JPS501639A - - Google Patents

Info

Publication number
JPS501639A
JPS501639A JP4975373A JP4975373A JPS501639A JP S501639 A JPS501639 A JP S501639A JP 4975373 A JP4975373 A JP 4975373A JP 4975373 A JP4975373 A JP 4975373A JP S501639 A JPS501639 A JP S501639A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4975373A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4975373A priority Critical patent/JPS501639A/ja
Publication of JPS501639A publication Critical patent/JPS501639A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP4975373A 1973-05-07 1973-05-07 Pending JPS501639A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4975373A JPS501639A (fr) 1973-05-07 1973-05-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4975373A JPS501639A (fr) 1973-05-07 1973-05-07

Publications (1)

Publication Number Publication Date
JPS501639A true JPS501639A (fr) 1975-01-09

Family

ID=12839931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4975373A Pending JPS501639A (fr) 1973-05-07 1973-05-07

Country Status (1)

Country Link
JP (1) JPS501639A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244177A (en) * 1975-10-01 1977-04-06 Ibm System for transferring pieces under treatment
JPS63241948A (ja) * 1987-03-30 1988-10-07 Hitachi Ltd ウエハ搬送方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3645581A (en) * 1968-11-26 1972-02-29 Ind Modular Systems Corp Apparatus and method for handling and treating articles

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3645581A (en) * 1968-11-26 1972-02-29 Ind Modular Systems Corp Apparatus and method for handling and treating articles

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244177A (en) * 1975-10-01 1977-04-06 Ibm System for transferring pieces under treatment
JPS5410829B2 (fr) * 1975-10-01 1979-05-10
JPS63241948A (ja) * 1987-03-30 1988-10-07 Hitachi Ltd ウエハ搬送方法

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