FR2345373A1 - Systeme de transport de pastilles semi-conductrices dans un dispositif a stations de multi-traitement - Google Patents

Systeme de transport de pastilles semi-conductrices dans un dispositif a stations de multi-traitement

Info

Publication number
FR2345373A1
FR2345373A1 FR7623754A FR7623754A FR2345373A1 FR 2345373 A1 FR2345373 A1 FR 2345373A1 FR 7623754 A FR7623754 A FR 7623754A FR 7623754 A FR7623754 A FR 7623754A FR 2345373 A1 FR2345373 A1 FR 2345373A1
Authority
FR
France
Prior art keywords
station device
transport system
processing station
semiconductor pellets
pellets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7623754A
Other languages
English (en)
Other versions
FR2345373B1 (fr
Inventor
John P Babinski
Bruce I Bertelsen
Karl H Raacke
Valdeko H Sirgo
Clarence J Townsend
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2345373A1 publication Critical patent/FR2345373A1/fr
Application granted granted Critical
Publication of FR2345373B1 publication Critical patent/FR2345373B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
FR7623754A 1975-10-01 1976-07-28 Systeme de transport de pastilles semi-conductrices dans un dispositif a stations de multi-traitement Granted FR2345373A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/618,654 US3976330A (en) 1975-10-01 1975-10-01 Transport system for semiconductor wafer multiprocessing station system

Publications (2)

Publication Number Publication Date
FR2345373A1 true FR2345373A1 (fr) 1977-10-21
FR2345373B1 FR2345373B1 (fr) 1980-10-17

Family

ID=24478582

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7623754A Granted FR2345373A1 (fr) 1975-10-01 1976-07-28 Systeme de transport de pastilles semi-conductrices dans un dispositif a stations de multi-traitement

Country Status (8)

Country Link
US (1) US3976330A (fr)
JP (1) JPS5244177A (fr)
BR (1) BR7606592A (fr)
CA (1) CA1049158A (fr)
DE (1) DE2644055A1 (fr)
FR (1) FR2345373A1 (fr)
GB (1) GB1555673A (fr)
IT (1) IT1074053B (fr)

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Also Published As

Publication number Publication date
IT1074053B (it) 1985-04-17
BR7606592A (pt) 1977-07-05
CA1049158A (fr) 1979-02-20
DE2644055A1 (de) 1977-04-14
GB1555673A (en) 1979-11-14
JPS5244177A (en) 1977-04-06
US3976330A (en) 1976-08-24
JPS5410829B2 (fr) 1979-05-10
FR2345373B1 (fr) 1980-10-17

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Legal Events

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