IT1074053B - Sistema per convogliare in modo prestabilito,pezzi,quali wafer semiconduttori - Google Patents

Sistema per convogliare in modo prestabilito,pezzi,quali wafer semiconduttori

Info

Publication number
IT1074053B
IT1074053B IT26822/76A IT2682276A IT1074053B IT 1074053 B IT1074053 B IT 1074053B IT 26822/76 A IT26822/76 A IT 26822/76A IT 2682276 A IT2682276 A IT 2682276A IT 1074053 B IT1074053 B IT 1074053B
Authority
IT
Italy
Prior art keywords
conveying
pieces
semiconductor wafers
preset way
preset
Prior art date
Application number
IT26822/76A
Other languages
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1074053B publication Critical patent/IT1074053B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
IT26822/76A 1975-10-01 1976-09-03 Sistema per convogliare in modo prestabilito,pezzi,quali wafer semiconduttori IT1074053B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/618,654 US3976330A (en) 1975-10-01 1975-10-01 Transport system for semiconductor wafer multiprocessing station system

Publications (1)

Publication Number Publication Date
IT1074053B true IT1074053B (it) 1985-04-17

Family

ID=24478582

Family Applications (1)

Application Number Title Priority Date Filing Date
IT26822/76A IT1074053B (it) 1975-10-01 1976-09-03 Sistema per convogliare in modo prestabilito,pezzi,quali wafer semiconduttori

Country Status (8)

Country Link
US (1) US3976330A (it)
JP (1) JPS5244177A (it)
BR (1) BR7606592A (it)
CA (1) CA1049158A (it)
DE (1) DE2644055A1 (it)
FR (1) FR2345373A1 (it)
GB (1) GB1555673A (it)
IT (1) IT1074053B (it)

