JP2004031400A5 - - Google Patents

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Publication number
JP2004031400A5
JP2004031400A5 JP2002181151A JP2002181151A JP2004031400A5 JP 2004031400 A5 JP2004031400 A5 JP 2004031400A5 JP 2002181151 A JP2002181151 A JP 2002181151A JP 2002181151 A JP2002181151 A JP 2002181151A JP 2004031400 A5 JP2004031400 A5 JP 2004031400A5
Authority
JP
Japan
Prior art keywords
substrate
processing liquid
processed
fence
recovery tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002181151A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004031400A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002181151A priority Critical patent/JP2004031400A/ja
Priority claimed from JP2002181151A external-priority patent/JP2004031400A/ja
Priority to EP03733530A priority patent/EP1536460A4/en
Priority to CNB038174138A priority patent/CN100380601C/zh
Priority to TW092116810A priority patent/TWI311779B/zh
Priority to PCT/JP2003/007849 priority patent/WO2004001828A1/ja
Priority to KR1020047020752A priority patent/KR100704594B1/ko
Priority to US10/516,949 priority patent/US20050244579A1/en
Publication of JP2004031400A publication Critical patent/JP2004031400A/ja
Publication of JP2004031400A5 publication Critical patent/JP2004031400A5/ja
Pending legal-status Critical Current

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JP2002181151A 2002-06-21 2002-06-21 基板処理装置及びその処理方法 Pending JP2004031400A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2002181151A JP2004031400A (ja) 2002-06-21 2002-06-21 基板処理装置及びその処理方法
EP03733530A EP1536460A4 (en) 2002-06-21 2003-06-20 DEVICE AND METHOD FOR PROCESSING A SUBSTRATE
CNB038174138A CN100380601C (zh) 2002-06-21 2003-06-20 基板处理装置及其基板处理方法
TW092116810A TWI311779B (en) 2002-06-21 2003-06-20 Substrate processing apparatus and processing method thereof
PCT/JP2003/007849 WO2004001828A1 (ja) 2002-06-21 2003-06-20 基板処理装置及び基板処理方法
KR1020047020752A KR100704594B1 (ko) 2002-06-21 2003-06-20 기판 처리 장치 및 기판 처리 방법
US10/516,949 US20050244579A1 (en) 2002-06-21 2003-06-20 Substrate processing device and substrate processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002181151A JP2004031400A (ja) 2002-06-21 2002-06-21 基板処理装置及びその処理方法

Publications (2)

Publication Number Publication Date
JP2004031400A JP2004031400A (ja) 2004-01-29
JP2004031400A5 true JP2004031400A5 (enExample) 2005-10-20

Family

ID=29996621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002181151A Pending JP2004031400A (ja) 2002-06-21 2002-06-21 基板処理装置及びその処理方法

Country Status (7)

