JPS51130184A - Semiconductor ic resistance element process - Google Patents
Semiconductor ic resistance element processInfo
- Publication number
- JPS51130184A JPS51130184A JP5484275A JP5484275A JPS51130184A JP S51130184 A JPS51130184 A JP S51130184A JP 5484275 A JP5484275 A JP 5484275A JP 5484275 A JP5484275 A JP 5484275A JP S51130184 A JPS51130184 A JP S51130184A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- resistance element
- element process
- precision
- silicon layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: Obtain a precision-accurate resistance values by laser trimming a silicon layer as resistance material.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5484275A JPS51130184A (en) | 1975-05-06 | 1975-05-06 | Semiconductor ic resistance element process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5484275A JPS51130184A (en) | 1975-05-06 | 1975-05-06 | Semiconductor ic resistance element process |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51130184A true JPS51130184A (en) | 1976-11-12 |
JPS5634094B2 JPS5634094B2 (en) | 1981-08-07 |
Family
ID=12981859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5484275A Granted JPS51130184A (en) | 1975-05-06 | 1975-05-06 | Semiconductor ic resistance element process |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51130184A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5526570U (en) * | 1978-08-11 | 1980-02-20 | ||
JPS5676558A (en) * | 1979-11-22 | 1981-06-24 | Burr Brown Res Corp | Method of trimming value of element for integrated circuit and integrated circuit |
JPS5691460A (en) * | 1979-12-25 | 1981-07-24 | Seiko Epson Corp | Manufacturing of dispersion layer resistor |
JPS56100427A (en) * | 1980-01-16 | 1981-08-12 | Nec Corp | Manufacture of semiconductor device |
JPS57180157A (en) * | 1981-04-30 | 1982-11-06 | Nec Corp | Trimming resistor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63208697A (en) * | 1987-02-24 | 1988-08-30 | Ishikawajima Harima Heavy Ind Co Ltd | Control method for turbo-compressor |
-
1975
- 1975-05-06 JP JP5484275A patent/JPS51130184A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5526570U (en) * | 1978-08-11 | 1980-02-20 | ||
JPS5834407Y2 (en) * | 1978-08-11 | 1983-08-02 | トキナ−光学株式会社 | Distance adjustment device for zoom interchangeable lenses for cameras |
JPS5676558A (en) * | 1979-11-22 | 1981-06-24 | Burr Brown Res Corp | Method of trimming value of element for integrated circuit and integrated circuit |
JPS5691460A (en) * | 1979-12-25 | 1981-07-24 | Seiko Epson Corp | Manufacturing of dispersion layer resistor |
JPS56100427A (en) * | 1980-01-16 | 1981-08-12 | Nec Corp | Manufacture of semiconductor device |
JPS626649B2 (en) * | 1980-01-16 | 1987-02-12 | Nippon Electric Co | |
JPS57180157A (en) * | 1981-04-30 | 1982-11-06 | Nec Corp | Trimming resistor |
Also Published As
Publication number | Publication date |
---|---|
JPS5634094B2 (en) | 1981-08-07 |
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