Families Citing this family (91)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4211505A (en) * 1975-10-01 1980-07-08 International Business Machines Corporation Fluidic transport intersection
US4027246A (en) * 1976-03-26 1977-05-31 International Business Machines Corporation Automated integrated circuit manufacturing system
US4278366A (en) * 1977-03-18 1981-07-14 Gca Corporation Automatic wafer processing system and method
US4178113A (en) * 1977-12-05 1979-12-11 Macronetics, Inc. Buffer storage apparatus for semiconductor wafer processing
US4203510A (en) * 1978-06-05 1980-05-20 Gte Automatic Electric Laboratories Incorporated Pneumatic diverter for hybrid thick film substrate processing equipment
US4347022A (en) * 1978-10-02 1982-08-31 Precision Metal Fabricators, Inc. Air table system
JPS5846170B2 (ja) * 1979-09-20 1983-10-14 株式会社東芝 半導体ウェファ−の搬送方法および搬送装置
US4293249A (en) * 1980-03-03 1981-10-06 Texas Instruments Incorporated Material handling system and method for manufacturing line
US4348139A (en) * 1980-04-30 1982-09-07 International Business Machines Corp. Gas film wafer transportation system
US4395165A (en) * 1980-12-19 1983-07-26 International Business Machine Corp. Chip shuttle track
NL8103979A (nl) * 1981-08-26 1983-03-16 Bok Edward Methode en inrichting voor het aanbrengen van een film vloeibaar medium op een substraat.
AT382808B (de) * 1982-03-05 1987-04-10 Sticht Fertigungstech Stiwa Einrichtung zum montieren bzw. bearbeiten von werkstuecken
JPS5981034U (ja) * 1982-11-22 1984-05-31 日立プラント建設株式会社 ウエハ搬送装置
US4622918A (en) * 1983-01-31 1986-11-18 Integrated Automation Limited Module for high vacuum processing
NL8300648A (nl) * 1983-02-21 1984-09-17 Integrated Automation Floating transportbaan voor substraten.
JPS59138235U (ja) * 1983-03-04 1984-09-14 株式会社不二越 シリコンウエ−ハの搬送装置
US4668484A (en) * 1984-02-13 1987-05-26 Elliott David J Transport containers for semiconductor wafers
US4821866A (en) * 1987-12-24 1989-04-18 Despatch Industries, Inc. Conveyor for a clean room
US4938636A (en) * 1988-11-14 1990-07-03 Aidlin Automation Corp. Method and apparatus for feeding container bodies
US5331458A (en) * 1989-09-11 1994-07-19 Kensington Laboratories, Inc. Compact specimen inspection station
US5022164A (en) * 1989-11-29 1991-06-11 A/S Niro Atomizer Fluid bed dryer
US5089441A (en) * 1990-04-16 1992-02-18 Texas Instruments Incorporated Low-temperature in-situ dry cleaning process for semiconductor wafers
US5209387A (en) * 1990-09-20 1993-05-11 Eastman Kodak Company Gas film conveyor for elongated strips of web material
GB2275903A (en) * 1992-04-30 1994-09-14 Brian Edwin Jones Load sensing and conveying system
US5788425A (en) * 1992-07-15 1998-08-04 Imation Corp. Flexible system for handling articles
US5470420A (en) * 1992-07-31 1995-11-28 Eastman Kodak Company Apparatus for label application using Bernoulli Effect
US5442828A (en) * 1992-11-30 1995-08-22 Ontrak Systems, Inc. Double-sided wafer scrubber with a wet submersing silicon wafer indexer
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions
US5403434A (en) * 1994-01-06 1995-04-04 Texas Instruments Incorporated Low-temperature in-situ dry cleaning process for semiconductor wafer
JP2509466B2 (ja) * 1994-12-21 1996-06-19 ヤンマー農機株式会社 田植機の苗載台下端部構造
US6075924A (en) * 1995-01-13 2000-06-13 University Of Southern California Intelligent motion surface
JPH10116875A (ja) * 1996-10-08 1998-05-06 Mitsubishi Electric Corp 半導体製造システム
US6432203B1 (en) * 1997-03-17 2002-08-13 Applied Komatsu Technology, Inc. Heated and cooled vacuum chamber shield
US6235634B1 (en) * 1997-10-08 2001-05-22 Applied Komatsu Technology, Inc. Modular substrate processing system
US6176668B1 (en) 1998-05-20 2001-01-23 Applied Komatsu Technology, Inc. In-situ substrate transfer shuttle
US6213704B1 (en) 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Method and apparatus for substrate transfer and processing
US6517303B1 (en) 1998-05-20 2003-02-11 Applied Komatsu Technology, Inc. Substrate transfer shuttle
US6206176B1 (en) 1998-05-20 2001-03-27 Applied Komatsu Technology, Inc. Substrate transfer shuttle having a magnetic drive
US6215897B1 (en) 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Automated substrate processing system
US6533101B2 (en) 1998-06-24 2003-03-18 Asyst Technologies, Inc. Integrated transport carrier and conveyor system
US6223886B1 (en) 1998-06-24 2001-05-01 Asyst Technologies, Inc. Integrated roller transport pod and asynchronous conveyor
US6435330B1 (en) 1998-12-18 2002-08-20 Asyai Technologies, Inc. In/out load port transfer mechanism
US6308818B1 (en) 1999-08-02 2001-10-30 Asyst Technologies, Inc. Transport system with integrated transport carrier and directors
US6298685B1 (en) 1999-11-03 2001-10-09 Applied Materials, Inc. Consecutive deposition system
US6949143B1 (en) * 1999-12-15 2005-09-27 Applied Materials, Inc. Dual substrate loadlock process equipment
DE60112563T2 (de) * 2000-04-13 2006-06-01 Nanophotonics Ag Modulares messsystem für substrate
TW512421B (en) * 2000-09-15 2002-12-01 Applied Materials Inc Double dual slot load lock for process equipment
US7316966B2 (en) * 2001-09-21 2008-01-08 Applied Materials, Inc. Method for transferring substrates in a load lock chamber
DE10157703B4 (de) * 2001-11-24 2004-05-06 Weidenmüller, Ralf Vorrichtung zum gleichzeitigen Fördern und Temperieren von Formteilen
US7988398B2 (en) 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus
US7959395B2 (en) * 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
US6854948B1 (en) 2002-08-15 2005-02-15 Nanometrics Incorporated Stage with two substrate buffer station
US6990721B2 (en) * 2003-03-21 2006-01-31 Brooks Automation, Inc. Growth model automated material handling system
US7288465B2 (en) * 2003-04-15 2007-10-30 International Business Machines Corpoartion Semiconductor wafer front side protection
US7001827B2 (en) * 2003-04-15 2006-02-21 International Business Machines Corporation Semiconductor wafer front side protection
KR100956348B1 (ko) * 2003-09-05 2010-05-06 삼성전자주식회사 인라인 반송 시스템
US7207766B2 (en) * 2003-10-20 2007-04-24 Applied Materials, Inc. Load lock chamber for large area substrate processing system
US20050113976A1 (en) 2003-11-10 2005-05-26 Blueshift Technologies, Inc. Software controller for handling system
US7497414B2 (en) * 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
JP5291281B2 (ja) * 2004-06-28 2013-09-18 株式会社渡辺商行 浮上搬送装置及び浮上搬送方法
JP4583882B2 (ja) * 2004-11-05 2010-11-17 シーケーディ株式会社 非接触支持装置
JP4396847B2 (ja) * 2004-12-22 2010-01-13 Ｓｍｃ株式会社 除電装置付きエア浮上装置及び該浮上装置における除電方法
US7513822B2 (en) 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US9339900B2 (en) 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US9159592B2 (en) 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US9059227B2 (en) 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
US20070006936A1 (en) * 2005-07-07 2007-01-11 Applied Materials, Inc. Load lock chamber with substrate temperature regulation
JP4525514B2 (ja) * 2005-08-01 2010-08-18 パナソニック株式会社 バルクフィーダおよび電子部品実装装置
WO2007025199A2 (en) * 2005-08-26 2007-03-01 Flitsch Frederick A Multi-level cleanspace fabricator elevator system
WO2007035423A2 (en) 2005-09-18 2007-03-29 Flitsch Frederick A Method and apparatus for vertically orienting substrate processing tools in a clean space
US7845891B2 (en) * 2006-01-13 2010-12-07 Applied Materials, Inc. Decoupled chamber body
US7665951B2 (en) * 2006-06-02 2010-02-23 Applied Materials, Inc. Multiple slot load lock chamber and method of operation
US7845618B2 (en) 2006-06-28 2010-12-07 Applied Materials, Inc. Valve door with ball coupling
US8124907B2 (en) * 2006-08-04 2012-02-28 Applied Materials, Inc. Load lock chamber with decoupled slit valve door seal compartment
NL2000203C2 (nl) * 2006-08-29 2008-03-03 Univ Delft Tech Product-draag en -transportinrichting.
JP2010533970A (ja) * 2007-07-19 2010-10-28 セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト 平面状の基板用の非接触型搬送装置
US20090199901A1 (en) * 2008-02-08 2009-08-13 Applied Materials, Inc. Photovoltaic device comprising a sputter deposited passivation layer as well as a method and apparatus for producing such a device
CN102084460A (zh) * 2008-05-30 2011-06-01 奥塔装置公司 用于化学气相沉积反应器的方法和设备
US8602706B2 (en) * 2009-08-17 2013-12-10 Brooks Automation, Inc. Substrate processing apparatus
JP5591562B2 (ja) * 2010-03-10 2014-09-17 日本発條株式会社 位置決め装置
JP5591563B2 (ja) * 2010-03-10 2014-09-17 日本発條株式会社 位置確認装置
JP2014010862A (ja) * 2012-06-29 2014-01-20 Fujitsu Ltd ライブラリ装置
JP6303167B2 (ja) * 2013-11-07 2018-04-04 昭和電工株式会社 インライン式成膜装置及びそれを用いた磁気記録媒体の製造方法
US10332770B2 (en) * 2014-09-24 2019-06-25 Sandisk Technologies Llc Wafer transfer system
US10373858B2 (en) 2016-04-06 2019-08-06 Lam Research Corporation Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal
KR101839345B1 (ko) * 2016-10-27 2018-03-16 세메스 주식회사 기판 플로팅 장치 및 기판 플로팅 방법
US9889995B1 (en) * 2017-03-15 2018-02-13 Core Flow Ltd. Noncontact support platform with blockage detection

