WO2022163804A1 - 鏡支持機構および光学装置 - Google Patents
鏡支持機構および光学装置 Download PDFInfo
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- WO2022163804A1 WO2022163804A1 PCT/JP2022/003272 JP2022003272W WO2022163804A1 WO 2022163804 A1 WO2022163804 A1 WO 2022163804A1 JP 2022003272 W JP2022003272 W JP 2022003272W WO 2022163804 A1 WO2022163804 A1 WO 2022163804A1
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- Prior art keywords
- support
- mirror
- supported
- support member
- length
- Prior art date
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
- B64G1/00—Cosmonautic vehicles
- B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
- B64G1/00—Cosmonautic vehicles
- B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
- B64G1/66—Arrangements or adaptations of apparatus or instruments, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/16—Housings; Caps; Mountings; Supports, e.g. with counterweight
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
- B64G1/00—Cosmonautic vehicles
- B64G1/10—Artificial satellites; Systems of such satellites; Interplanetary vehicles
- B64G1/1021—Earth observation satellites
- B64G1/1028—Earth observation satellites using optical means for mapping, surveying or detection, e.g. of intelligence
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
- B64G1/00—Cosmonautic vehicles
- B64G1/10—Artificial satellites; Systems of such satellites; Interplanetary vehicles
- B64G1/105—Space science
- B64G1/1057—Space science specifically adapted for astronomy
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
Definitions
- the present disclosure relates to a mirror support mechanism for supporting a reflecting mirror and an optical device having the mirror support mechanism.
- Structural members of optical devices used in the aerospace and astronomical fields need to be lightweight and have a low coefficient of thermal expansion. If the coefficient of thermal expansion is large, temperature changes may cause the structural member to deform beyond the allowable width. For example, the optical axis of an optical telescope may deviate from the specified direction due to thermal deformation of the structural member beyond the allowable width. Alternatively, the focal position of the optical telescope may deviate from the fixed position.
- the reflector In the optical device installed on the satellite, the reflector is supported by a complicated mechanism. Since it is a complicated mechanism, at least one of time, labor, and cost is required for manufacturing. There is a demand for a mirror support mechanism and an optical device that can deal with the relative difference in coefficient of thermal expansion between the reflecting mirror and the mirror supporting mechanism and that can support the reflecting mirror with a simpler structure than before.
- a mirror supporting mechanism is provided on the back surface of the reflecting mirror, which is the surface opposite to the reflecting surface that reflects light, and has a 120-degree angle around the optical axis.
- a reflecting mirror having a supported portion having three supported surfaces arranged with a degree of rotational symmetry, a structural member present on the back side of the reflecting mirror, and a mirror supporting the supported surface
- There is one that includes three support members each having a support portion and having both ends connected to structural members for example, Patent Document 1).
- Such an optical device can accommodate relative differences in thermal expansion coefficients between the reflector and the structural member supporting the reflector by means of the support member.
- the support member has a beam portion connected to both sides of the mirror support portion, and a flange portion vertically connected to each beam portion at the end of each beam portion not connected to the mirror support portion,
- the structural members have beam anchors to which the flanges connect.
- the present disclosure has been made to solve the above-described problems, and aims to obtain a mirror support mechanism that can alleviate deformation due to tensile or compressive force generated in the support member.
- a mirror support mechanism includes three first support members and three second support members.
- Each first support member has a mirror support portion and a first beam portion.
- the reflecting mirror has a reflecting surface that reflects light and a supported portion provided on the back surface opposite to the reflecting surface.
- the mirror supporting portion supports the supported surfaces by contacting with each of the three supported surfaces.
- the three supported surfaces are arranged on the supported portion of the reflecting mirror with 120-degree rotational symmetry about the optical axis.
- Each first beam section is connected to opposite sides of each mirror support.
- Each second support member has a support portion and a second beam portion. The supporting portion is connected to the ends of the two adjacent first beam portions that are not connected to the mirror supporting portion.
- Each second beam section is connected to both sides of each support section. The end of the second beam portion that is not connected to the support portion is supported by a structural member present on the back side of the reflector.
- the mirror support mechanism according to the present disclosure is provided on the reflecting surface that reflects light and the back surface, which is the surface opposite to the reflecting surface, and is arranged with 120-degree rotational symmetry around the optical axis.
- a reflecting mirror having a supported portion having three supported surfaces is supported.
- the mirror support mechanism comprises three first support members and second support members.
- the three first support members have a hexagonal outline in which sides of the first length and sides of the second length are alternately adjacent to each other on a plane perpendicular to the optical axis.
- Each first support member supports the surface to be supported by contacting the surface to be supported at the mirror support portion formed at the center of each side of the first length.
- the second support member has a hexagonal outer shape in which the sides of the third length and the sides of the fourth length are alternately adjacent to each other on the plane perpendicular to the optical axis.
- Three connections formed at each fourth length side are connected to structural members present on the rear side of the reflector.
- FIG. 1 is a perspective view of an optical device according to Embodiment 1;
- FIG. 1 is a front view of an optical device according to Embodiment 1;
- FIG. 1 is a plan view of an optical device according to Embodiment 1;
- FIG. 2 is a right side view of the optical device according to Embodiment 1.
- FIG. 2 is a bottom view of the optical device according to Embodiment 1;
- FIG. 1 is a cross-sectional view of an optical device according to Embodiment 1;
- FIG. 4A and 4B are perspective views of a first support member and a second support member used to support a reflecting mirror in the optical device (mirror support mechanism) according to Embodiment 1; 4 is a front view of a first support member and a second support member used for supporting a reflecting mirror in the optical device (mirror support mechanism) according to Embodiment 1; FIG. 4A and 4B are plan views of a first support member and a second support member used to support a reflecting mirror in the optical device (mirror support mechanism) according to Embodiment 1; FIG. 4 is a right side view of a first support member and a second support member used for supporting a reflecting mirror in the optical device (mirror support mechanism) according to Embodiment 1; FIG.
- FIG. 4 is a rear view of a support beam used for supporting a reflecting mirror in the optical device (mirror support mechanism) according to Embodiment 1.
- FIG. 4 is a perspective view of a reflecting mirror supported by a first supporting member and a second supporting member in the optical device according to Embodiment 1;
- FIG. 4 is a front view of a reflecting mirror supported by a first supporting member and a second supporting member in the optical device according to Embodiment 1;
- FIG. 4 is a right side view of the reflecting mirror supported by the first supporting member and the second supporting member in the optical device according to Embodiment 1;
- FIG. 4 is a rear view of the reflecting mirror supported by the first supporting member and the second supporting member in the optical device according to Embodiment 1.
- FIG. 4 is a perspective view of a reflecting mirror supported by a first supporting member and a second supporting member in the optical device according to Embodiment 1;
- FIG. 4 is a front view of a reflecting mirror supported by a first supporting member
- FIG. 4 is a bottom view of the reflecting mirror supported by the first supporting member and the second supporting member in the optical device according to Embodiment 1;
- FIG. FIG. 2 is a perspective view of the honeycomb sandwich panel used in the optical device according to Embodiment 1, with a part of the skin material removed.
- FIG. 10 is a front view of an artificial satellite on which an optical device according to Embodiment 2 is mounted;
- FIG. 11 is an enlarged view of a portion connecting the optical device and the artificial satellite according to Embodiment 2;
- 6 is a conceptual cross-sectional view for explaining the internal configuration of an optical device according to Embodiment 2;
- Embodiment 1 An optical device according to Embodiment 1 will be described with reference to FIGS. 1 to 6.
- FIG. Note that the mirror support mechanism according to the first embodiment is a mechanism included in the optical device according to the first embodiment.
- the mirror support mechanism according to the first embodiment may be considered to be the optical device according to the first embodiment from which the reflecting mirror 1 or the reflecting mirror 1 and the structural member 2 are removed.
- the mirror support mechanism according to Embodiment 1 may be considered to be the first support member 9 or the first support member 9 and the second support member 10 .
- the mirror support mechanism may be called a mirror support structure.
- FIG. 1 is a perspective view of an optical device according to Embodiment 1.
- FIG. 2 to 5 are a front view, a plan view, a right side view and a bottom view of the optical device.
- FIG. 6 is a cross-sectional view taken along line AA shown in FIG. The AA cross section is a cross section at the same position in FIG. 9 described later.
- the optical device 50 has a reflector 1 and a structural member 2 .
- the optical device 50 constitutes an optical telescope for observing celestial bodies and the like.
- a structural member 2 that is a mirror supporting member is a member that supports the reflecting mirror 1 .
- the reflecting mirror 1 has a reflecting surface 3 and a supported portion 4 .
- the reflecting surface 3 reflects observation light, which is light used for observation.
- the surface opposite to the reflecting surface 3 is called a back surface.
- the supported portion 4 is provided at the center of the back surface of the reflecting mirror 1 .
- the supported portion 4 is a member supported by the structural member
- the reflective surface 3 has a circular outer shape and is a concave surface.
- the supported portion 4 is a protrusion having a cylindrical outer shape.
- the supported portion 4 is provided at the center of the back surface of the reflecting mirror 1 .
