BR7606592A - Sistema de transporte - Google Patents

Sistema de transporte

Info

Publication number
BR7606592A
BR7606592A BR7606592A BR7606592A BR7606592A BR 7606592 A BR7606592 A BR 7606592A BR 7606592 A BR7606592 A BR 7606592A BR 7606592 A BR7606592 A BR 7606592A BR 7606592 A BR7606592 A BR 7606592A
Authority
BR
Brazil
Prior art keywords
transport system
transport
Prior art date
Application number
BR7606592A
Other languages
English (en)
Inventor
K Raacke
J Babinski
B Bertelsen
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of BR7606592A publication Critical patent/BR7606592A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
BR7606592A 1975-10-01 1976-10-01 Sistema de transporte BR7606592A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/618,654 US3976330A (en) 1975-10-01 1975-10-01 Transport system for semiconductor wafer multiprocessing station system

Publications (1)

Publication Number Publication Date
BR7606592A true BR7606592A (pt) 1977-07-05

Family

ID=24478582

Family Applications (1)

Application Number Title Priority Date Filing Date
BR7606592A BR7606592A (pt) 1975-10-01 1976-10-01 Sistema de transporte

Country Status (8)

Country Link
US (1) US3976330A (pt)
JP (1) JPS5244177A (pt)
BR (1) BR7606592A (pt)
CA (1) CA1049158A (pt)
DE (1) DE2644055A1 (pt)
FR (1) FR2345373A1 (pt)
GB (1) GB1555673A (pt)
IT (1) IT1074053B (pt)

