JP2000081636A - 電気光学装置及びその製造方法並びに電子機器 - Google Patents
電気光学装置及びその製造方法並びに電子機器Info
- Publication number
- JP2000081636A JP2000081636A JP25012898A JP25012898A JP2000081636A JP 2000081636 A JP2000081636 A JP 2000081636A JP 25012898 A JP25012898 A JP 25012898A JP 25012898 A JP25012898 A JP 25012898A JP 2000081636 A JP2000081636 A JP 2000081636A
- Authority
- JP
- Japan
- Prior art keywords
- electro
- optical device
- substrate
- region
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 239000000758 substrate Substances 0.000 claims abstract description 188
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- 238000005530 etching Methods 0.000 claims description 38
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
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- 102000004129 N-Type Calcium Channels Human genes 0.000 description 1
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- 229910019142 PO4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 101100214491 Solanum lycopersicum TFT3 gene Proteins 0.000 description 1
- GDFCWFBWQUEQIJ-UHFFFAOYSA-N [B].[P] Chemical compound [B].[P] GDFCWFBWQUEQIJ-UHFFFAOYSA-N 0.000 description 1
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- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
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- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
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- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25012898A JP2000081636A (ja) | 1998-09-03 | 1998-09-03 | 電気光学装置及びその製造方法並びに電子機器 |
| US09/216,872 US6433841B1 (en) | 1997-12-19 | 1998-12-21 | Electro-optical apparatus having faces holding electro-optical material in between flattened by using concave recess, manufacturing method thereof, and electronic device using same |
| US10/153,804 US6611301B2 (en) | 1997-12-19 | 2002-05-24 | Electro-optical apparatus having faces holding electro-optical material in between flattened by using concave recess, manufacturing method thereof, and electronic device using same |
| US10/394,178 US6897932B2 (en) | 1997-12-19 | 2003-03-24 | Electro-optical device having a concave recess formed above a substrate in correspondence with a plurality of wirings and an electro-optical apparatus having same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25012898A JP2000081636A (ja) | 1998-09-03 | 1998-09-03 | 電気光学装置及びその製造方法並びに電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003209418A Division JP3855976B2 (ja) | 2003-08-28 | 2003-08-28 | 電気光学装置及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000081636A true JP2000081636A (ja) | 2000-03-21 |
| JP2000081636A5 JP2000081636A5 (enExample) | 2004-09-09 |
Family
ID=17203253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25012898A Pending JP2000081636A (ja) | 1997-12-19 | 1998-09-03 | 電気光学装置及びその製造方法並びに電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000081636A (enExample) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003295218A (ja) * | 2002-04-04 | 2003-10-15 | Advanced Display Inc | 表示装置 |
| US7075704B2 (en) | 2003-03-19 | 2006-07-11 | Seiko Epson Corporation | Test-element-provided substrate, method of manufacturing the same, substrate for electro-optical device, electro-optical device, and electronic apparatus |