- supported surfaces 5, which are three planes parallel to the optical axis LX (shown in FIGS. 2 and 4) of the reflecting mirror 1, are provided on the tip side of the projection.
- the supported surface 5 is preferably formed as a projection and is a plane parallel to the optical axis LX.
- the supported surfaces 5 are rectangular planes of the same size and form an angle of 120 degrees with each other.
- the supported portion 4 has rotational symmetry every 120 degrees around the optical axis LX.
- the supported surface 5 is preferably a plane parallel to the optical axis LX, but is not limited to this.
- the structural member 2 is a member that exists on the back side of the reflecting mirror 1 and supports the reflecting mirror 1 .
- the reflecting mirror 1 and structural member 2 can also be applied to optical instruments that are not used for observation purposes.
- the structural member 2 has a support substrate portion 6 , a bearing portion 7 and a support opening portion 8 .
- the structural member 2 is provided with a first support member 9 and a second support member 10 .
- the support substrate portion 6 is the main body portion of the structural member 2 .
- the support substrate portion 6 is a panel-shaped member present on the back side of the reflecting mirror 1 .
- the support substrate portion 6 When viewed from the direction of the optical axis LX, the support substrate portion 6 has a shape in which two substantially rectangular portions are connected to a substantially circular portion having a smaller diameter than the outer diameter of the reflecting mirror 1 .
- the two substantially rectangular portions are provided symmetrically about the substantially circular portion.
- Bearings 7 are provided on the outer sides of the two substantially rectangular portions, respectively.
- the two bearing portions 7 are provided one by one at the central portions of two sides of the support substrate portion 6 facing each other when viewed from the direction of the optical axis LX.
- the bearing portion 7 has a shape protruding from the support substrate portion 6 .
- the bearing portion 7 has a shaft holding hole 11 having a cylindrical inner space.
- the shaft holding holes 11 of the two bearings 7 are provided so that their central axes are aligned and intersect the optical axis LX of the reflecting mirror 1 .
- a central axis of the shaft holding hole 11 is parallel to the main surface of the support substrate portion 6 .
- a cylindrical Y-axis member 12 (not shown) is inserted into each of the two shaft holding holes 11 .
- the central axis of the shaft holding hole 11 and the central axis of the Y-axis member 12 match.
- a central axis of the Y-axis member 12 is called a Y-axis.
- the optical device 50 is rotatable around the Y-axis member 12, ie, the Y-axis.
- An axis perpendicular to the Y-axis on a plane perpendicular to the optical axis LX is called an X-axis.
- the Z-axis orthogonal to the X-axis and the Y-axis is arranged to coincide with the optical axis LX.
- the support opening 8 , the first support member 9 and the second support member 10 are members for supporting the supported portion 4 of the reflector 1 .
- the structural member 2 has a support opening 8 which is a hole into which the supported portion 4 is inserted.
- the support opening 8 is a cylindrical open space provided in the center of the support substrate portion 6 .
- the support opening 8 is provided through the support substrate portion 6 .
- the inner surface of the cylindrical opening formed by the support opening 8 is called the cylindrical surface 13 .
- the cylindrical surface 13 also extends to the back side of the portion corresponding to the disk-shaped support substrate portion 6 .
- the support opening 8 has an annular portion protruding from the back surface of the support substrate portion 6 .
- the supported portion 4 of the reflecting mirror 1 is inserted into the space surrounded by the cylindrical surface 13 .
- the supported portion 4 is supported by three first supporting members 9 and three second supporting members 10 in the space surrounded by the cylindrical surface 13 .
- a mirror support portion 9A formed in the first support member 9 contacts the surface 5 to be supported and supports the surface 5 to be supported.
- the first support member 9 is connected to the support portion 10A formed on the second support member 10 .
- Three connection portions 10C formed on the three second support members 10 are connected to the structural member 2 present on the back side of the reflecting mirror 1.
- the cylindrical surface 13 of the structural member 2 is provided with three fixing portions 2A (illustrated in FIG. 5) to which each of the three connecting portions 10C is fixed.
- the supported portion 4 is supported by the first support member 9 and the second support member 10 in the space surrounded by the cylindrical surface 13, the length of the optical device 50 in the direction of the optical axis LX is shortened, and the structural member 2 is A reflector 1 can be supported.
- the supported portion 4 may be supported by the first support member 9 and the second support member 10 on the main surface side of the support substrate portion 6 without providing the support opening portion 8 .
- the three first support members 9 have two types of side lengths on a plane perpendicular to the optical axis LX, and have a hexagonal shape (first hexagonal).
- first hexagonal the outer shape of the plurality of members on a plane is the shape of a convex plane figure that includes the plurality of members.
- the outer shape of a plurality of members in space is the shape of a convex solid (space figure) that includes the plurality of members.
- the sides of the first length alternate with the sides of the second length.
- the second length is shorter than the first length.
- the second length may be the same as the first length or longer than the first length.
- a mirror support 9A is formed at the central portion (central portion) of each first length side.
- the mirror supporting portion 9A is a member that connects to the supported surface 5 and supports the supported surface 5 .
- the external shape of the three first support members 9 seen from the optical axis perpendicular plane, that is, from the direction of the optical axis LX, is a first hexagonal shape. It is desirable that the interior angles of the first hexagon are all the same (equal). That is, it is desirable that all internal angles in the first hexagonal shape are 120 degrees.
- the first support member 9 has a first beam portion 9B with one end connected to the mirror support portion 9A and the other end connected to the second support member 10 .
- the mirror support portion 9A and the first beam portion 9B are flat.
- the surface of the reflecting mirror 1 on the far side from the supported portion 4 is a continuous flat surface without steps.
- the plate thickness of the mirror support portion 9A is thicker than the plate thickness of the first beam portion 9B. Therefore, the surface of the mirror supporting portion 9A that contacts the supported surface 5 protrudes from the surface of the first beam portion 9B on the reflecting mirror 1 side.
- the shape of the first support member 9 can be said to be a shape in which the main part exists substantially on a plane.
- the three first support members 9 are arranged parallel to the optical axis LX and have 120-degree rotational symmetry.
- the three first support members 9 are arranged so as to have a hexagonal prism shape.
- the mirror support portion 9A and the first beam portion 9B correspond to the first length side of the first hexagon on the plane perpendicular to the optical axis.
- the side of the second length corresponds to the central portion of the second support member 10 .
- the outer shape of the three first support members 9 may be a frustum instead of a column.
- the three second support members 10 have a hexagonal shape (second hexagonal shape) with two types of side lengths adjacent to each other on the plane perpendicular to the optical axis and with different side lengths (second hexagonal shape).
- the second hexagonal shape has alternating sides of the third length and adjacent sides of the fourth length.
- the fourth length is shorter than the third length.
- the fourth length may be the same as the third length or longer than the third length.
- a support portion 10A is formed at the center of each third length side.
- the position where the support portion 10A is arranged is also the position corresponding to the side of the second length in the first hexagonal shape that is the outer shape of the first support member 9 .
- the support portion 10A supports the first support member 9 .
- Connections 10C are formed on three sides of the fourth length in the second hexagon.
- the end portions of the two second beam portions 10B are connected to the connection portion 10C.
- the connection portion 10C is connected to the structural member 2 (fixed portion 2A) present on the back side of the reflecting mirror 1 .
- the outer shape of the three second support members 10 seen from the plane perpendicular to the optical axis, that is, from the direction of the optical axis LX is a second hexagonal shape. All interior angles of the second hexagon are preferably equal. That is, it is desirable that all internal angles in the second hexagonal shape are 120 degrees.
- the second support member 10 includes a second beam portion 10B having one end connected to the support portion 10A and the other end connected to the connection portion 10C.
- the plate thickness of the support portion 10A is thicker than the plate thickness of the second beam portion 10B.
- the center positions of the thicknesses of the support portion 10A and the second beam portion 10B are substantially the same.
- the support portion 10A protrudes from the second beam portion 10B on the side of the supported portion 4 of the reflecting mirror 1 and on the side far from the supported portion 4 . It can be said that the shape of the support portion 10A and the second beam portion 10B is a shape in which the main portions are substantially on a plane.
- a set of three support parts 10A and second beam parts 10B is arranged parallel to the optical axis LX and has 120-degree rotational symmetry.
- a connecting portion 10C is arranged between two adjacent second beam portions 10B.
- the connecting portion 10C has a portion protruding farther from the supported portion 4.
- the back side of the connecting portion 10C of the projecting portion is flat.
- the connecting portion 10C has an inclined surface on the back side so that the corner portion where the second beam portion 10B and the connecting portion 10C are connected is thickened for reinforcement.
- the support portion 10A and the second beam portion 10B correspond to the third length side of the second hexagon on the plane perpendicular to the optical axis.
- the connecting portion 10C corresponds to the fourth length side.
- the external shape of the three second support members 10 is annular when viewed from the direction of the optical axis LX. It can also be considered that there is one annular second support member 10 .
- the annular second support member 10 has three sets of support portions 10A and two second beam portions 10B, and three connection portions 10C. Considering that, the second support member 10 has an external shape of a hexagonal cylinder.
- the outer shape of the three or one second support member 10 may be a frustum instead of a column.
- FIG. 7 is a perspective view of the first support member 9 and the second support member 10.
