TW548525B - Apparatus for mounting an optical element in an optical system - Google Patents
Apparatus for mounting an optical element in an optical system Download PDFInfo
- Publication number
- TW548525B TW548525B TW091106342A TW91106342A TW548525B TW 548525 B TW548525 B TW 548525B TW 091106342 A TW091106342 A TW 091106342A TW 91106342 A TW91106342 A TW 91106342A TW 548525 B TW548525 B TW 548525B
- Authority
- TW
- Taiwan
- Prior art keywords
- item
- patent application
- scope
- optical element
- optical
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 69
- 238000005452 bending Methods 0.000 claims abstract description 9
- 239000004065 semiconductor Substances 0.000 claims abstract description 6
- 238000001459 lithography Methods 0.000 claims abstract description 5
- 239000007787 solid Substances 0.000 claims description 18
- 230000008859 change Effects 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008451 emotion Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 210000000006 pectoral fin Anatomy 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10115914A DE10115914A1 (de) | 2001-03-30 | 2001-03-30 | Vorrichtung zur Lagerung eines optischen Elementes in einer Optik |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW548525B true TW548525B (en) | 2003-08-21 |
Family
ID=7679768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091106342A TW548525B (en) | 2001-03-30 | 2002-03-29 | Apparatus for mounting an optical element in an optical system |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6870632B2 (enExample) |
| EP (1) | EP1245982B1 (enExample) |
| JP (1) | JP2002350699A (enExample) |
| DE (2) | DE10115914A1 (enExample) |
| TW (1) | TW548525B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI481966B (zh) * | 2007-08-23 | 2015-04-21 | Zeiss Carl Smt Gmbh | 具有最小化寄生負載之光學元件模組 |
Families Citing this family (62)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10136387A1 (de) | 2001-07-26 | 2003-02-13 | Zeiss Carl | Objektiv, insbesondere Objektiv für die Halbleiter-Lithographie |
| DE10219514A1 (de) | 2002-04-30 | 2003-11-13 | Zeiss Carl Smt Ag | Beleuchtungssystem, insbesondere für die EUV-Lithographie |
| WO2004019104A1 (de) * | 2002-08-08 | 2004-03-04 | Carl Zeiss Smt Ag | Vorrichtung zur aufnahme einer optischen baugruppe in einer abbildungseinrichtung |
| DE10246828A1 (de) * | 2002-10-08 | 2004-04-22 | Carl Zeiss Smt Ag | Objektiv, insbesondere Projektionsobjektiv in der Mikrolithographie |
| WO2004086148A1 (de) * | 2003-03-26 | 2004-10-07 | Carl Zeiss Smt Ag | Vorrichtung zur deformationsarmen austauschbaren lagerung eines optischen elements |
| JP2004343101A (ja) * | 2003-04-25 | 2004-12-02 | Canon Inc | 駆動機構、それを有する露光装置、デバイスの製造方法 |
| US7760452B2 (en) * | 2003-04-25 | 2010-07-20 | Canon Kabushiki Kaisha | Driving apparatus, optical system, exposure apparatus and device fabrication method |
| AU2003254364A1 (en) * | 2003-07-17 | 2005-03-07 | Carl Zeiss Smt Ag | Device for mounting an optical element, particularly a lens in an objective |
| DE10344178B4 (de) * | 2003-09-24 | 2006-08-10 | Carl Zeiss Smt Ag | Halte- und Positioniervorrichtung für ein optisches Element |