Country Link
US (1) US20050244579A1 (enExample)
EP (1) EP1536460A4 (enExample)
JP (1) JP2004031400A (enExample)
KR (1) KR100704594B1 (enExample)
CN (1) CN100380601C (enExample)
TW (1) TWI311779B (enExample)
WO (1) WO2004001828A1 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1727191A1 (en) * 2004-03-12 2006-11-29 Sipec Corporation Substrate processing equipment
JP4531612B2 (ja) * 2005-03-31 2010-08-25 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
KR100752246B1 (ko) 2005-03-31 2007-08-29 다이닛뽕스크린 세이조오 가부시키가이샤 기판처리장치 및 기판처리방법
KR100993311B1 (ko) * 2005-04-01 2010-11-09 에프에스아이 인터내쇼날 인크. 하나 이상의 처리 유체로 마이크로일렉트로닉 작업물을 처리하는 장치용 이동 및 중첩 가능한 배플들을 포함하는 소형 덕트 시스템
JP4796902B2 (ja) * 2005-07-11 2011-10-19 芝浦メカトロニクス株式会社 基板のスピン処理装置
JP2009520362A (ja) * 2005-12-16 2009-05-21 ソリッド ステイト イクイップメント コーポレイション 化学的分離の装置及び方法
JP4637741B2 (ja) * 2005-12-28 2011-02-23 株式会社ジェイ・イー・ティ 基板処理装置
JP2007311446A (ja) * 2006-05-17 2007-11-29 Realize Advanced Technology Ltd 洗浄装置
CN101484974B (zh) 2006-07-07 2013-11-06 Fsi国际公司 用于处理微电子工件的设备和方法以及遮挡结构
KR100797081B1 (ko) * 2006-08-24 2008-01-22 세메스 주식회사 기판 처리 장치 및 방법
JP4763567B2 (ja) * 2006-10-03 2011-08-31 大日本スクリーン製造株式会社 基板処理装置
JP2008141010A (ja) * 2006-12-01 2008-06-19 Dainippon Screen Mfg Co Ltd 基板処理装置
KR100824306B1 (ko) * 2006-12-22 2008-04-22 세메스 주식회사 기판 처리 장치
KR100872877B1 (ko) * 2007-03-06 2008-12-10 세메스 주식회사 기판 처리 장치
WO2009020524A1 (en) 2007-08-07 2009-02-12 Fsi International, Inc. Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses
CN102683249B (zh) 2008-05-09 2015-06-17 泰尔Fsi公司 用于处理微电子工件的系统
JP5084639B2 (ja) 2008-06-30 2012-11-28 芝浦メカトロニクス株式会社 スピン処理装置
CN101958228B (zh) * 2009-07-13 2012-06-20 弘塑科技股份有限公司 具有移动式泄液槽的清洗蚀刻机台
JP2012044213A (ja) * 2011-10-26 2012-03-01 Dainippon Screen Mfg Co Ltd 基板処理装置
JP5693438B2 (ja) 2011-12-16 2015-04-01 東京エレクトロン株式会社 基板処理装置、基板処理方法および記憶媒体
US10707099B2 (en) 2013-08-12 2020-07-07 Veeco Instruments Inc. Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle
CN107093567B (zh) * 2016-02-18 2019-08-06 顶程国际股份有限公司 环状液体收集装置
TWI656594B (zh) * 2016-12-15 2019-04-11 辛耘企業股份有限公司 基板處理裝置
WO2018200398A1 (en) 2017-04-25 2018-11-01 Veeco Precision Surface Processing Llc Semiconductor wafer processing chamber
CN109570126B (zh) * 2018-12-27 2021-06-22 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 多级药品回收的单片清洗装置
JP2024060970A (ja) * 2022-10-20 2024-05-07 東京エレクトロン株式会社 カップ、液処理装置及び液処理方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0434902Y2 (enExample) * 1987-01-13 1992-08-19
JPH0724396A (ja) * 1993-07-12 1995-01-27 Dainippon Screen Mfg Co Ltd 基板処理装置
US5608943A (en) * 1993-08-23 1997-03-11 Tokyo Electron Limited Apparatus for removing process liquid
JP3116297B2 (ja) * 1994-08-03 2000-12-11 東京エレクトロン株式会社 処理方法及び処理装置
TW306011B (enExample) * 1995-04-19 1997-05-21 Tokyo Electron Co Ltd
US5843527A (en) * 1995-06-15 1998-12-01 Dainippon Screen Mfg. Co., Ltd. Coating solution applying method and apparatus
US5725663A (en) * 1996-01-31 1998-03-10 Solitec Wafer Processing, Inc. Apparatus for control of contamination in spin systems
TW357389B (en) * 1996-12-27 1999-05-01 Tokyo Electric Ltd Apparatus and method for supplying process solution to surface of substrate to be processed
JP4043593B2 (ja) * 1998-04-30 2008-02-06 東芝松下ディスプレイテクノロジー株式会社 基板処理装置
JPH11333354A (ja) * 1998-05-27 1999-12-07 Sumitomo Precision Prod Co Ltd 回転式基板処理装置
JP3929192B2 (ja) * 1998-12-21 2007-06-13 大日本スクリーン製造株式会社 基板処理装置
TW504776B (en) * 1999-09-09 2002-10-01 Mimasu Semiconductor Ind Co Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanism
JP4426036B2 (ja) * 1999-12-02 2010-03-03 東京エレクトロン株式会社 基板処理装置

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