- FIG. 8 to 11 are a front view, a plan view, a right side view and a rear view of the first support member 9 and the second support member 10.
- FIG. The mirror support mechanism comprises three first support members 9 and three second support members 10 .
- Each of the three first support members 9 has a mirror support portion 9A that contacts the surface 5 to be supported and supports the surface 5 to be supported.
- Each of the three mirror support portions 9A is in contact with and connected to each of the three supported surfaces 5 having 120-degree rotational symmetry.
- the first beam portion 9B is a member connected to both sides of the mirror support portion 9A in the first support member 9 .
- Each of the three second support members 10 is interposed between the ends of two adjacent first support members 9 and the structural member 2 .
- a structural member 2 is present on the back side of the reflector 1 .
- the three second support members 10 are members that indirectly connect both ends of the three first support members 9 and the structural member 2 .
- Each of the three support portions 10A is a member to which the ends of the two adjacent first beam portions 9B on the side not connected to the mirror support portion 9A are connected. Two adjacent ends of the first beam portions 9B are connected to each support portion 10A.
- the second beam portion 10B is a member connected to both sides of the support portion 10A.
- Each connecting portion 10C is connected to the end of each two adjacent second beam portions 10B on the side not connected to the supporting portion 10A.
- Each connecting portion 10C is a member connected to each of the three fixing portions 2A of the structural member 2. As shown in FIG. Each second beam portion 10B is connected to and supported by the structural member 2 via a connecting portion 10C. Since each second beam portion 10B is connected to the fixed portion 2A via the connecting portion 10C, each second beam portion 10B can be easily connected to the structural member 2. FIG. Further, it is easy to set the attachment position of each second beam portion 10B to the structural member 2 at a desired position.
- the mirror support portion 9A is arranged in the central portion of the first support member 9.
- the first support member 9 has a mirror support portion 9A in the center, and two first beam portions 9B are connected to both sides of the mirror support portion 9A.
- Each of the two first beam portions 9B connected to the mirror support portion 9A is connected to each of the two support portions 10A.
- a mirror support 9A is arranged at a central position between the two supports 10A.
- the outer shape of the first support member 9 and the second support member 10 is hexagonal on a plane perpendicular to the optical axis LX (plane perpendicular to the optical axis).
- the support portion 10A may be considered as a member on the first support member 9 side.
- the outer shape of the ring on the plane perpendicular to the optical axis which is composed of the mirror support portion 9A, the first beam portion 9B and the support portion 10A, is preferably hexagonal.
- each first beam portion 9B has the same length
- each support portion 10A has the same length
- the length of the first beam portion 9B is longer than the length of the support portion 10A.
- Each mirror support 9A is also of the same length.
- the first hexagonal shape formed by the mirror support portion 9A, the first beam portion 9B and the support portion 10A preferably has the same internal angle (120 degrees).
- the outer shape of the ring formed by the supporting portion 10A, the second beam portion 10B and the connecting portion 10C is preferably hexagonal.
- Each second beam portion 10B has the same length
- each connecting portion 10C has the same length
- the length of the second beam portion 10B is longer than the length of the connecting portion 10C.
- the second hexagonal shape formed by the supporting portion 10A, the second beam portion 10B, and the connecting portion 10C preferably has the same interior angle (120 degrees).
- the first support member 9 has a shape in which plate members are connected
- the second support member 10 has a shape in which plate members are connected.
- the plate thickness of the mirror support portion 9A is thicker than the plate thickness of the first support member 9 at the portion connected to the mirror support portion 9A.
- the plate thickness of the support portion 10A is thicker than the plate thickness of the second support member 10 at the portion connected to the support portion 10A.
- the plate thickness of the connection portion 10C is thicker than the plate thickness of the second support member 10 at the portion connected to the connection portion 10C.
- the first support member 9 and the second support member 10 are leaf springs. In addition, you may call the part to the location which connects with the 2nd beam part 10B of the both sides of the connection part 10C as a 3rd beam part.
- the mirror supporting portion 9A, the supporting portion 10A, and the connecting portion 10C are desirably rectangular when viewed from the normal direction.
- the first beam 9B, the second beam portion 10B and the third beam portion are preferably rectangular.
- the rectangular mirror supporting portion 9A, supporting portion 10A, connecting portion 10C, first beam 9B, and second beam portion 10B have short sides in the direction of the optical axis LX.
- the rectangular third beam portion has a long side in the direction of the optical axis LX.
- the mirror support portion 9A of the first support member 9 is a plane parallel to the optical axis LX.
- the fixed portion 2A formed on the cylindrical surface 13 of the structural member 2 is a plane parallel to the optical axis LX.
- the connection portion 10C of the second support member 10 is a plane parallel to the optical axis LX.
- the support portion 10A of the second support member 10 is preferably a plane parallel to the optical axis LX, including the case where the first support member 9 and the second support member 10 are integrated.
- members may also be formed on the sides of the second length to form one annular member together with the three first support members 9 .
- This one annular member may be used as one annular first support member.
- a member arranged on a side of the second length in the annular first support member is called a support portion of the first support member.
- the annular first support member and the annular second support member may be connected at their supporting portions. That is, the support portion of the first support member and the support portion 10A of the second support member 10 may be connected.
- the support portion of the first support member and the support portion 10A of the second support member 10 are preferably flat surfaces parallel to the optical axis LX.
- the mirror supporting portion 9 and the supported surface 5 are adhered with an adhesive.
- the fixed portion 2A and the connecting portion 10C are connected by bolts, for example.
- Two holes provided in the connecting portion 10C shown in FIGS. 8, 10 and 11 are holes into which the shafts of bolts are inserted. If the first support member 9 and the second support member 10 are not integral and support portions are respectively formed, the support portions may be connected by bolts.
- the mirror support mechanism according to Embodiment 1 also includes the structural member 2 .
- the second support member 10 may be formed integrally with the structural member 2 .
- a structural member 2 integrally formed with a second support member 10 may be considered to include the second support member 10 .
- the structural member 2 of the optical device (mirror support mechanism) according to the first embodiment has a hole (support opening 8) into which the supported portion 4 is inserted.
- a cylindrical surface 13 is formed as the inner surface of this hole.
- the plate-shaped first support member 9 and second support member 10 have moderate elasticity. Therefore, the deflection of the first support member 9 can absorb the radial displacement of the portion where the supported surface 5 is supported by the mirror support portion 9A caused by the difference in thermal expansion coefficient between the reflecting mirror 1 and the structural member 2 .
- the tensile force or compressive force applied to the support portion 10A via the first beam portion 9B can be absorbed and alleviated by the bending of the second support member 10.
- FIG. In general, the thermal expansion coefficient of the reflecting mirror 1 is small and the thermal expansion coefficient of the structural member 2 is large. Therefore, a tensile force is often generated in the structural member 2 due to the difference in coefficient of thermal expansion.
- the first support member 9 can support the supported portion 4 without applying excessive stress to the supported portion 4 according to the expansion or contraction of the supported portion 4 in the radial direction. That is, the first supporting member 9 has a structure in which the mirror supporting portion 9A is movable in the radial direction of the reflecting mirror 1, and the second supporting member 10 has a structure in which the supporting portion 10A is movable in the radial direction of the reflecting mirror 1. It is sufficient if it has a structure. Even if one or both of the mirror supporting portion 9A and the supporting portion 10A move in the radial direction, the center position of the supported portion 4 is fixed with respect to the structural member 2.
- the three first support members 9 and the three second support members 10 are arranged with respect to a central plane CS passing through each set of three mirror supports 9A, supports 10A and connections 10C. It is plane symmetrical.
- the center plane CS passes vertically through the center of each of the rectangular parallelepiped mirror support portion 9A, support portion 10A and connection portion 10C. Since the three sets of mirror supporting portion 9A, supporting portion 10A and connecting portion 10C are arranged with 120 degree rotational symmetry, there are three central planes CS.
- the position of the section AA shown in FIG. 9 is one of the three central planes CS.
- the three central planes CS are arranged with a rotational symmetry of 120 degrees. Since the three first supporting members 9 and the three second supporting members 10 are symmetrical about the three central planes CS, the three first supporting members 9 and the three second supporting members 10 are The reflecting mirror 1 can be evenly and stably supported.
- Each mirror support 9A has the same length (L 0 ).
- Each first beam portion 9B has the same length (L 1 ).
- Each support portion 10A has the same length (L 2 ).
- Each second beam portion 10B has the same length (L 3 ).
- the connecting portion 10C has the same length (L 4 ).
- each first support member 9 has the same length (L 0 +2*L 1 ).
- Each second support member 10 has the same length (L 2 +2*L 3 ).
- Each interior angle of the first hexagonal shape formed by the first support member 9 and the support portion 10A is 120 degrees.
- Each interior angle of the second hexagonal shape formed by the second support member 10 and the connecting portion 10C is 120 degrees.
- each set of three mirror support portions 9A, support portions 10A and connection portions 10C, the perpendicular bisector of the mirror support portion 9A, the perpendicular bisector of the support portion 10A and the perpendicular bisector of the support portion 10A are The perpendicular bisectors of the connecting portion 10C coincide and exist on the central plane CS.
