IL211092A - Polishing pad and method of manufacture - Google Patents

Polishing pad and method of manufacture

Info

Publication number
IL211092A
IL211092A IL211092A IL21109211A IL211092A IL 211092 A IL211092 A IL 211092A IL 211092 A IL211092 A IL 211092A IL 21109211 A IL21109211 A IL 21109211A IL 211092 A IL211092 A IL 211092A
Authority
IL
Israel
Prior art keywords
polishing pad
polishing
polymeric elastomer
fibers
ultrafine
Prior art date
Application number
IL211092A
Other languages
English (en)
Hebrew (he)
Other versions
IL211092A0 (en
Original Assignee
Kuraray Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co filed Critical Kuraray Co
Publication of IL211092A0 publication Critical patent/IL211092A0/en
Publication of IL211092A publication Critical patent/IL211092A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
    • D04H3/016—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the fineness
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
    • D04H3/08—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating
    • D04H3/10—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating with bonds between yarns or filaments made mechanically

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Textile Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
IL211092A 2008-08-08 2011-02-06 Polishing pad and method of manufacture IL211092A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008205981 2008-08-08
PCT/JP2009/063802 WO2010016486A1 (ja) 2008-08-08 2009-08-04 研磨パッド及び研磨パッドの製造方法

Publications (2)

Publication Number Publication Date
IL211092A0 IL211092A0 (en) 2011-04-28
IL211092A true IL211092A (en) 2014-03-31

Family

ID=41663704

Family Applications (1)

Application Number Title Priority Date Filing Date
IL211092A IL211092A (en) 2008-08-08 2011-02-06 Polishing pad and method of manufacture

Country Status (9)

Country Link
US (2) US20110171890A1 (zh)
EP (1) EP2316614B1 (zh)
JP (1) JP5411862B2 (zh)
KR (1) KR101410116B1 (zh)
CN (1) CN102119069B (zh)
HK (1) HK1154828A1 (zh)
IL (1) IL211092A (zh)
TW (1) TWI460052B (zh)
WO (1) WO2010016486A1 (zh)

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Also Published As

Publication number Publication date
CN102119069A (zh) 2011-07-06
WO2010016486A1 (ja) 2010-02-11
TW201016393A (en) 2010-05-01
KR20110042213A (ko) 2011-04-25
KR101410116B1 (ko) 2014-06-25
US20110171890A1 (en) 2011-07-14
HK1154828A1 (zh) 2012-05-04
US20190218697A1 (en) 2019-07-18
EP2316614B1 (en) 2019-07-17
CN102119069B (zh) 2015-04-15
JPWO2010016486A1 (ja) 2012-01-26
TWI460052B (zh) 2014-11-11
EP2316614A1 (en) 2011-05-04
IL211092A0 (en) 2011-04-28
EP2316614A4 (en) 2014-08-20
JP5411862B2 (ja) 2014-02-12

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