JP2002350699A - 光学部材を光学システムに取り付けるための装置 - Google Patents

光学部材を光学システムに取り付けるための装置

Info

Publication number
JP2002350699A
JP2002350699A JP2002098814A JP2002098814A JP2002350699A JP 2002350699 A JP2002350699 A JP 2002350699A JP 2002098814 A JP2002098814 A JP 2002098814A JP 2002098814 A JP2002098814 A JP 2002098814A JP 2002350699 A JP2002350699 A JP 2002350699A
Authority
JP
Japan
Prior art keywords
optical
optical member
support device
parallelogram
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2002098814A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002350699A5 (enExample
Inventor
Thomas Petasch
トーマス・ペタッシュ
Hartmut Muenker
ハルトムット・ムエンカー
Klaus-Dieter Klein
クラウス−ディエター・クレイン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of JP2002350699A publication Critical patent/JP2002350699A/ja
Publication of JP2002350699A5 publication Critical patent/JP2002350699A5/ja
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2002098814A 2001-03-30 2002-04-01 光学部材を光学システムに取り付けるための装置 Ceased JP2002350699A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10115914.5 2001-03-30
DE10115914A DE10115914A1 (de) 2001-03-30 2001-03-30 Vorrichtung zur Lagerung eines optischen Elementes in einer Optik

Publications (2)

Publication Number Publication Date
JP2002350699A true JP2002350699A (ja) 2002-12-04
JP2002350699A5 JP2002350699A5 (enExample) 2005-09-08

Family

ID=7679768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002098814A Ceased JP2002350699A (ja) 2001-03-30 2002-04-01 光学部材を光学システムに取り付けるための装置

Country Status (5)

Country Link
US (1) US6870632B2 (enExample)
EP (1) EP1245982B1 (enExample)
JP (1) JP2002350699A (enExample)
DE (2) DE10115914A1 (enExample)
TW (1) TW548525B (enExample)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004343101A (ja) * 2003-04-25 2004-12-02 Canon Inc 駆動機構、それを有する露光装置、デバイスの製造方法
JP2008504579A (ja) * 2004-06-29 2008-02-14 カール・ツァイス・エスエムティー・アーゲー 光学素子のための位置決めユニット及び調節デバイス
JP2008218710A (ja) * 2007-03-05 2008-09-18 Canon Inc 光学素子保持装置
JP2008545152A (ja) * 2005-07-01 2008-12-11 カール・ツァイス・エスエムティー・アーゲー 光学要素の支持装置
JP2009508344A (ja) * 2005-09-13 2009-02-26 カール・ツァイス・エスエムティー・アーゲー 光学要素ユニット
JP2009217150A (ja) * 2008-03-12 2009-09-24 Canon Inc 光学素子保持装置
US7760452B2 (en) 2003-04-25 2010-07-20 Canon Kabushiki Kaisha Driving apparatus, optical system, exposure apparatus and device fabrication method
US7878665B2 (en) 2007-02-23 2011-02-01 Canon Kabushiki Kaisha Holding apparatus for holding optical element above a base, exposure apparatus including the holding apparatus, and device manufacturing method using the exposure apparatus
JP2012185278A (ja) * 2011-03-04 2012-09-27 Mitsubishi Electric Corp 鏡支持機構
JP2013506978A (ja) * 2009-09-30 2013-02-28 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光装置の光学構成体
JP2013047836A (ja) * 2008-09-30 2013-03-07 Carl Zeiss Smt Gmbh 光学モジュール
JP2014518011A (ja) * 2011-05-05 2014-07-24 カール・ツァイス・エスエムティー・ゲーエムベーハー 測定装置を備えた光学モジュール
JP2015525469A (ja) * 2012-06-01 2015-09-03 カール・ツァイス・エスエムティー・ゲーエムベーハー リソグラフィ装置、およびミラー配列を製造する方法
WO2019116799A1 (ja) * 2017-12-14 2019-06-20 三菱電機株式会社 鏡支持体及び鏡支持機構
JP2020160217A (ja) * 2019-03-26 2020-10-01 三菱電機株式会社 減速装置及び構造体
WO2022163804A1 (ja) * 2021-01-29 2022-08-04 三菱電機株式会社 鏡支持機構および光学装置