- Each angle ( ⁇ 1 ) formed by the support portion 10A and the first beam portion 9B is 120 degrees on the plane perpendicular to the optical axis.
- Each angle ( ⁇ 2 ) formed by the connecting portion 10A and the second beam portion 10B is 120 degrees on the plane perpendicular to the optical axis.
- Each first beam portion 9B connected to each mirror support portion 9A on the counterclockwise side about the optical axis LX has the same length (L 1A ) with respect to each mirror support portion 9A.
- Each first beam portion 9B connected to each mirror support portion 9A on the clockwise side with respect to the optical axis LX as the center of rotation has the same length (L 1B ⁇ L 1A ). .
- Each second beam portion 10B connected to each support portion 10A on the counterclockwise side with respect to the optical axis LX as the rotation center has the same length (L 3A ).
- Each second beam portion 10B connected to each support portion 10A on the clockwise side with respect to the optical axis LX as the center of rotation has the same length (L 3B ⁇ L 3A ).
- Case 2 is a case where propositions (A), (B1), (B2), (C), (D1), (D2) and (E) hold.
- N) The optical axis LX exists on the perpendicular bisector of each first support member 9 in the plane perpendicular to the optical axis.
- P) The optical axis LX exists on the perpendicular bisector of each second support member 10 in the plane perpendicular to the optical axis.
- Q In the plane perpendicular to the optical axis, the optical axis LX exists on the perpendicular bisector of each connecting portion 10C.
- the three first support members 9 and the three second support members 10 are rotated by 120 degrees.
- the reflecting mirror 1 can be supported with symmetry.
- FIGS. 12 to 16 are a perspective view, a front view, a right side view, a rear view and a bottom view of the reflector 1 supported by the first support member 9 and the second support member 10.
- the reflector 1 is supported by a simple structure consisting of a first support member 9 and a second support member 10.
- FIG. The support opening 8 , the first support member 9 , and the second support member 10 form a support opening that fixes the position of the supported portion 4 with respect to the support substrate portion 6 and connects the supported portion 4 to the support substrate portion 6 . do.
- the Y-axis member 12 is connected to the X-axis rotating member 14 (not shown).
- the X-axis is an axis perpendicular to the Y-axis on a plane perpendicular to the optical axis LX.
- the X-axis rotating member 14 is rotatable around the X-axis.
- the X-axis rotating member 14 has the same shape as the supporting substrate portion 6 .
- the X-axis rotating member 14 is rotatable around the X-axis by two X-axis members 15 (not shown) parallel to the X-axis.
- a plate-shaped mirror base member 16 (not shown) having a projection for supporting the X-axis member 15 is present on the back side of the X-axis rotating member 14 .
- the distance between the mirror base member 16 and the X-axis is appropriately determined so that the X-axis rotating member 14 is rotatable about the X-axis by a determined angle.
- the mirror base member 16 is fixed to a structural member of an optical telescope as described in the second embodiment.
- the optical device 50 having the mirror support mechanism according to the first embodiment has a triangular structure in which the leaf springs (first support member 9) are assembled in a triangular shape, and the leaf springs (second support member 10) are arranged on the outer side.
- a triangular structure is arranged. That is, a triangle is formed by extending imaginary straight lines of the first beam portion 9B of the first support member 9 from the other end opposite to the one end connected to the mirror support portion 9A. This triangle is preferably an equilateral triangle.
- a triangle is formed by extending imaginary straight lines from the second beam portion 10B of the second support member 10 from the other end opposite to the end connected to the support portion 10A. This triangle is preferably an equilateral triangle.
- the relative thermal deformation of the reflecting mirror 1 and the telescope structure due to temperature changes causes the mirror support mechanism to displace (deformation amount) due to thermal deformation in the radial direction as well as in the circumferential direction. can be absorbed to maintain the position of the primary mirror.
- the triangular structure of the double leaf springs can ideally support the primary mirror without causing fluctuations in the support reaction force.
- the triangular shape of the leaf springs is arranged in an upside-down double structure to create a structure similar to a truss. The positions of the mirror supporting portion and the supporting portion in the direction of the optical axis LX are the same.
- the height of the mirror support mechanism is fixed, and both the surface near and far from the reflecting mirror 1 are flat. These structures make it possible to increase the rigidity of the mirror support mechanism. Although there is a possibility that the rigidity will be lowered, the positions of the mirror support portion and the support portion in the direction of the optical axis LX may be different.
- the parts near each vertex of the triangular structure of the double leaf spring are cut out to form a hexagonal shape. Therefore, the size of the mirror support mechanism on the plane perpendicular to the optical axis can be reduced.
- the structural member 2 may support the end of the second beam portion 10B that does not have the connection portion 10C and is not connected to the support portion 10A.
- the end of the second beam portion 10B on the side not connected to the support portion 10A is a support provided on the structural member 2 so that the support beam 9 is supported on the cylindrical surface 13 via the beam fixing portion 10. It may be supported by the cylindrical surface 13 that is the inner surface of the opening 8 .
- connection portion may be formed separately from the second support member, the ends of two adjacent second beam portions 10B may be connected to the connection portion, and the connection portion may be fixed to the fixed portion 2A. The end of the second beam portion 10B to which the support portion 10A is not connected should be supported by the structural member 2 .
- each first beam portion 9B is longer than the length (L 2 ) of each support portion 10A (L 1 >L 2 )
- the length (L 3 ) of each second beam portion 10B is longer than the length (L 4 ) of each connection portion 10C (L 3 >L 4 )
- the maximum amount of deformation that can be absorbed by the second support member 10 can be increased with respect to the amount of deformation of the first support member 9 in the circumferential direction. For the same amount of circumferential displacement, the amount of deformation of the second support member 10 is smaller.
- the second hexagon can be made closer to a regular hexagon, and the mirror support mechanism can be made more compact.
- the lengths of the mirror support portion 9A, the first beam portion 9B, the support portion 10A, the second beam portion 10B, and the connection portion 10C are appropriately determined in consideration of the expected maximum amount of deformation, restrictions on the size of the mirror support mechanism, and the like. decide.
- each first support member 9 the mirror support portion 9A and the first beam portions 9B on both sides thereof are arranged in one straight line when viewed from the direction of the optical axis LX.
- the support portion 10A and the second beam portions 10B on both sides thereof are arranged in a single straight line when viewed from the direction of the optical axis LX. Therefore, the mirror support mechanism can support the supported portion 4 by reducing the load applied to the supported portion 4 of the reflecting mirror 1 .
- Either one or both of the first support member 9 and the second support member 10 may be arranged in a polygonal shape when viewed from the direction of the optical axis LX, although the effect of the triangular structure of the leaf spring is reduced.
- the polygonal line may be either concave or convex on the side closer to the supported portion 4 .
- the directions of the bends of the first support member 9 and the second support member 10 may be the same or different.
- first support member 9 leaf springs are assembled into a triangular shape
- second support member 10 a triangular leaf spring structure
- first support member 9 and the second support member 10 are arranged to prevent relative thermal deformation between the reflector 1 and the telescope structure when the temperature changes.
- the position of the reflector 1 can be maintained by absorbing thermal deformation in the circumferential direction as well as in the radial direction of the reflector 1 .
- the mirror support mechanism (optical device) according to the first embodiment can ideally support the reflecting mirror 1 without causing variations in support reaction force.
- a device including the mirror support mechanism according to the first embodiment and the reflecting mirror 1 may be called an optical device according to the first embodiment.
- a device including the mirror support mechanism according to the first embodiment, the reflecting mirror 1 and the structural member 2 may be referred to as an optical device according to the first embodiment.
- the supported portion 4 is a projection having a cylindrical outer shape
- the supported surface 5 is a plane parallel to the optical axis.
- the mirror support mechanism By manufacturing the mirror support mechanism from a metal with a low coefficient of thermal expansion, it is possible to reduce the amount of deformation of the mirror support mechanism that occurs due to temperature changes.
- a metal whose absolute value of thermal expansion coefficient is smaller than that of carbon fiber reinforced plastic (abbreviated as CFRP) is referred to as a low-expansion metal used for manufacturing optical devices.
- CFRP carbon fiber reinforced plastic
- the structural member 2, the first support member 9 and the second support member 10 may be made of low expansion metal. Any one or more of the structural member 2, the first support member 0, and the second support member 10 may be formed of the low-expansion metal.
- the structural member 2, the first support member 0 and the second support member 10 may be made of other members (such as metal). At least one of the support substrate portion 6 and the bearing portion 7 provided in the structural member 2 may be made of a low-expansion metal.
- the structural member 2 shown in the drawing has an exemplified configuration and is not the honeycomb sandwich panel 20.
- the support substrate portion 6 and the bearing portion 7 of the structural member 2 may be constructed of a honeycomb sandwich panel 20 made of a metal having a low coefficient of thermal expansion so as to be lightweight and have a small coefficient of thermal expansion.
- Invar alloys are used as metals with a low coefficient of thermal expansion.
- the "zero thermal expansion Invar alloy” manufactured by Shinpokoku Steel Co., Ltd. has an extremely low thermal expansion coefficient of 0.06 ppm [1/K] (according to an article in the Nikkan Tekko Shimbun dated November 22, 2018 ).