| US7095550B2 (en) | 2003-03-13 | 2006-08-22 | Seiko Epson Corporation | Substrate having a planarization layer and method of manufacture therefor, substrate for electro-optical device, electro-optical device, and electronic apparatus |
| US7098979B2 (en) | 2003-02-04 | 2006-08-29 | Seiko Epson Corporation | Electro-optical device and electronic apparatus comprising convex and projected portions formed in the alignment film at the periphery of the image display area |
| JP2006250985A (ja) * | 2005-03-08 | 2006-09-21 | Sanyo Epson Imaging Devices Corp | 電気光学装置及び電子機器 |
| KR100806896B1 (ko) * | 2001-07-18 | 2008-02-22 | 삼성전자주식회사 | 액정 표시 장치 |
| US7483090B2 (en) | 2004-07-27 | 2009-01-27 | Samsung Electronics Co., Ltd. | Liquid crystal display having first and second subpixel electrodes connected to coupling electrode through respective contact holes and third subpixel electrode separated from the first two but capacitively coupled thereto |
| US7511793B2 (en) | 2001-07-18 | 2009-03-31 | Samsung Electronics Co., Ltd. | Liquid crystal display having additional signal lines to define additional pixel regions |
| WO2009128179A1 (ja) * | 2008-04-17 | 2009-10-22 | シャープ株式会社 | Ｔｆｔアレイ基板、及び、液晶表示装置 |
| JP2011203289A (ja) * | 2010-03-24 | 2011-10-13 | Seiko Epson Corp | 液晶装置および電子機器 |
| US8125607B2 (en) | 2006-04-25 | 2012-02-28 | Seiko Epson Corporation | Electro optical device and electronic apparatus equipped with the same |
| JP2013182274A (ja) * | 2012-03-02 | 2013-09-12 | Lg Display Co Ltd | 液晶表示装置 |
| CN104885006A (zh) * | 2012-08-20 | 2015-09-02 | 弗莱克因艾伯勒有限公司 | 在光学正面的公共电极和相反的背面的电接触部分之间形成导电连接 |
| CN113658970A (zh) * | 2015-04-02 | 2021-11-16 | 松下知识产权经营株式会社 | 摄像装置 |
Citations (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5672421A (en) * | 1979-11-19 | 1981-06-16 | Matsushita Electric Ind Co Ltd | Liquid-crystal display panel |
| JPS5948735A (ja) * | 1982-09-13 | 1984-03-21 | Hitachi Ltd | 液晶表示装置 |
| JPS63235983A (ja) * | 1987-03-24 | 1988-09-30 | 富士通株式会社 | 薄膜トランジスタパネルの製造方法 |
| JPS6481262A (en) * | 1987-09-22 | 1989-03-27 | Seiko Epson Corp | Active matrix substrate |
| JPH0418525A (ja) * | 1990-05-14 | 1992-01-22 | Matsushita Electron Corp | 液晶表示装置およびその製造方法 |
| JPH0490514A (ja) * | 1990-08-02 | 1992-03-24 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| JPH04180031A (ja) * | 1990-11-15 | 1992-06-26 | Matsushita Electric Ind Co Ltd | 液晶表示装置 |
| JPH04305625A (ja) * | 1991-04-03 | 1992-10-28 | Sony Corp | 液晶表示装置 |
| JPH04324938A (ja) * | 1991-04-25 | 1992-11-13 | Stanley Electric Co Ltd | 薄膜トランジスタとその製造方法 |
| JPH04367828A (ja) * | 1991-06-17 | 1992-12-21 | Sharp Corp | アクティブマトリクス基板の製造方法 |
| JPH0534709A (ja) * | 1991-07-25 | 1993-02-12 | Sony Corp | 液晶表示装置 |
| JPH0561071A (ja) * | 1991-09-04 | 1993-03-12 | Sony Corp | 液晶表示装置 |
| JPH05114613A (ja) * | 1991-10-23 | 1993-05-07 | Kyocera Corp | アクテイブマトリツクス基板およびその製造方法 |
| JPH05265040A (ja) * | 1992-03-18 | 1993-10-15 | Sanyo Electric Co Ltd | 液晶表示装置およびその製造方法 |
| JPH05265034A (ja) * | 1992-03-17 | 1993-10-15 | Sharp Corp | 溝付きガラス基板 |
| JPH05297413A (ja) * | 1991-12-19 | 1993-11-12 | Sony Corp | 液晶表示装置 |
| JPH0627492A (ja) * | 1992-07-07 | 1994-02-04 | Sony Corp | アクティブマトリクス基板 |
| JPH0667207A (ja) * | 1992-08-20 | 1994-03-11 | Seiko Epson Corp | 液晶表示装置 |
| JPH0675248A (ja) * | 1992-06-30 | 1994-03-18 | Sony Corp | アクティブマトリクス基板 |
| JPH0697197A (ja) * | 1992-09-10 | 1994-04-08 | Sharp Corp | 薄膜トランジスタおよびその製造方法 |
