KR101410116B1 - 연마 패드 및 연마 패드의 제조 방법 - Google Patents

연마 패드 및 연마 패드의 제조 방법 Download PDF

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Publication number
KR101410116B1
KR101410116B1 KR1020117005315A KR20117005315A KR101410116B1 KR 101410116 B1 KR101410116 B1 KR 101410116B1 KR 1020117005315 A KR1020117005315 A KR 1020117005315A KR 20117005315 A KR20117005315 A KR 20117005315A KR 101410116 B1 KR101410116 B1 KR 101410116B1
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KR
South Korea
Prior art keywords
polishing
polishing pad
microfine
fiber
elastic modulus
Prior art date
Application number
KR1020117005315A
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English (en)
Korean (ko)
Other versions
KR20110042213A (ko
Inventor
기미오 나카야마
노부오 다카오카
미츠루 가토
히로후미 기쿠치
Original Assignee
가부시키가이샤 구라레
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR20110042213A publication Critical patent/KR20110042213A/ko
Application granted granted Critical
Publication of KR101410116B1 publication Critical patent/KR101410116B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
    • D04H3/016—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the fineness
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
    • D04H3/08—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating
    • D04H3/10—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of strengthening or consolidating with bonds between yarns or filaments made mechanically

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Textile Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
KR1020117005315A 2008-08-08 2009-08-04 연마 패드 및 연마 패드의 제조 방법 KR101410116B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2008-205981 2008-08-08
JP2008205981 2008-08-08
PCT/JP2009/063802 WO2010016486A1 (ja) 2008-08-08 2009-08-04 研磨パッド及び研磨パッドの製造方法

Publications (2)

Publication Number Publication Date
KR20110042213A KR20110042213A (ko) 2011-04-25
KR101410116B1 true KR101410116B1 (ko) 2014-06-25

Family

ID=41663704

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117005315A KR101410116B1 (ko) 2008-08-08 2009-08-04 연마 패드 및 연마 패드의 제조 방법

Country Status (9)

Country Link
US (2) US20110171890A1 (zh)
EP (1) EP2316614B1 (zh)
JP (1) JP5411862B2 (zh)
KR (1) KR101410116B1 (zh)
CN (1) CN102119069B (zh)
HK (1) HK1154828A1 (zh)
IL (1) IL211092A (zh)
TW (1) TWI460052B (zh)
WO (1) WO2010016486A1 (zh)

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CN104136670B (zh) * 2012-01-31 2016-06-01 可乐丽股份有限公司 复合纤维、聚氨酯弹性体布帛的制造方法及聚氨酯弹性体布帛
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US9598802B2 (en) 2013-12-17 2017-03-21 Eastman Chemical Company Ultrafiltration process for producing a sulfopolyester concentrate
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Also Published As

Publication number Publication date
TWI460052B (zh) 2014-11-11
CN102119069B (zh) 2015-04-15
US20110171890A1 (en) 2011-07-14
WO2010016486A1 (ja) 2010-02-11
HK1154828A1 (zh) 2012-05-04
KR20110042213A (ko) 2011-04-25
CN102119069A (zh) 2011-07-06
US20190218697A1 (en) 2019-07-18
JP5411862B2 (ja) 2014-02-12
EP2316614A4 (en) 2014-08-20
EP2316614B1 (en) 2019-07-17
TW201016393A (en) 2010-05-01
JPWO2010016486A1 (ja) 2012-01-26
EP2316614A1 (en) 2011-05-04
IL211092A (en) 2014-03-31
IL211092A0 (en) 2011-04-28

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