- first support member 9 and second support member 10 are made of a low expansion metal. At least one of the support opening 8, the first support member 9, and the second support member 10 may be made of a material different from the low-expansion metal.
- FIG. 17 is a perspective view of the honeycomb sandwich panel with some skin materials removed.
- the honeycomb sandwich panel 20 includes a first skin material 21 , a core material 22 and a second skin material 23 .
- the first skin material 21 is a plate material that forms one surface of the honeycomb sandwich panel 20 .
- the second skin material 23 is a plate material that is arranged to face one surface and is the other surface. In the honeycomb sandwich panel 20 shown in FIG. 17, the first skin material 21 and the second skin material 23 are arranged in parallel.
- the core material 22 is a member having a honeycomb structure.
- a honeycomb structure is a structure in which a plurality of cylinders having hexagonal (preferably regular hexagonal) cross sections are formed adjacent to each other.
- the core material 22 is vertically bonded to the first skin material 21 and the second skin material 23 with an adhesive. It should be noted that even a hexagon in which the two opposite sides of the six sides are different in length from the other four sides can fill the plane without gaps. Therefore, the core material may have a shape in which cylinders each having a hexagonal cross section are arranged adjacent to each other.
- the structural member 2 may be manufactured using a honeycomb sandwich panel made of low-expansion metal. Therefore, the degree of influence of expansion or contraction due to temperature change on the position of the reflecting mirror 1 can be made smaller than in the case of manufacturing with CFRP.
- the Y-axis member 12, the X-axis rotating member 14, the X-axis member 15, and the mirror base member 16 are also configured with honeycomb sandwich panels made of low-expansion metal, or made of low-expansion metal.
- the structural member 2 may be manufactured using honeycomb sandwich panels made of materials other than low-expansion metals, or may be manufactured without using honeycomb sandwich panels. The same applies to each of the Y-axis member 12, the X-axis rotating member 14, the X-axis member 15, and the mirror base member 16.
- CFRP honeycomb sandwich panels By using a low-expansion metal instead of CFRP, the following problems that occur when using CFRP can be resolved.
- CFRP honeycomb sandwich panels using CFRP the properties of stiffness and coefficient of thermal expansion change depending on the fiber direction and layer structure. Therefore, it is necessary to examine and adjust the fiber direction and layer structure before manufacturing the skin material and the core material. As a result, CFRP honeycomb sandwich panels require more labor, time and/or cost than using low expansion metals.
- the absolute value of the thermal expansion coefficient that can be realized with CFRP is less than 10 ⁇ 6 and about 3 ⁇ 10 ⁇ 7 [1/K] or more.
- a low-expansion glass material such as ZERODUR® from SCHOTT, has a coefficient of thermal expansion of 0 ⁇ 0.05 ⁇ 10 ⁇ 6 [1/K] in Class 1.
- the coefficient of thermal expansion of CFRP which is the material of the mirror support member, is at least five times greater than that of a reflector made of a low-expansion glass material having a coefficient of thermal expansion of less than 10 -7 [1/K]. .
- CFRP is a high molecular weight organic material, it absorbs moisture. If the CFRP containing water is launched into orbit, the water may evaporate in space and shrink and deform. In addition, organic matter contained in CFRP may evaporate in outer space, shrinking and deforming. The shrinkage deformation of the CFRP may change the dimensions of the structural members, change the relative positions of the optical instruments, and reduce the observation accuracy.
- a gas (outgas) containing organic matter generated from CFRP may come into contact with an optical device, and the organic matter generated from CFRP may adhere to the optical device. Attachment of organic matter may lead to deterioration of observation accuracy.
- Low-expansion metals have high rigidity and strength, and are isotropic in terms of rigidity and thermal expansion. Low expansion metals also have higher thermal conductivity than CFRP.
- the structural member 2 can achieve a low thermal expansion coefficient of less than 10 ⁇ 7 [1/K] by using a low expansion metal such as “zero thermal expansion Invar alloy”. Therefore, the difference in thermal expansion coefficient between the portion corresponding to the supporting structure and the reflecting mirror 1 is small, and the reflecting mirror 1 can be fixed to the structural member 2 by the three first supporting members 9 and the second supporting members 10 .
- the simple structure of the first support member 9 and the second support member 10 can support optical equipment such as the reflecting mirror 1 .
- Low-expansion metal can also be cut and welded. Since the low-expansion metal is a material that can be processed, it is not necessary to consider the fiber direction and layer structure that were necessary in the case of CFRP. At least one of labor, time, and cost can be improved in manufacturing an optical device compared to using CFRP.
- low-expansion metals can employ welding, which has a higher strength than adhesives. Welding of the low-expansion metal is performed by a method that does not deform the honeycomb sandwich panel.
- the first skin material and the second skin material may be made of low expansion metal, and the core material may be made of CFRP.
- a honeycomb sandwich panel whose first skin material and second skin material are made of "zero thermal expansion Invar alloy” and whose core material is made of CFRP was simulated by finite element analysis with respect to temperature change.
- the shape of the honeycomb sandwich panel is such that the first skin material and the second skin material are plate materials with length (Y direction) and width (X direction) of 100 mm ⁇ 100 mm and a thickness of 1 mm.
- the core material has a cell size of about 6 mm, a core material film thickness of about 0.03 mm, and a height (Z direction) of 20 mm.
- the coefficient of thermal expansion is 5.0 ⁇ 10 ⁇ 8 [1/K] for “zero thermal expansion Invar alloy” and ⁇ 3.0 ⁇ 10 ⁇ 7 [ 1/K] for CFRP. and A temperature change is assumed to be a rise of 10[K].
- the displacement in the X and Y directions is 5.0 ⁇ 10 ⁇ 5 [mm].
- the displacement in the Z direction is 1.0 ⁇ 10 ⁇ 5 [mm].
- the displacement in the X direction is 4.92 ⁇ 10 ⁇ 5 [mm]
- the displacement in the Y direction is 5.16 ⁇ 10 ⁇ 5 [mm]
- the displacement in the Z direction is ⁇ 8.28 ⁇ 10 ⁇ 5 [mm].
- the core material is made of CFRP, it deforms like waving, so the amount of displacement was measured at the point where the displacement was the largest.
- a low-expansion metallic honeycomb sandwich panel can be applied even when supporting an optical device different from an optical device having a reflecting mirror.
- the structural member 2 supports the supported portion 4 of the reflecting mirror 1 by three first supporting members 9 and second supporting members 10 .
- the three first support members 9 and the second support members 10 provide three-point support, and the structural member 2 can support the reflecting mirror 1 without excessive restraint.
- the supported portion 4 is supported by three supported surfaces 5 in a point-symmetrical manner with respect to the optical axis LX.
- the first supporting member 9 and the second supporting member 10 support the supported portion 4 symmetrically with respect to the central plane CS. Therefore, the first support member 9 and the second support member 10 or the structural member 2 do not prevent the reflecting mirror 1 from expanding or contracting point-symmetrically about the optical axis LX due to temperature changes.
- the first supporting member 9 and the structural member 2 expand or contract with respect to the reflector 1
- the first supporting member 9 and the second supporting member 10 expand or contract in the same manner. Since it contracts, the stress acting on the reflecting mirror 1 is symmetrical with respect to the optical axis LX at three points.
- the stress acting on the reflecting mirror 1 exists on the central plane CS.
- the magnitude of the stress applied by the three first support members 9 and the second support members 10 will be the same.
- the expansion or contraction of the structural member 2 does not change the position at which the reflector 1 is supported by the first support member 9 and the second support member 10 .
- the reflecting mirror 1 expands or contracts due to the expansion or contraction of the structural member 2, the reflecting mirror 1 expands or contracts point-symmetrically about the optical axis LX.
- the supported portion 4 exists at a position close to the optical axis LX of the reflecting mirror 1 . Therefore, even if there is expansion or contraction due to a change in temperature, the amount of expansion or contraction of the first support member 9 and the second support member 10 that support the supported portion 4 can be can be made smaller than when supported by Therefore, the stress due to expansion or contraction applied to the reflecting mirror 1, the first support member 9 and the second support member 10 is also reduced.
- the structural member 2, the first supporting member 9, and the second supporting member 10 made of a low-expansion metal, the amount of expansion or contraction can be further reduced, and the stress can also be reduced.
- the optical device 50 can accommodate relative differences in thermal expansion coefficients between the reflector 1 and the structural member 2 .
- the supported surface does not have to be parallel to the optical axis LX of the reflecting mirror 1.
- the supported surface may not be flat.
- a protrusion or a recess may be provided on the surface to be supported. It is sufficient that the supported surface is provided with 120-degree rotational symmetry around the optical axis LX.
- An optical telescope including optical device 50 may be used onboard a satellite.
- acceleration is applied to the optical telescope and the like.
- the first support member 9 and the second support member 10 can support the reflecting mirror 1 even under conditions where acceleration is applied.
- the reflecting mirror 1 is in a posture in which the optical axis LX is parallel to the moving direction.
- the acceleration at launch is generated in a direction parallel to the optical axis LX of the reflecting mirror 1 .