| JPH06130418A (ja) * | 1992-10-21 | 1994-05-13 | Seiko Epson Corp | アクティブマトリクス基板 |
| JPH06163584A (ja) * | 1992-11-18 | 1994-06-10 | Nippon Sheet Glass Co Ltd | 薄膜トランジスタの製造方法 |
| JPH06342171A (ja) * | 1993-06-02 | 1994-12-13 | Kodo Eizo Gijutsu Kenkyusho:Kk | アクティブマトリクス基板とその製造方法 |
| JPH0710728U (ja) * | 1993-07-21 | 1995-02-14 | ローム株式会社 | 液晶表示装置 |
| JPH07168168A (ja) * | 1993-12-16 | 1995-07-04 | Matsushita Electron Corp | 液晶表示装置 |
| JPH07270819A (ja) * | 1994-03-28 | 1995-10-20 | Casio Comput Co Ltd | 薄膜トランジスタパネル |
| JPH10213813A (ja) * | 1997-01-29 | 1998-08-11 | Sony Corp | 液晶表示装置およびその製造方法 |
-
1998
- 1998-09-03 JP JP25012898A patent/JP2000081636A/ja active Pending
Patent Citations (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5672421A (en) * | 1979-11-19 | 1981-06-16 | Matsushita Electric Ind Co Ltd | Liquid-crystal display panel |
| JPS5948735A (ja) * | 1982-09-13 | 1984-03-21 | Hitachi Ltd | 液晶表示装置 |
| JPS63235983A (ja) * | 1987-03-24 | 1988-09-30 | 富士通株式会社 | 薄膜トランジスタパネルの製造方法 |
| JPS6481262A (en) * | 1987-09-22 | 1989-03-27 | Seiko Epson Corp | Active matrix substrate |
| JPH0418525A (ja) * | 1990-05-14 | 1992-01-22 | Matsushita Electron Corp | 液晶表示装置およびその製造方法 |
| JPH0490514A (ja) * | 1990-08-02 | 1992-03-24 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| JPH04180031A (ja) * | 1990-11-15 | 1992-06-26 | Matsushita Electric Ind Co Ltd | 液晶表示装置 |
| JPH04305625A (ja) * | 1991-04-03 | 1992-10-28 | Sony Corp | 液晶表示装置 |
| JPH04324938A (ja) * | 1991-04-25 | 1992-11-13 | Stanley Electric Co Ltd | 薄膜トランジスタとその製造方法 |
| JPH04367828A (ja) * | 1991-06-17 | 1992-12-21 | Sharp Corp | アクティブマトリクス基板の製造方法 |
| JPH0534709A (ja) * | 1991-07-25 | 1993-02-12 | Sony Corp | 液晶表示装置 |
| JPH0561071A (ja) * | 1991-09-04 | 1993-03-12 | Sony Corp | 液晶表示装置 |
| JPH05114613A (ja) * | 1991-10-23 | 1993-05-07 | Kyocera Corp | アクテイブマトリツクス基板およびその製造方法 |
| JPH05297413A (ja) * | 1991-12-19 | 1993-11-12 | Sony Corp | 液晶表示装置 |
| JPH05265034A (ja) * | 1992-03-17 | 1993-10-15 | Sharp Corp | 溝付きガラス基板 |
| JPH05265040A (ja) * | 1992-03-18 | 1993-10-15 | Sanyo Electric Co Ltd | 液晶表示装置およびその製造方法 |
| JPH0675248A (ja) * | 1992-06-30 | 1994-03-18 | Sony Corp | アクティブマトリクス基板 |
| JPH0627492A (ja) * | 1992-07-07 | 1994-02-04 | Sony Corp | アクティブマトリクス基板 |
| JPH0667207A (ja) * | 1992-08-20 | 1994-03-11 | Seiko Epson Corp | 液晶表示装置 |
| JPH0697197A (ja) * | 1992-09-10 | 1994-04-08 | Sharp Corp | 薄膜トランジスタおよびその製造方法 |
| JPH06130418A (ja) * | 1992-10-21 | 1994-05-13 | Seiko Epson Corp | アクティブマトリクス基板 |
| JPH06163584A (ja) * | 1992-11-18 | 1994-06-10 | Nippon Sheet Glass Co Ltd | 薄膜トランジスタの製造方法 |
| JPH06342171A (ja) * | 1993-06-02 | 1994-12-13 | Kodo Eizo Gijutsu Kenkyusho:Kk | アクティブマトリクス基板とその製造方法 |
| JPH0710728U (ja) * | 1993-07-21 | 1995-02-14 | ローム株式会社 | 液晶表示装置 |
| JPH07168168A (ja) * | 1993-12-16 | 1995-07-04 | Matsushita Electron Corp | 液晶表示装置 |
| JPH07270819A (ja) * | 1994-03-28 | 1995-10-20 | Casio Comput Co Ltd | 薄膜トランジスタパネル |
| JPH10213813A (ja) * | 1997-01-29 | 1998-08-11 | Sony Corp | 液晶表示装置およびその製造方法 |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7511793B2 (en) | 2001-07-18 | 2009-03-31 | Samsung Electronics Co., Ltd. | Liquid crystal display having additional signal lines to define additional pixel regions |
| KR100806896B1 (ko) * | 2001-07-18 | 2008-02-22 | 삼성전자주식회사 | 액정 표시 장치 |
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