JP5291281B2 - 浮上搬送装置及び浮上搬送方法 - Google Patents
浮上搬送装置及び浮上搬送方法 Download PDFInfo
- Publication number
- JP5291281B2 JP5291281B2 JP2004189444A JP2004189444A JP5291281B2 JP 5291281 B2 JP5291281 B2 JP 5291281B2 JP 2004189444 A JP2004189444 A JP 2004189444A JP 2004189444 A JP2004189444 A JP 2004189444A JP 5291281 B2 JP5291281 B2 JP 5291281B2
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- Prior art keywords
- path
- transfer
- levitation
- semiconductor wafer
- transport
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/26—Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles
- B65G47/28—Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles during transit by a single conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
Description
尚、ノズル4cの傾斜角度は、垂直を含め、半導体ウエハ2の搬送方向等によって決定されている。
請求項4に記載の浮上搬送装置は、前記被搬送体である半導体ウエハが前記搬送路からずれて搬送されている場合には、前記ラインセンサーによるずれ位置とずれ量の検出結果に基づいて前記半導体ウエハ毎に搬送位置修正を行うことを特徴とする。
請求項5に記載の浮上搬送装置は、前記被搬送体である半導体ウエハに形成された切欠の位置を2つのピーク間位置で検出し、2つのピークが前記ラインセンサーの中心から等距離にあれば前記半導体ウエハが搬送路の搬送中心に適正に位置して搬送されていると制御部が判定することを特徴とする。
図1において、本発明の浮上搬送装置10は、複数の移送用ユニットと制御用ユニットとを縦横に複数配置して搬送路11を形成している。尚、移送用ユニット若しくは制御用ユニットは、複数隣接して配置することにより所定の搬送方向が構築されるが、その配置例は自由であり、ここでは直線状に配置した一部のみを図示している。
即ち、搬送ズレの要因の一つは、半導体ウエハ12の処理工程によっては半導体ウエハ12の搬送側裏面、即ち、ノズル18eから噴射された圧力気体が噴射される面には面ダレ等のミクロ単位の凹凸が形成されている場合があり、このような凹凸に起因して半導体ウエハ12の搬送位置がズレる場合が考えられる。
この際のズレは、連続して略同一方向に同一量だけ発生するものと想定することができるため、このようなズレが発生した場合には、上述したラインセンサー16によるずれ位置とずれ量の検出結果に基づいて半導体ウエハ12が適正搬送されるようにノズル本体18の位置を修正する。
11…搬送路
15…噴射ノズル
20…搬送部
21…ベース部
18…ノズル本体
Claims (6)
- 被搬送体の搬送経路を形成する搬送路と、被搬送体を前記搬送路に沿って浮上搬送する複数の噴射ノズルと、前記搬送路中における被搬送体の搬送方向を検出する一つ以上の検出部と、該検出部の検出結果に基づいて前記複数の噴射ノズルを独立して制御する制御部とを備え、
前記制御部は前記検出部から同一方向に連続して被搬送体が前記搬送路の中心から外れているとの検出結果を得たときに、
前記制御部は、前記検出部からの検出結果に基づいて、被搬送体を前記搬送路の中心へと戻すように
前記噴射ノズルから噴射される圧力気体の噴射方向を自動的に変更することを特徴とする浮上搬送装置。 - 前記制御部は、前記検出部からの検出結果に基づいて、前記噴射ノズルを同一面内にて回転させる駆動モータを駆動制御することを特徴とする請求項1に記載の浮上搬送装置。
- 前記搬送路の搬送方向と直交し且つ前記搬送路の全幅に跨る検出範囲を有するラインセンサーであることを特徴とする請求項1又は2に記載の浮上搬送装置。
- 前記被搬送体である半導体ウエハが前記搬送路からずれて搬送されている場合には、前記ラインセンサーによるずれ位置とずれ量の検出結果に基づいて前記半導体ウエハ毎に搬送位置修正を行うことを特徴とする請求項3に記載の浮上搬送装置。
- 前記被搬送体である半導体ウエハに形成された切欠の位置を2つのピーク間位置で検出し、2つのピークが前記ラインセンサーの中心から等距離にあれば前記半導体ウエハが搬送路の搬送中心に適正に位置して搬送されていると制御部が判定することを特徴とする請求項3又は4に記載の浮上搬送装置。
- 請求項1乃至5の何れか一つに記載の浮上搬送装置を用いて被搬送体を搬送することを特徴とする浮上搬送方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004189444A JP5291281B2 (ja) | 2004-06-28 | 2004-06-28 | 浮上搬送装置及び浮上搬送方法 |
CNA2005800214457A CN1997576A (zh) | 2004-06-28 | 2005-06-22 | 浮动搬送装置及浮动搬送方法 |
TW094120757A TW200600440A (en) | 2004-06-28 | 2005-06-22 | Levitation transportation device and levitation transportation method |
KR1020067027599A KR101302818B1 (ko) | 2004-06-28 | 2005-06-22 | 부상 반송 장치 및 부상 반송 방법 |
US11/630,437 US7704019B2 (en) | 2004-06-28 | 2005-06-22 | Levitation transportation device and levitation transportation method |
PCT/JP2005/011416 WO2006001294A1 (ja) | 2004-06-28 | 2005-06-22 | 浮上搬送装置及び浮上搬送方法 |
EP05753450A EP1770032A4 (en) | 2004-06-28 | 2005-06-22 | FLOAT TRANSPORT DEVICE AND FLOAT TRANSPORT PROCESS |
US12/652,069 US20100104380A1 (en) | 2004-06-28 | 2010-01-05 | Levitation transportation device and levitation transportation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004189444A JP5291281B2 (ja) | 2004-06-28 | 2004-06-28 | 浮上搬送装置及び浮上搬送方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011196224A Division JP2012017211A (ja) | 2011-09-08 | 2011-09-08 | 浮上搬送装置及び浮上搬送方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006008347A JP2006008347A (ja) | 2006-01-12 |
JP5291281B2 true JP5291281B2 (ja) | 2013-09-18 |
Family
ID=35776006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004189444A Expired - Fee Related JP5291281B2 (ja) | 2004-06-28 | 2004-06-28 | 浮上搬送装置及び浮上搬送方法 |