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Publication number Priority date Publication date Assignee Title
DE10136387A1 (de) 2001-07-26 2003-02-13 Zeiss Carl Objektiv, insbesondere Objektiv für die Halbleiter-Lithographie
DE10219514A1 (de) 2002-04-30 2003-11-13 Zeiss Carl Smt Ag Beleuchtungssystem, insbesondere für die EUV-Lithographie
WO2004019104A1 (de) * 2002-08-08 2004-03-04 Carl Zeiss Smt Ag Vorrichtung zur aufnahme einer optischen baugruppe in einer abbildungseinrichtung
DE10246828A1 (de) * 2002-10-08 2004-04-22 Carl Zeiss Smt Ag Objektiv, insbesondere Projektionsobjektiv in der Mikrolithographie
WO2004086148A1 (de) * 2003-03-26 2004-10-07 Carl Zeiss Smt Ag Vorrichtung zur deformationsarmen austauschbaren lagerung eines optischen elements
AU2003254364A1 (en) * 2003-07-17 2005-03-07 Carl Zeiss Smt Ag Device for mounting an optical element, particularly a lens in an objective
DE10344178B4 (de) * 2003-09-24 2006-08-10 Carl Zeiss Smt Ag Halte- und Positioniervorrichtung für ein optisches Element
AU2003296244A1 (en) * 2003-10-02 2005-05-11 Carl Zeiss Smt Ag Optical subassembly and projection objective for semiconductor lithography
DE10350574A1 (de) * 2003-10-30 2005-06-02 Carl Zeiss Jena Gmbh Festkörpergelenkführungen
DE10352820A1 (de) 2003-11-12 2005-06-23 Carl Zeiss Smt Ag Flanschbaugruppe eines optischen Systems
JP2005166785A (ja) * 2003-12-01 2005-06-23 Canon Inc 位置検出装置及び方法、並びに、露光装置
US7265917B2 (en) * 2003-12-23 2007-09-04 Carl Zeiss Smt Ag Replacement apparatus for an optical element
EP1716455B1 (de) * 2004-02-20 2011-05-11 Carl Zeiss SMT GmbH Projektionsobjektiv einer mikrolithographischen projektionsbelichtungsanlage
US7581305B2 (en) 2004-04-12 2009-09-01 Carl Zeiss Smt Ag Method of manufacturing an optical component
DE102004018656A1 (de) * 2004-04-13 2005-11-03 Carl Zeiss Smt Ag Optisches Element
US7604359B2 (en) 2004-05-04 2009-10-20 Carl Zeiss Smt Ag High positioning reproducible low torque mirror-actuator interface
DE102004024755B4 (de) * 2004-05-12 2006-02-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Halterung für optische Elemente
DE102005049731A1 (de) * 2005-10-14 2007-04-19 Cube Optics Ag Optischer Aufbau mit elastischer Aufhängung und Verfahren zur Herstellung eines solchen
US8441747B2 (en) 2006-09-14 2013-05-14 Carl Zeiss Smt Gmbh Optical module with minimized overrun of the optical element
RU2358298C2 (ru) * 2007-06-21 2009-06-10 Открытое акционерное общество "Красногорский завод им. С.А. Зверева" Регулируемый оптический модуль
DE102008040218A1 (de) 2007-07-11 2009-01-15 Carl Zeiss Smt Ag Drehbares optisches Element
JP5128665B2 (ja) * 2007-08-23 2013-01-23 カール・ツァイス・エスエムティー・ゲーエムベーハー 寄生負荷最小化光学素子モジュール
US20090219497A1 (en) * 2008-02-28 2009-09-03 Carl Zeiss Smt Ag Optical device with stiff housing
DE102008000967B4 (de) 2008-04-03 2015-04-09 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die EUV-Mikrolithographie
DE102008026979B3 (de) * 2008-05-29 2009-12-24 Carl Zeiss Ag Vorrichtung zum Korrigieren von Abbildungsfehlern in einem optischen System
DE102008036574A1 (de) 2008-07-31 2010-02-04 Carl Zeiss Laser Optics Gmbh Vorrichtung zum Lagern eines optischen Elements
DE102009029536A1 (de) * 2008-09-17 2010-04-15 Carl Zeiss Smt Ag Verbindungsanordnung für eine optische Einrichtung
DE102010005993B4 (de) * 2010-01-27 2016-10-20 Deutsches Zentrum für Luft- und Raumfahrt e.V. Laserscanner-Einrichtung und Verfahren zur dreidimensionalen berührungslosen Umgebungserfassung mit einer Laserscanner-Einrichtung
DE102010018224A1 (de) * 2010-04-23 2012-02-16 Carl Zeiss Smt Gmbh Optisches Modul mit einem verstellbaren optischen Element
US8651677B2 (en) * 2010-06-28 2014-02-18 Lexmark International, Inc. Mounting mechanism for a component of an imaging apparatus, and methods of making and using same
US8542450B2 (en) 2011-02-08 2013-09-24 Utah State University Research Foundation Kinematic optic mount
DE102012102566B4 (de) 2012-03-26 2019-02-21 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Übertragungselement für eine Stellbewegung eines optischen Elementes, Positioniereinrichtung sowie Bearbeitungskopf für eine Laserbearbeitungsmaschine
KR102001460B1 (ko) 2013-03-18 2019-07-19 삼성디스플레이 주식회사 레이저 빔 요동을 위한 광학 모듈
CN104076612B (zh) * 2013-03-27 2016-04-20 上海微电子装备有限公司 重载荷柔性支撑装置
DE102013109185B3 (de) * 2013-08-23 2014-05-22 Jenoptik Optical Systems Gmbh Optische Baugruppe mit einer Fassung mit Verbindungseinheiten gerichteter Nachgiebigkeit
CN104459937B (zh) * 2013-09-12 2018-01-19 上海微电子装备（集团）股份有限公司 一种反射镜精密调整装置
CN104391367B (zh) * 2014-10-15 2017-02-15 中国科学院光电研究院 一种极紫外反射镜片的四维装调装置
DE102015223520A1 (de) * 2015-11-27 2016-10-20 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Halbleiterlithographie
CN105467548B (zh) * 2015-12-04 2018-05-01 中国科学院长春光学精密机械与物理研究所 高定位精度的镜片可更换的光刻物镜镜框
CN105607211B (zh) * 2015-12-31 2018-06-19 中国华录集团有限公司 透镜调整结构及投影光学系统
WO2017207016A1 (en) * 2016-05-30 2017-12-07 Carl Zeiss Smt Gmbh Optical imaging arrangement with a piezoelectric device
DE102016217479A1 (de) * 2016-09-14 2017-09-14 Carl Zeiss Smt Gmbh Optisches modul mit verkippbaren optischen flächen
CN106405787B (zh) * 2016-12-10 2020-08-21 中国科学院长春光学精密机械与物理研究所 一种用于反射镜光学元件的角度调整装置
DE102017115050B3 (de) * 2017-07-05 2018-03-29 Physik Instrumente (Pi) Gmbh & Co. Kg Gelenk
DE102018107034A1 (de) * 2018-03-23 2019-09-26 Huber+Suhner Cube Optics Ag Elastische Aufhängung für optischen Aufbau
CN110412714B (zh) * 2019-06-27 2022-02-01 北京空间机电研究所 一种大口径反射镜支撑机构
CN111045186A (zh) * 2019-12-30 2020-04-21 长春奥普光电技术股份有限公司 一种自带支撑基准结构的sic反射镜