| AU2003296244A1 (en) * | 2003-10-02 | 2005-05-11 | Carl Zeiss Smt Ag | Optical subassembly and projection objective for semiconductor lithography |
| DE10350574A1 (de) * | 2003-10-30 | 2005-06-02 | Carl Zeiss Jena Gmbh | Festkörpergelenkführungen |
| DE10352820A1 (de) | 2003-11-12 | 2005-06-23 | Carl Zeiss Smt Ag | Flanschbaugruppe eines optischen Systems |
| JP2005166785A (ja) * | 2003-12-01 | 2005-06-23 | Canon Inc | 位置検出装置及び方法、並びに、露光装置 |
| US7265917B2 (en) * | 2003-12-23 | 2007-09-04 | Carl Zeiss Smt Ag | Replacement apparatus for an optical element |
| EP1716455B1 (de) * | 2004-02-20 | 2011-05-11 | Carl Zeiss SMT GmbH | Projektionsobjektiv einer mikrolithographischen projektionsbelichtungsanlage |
| US7581305B2 (en) | 2004-04-12 | 2009-09-01 | Carl Zeiss Smt Ag | Method of manufacturing an optical component |
| DE102004018656A1 (de) * | 2004-04-13 | 2005-11-03 | Carl Zeiss Smt Ag | Optisches Element |
| US7604359B2 (en) | 2004-05-04 | 2009-10-20 | Carl Zeiss Smt Ag | High positioning reproducible low torque mirror-actuator interface |
| DE102004024755B4 (de) * | 2004-05-12 | 2006-02-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Halterung für optische Elemente |
| JP4532545B2 (ja) | 2004-06-29 | 2010-08-25 | カール・ツァイス・エスエムティー・アーゲー | 光学素子のための位置決めユニット及び調節デバイス |
| EP1899756A2 (de) | 2005-07-01 | 2008-03-19 | Carl Zeiss SMT AG | Anordnung zur lagerung eines optischen bauelements |
| TWI372271B (en) * | 2005-09-13 | 2012-09-11 | Zeiss Carl Smt Gmbh | Optical element unit, optical element holder, method of manufacturing an optical element holder, optical element module, optical exposure apparatus, and method of manufacturing a semiconductor device |
| DE102005049731A1 (de) * | 2005-10-14 | 2007-04-19 | Cube Optics Ag | Optischer Aufbau mit elastischer Aufhängung und Verfahren zur Herstellung eines solchen |
| US8441747B2 (en) | 2006-09-14 | 2013-05-14 | Carl Zeiss Smt Gmbh | Optical module with minimized overrun of the optical element |
| JP5043468B2 (ja) * | 2007-02-23 | 2012-10-10 | キヤノン株式会社 | 保持装置 |
| JP5013906B2 (ja) * | 2007-03-05 | 2012-08-29 | キヤノン株式会社 | 光学素子保持装置 |
| RU2358298C2 (ru) * | 2007-06-21 | 2009-06-10 | Открытое акционерное общество "Красногорский завод им. С.А. Зверева" | Регулируемый оптический модуль |
| DE102008040218A1 (de) | 2007-07-11 | 2009-01-15 | Carl Zeiss Smt Ag | Drehbares optisches Element |
| US20090219497A1 (en) * | 2008-02-28 | 2009-09-03 | Carl Zeiss Smt Ag | Optical device with stiff housing |
| JP5127515B2 (ja) * | 2008-03-12 | 2013-01-23 | キヤノン株式会社 | 光学素子保持装置 |
| DE102008000967B4 (de) | 2008-04-03 | 2015-04-09 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage für die EUV-Mikrolithographie |
| DE102008026979B3 (de) * | 2008-05-29 | 2009-12-24 | Carl Zeiss Ag | Vorrichtung zum Korrigieren von Abbildungsfehlern in einem optischen System |
| DE102008036574A1 (de) | 2008-07-31 | 2010-02-04 | Carl Zeiss Laser Optics Gmbh | Vorrichtung zum Lagern eines optischen Elements |
| DE102009029536A1 (de) * | 2008-09-17 | 2010-04-15 | Carl Zeiss Smt Ag | Verbindungsanordnung für eine optische Einrichtung |