Country Status (7)
Country | Link |
---|---|
US (2) | US7704019B2 (ja) |
EP (1) | EP1770032A4 (ja) |
JP (1) | JP5291281B2 (ja) |
KR (1) | KR101302818B1 (ja) |
CN (1) | CN1997576A (ja) |
TW (1) | TW200600440A (ja) |
WO (1) | WO2006001294A1 (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
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US8834891B2 (en) | 2005-03-14 | 2014-09-16 | Boehringer Ingelheim Vetmedica, Inc. | Immunogenic compositions comprising Lawsonia intracellularis |
US8398994B2 (en) | 2005-07-15 | 2013-03-19 | Boehringer Ingelheim Vetmedica, Inc. | Lawsonia vaccine and methods of use thereof |
US20100129397A1 (en) | 2006-12-11 | 2010-05-27 | Boehringer Ingelheim Vetmedica, Inc. | Effective method of treatment of porcine circovirus and lawsonia intracellularis infections |
JP4900115B2 (ja) * | 2007-07-27 | 2012-03-21 | 株式会社Ihi | 搬送方向転換装置及び浮上搬送システム |
DE102007043600A1 (de) | 2007-09-13 | 2009-03-19 | Robert Bosch Gmbh | Pumpenrotor für eine Spaltrohrpumpe |
KR100872871B1 (ko) * | 2007-10-05 | 2008-12-10 | 세메스 주식회사 | 기판 처리 장치 및 그 제어 방법 |
JP2009245997A (ja) * | 2008-03-28 | 2009-10-22 | Juki Corp | 部品供給装置 |
DE102008057389B4 (de) * | 2008-11-14 | 2011-03-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Transport eines Objekts über eine Oberfläche |
KR20120003455A (ko) * | 2009-03-16 | 2012-01-10 | 알타 디바이씨즈, 인크. | 증기 증착 반응기 시스템 및 그의 방법 |
RU2496702C2 (ru) * | 2010-01-13 | 2013-10-27 | Гизеке Унд Девриент Гмбх | Транспортная система для перемещения листового материала |
JP5449239B2 (ja) * | 2010-05-12 | 2014-03-19 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及びプログラムを記録した記憶媒体 |
JP2012076877A (ja) * | 2010-10-01 | 2012-04-19 | Nitto Denko Corp | ワーク搬送方法およびワーク搬送装置 |
US8834073B2 (en) * | 2010-10-29 | 2014-09-16 | Corning Incorporated | Transport apparatus having a measuring system and methods therefor |
JP6468848B2 (ja) * | 2015-01-13 | 2019-02-13 | 株式会社ディスコ | 搬送装置 |
KR101751279B1 (ko) | 2015-02-06 | 2017-06-27 | 유옥수 | 마찰계수 감소와 내경 보강용 디씨 이중벽 하수관 제조방법 |
KR101751278B1 (ko) | 2015-02-06 | 2017-07-11 | 유옥수 | 마찰계수 감소와 내경 보강용 디씨 이중벽 하수관 성형장치 |
US10807811B2 (en) | 2016-03-07 | 2020-10-20 | Purple Innovation, Llc | Mattress toppers, air tables for making mattress toppers, and related methods |
CN108657821A (zh) * | 2018-05-03 | 2018-10-16 | 拓卡奔马机电科技有限公司 | 裁片气浮输送装置 |
CN110641757B (zh) * | 2019-10-14 | 2021-04-27 | 中山易裁剪网络科技有限公司 | 一种柔性布料裁剪半成品的打包设备 |
JP7437187B2 (ja) * | 2020-02-26 | 2024-02-22 | Jswアクティナシステム株式会社 | 浮上搬送装置、及びレーザ処理装置 |
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2004
- 2004-06-28 JP JP2004189444A patent/JP5291281B2/ja not_active Expired - Fee Related
-
2005
- 2005-06-22 TW TW094120757A patent/TW200600440A/zh not_active IP Right Cessation
- 2005-06-22 WO PCT/JP2005/011416 patent/WO2006001294A1/ja active Application Filing
- 2005-06-22 EP EP05753450A patent/EP1770032A4/en not_active Withdrawn
- 2005-06-22 US US11/630,437 patent/US7704019B2/en not_active Expired - Fee Related
- 2005-06-22 KR KR1020067027599A patent/KR101302818B1/ko not_active IP Right Cessation
- 2005-06-22 CN CNA2005800214457A patent/CN1997576A/zh active Pending
-
2010
- 2010-01-05 US US12/652,069 patent/US20100104380A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN1997576A (zh) | 2007-07-11 |
TW200600440A (en) | 2006-01-01 |
WO2006001294A1 (ja) | 2006-01-05 |
JP2006008347A (ja) | 2006-01-12 |
TWI363036B (ja) | 2012-05-01 |
EP1770032A1 (en) | 2007-04-04 |
US20100104380A1 (en) | 2010-04-29 |
KR101302818B1 (ko) | 2013-09-02 |
US7704019B2 (en) | 2010-04-27 |
EP1770032A4 (en) | 2008-02-27 |
KR20070038468A (ko) | 2007-04-10 |
US20080031696A1 (en) | 2008-02-07 |
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