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Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7760452B2 (en) 2003-04-25 2010-07-20 Canon Kabushiki Kaisha Driving apparatus, optical system, exposure apparatus and device fabrication method
JP2004343101A (ja) * 2003-04-25 2004-12-02 Canon Inc 駆動機構、それを有する露光装置、デバイスの製造方法
US8760777B2 (en) 2004-06-29 2014-06-24 Carl Zeiss Smt Gmbh Positioning unit and apparatus for adjustment of an optical element
US9664873B2 (en) 2004-06-29 2017-05-30 Carl Zeiss Smt Gmbh Positioning unit and apparatus for adjustment of an optical element
US10133021B2 (en) 2004-06-29 2018-11-20 Carl Zeiss Smt Gmbh Positioning unit and apparatus for adjustment of an optical element
US8416515B2 (en) 2004-06-29 2013-04-09 Carl Zeiss Smt Gmbh Positioning unit and alignment device for an optical element
US7738193B2 (en) 2004-06-29 2010-06-15 Carl Zeiss Smt Ag Positioning unit and alignment device for an optical element
US9075174B2 (en) 2004-06-29 2015-07-07 Carl Zeiss Smt Gmbh Positioning unit and apparatus for adjustment of an optical element
JP2010183097A (ja) * 2004-06-29 2010-08-19 Carl Zeiss Smt Ag 光学素子の位置決めユニット
US8493674B2 (en) 2004-06-29 2013-07-23 Carl Zeiss Smt Gmbh Positioning unit and alignment device for an optical element
JP2008504579A (ja) * 2004-06-29 2008-02-14 カール・ツァイス・エスエムティー・アーゲー 光学素子のための位置決めユニット及び調節デバイス
US8035903B2 (en) 2004-06-29 2011-10-11 Carl Zeiss Smt Gmbh Positioning unit and alignment device for an optical element
JP2008545152A (ja) * 2005-07-01 2008-12-11 カール・ツァイス・エスエムティー・アーゲー 光学要素の支持装置
JP4934131B2 (ja) * 2005-07-01 2012-05-16 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学要素の支持装置
JP2009508344A (ja) * 2005-09-13 2009-02-26 カール・ツァイス・エスエムティー・アーゲー 光学要素ユニット
US7878665B2 (en) 2007-02-23 2011-02-01 Canon Kabushiki Kaisha Holding apparatus for holding optical element above a base, exposure apparatus including the holding apparatus, and device manufacturing method using the exposure apparatus
JP2008218710A (ja) * 2007-03-05 2008-09-18 Canon Inc 光学素子保持装置
KR100931561B1 (ko) * 2007-03-05 2009-12-14 캐논 가부시끼가이샤 광학소자 유지장치
US7602564B2 (en) 2007-03-05 2009-10-13 Canon Kabushiki Kaisha Optical element holding apparatus
US7986471B2 (en) 2008-03-12 2011-07-26 Canon Kabushiki Kaisha Optical element supporting device, lens barrel, exposure apparatus, and device manufacturing method
JP2009217150A (ja) * 2008-03-12 2009-09-24 Canon Inc 光学素子保持装置
KR101626180B1 (ko) * 2008-09-30 2016-05-31 칼 짜이스 에스엠테 게엠베하 광학 소자용 지지 부재
KR101449793B1 (ko) * 2008-09-30 2014-10-13 칼 짜이스 에스엠테 게엠베하 광학 소자용 지지 부재
US8988654B2 (en) 2008-09-30 2015-03-24 Carl Zeiss Smt Gmbh Support elements for an optical element
JP2013047836A (ja) * 2008-09-30 2013-03-07 Carl Zeiss Smt Gmbh 光学モジュール
JP2014160257A (ja) * 2008-09-30 2014-09-04 Carl Zeiss Smt Gmbh 光学モジュール
US9709895B2 (en) 2008-09-30 2017-07-18 Carl Zeiss Smt Gmbh Support elements for an optical element
JP2013506978A (ja) * 2009-09-30 2013-02-28 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光装置の光学構成体
US9436101B2 (en) 2009-09-30 2016-09-06 Carl Zeiss Smt Gmbh Optical arrangement and microlithographic projection exposure apparatus including same
JP2012185278A (ja) * 2011-03-04 2012-09-27 Mitsubishi Electric Corp 鏡支持機構
JP2014518011A (ja) * 2011-05-05 2014-07-24 カール・ツァイス・エスエムティー・ゲーエムベーハー 測定装置を備えた光学モジュール
US9459538B2 (en) 2012-06-01 2016-10-04 Carl Zeiss Smt Gmbh Lithography apparatus and method for producing a mirror arrangement
JP2015525469A (ja) * 2012-06-01 2015-09-03 カール・ツァイス・エスエムティー・ゲーエムベーハー リソグラフィ装置、およびミラー配列を製造する方法
WO2019116799A1 (ja) * 2017-12-14 2019-06-20 三菱電機株式会社 鏡支持体及び鏡支持機構
JP6559386B1 (ja) * 2017-12-14 2019-08-14 三菱電機株式会社 鏡支持体及び鏡支持機構
US11086100B2 (en) 2017-12-14 2021-08-10 Mitsubishi Electric Corporation Mirror support and mirror support mechanism
JP2020160217A (ja) * 2019-03-26 2020-10-01 三菱電機株式会社 減速装置及び構造体
JP7118024B2 (ja) 2019-03-26 2022-08-15 三菱電機株式会社 減速装置及び構造体
WO2022163804A1 (ja) * 2021-01-29 2022-08-04 三菱電機株式会社 鏡支持機構および光学装置
JPWO2022163804A1 (enExample) * 2021-01-29 2022-08-04
JP7292541B2 (ja) 2021-01-29 2023-06-16 三菱電機株式会社 鏡支持機構および光学装置
US12174452B2 (en) 2021-01-29 2024-12-24 Mitsubishi Electric Corporation Mirror support mechanism and optical device

Also Published As

Publication number Publication date
EP1245982A3 (de) 2003-08-27
US20020176094A1 (en) 2002-11-28
EP1245982B1 (de) 2005-11-30
DE10115914A1 (de) 2002-10-02
DE50205077D1 (de) 2006-01-05
TW548525B (en) 2003-08-21
EP1245982A2 (de) 2002-10-02
US6870632B2 (en) 2005-03-22

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