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US5403434A (en) * 1994-01-06 1995-04-04 Texas Instruments Incorporated Low-temperature in-situ dry cleaning process for semiconductor wafer
JP2509466B2 (ja) * 1994-12-21 1996-06-19 ヤンマー農機株式会社 田植機の苗載台下端部構造
US6075924A (en) * 1995-01-13 2000-06-13 University Of Southern California Intelligent motion surface
JPH10116875A (ja) * 1996-10-08 1998-05-06 Mitsubishi Electric Corp 半導体製造システム
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US6235634B1 (en) 1997-10-08 2001-05-22 Applied Komatsu Technology, Inc. Modular substrate processing system
US6176668B1 (en) 1998-05-20 2001-01-23 Applied Komatsu Technology, Inc. In-situ substrate transfer shuttle
US6206176B1 (en) 1998-05-20 2001-03-27 Applied Komatsu Technology, Inc. Substrate transfer shuttle having a magnetic drive
US6215897B1 (en) 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Automated substrate processing system
US6517303B1 (en) 1998-05-20 2003-02-11 Applied Komatsu Technology, Inc. Substrate transfer shuttle
US6213704B1 (en) 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Method and apparatus for substrate transfer and processing
US6223886B1 (en) 1998-06-24 2001-05-01 Asyst Technologies, Inc. Integrated roller transport pod and asynchronous conveyor
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US6481558B1 (en) * 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
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US6949143B1 (en) * 1999-12-15 2005-09-27 Applied Materials, Inc. Dual substrate loadlock process equipment
EP1273031B1 (en) * 2000-04-13 2005-08-10 NanoPhotonics AG Modular substrate measurement system
JP2004523880A (ja) * 2000-09-15 2004-08-05 アプライド　マテリアルズ　インコーポレイテッド 処理装置用ダブル二重スロット式ロードロック
US7316966B2 (en) * 2001-09-21 2008-01-08 Applied Materials, Inc. Method for transferring substrates in a load lock chamber
DE10157703B4 (de) * 2001-11-24 2004-05-06 Weidenmüller, Ralf Vorrichtung zum gleichzeitigen Fördern und Temperieren von Formteilen
US7959395B2 (en) * 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
US7988398B2 (en) 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus
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US6990721B2 (en) * 2003-03-21 2006-01-31 Brooks Automation, Inc. Growth model automated material handling system
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KR100956348B1 (ko) * 2003-09-05 2010-05-06 삼성전자주식회사 인라인 반송 시스템
US7207766B2 (en) * 2003-10-20 2007-04-24 Applied Materials, Inc. Load lock chamber for large area substrate processing system
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US7497414B2 (en) * 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
JP5291281B2 (ja) * 2004-06-28 2013-09-18 株式会社渡辺商行 浮上搬送装置及び浮上搬送方法
JP4583882B2 (ja) * 2004-11-05 2010-11-17 シーケーディ株式会社 非接触支持装置
JP4396847B2 (ja) * 2004-12-22 2010-01-13 Ｓｍｃ株式会社 除電装置付きエア浮上装置及び該浮上装置における除電方法
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
US9339900B2 (en) * 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US9059227B2 (en) 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
US7513822B2 (en) 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US9159592B2 (en) 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
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JP4525514B2 (ja) * 2005-08-01 2010-08-18 パナソニック株式会社 バルクフィーダおよび電子部品実装装置
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CN102986016B (zh) 2005-09-18 2015-11-25 弗雷德里克·A·弗里奇 用于在洁净空间中垂直定位基片处理设备的方法和装置
US7845891B2 (en) * 2006-01-13 2010-12-07 Applied Materials, Inc. Decoupled chamber body
US7665951B2 (en) * 2006-06-02 2010-02-23 Applied Materials, Inc. Multiple slot load lock chamber and method of operation
US7845618B2 (en) 2006-06-28 2010-12-07 Applied Materials, Inc. Valve door with ball coupling
US8124907B2 (en) * 2006-08-04 2012-02-28 Applied Materials, Inc. Load lock chamber with decoupled slit valve door seal compartment
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EP2173645B1 (de) * 2007-07-19 2012-05-30 Centrotherm Thermal Solutions GmbH + CO. KG Anordnung zum berührungslosen transport von flachen substraten
US20090199901A1 (en) * 2008-02-08 2009-08-13 Applied Materials, Inc. Photovoltaic device comprising a sputter deposited passivation layer as well as a method and apparatus for producing such a device
US8602707B2 (en) * 2008-05-30 2013-12-10 Alta Devices, Inc. Methods and apparatus for a chemical vapor deposition reactor
US8602706B2 (en) * 2009-08-17 2013-12-10 Brooks Automation, Inc. Substrate processing apparatus
JP5591563B2 (ja) * 2010-03-10 2014-09-17 日本発條株式会社 位置確認装置
JP5591562B2 (ja) * 2010-03-10 2014-09-17 日本発條株式会社 位置決め装置
JP2014010862A (ja) * 2012-06-29 2014-01-20 Fujitsu Ltd ライブラリ装置
JP6303167B2 (ja) * 2013-11-07 2018-04-04 昭和電工株式会社 インライン式成膜装置及びそれを用いた磁気記録媒体の製造方法
US10332770B2 (en) * 2014-09-24 2019-06-25 Sandisk Technologies Llc Wafer transfer system
US10373858B2 (en) 2016-04-06 2019-08-06 Lam Research Corporation Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal
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US9889995B1 (en) * 2017-03-15 2018-02-13 Core Flow Ltd. Noncontact support platform with blockage detection

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US2678237A (en) * 1948-09-13 1954-05-11 Svenska Flaektfabriken Ab Device for supporting and conveying materials
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US3603646A (en) * 1970-01-26 1971-09-07 Ibm Semiconductor wafer air slide with controlled wafer motion
US3889355A (en) * 1973-02-05 1975-06-17 Ibm Continuous processing system
US3845286A (en) * 1973-02-05 1974-10-29 Ibm Manufacturing control system for processing workpieces
JPS501637A (pt) * 1973-05-07 1975-01-09
JPS501639A (pt) * 1973-05-07 1975-01-09
JPS5021342A (pt) * 1973-06-25 1975-03-06
JPS5051671A (pt) * 1973-09-07 1975-05-08
JPS5066174A (pt) * 1973-10-12 1975-06-04

Also Published As

Publication number Publication date
US3976330A (en) 1976-08-24
FR2345373A1 (fr) 1977-10-21
FR2345373B1 (pt) 1980-10-17
JPS5244177A (en) 1977-04-06
GB1555673A (en) 1979-11-14
DE2644055A1 (de) 1977-04-14
IT1074053B (it) 1985-04-17
CA1049158A (en) 1979-02-20
JPS5410829B2 (pt) 1979-05-10

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