- the first beam portion 9B of the first support member 9 is perpendicular to the direction in which the acceleration is generated, and the first beam portion 9B can generate the stress corresponding to the acceleration.
- the above also applies to other embodiments.
- FIG. 18 is a front view of an artificial satellite equipped with an optical device according to Embodiment 2.
- FIG. 19 is an enlarged view of a portion where the optical device and the artificial satellite are connected.
- FIG. 20 is a conceptual cross-sectional view for explaining the internal configuration of the optical device.
- the mirror support mechanism (optical device) according to the first embodiment is located in the tilting mechanism of the telescope structure of the optical telescope 32 .
- the tilting mechanism is a member installed for the purpose of rotating the primary mirror around two axes to scan the solar surface.
- the artificial satellite 30 has a satellite body 31 and an optical telescope 32 .
- the optical telescope 32 is manufactured with a low coefficient of thermal expansion taken into consideration in the portions that affect observation accuracy.
- the satellite body 31 is manufactured without special consideration for thermal expansion.
- the satellite body 31 has a connection panel section 33 for mounting the optical telescope 32 .
- the connection panel section 33 is a planar plate-like member.
- the connection panel section 33 is manufactured using a honeycomb sandwich panel made of metal such as aluminum.
- the optical telescope 32 has a structure in which a circular entrance 34 (shown in FIG. 20) is arranged on the far side from the satellite main body 31 and the reflecting mirror 1 is arranged on the side close to the satellite main body 31.
- the side on which the entrance 34 is present is called the tip side
- the side connected to the satellite main body 1 is called the base side.
- the optical telescope 32 is roughly divided into a pedestal portion 35 and a lens barrel portion 36 .
- a pedestal portion 35 is present on the base side and connects to the connection panel portion 33 .
- a reflecting mirror 1 is installed on the base portion 35 .
- the lens barrel 36 is a member surrounding an optical path 42 (shown in FIG. 20) through which observation light passes.
- the lens barrel portion 36 is connected to the pedestal portion 35 on the base side.
- the pedestal part 35 has a disk-like shape with a through hole in the center. Wiring for sending observed images to a storage device arranged inside the satellite main body 31, signal lines for sending signals for controlling the optical telescope 32, and the like pass through the through holes.
- the base portion 35 is manufactured using a low-expansion metal honeycomb sandwich panel.
- a support member for the reflecting mirror 1 is fixed to the base portion 35 .
- the reflecting mirror 1 is supported by a supporting member so that the direction in which the optical axis faces can be changed.
- the lens barrel section 36 is vertically connected to the pedestal section 35 .
- the lens barrel portion 36 has a lens barrel base portion 37 , a lens barrel intermediate portion 38 , a device holding portion 39 and an optical path cylindrical portion 40 .
- the shape of the lens barrel base portion 37 is a rectangular tube whose height is lower than its width.
- the cross-sectional shape of the barrel base 37 is a regular octagon.
- the lens barrel base portion 37 is fixed to the pedestal portion 35 .
- the lens barrel base 37 accommodates the reflecting mirror 1 therein.
- the barrel base 37 has a flange on the tip side.
- the lens barrel base 37 is manufactured using a low-expansion metal honeycomb sandwich panel.
- the base side of the intermediate part 38 of the lens barrel is a regular octagonal rectangular tube having a flange.
- the tip side of the lens barrel intermediate portion 38 has the shape of only the upper half of the rectangular tube.
- an optical path cylindrical portion 40 is connected to the lower side and the distal end side of the lens barrel intermediate portion 38 in the figure.
- the tip side of the optical path cylindrical portion 40 is cylindrical.
- An opening on the tip side of the cylinder is the incident port 34 .
- the base side of the optical path cylindrical portion 40 has a cylindrical shape with only a lower half so that the lens barrel intermediate portion 38 can be connected to the upper side.
- the lens barrel intermediate portion 38 and the optical path cylindrical portion 40 are joined together so that there is no gap between them.
- a device holding portion 39 is connected to the tip side of the upper portion of the lens barrel intermediate portion 38 .
- the device holding portion 39 is present above the optical path cylindrical portion 40 and on the distal end side of the lens barrel intermediate portion 38 .
- the device holding section 39 holds an optical device.
- the lens barrel intermediate portion 38 and the equipment holding portion 39 are manufactured using honeycomb sandwich panels made of low-expansion metal.
- the optical path cylindrical portion 40 is made of aluminum.
- the lens barrel base portion 37, the lens barrel intermediate portion 38, the device holding portion 39, and the optical path cylindrical portion 40 are joined to the pedestal portion 35 to form a closed space into which the observation light enters only from the entrance 34.
- An optical device is placed in a closed space inside the lens barrel.
- FIG. 20 shows only the slit 41 that disperses the observation light.
- An optical device such as a camera is also arranged inside the lens barrel. Light entering the lens barrel through the entrance 34 is reflected by the reflecting mirror 1 . The light reflected by the reflecting mirror 1 is split by the slit 41 . Spectroscopic light of a specific wavelength enters a camera (not shown), and the camera captures an image of an observation target.
- An optical path 42 is a path followed by light from the entrance 34 to the slit 41 .
- the optical path 42 is indicated by a dashed line.
- the pedestal portion 35, the barrel base portion 37, the barrel intermediate portion 38, and the device holding portion 39 are made of a low thermal expansion coefficient whose absolute value is smaller than 1.0 ⁇ 10 ⁇ 7 [1/K]. It is manufactured using honeycomb sandwich panels made of expansion metal or members made of low expansion metal. Therefore, changes in the relative positional relationship between the reflecting mirror 1 and the slit 41 can be kept small even when there is a change in temperature.
- the focal position of the optical telescope 32 can be kept within an allowable range even if the temperature changes.
- the position of the optical equipment other than the slit 41 with respect to the reflecting mirror 1 can also be kept within an allowable range even if there is a temperature change.
- the change in the image obtained by observation can be reduced even when there is a temperature change.
- a structural member that supports an optical device such as the reflecting mirror 1 or the slit 41 from a material with a large coefficient of thermal expansion
- the distance between the optical devices changes due to temperature changes, and the focal position shifts. There is If the focus position shifts, for example, the image captured by the camera becomes unclear.
- an adjusting mechanism having a large stroke may be separately required in order not to change the focal position. Since the honeycomb sandwich panel is used, the weight can be reduced, and the amount of energy required to launch the artificial satellite 30 into outer space can be reduced.
- the optical telescope 32 which is an optical device, has a plurality of optical devices and structural members that support the optical devices. Reflector 1 and slit 41 are examples of optical equipment.
- the pedestal portion 35 is a structural member that supports the structural member 2 .
- a structural member 2 is a structural member that supports the reflecting mirror 1 .
- the back surface which is the surface opposite to the reflecting surface 3 that reflects light, and is arranged with 120-degree rotational symmetry around the optical axis.
- the supported surface 5 is supported by a mirror support portion 9A formed on a first support member 9. , is connected to the first support member 9 at the support portion 10A formed on the second support member 10, and is connected to the structural member 2 existing on the back side of the reflecting mirror 1 at the connection portion 10C formed on the second support member 10.
- a connected one is preferred.
- the lens barrel section 36 is a structural member that supports the slit 41 and is connected to the pedestal section 35 while surrounding the optical path through which the observation light passes. Although not shown in the drawing, the barrel section 36 supports an optical device in addition to the slit 41 .
- the structural member 2, the pedestal portion 35 and the lens barrel portion 36 are configured including a honeycomb sandwich panel made of low-expansion metal.
- a path through the structural member connecting the reflecting mirror 1 and the slit 41 is only a honeycomb sandwich panel made of low-expansion metal or a structural member made of low-expansion metal. Therefore, changes in the relative positional relationship between the reflecting mirror 1 and the slit 41 can be kept within an allowable range with respect to temperature changes.
- Structural members made of materials other than low expansion metals may be present in the path between the optics.
- the ratio of the honeycomb sandwich panel made of low-expansion metal or the structural member made of low-expansion metal is equal to or higher than the determined lower limit. If the optical device has three or more optical instruments, for all combinations of selecting two optical instruments from a plurality of optical instruments, a path through a structural member connecting one optical instrument to the other optical instrument , the ratio of the honeycomb sandwich panel made of low-expansion metal or the portion made of low-expansion metal on the path should be equal to or higher than a predetermined lower limit.
- the pedestal portion 35 is made of a low-expansion metal, and the connection panel portion 33 is made of a metal with a larger thermal expansion coefficient than the low-expansion metal. A structure for absorbing the difference in the amount of expansion or contraction between the connection panel portion 33 and the base portion 35 due to temperature changes will be described.
- the pedestal 35 is connected to the connection panel 33 by a support mechanism with 45 degree rotational symmetry about its center.
- a rectangular parallelepiped projection 43 is provided at the center of each outer surface of the pedestal portion 35 whose outer shape is a regular octagonal prism. The projections 43 are fixed to the side surface of the pedestal 35 and the portion of the pedestal 35 made of a honeycomb sandwich panel where the skin material protrudes from one surface.
- connection panel portion 33 is also provided with a prismatic projection 44 .