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2678237A (en) * 1948-09-13 1954-05-11 Svenska Flaektfabriken Ab Device for supporting and conveying materials
US3210124A (en) * 1963-09-23 1965-10-05 Gen Motors Corp Air feed conveyor
US3717381A (en) * 1969-07-25 1973-02-20 Texas Instruments Inc Transporting and positioning system
US3603646A (en) * 1970-01-26 1971-09-07 Ibm Semiconductor wafer air slide with controlled wafer motion
US3889355A (en) * 1973-02-05 1975-06-17 Ibm Continuous processing system
US3845286A (en) * 1973-02-05 1974-10-29 Ibm Manufacturing control system for processing workpieces
JPS501639A (it) * 1973-05-07 1975-01-09
JPS501637A (it) * 1973-05-07 1975-01-09
JPS5021342A (it) * 1973-06-25 1975-03-06
JPS5051671A (it) * 1973-09-07 1975-05-08
JPS5066174A (it) * 1973-10-12 1975-06-04

Also Published As

Publication number Publication date
GB1555673A (en) 1979-11-14
BR7606592A (pt) 1977-07-05
JPS5410829B2 (it) 1979-05-10
FR2345373A1 (fr) 1977-10-21
DE2644055A1 (de) 1977-04-14
FR2345373B1 (it) 1980-10-17
US3976330A (en) 1976-08-24
JPS5244177A (en) 1977-04-06
CA1049158A (en) 1979-02-20

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