| DE102009044957A1 (de) * | 2008-09-30 | 2010-04-08 | Carl Zeiss Smt Ag | Stützelemente für ein optisches Element |
| DE102009045163B4 (de) * | 2009-09-30 | 2017-04-06 | Carl Zeiss Smt Gmbh | Optische Anordnung in einer mikrolithographischen Projektionsbelichtungsanlage |
| DE102010005993B4 (de) * | 2010-01-27 | 2016-10-20 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Laserscanner-Einrichtung und Verfahren zur dreidimensionalen berührungslosen Umgebungserfassung mit einer Laserscanner-Einrichtung |
| DE102010018224A1 (de) * | 2010-04-23 | 2012-02-16 | Carl Zeiss Smt Gmbh | Optisches Modul mit einem verstellbaren optischen Element |
| US8651677B2 (en) * | 2010-06-28 | 2014-02-18 | Lexmark International, Inc. | Mounting mechanism for a component of an imaging apparatus, and methods of making and using same |
| US8542450B2 (en) | 2011-02-08 | 2013-09-24 | Utah State University Research Foundation | Kinematic optic mount |
| JP5306393B2 (ja) * | 2011-03-04 | 2013-10-02 | 三菱電機株式会社 | 鏡支持機構 |
| DE102011075316A1 (de) * | 2011-05-05 | 2012-11-08 | Carl Zeiss Smt Gmbh | Optisches Modul mit einer Messeinrichtung |
| DE102012102566B4 (de) | 2012-03-26 | 2019-02-21 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Übertragungselement für eine Stellbewegung eines optischen Elementes, Positioniereinrichtung sowie Bearbeitungskopf für eine Laserbearbeitungsmaschine |
| DE102012209309A1 (de) * | 2012-06-01 | 2013-12-05 | Carl Zeiss Smt Gmbh | Lithographievorrichtung und Verfahren zur Herstellung einer Spiegelanordnung |
| KR102001460B1 (ko) | 2013-03-18 | 2019-07-19 | 삼성디스플레이 주식회사 | 레이저 빔 요동을 위한 광학 모듈 |
| CN104076612B (zh) * | 2013-03-27 | 2016-04-20 | 上海微电子装备有限公司 | 重载荷柔性支撑装置 |
| DE102013109185B3 (de) * | 2013-08-23 | 2014-05-22 | Jenoptik Optical Systems Gmbh | Optische Baugruppe mit einer Fassung mit Verbindungseinheiten gerichteter Nachgiebigkeit |
| CN104459937B (zh) * | 2013-09-12 | 2018-01-19 | 上海微电子装备(集团)股份有限公司 | 一种反射镜精密调整装置 |
| CN104391367B (zh) * | 2014-10-15 | 2017-02-15 | 中国科学院光电研究院 | 一种极紫外反射镜片的四维装调装置 |
| DE102015223520A1 (de) * | 2015-11-27 | 2016-10-20 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage für die Halbleiterlithographie |
| CN105467548B (zh) * | 2015-12-04 | 2018-05-01 | 中国科学院长春光学精密机械与物理研究所 | 高定位精度的镜片可更换的光刻物镜镜框 |
| CN105607211B (zh) * | 2015-12-31 | 2018-06-19 | 中国华录集团有限公司 | 透镜调整结构及投影光学系统 |
| WO2017207016A1 (en) * | 2016-05-30 | 2017-12-07 | Carl Zeiss Smt Gmbh | Optical imaging arrangement with a piezoelectric device |
| DE102016217479A1 (de) * | 2016-09-14 | 2017-09-14 | Carl Zeiss Smt Gmbh | Optisches modul mit verkippbaren optischen flächen |
| CN106405787B (zh) * | 2016-12-10 | 2020-08-21 | 中国科学院长春光学精密机械与物理研究所 | 一种用于反射镜光学元件的角度调整装置 |
| DE102017115050B3 (de) * | 2017-07-05 | 2018-03-29 | Physik Instrumente (Pi) Gmbh & Co. Kg | Gelenk |
| JP6559386B1 (ja) * | 2017-12-14 | 2019-08-14 | 三菱電機株式会社 | 鏡支持体及び鏡支持機構 |
| DE102018107034A1 (de) * | 2018-03-23 | 2019-09-26 | Huber+Suhner Cube Optics Ag | Elastische Aufhängung für optischen Aufbau |
| JP7118024B2 (ja) * | 2019-03-26 | 2022-08-15 | 三菱電機株式会社 | 減速装置及び構造体 |