- One protrusion 43 is connected to the protrusions 44 on both sides by one columnar rod 45 respectively.
- Two rods 45 connected to one protrusion 43 support the protrusion 43 in a bipod structure (two legs).
- the surface of the protrusion 43 to which one end of the rod 45 is fixed is a surface perpendicular to the outer surface of the pedestal portion 35 .
- the other end of rod 45 is fixed to the side surface of projection 44 .
- the side surface of the protrusion 44 to which the other end of the rod 45 is fixed intersects perpendicularly with the plane parallel to the optical axis along which the rod 45 extends.
- the projection 44 has a trapezoidal outline when viewed in a direction parallel to the optical axis.
- the other end of the rod 45 may be fixed to the upper surface of the projection 44 (the surface on which the projection 43 exists).
- the base portion 35 and the connection panel portion 33 are connected only by the rod 45 . A space exists between the base portion 35 and the connection panel portion 33 .
- Each of the eight projections 43 is connected to adjacent projections 44 by two rods 45 .
- Sixteen rods 45, eight projections 43 and eight projections 44 are optical rods connecting the optical telescope 32 to the satellite body 31 allowing the position of the optical telescope 32 relative to the satellite body 31 to vary with temperature changes. Configure equipment connections.
- the optical telescope 32 may be connected to the satellite body 31 by allowing the position of the optical telescope 32 relative to the satellite body 31 to change due to temperature changes.
- Both ends of the rod 45 are provided with diameter-reduced portions 46 having a smaller diameter.
- a portion of the rod 45 sandwiched between the diameter-reduced portions 46 is called a body portion.
- the reduced diameter portions 46 on both sides have the same shape.
- the cross section perpendicular to the axial direction of the rod 45 remains concentrically circular, and only the diameter decreases toward the end portion.
- the reduced diameter portion 46 increases in diameter toward the end of the rod 45 . Since the reduced diameter portion 46 is provided, the connection angle between the rod 45 and the projection 43 and the connection angle between the rod 45 and the projection 44 can be changed.
- the rods 45 can constitute a truss structure in which the connection angle of the rods can be changed. Sixteen rods 45 constitute a truss. The number of rods can be more or less than 16 rods.
- the cross section of the lens barrel does not have to be octagonal.
- the length of the rod 45 is set to an appropriate length so that there is a space between the pedestal 35 and the connection panel 33 even when the temperature changes.
- the pedestal 35, the connection panel 33, the projections 43 and 44 are provided with necessary and sufficient strength so as not to deform due to temperature changes.
- the reduced diameter portion 46 of the rod 45 bends slightly with respect to the body portion when there is a change in temperature.
- the material and shape of the rod 45 are manufactured so that necessary and sufficient strength can be obtained so as not to be damaged even when bent.
- connection panel 33 When the temperature rises due to the application of heat such as sunlight irradiation in outer space, the connection panel 33 expands more than the pedestal 35 .
- the diameter-reduced portion 46 of the rod 45 bends slightly, and the angle of the body portion of the rod 45 with respect to the connection panel 33 becomes small.
- the connection panel 33 contracts more than the pedestal 35 .
- the reduced diameter portion 46 of the rod 45 slightly bends in the opposite direction to the temperature increase, and the angle of the body portion of the rod 45 with respect to the connection panel 33 increases. In this manner, the rod 45 absorbs the difference in expansion or contraction due to the difference in thermal expansion coefficient between the connecting panel portion 33 and the base portion 35 .
- the rod 45 is made of a material having a coefficient of thermal expansion equal to or slightly smaller than that of the connection panel 33, the rod 45 itself expands and contracts, so the bending angle of the reduced diameter portion 46 of the rod 45 does not change. , can be made smaller than when the rod 45 is made of a low-expansion metal.
- optical devices 1 reflector (optical equipment) 2 Structural member (mirror support member) 2A Fixed part 3 Reflective surface 4 Supported part 5 Supported surface 6 Support substrate part (body part) 7 bearing portion 8 support opening portion 9 first support member 9A mirror support portion 9B first beam portion 10 second support member 10A support portion 10B second beam portion 10C connection portion 11 shaft holding hole 12 Y-axis member 13 cylindrical surface 14 X Axis rotation member 15 X-axis member 16 Mirror base member 20 honeycomb sandwich panel 21 first skin material 22 core material 23 second skin material 30 artificial satellite 31 satellite body 32 optical telescope (optical device) 33 Connection panel section 34 Incident port 35 Pedestal section (structural member) 36 lens barrel (structural member) 37 Lens barrel base 38 Lens barrel intermediate portion 39 Device holding portion 40 Optical path cylindrical portion 41 Slit (optical device) 42 Optical path 43 Protrusion (optical equipment connection part) 44 Protrusion (satellite connection) 45 rod (optical equipment connection part) 46 reduced diameter part LX optical axis CS central plane
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Abstract
Description
実施の形態1に係る光学装置について、図1から図6を参照して説明する。なお、実施の形態1に係る鏡支持機構は、実施の形態1に係る光学装置に含まれる機構である。実施の形態1に係る光学装置から、反射鏡1、または、反射鏡1および構造部材2を除いたものを実施の形態1に係る鏡支持機構と考えてもよい。また、実施の形態1に係る鏡支持機構は、第1支持部材9、または、第1支持部材9および第2支持部材10であると考えてもよい。なお、鏡支持機構は、鏡支持構造と呼ぶ場合がある。
(A)各鏡支持部9Aが同じ長さ(L0)である。
(B)各第1ビーム部9Bが同じ長さ(L1)である。
(C)各支持部10Aが同じ長さ(L2)である。
(D)各第2ビーム部10Bが同じ長さ(L3)である。
(E)接続部10Cが同じ長さ(L4)である。
(F)各第1支持部材9が同じ長さ(L0+2*L1)である。
(G)各第2支持部材10が同じ長さ(L2+2*L3)である。
(H)第1支持部材9と支持部10Aとが構成する第1の六角形状の各内角が120度である。
(J)第2支持部材10と接続部10Cとが構成する第2の六角形状の各内角が120度である。
(K)3個の鏡支持部9A、支持部10Aおよび接続部10Cの各組で、光軸垂直平面において、鏡支持部9Aの垂直二等分線、支持部10Aの垂直二等分線および接続部10Cの垂直二等分線が一致し、中心面CS上に存在する。
(L)光軸垂直平面において、支持部10Aと第1ビーム部9Bとがなす各角度(θ1)が120度である。
(M)光軸垂直平面において、接続部10Aと第2ビーム部10Bとがなす各角度(θ2)が120度である。
(B1)各鏡支持部9Aに対して、光軸LXを回転中心として反時計回り側で各鏡支持部9Aと接続する各第1ビーム部9Bが同じ長さ(L1A)である。
(B2)各鏡支持部9Aに対して、光軸LXを回転中心として時計回り側で各鏡支持部9Aと接続する各第1ビーム部9Bが同じ長さ(L1B≠L1A)である。
(D1)各支持部10Aに対して、光軸LXを回転中心として反時計回り側で各支持部10Aと接続する各第2ビーム部10Bが同じ長さ(L3A)である。
(D2)各支持部10Aに対して、光軸LXを回転中心として時計回り側で各支持部10Aと接続する各第2ビーム部10Bが同じ長さ(L3B≠L3A)である。
(N)光軸垂直平面において、各第1支持部材9の垂直二等分線上に光軸LXが存在する。
(P)光軸垂直平面において、各第2支持部材10の垂直二等分線上に光軸LXが存在する。
(Q)光軸垂直平面において、各接続部10Cの垂直二等分線上に光軸LXが存在する。
(R)光軸垂直平面において、光軸LXを回転中心として反時計回り側で各支持部10Aと接続する各第1ビーム部9Bと各支持部10Aとがなす角度が、同じ角度(θ1A)である。
(S)光軸垂直平面において、光軸LXを回転中心として時計回り側で各支持部10Aと接続する各第1ビーム部9Bと各支持部10Aとがなす角度が、同じ角度(θ1B≠θ1A)である。
(T)光軸垂直平面において、光軸LXを回転中心として反時計回り側で各接続部10Cと接続する各第2ビーム部10Bと各接続部10Cとがなす角度が、同じ角度(θ2A)である。
(U)光軸垂直平面において、光軸LXを回転中心として時計回り側で各接続部10Cと接続する各第2ビーム部10Bと各接続部10Cとがなす角度が、同じ角度(θ2B≠θ2A)である。
(V)L1A>L1Bである場合はL3A>L3B、θ1A>120度>θ1B、θ2A>120度>θ2Bである。L1A<L1Bである場合は、L3A<L3B、θ1A<120度<θ1B、θ2A<120度<θ2Bである。
(W)各第1ビーム部9Bの長さ(L1)が、各支持部10Aの長さ(L2)よりも長い(L1>L2)
(X)各第2ビーム部10Bの長さ(L3)が、各接続部10Cの長さ(L4)よりも長い(L3>L4)
CFRPを使用したハニカムサンドイッチパネルでは、繊維方向や層構造により剛性や熱膨張係数の性質が変化する。そのため、繊維方向や層構造を検討および調整した上でスキン材やコア材を製造する必要がある。結果として、CFRP製のハニカムサンドイッチパネルは、低膨張金属を使用する場合よりも、手間、時間およびコストの少なくとも1つが多くかかる。
とする。温度変化は、10[K]の上昇とする。
第1支持部材9および第2支持部材10は、加速度が加えられる状況でも反射鏡1を支持できる。打ち上げ時には、反射鏡1は、移動する方向に光軸LXが平行になる姿勢である。つまり、打ち上げ時の加速度は、反射鏡1の光軸LXに平行な方向に発生する。第1支持部材9の第1ビーム部9Bは、加速度が発生する方向に直角であり、加速度に対する応力を第1ビーム部9Bが発生することができる。
以上のことは、他の実施の形態にもあてはまる。
実施の形態2に係る人工衛星、すなわち、実施の形態2に係る光学装置を搭載した人工衛星を、図18から図20を参照して説明する。ここでいう光学装置は、例えば実施の形態1に係る光学装置である。図18は、実施の形態2に係る光学装置を搭載した人工衛星の正面図である。図19は、光学装置と人工衛星とが接続する部分の拡大図である。図20は、光学装置の内部構成を説明する概念的な断面図である。なお、実施の形態1に係る鏡支持機構(光学装置)は、光学望遠鏡32の望遠鏡構造の傾動機構という部分にある。傾動機構は主鏡を2軸周りに回転させて太陽面をスキャンする目的で設置される部材である。
ロッド45は、全部で16本になる。16本のロッド45、8個の突起43および8個の突起44は、衛星本体31に対する光学望遠鏡32の位置が温度変化によって変化することを許容して光学望遠鏡32を衛星本体31に接続する光学機器接続部を構成する。ロッド45による方法以外で、衛星本体31に対する光学望遠鏡32の位置が温度変化によって変化することを許容して光学望遠鏡32を衛星本体31に接続してもよい。
1 反射鏡(光学機器)
2 構造部材(鏡支持部材)
2A 固定部
3 反射面
4 被支持部
5 被支持面
6 支持基板部(本体部)
7 軸受部
8 支持開口部
9 第1支持部材
9A 鏡支持部
9B 第1ビーム部
10 第2支持部材
10A 支持部
10B 第2ビーム部
10C 接続部
11 軸保持穴
12 Y軸部材
13 円筒面
14 X軸回転部材
15 X軸部材
16 鏡基底部材
20 ハニカムサンドイッチパネル
21 第1スキン材
22 コア材
23 第2スキン材
30 人工衛星
31 衛星本体
32 光学望遠鏡(光学装置)
33 接続パネル部
34 入射口
35 台座部(構造部材)
36 鏡筒部(構造部材)
37 鏡筒基部
38 鏡筒中間部
39 機器保持部
40 光路円筒部
41 スリット(光学機器)
42 光路
43 突起(光学機器接続部)
44 突起(人工衛星接続部)
45 ロッド(光学機器接続部)
46 縮径部
LX 光軸
CS 中心面。
Claims (24)
- 光を反射する反射面と、前記反射面の反対側の面である背面に設けられた被支持部とを有する反射鏡の前記被支持部に、光軸の回りに120度の回転対称性を有して配置されて設けられた3個の被支持面のそれぞれと接触して前記被支持面を支持する鏡支持部と、前記鏡支持部の両側に接続された第1ビーム部とを有する3個の第1支持部材と、
隣接する2個の前記第1ビーム部の前記鏡支持部が接続しない側の端が接続された支持部と、前記支持部の両側に接続され、前記支持部が接続しない側の端が前記反射鏡の前記背面の側に存在する構造部材に支持される第2ビーム部とを有する3個の第2支持部材とを備えた鏡支持機構。 - 前記構造部材に設けられた3個の固定部にそれぞれ接続され、隣接する2個の前記第2ビーム部の前記支持部が接続しない側の端が接続された3個の接続部をさらに備えた請求項1に記載の鏡支持機構。
- 各前記接続部は同じ長さである請求項2に記載の鏡支持機構。
- 各前記第2ビーム部は同じ長さである、請求項1から請求項3のいずれか1項に記載の鏡支持機構。
- 各前記第2ビーム部は同じ長さであり、
前記第2ビーム部の長さは前記接続部の長さよりも長い、請求項3に記載の鏡支持機構。 - 前記第1支持部材は板材が接続した形状であり、
前記第2支持部材は板材が接続した形状であり、
前記鏡支持部の板厚は、前記鏡支持部と接続する部分での前記第1支持部材の板厚よりも厚く、
前記支持部の板厚は、前記支持部と接続する部分での前記第2支持部材の板厚よりも厚く、
前記接続部の板厚は、前記接続部と接続する部分での前記第2支持部材の板厚よりも厚い請求項2、請求項3、請求項5のいずれか1項に記載の鏡支持機構。 - 各鏡支持部は同じ長さであり、かつ各前記第1ビーム部は同じ長さであり、かつ各前記支持部は同じ長さである、請求項1から請求項6のいずれか1項に記載の鏡支持機構。
- 前記第1ビーム部の長さは前記支持部の長さよりも長い、請求項7に記載の鏡支持機構。
- 3個の前記第1支持部材および3個の前記支持部を前記光軸の方向から見た外形は、第1の六角形状である、請求項1から請求項8のいずれか1項に記載の鏡支持機構。
- 前記第1の六角形状では、すべての内角が同じ角度である、請求項9に記載の鏡支持機構。
- 3個の前記第1支持部材を前記光軸の方向から見た外形は、第2の六角形状である、請求項1から請求項10のいずれか1項に記載の鏡支持機構。
- 前記第2の六角形状では、すべての内角が同じ角度である六角形状である、請求項11に記載の鏡支持機構。
- 光を反射する反射面と、前記反射面の反対側の面である背面に設けられて、光軸の回りに120度の回転対称性を有して配置された3個の被支持面を有する被支持部とを有する反射鏡を支持する鏡支持機構において、
前記光軸に垂直な平面である光軸垂直平面において第1の長さの辺と第2の長さの辺とが交互に隣接する六角形状の外形を有し、各前記第1の長さの辺の中央部に形成された鏡支持部で前記被支持面と接触して前記被支持面を支持する3個の第1支持部材と、
前記光軸垂直平面において第3の長さの辺と第4の長さの辺とが交互に隣接する六角形状の外形を有し、各前記第3の長さの辺の中央部に形成された支持部が前記第1支持部材の前記第2の長さの辺に接続して前記第1支持部材を支持し、各前記第4の長さの辺に形成された3個の接続部が前記反射鏡の前記背面の側に存在する構造部材に接続される第2支持部材とを備えた鏡支持機構。 - 前記第1支持部材は、一端が前記鏡支持部に接続され、他端が前記支持部に接続された第1ビーム部を備え、
前記第2支持部材は、一端が前記支持部に接続され、他端が前記接続部に接続された第2ビーム部を備えた請求項13に記載の鏡支持機構。 - 前記被支持部は、外形が円筒状の突起である請求項1から請求項14のいずれか1項に記載の鏡支持機構。
- 前記被支持面は、前記光軸に平行な平面である請求項1から請求項15のいずれか1項に記載の鏡支持機構。
- 前記構造部材をさらに備えた請求項1から請求項16のいずれか1項に記載の鏡支持機構。
- 前記第2支持部材は前記構造部材と一体に形成された請求項17に記載の鏡支持機構。
- 前記第1支持部材および第2支持部材は一体に形成された請求項1から請求項18のいずれか1項に記載の鏡支持機構。
- 前記構造部材は、前記被支持部が入る穴を有する請求項17から請求項19のいずれか1項に記載の鏡支持機構。
- 前記第1支持部材は、前記鏡支持部が前記反射鏡の径方向に移動可能な構造を有し、
前記第2支持部材は、前記支持部が前記反射鏡の径方向に移動可能な構造を有する請求項1から請求項20のいずれか1項に記載の鏡支持機構。 - 請求項1から請求項21のいずれか1項に記載の鏡支持機構と、前記反射鏡とを備えた光学装置。
- 前記被支持部は、外形が円筒状の突起である請求項22に記載の光学装置。
- 前記被支持面は、前記突起に形成され、前記光軸に平行な平面である請求項23に記載の光学装置。
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Citations (3)
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JP2002350699A (ja) * | 2001-03-30 | 2002-12-04 | Carl Zeiss Semiconductor Manufacturing Technologies Ag | 光学部材を光学システムに取り付けるための装置 |
CN102200623A (zh) * | 2011-06-20 | 2011-09-28 | 北京空间机电研究所 | 小口径微晶玻璃材料反射镜微应力装配柔性支撑方法 |
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JP2002350699A (ja) * | 2001-03-30 | 2002-12-04 | Carl Zeiss Semiconductor Manufacturing Technologies Ag | 光学部材を光学システムに取り付けるための装置 |
CN102200623A (zh) * | 2011-06-20 | 2011-09-28 | 北京空间机电研究所 | 小口径微晶玻璃材料反射镜微应力装配柔性支撑方法 |
WO2020122196A1 (ja) * | 2018-12-13 | 2020-06-18 | 三菱電機株式会社 | 光学装置 |
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US20240085663A1 (en) | 2024-03-14 |
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