| CN110412714B (zh) * | 2019-06-27 | 2022-02-01 | 北京空间机电研究所 | 一种大口径反射镜支撑机构 |
| CN111045186A (zh) * | 2019-12-30 | 2020-04-21 | 长春奥普光电技术股份有限公司 | 一种自带支撑基准结构的sic反射镜 |
| WO2022163804A1 (ja) * | 2021-01-29 | 2022-08-04 | 三菱電機株式会社 | 鏡支持機構および光学装置 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH371906A (de) * | 1958-08-11 | 1963-09-15 | Optische Ind De Oude Delft Nv | Halterung für optische Elemente |
| JPS5790607A (en) | 1980-11-28 | 1982-06-05 | Fujitsu Ltd | Optical glass fitting device |
| DD215407A1 (de) * | 1983-04-04 | 1984-11-07 | Zeiss Jena Veb Carl | Ringfoermige linsenfassung fuer optische systeme hoher leistung |
| US4969726A (en) | 1985-06-03 | 1990-11-13 | Northrop Corporation | Ring laser gyro path-length-control mechanism |
| US4733945A (en) | 1986-01-15 | 1988-03-29 | The Perkin-Elmer Corporation | Precision lens mounting |
| DE3740515A1 (de) | 1987-11-30 | 1989-06-08 | Diehl Gmbh & Co | Justiereinrichtung fuer deformierbaren spiegel |
| DE69123098T2 (de) | 1990-08-15 | 1997-03-06 | Mitsubishi Electric Corp | Reflektor mit passiver und aktiver Temperaturkompensation |
| US5428482A (en) | 1991-11-04 | 1995-06-27 | General Signal Corporation | Decoupled mount for optical element and stacked annuli assembly |
| DE4236355C2 (de) | 1992-10-28 | 2001-11-08 | Zeiss Carl | Adaptiver Membranspiegel |
| DE19825716A1 (de) | 1998-06-09 | 1999-12-16 | Zeiss Carl Fa | Baugruppe aus optischem Element und Fassung |
| FR2783055B1 (fr) * | 1998-09-04 | 2000-11-24 | Essilor Int | Support pour lentille optique, et son procede de mise en oeuvre |
| DE19904152A1 (de) * | 1999-02-03 | 2000-08-10 | Zeiss Carl Fa | Baugruppe aus einem optischen Element und einer Fassung |
| DE19910947A1 (de) * | 1999-03-12 | 2000-09-14 | Zeiss Carl Fa | Vorrichtung zum Verschieben eines optischen Elementes entlang der optischen Achse |
| JP4482990B2 (ja) * | 1999-12-10 | 2010-06-16 | 株式会社ニコン | レンズ保持枠及びレンズ鏡筒 |
| DE10053899A1 (de) * | 2000-10-31 | 2002-05-08 | Zeiss Carl | Vorrichtung zur Lagerung eines optischen Elementes |
-
2001
- 2001-03-30 DE DE10115914A patent/DE10115914A1/de not_active Withdrawn
-
2002
- 2002-03-13 DE DE50205077T patent/DE50205077D1/de not_active Expired - Fee Related
- 2002-03-13 EP EP02005695A patent/EP1245982B1/de not_active Expired - Lifetime
- 2002-03-27 US US10/108,878 patent/US6870632B2/en not_active Expired - Fee Related
- 2002-03-29 TW TW091106342A patent/TW548525B/zh not_active IP Right Cessation
- 2002-04-01 JP JP2002098814A patent/JP2002350699A/ja not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI481966B (zh) * | 2007-08-23 | 2015-04-21 | Zeiss Carl Smt Gmbh | 具有最小化寄生負載之光學元件模組 |
| US10215948B2 (en) | 2007-08-23 | 2019-02-26 | Carl Zeiss Smt Gmbh | Optical element module with minimized parasitic loads |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1245982A3 (de) | 2003-08-27 |
| US20020176094A1 (en) | 2002-11-28 |
| EP1245982B1 (de) | 2005-11-30 |
| DE10115914A1 (de) | 2002-10-02 |
| DE50205077D1 (de) | 2006-01-05 |
| JP2002350699A (ja) | 2002-12-04 |
| EP1245982A2 (de) | 2002-10-02 |
| US6870632B2 (en) | 2005-03-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |