FR2750963B1 - Conteneur pour tranches, notamment de semiconducteurs - Google Patents
Conteneur pour tranches, notamment de semiconducteursInfo
- Publication number
- FR2750963B1 FR2750963B1 FR9708866A FR9708866A FR2750963B1 FR 2750963 B1 FR2750963 B1 FR 2750963B1 FR 9708866 A FR9708866 A FR 9708866A FR 9708866 A FR9708866 A FR 9708866A FR 2750963 B1 FR2750963 B1 FR 2750963B1
- Authority
- FR
- France
- Prior art keywords
- wafers
- container
- especially semiconductors
- semiconductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 235000012431 wafers Nutrition 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- E—FIXED CONSTRUCTIONS
- E21—EARTH OR ROCK DRILLING; MINING
- E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
- E21B11/00—Other drilling tools
- E21B11/005—Hand operated drilling tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
-
- E—FIXED CONSTRUCTIONS
- E21—EARTH OR ROCK DRILLING; MINING
- E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
- E21B7/00—Special methods or apparatus for drilling
- E21B7/003—Drilling with mechanical conveying means
- E21B7/005—Drilling with mechanical conveying means with helical conveying means
-
- E—FIXED CONSTRUCTIONS
- E21—EARTH OR ROCK DRILLING; MINING
- E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
- E21B7/00—Special methods or apparatus for drilling
- E21B7/008—Drilling ice or a formation covered by ice
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Mining & Mineral Resources (AREA)
- Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- Fluid Mechanics (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Earth Drilling (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/678,886 US5788082A (en) | 1996-07-12 | 1996-07-12 | Wafer carrier |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2750963A1 FR2750963A1 (fr) | 1998-01-16 |
FR2750963B1 true FR2750963B1 (fr) | 1999-02-26 |
Family
ID=24724706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9708866A Expired - Lifetime FR2750963B1 (fr) | 1996-07-12 | 1997-07-11 | Conteneur pour tranches, notamment de semiconducteurs |
Country Status (11)
Country | Link |
---|---|
US (2) | US5788082A (fr) |
JP (1) | JPH1070185A (fr) |
KR (1) | KR100287024B1 (fr) |
CN (1) | CN1145193C (fr) |
DE (1) | DE19731174C2 (fr) |
FR (1) | FR2750963B1 (fr) |
GB (1) | GB2315260B (fr) |
HK (1) | HK1032142A1 (fr) |
IT (1) | IT1293424B1 (fr) |
NL (1) | NL1006529C2 (fr) |
SG (1) | SG65873A1 (fr) |
Families Citing this family (115)
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US6390754B2 (en) * | 1997-05-21 | 2002-05-21 | Tokyo Electron Limited | Wafer processing apparatus, method of operating the same and wafer detecting system |
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JP3916342B2 (ja) * | 1999-04-20 | 2007-05-16 | 信越ポリマー株式会社 | 基板収納容器 |
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JP3955724B2 (ja) | 2000-10-12 | 2007-08-08 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
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EP0663686B1 (fr) * | 1994-01-14 | 1997-06-18 | International Business Machines Corporation | Appareil automatique d'assemblage et de desassemblage pour conteneur transportable pressurisé et scellé |
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DE69500752T2 (de) * | 1994-07-15 | 1998-03-12 | Fluoroware Inc | Wafer Träger |
JP3145252B2 (ja) * | 1994-07-29 | 2001-03-12 | 淀川化成株式会社 | 基板支承用側板およびそれを用いたカセット |
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-
1996
- 1996-07-12 US US08/678,886 patent/US5788082A/en not_active Expired - Lifetime
-
1997
- 1997-07-08 IT IT97TO000606A patent/IT1293424B1/it active IP Right Grant
- 1997-07-10 NL NL1006529A patent/NL1006529C2/nl not_active IP Right Cessation
- 1997-07-10 DE DE19731174A patent/DE19731174C2/de not_active Expired - Lifetime
- 1997-07-11 GB GB9714701A patent/GB2315260B/en not_active Expired - Fee Related
- 1997-07-11 FR FR9708866A patent/FR2750963B1/fr not_active Expired - Lifetime
- 1997-07-11 KR KR1019970032174A patent/KR100287024B1/ko not_active IP Right Cessation
- 1997-07-12 CN CNB971178712A patent/CN1145193C/zh not_active Expired - Lifetime
- 1997-07-12 SG SG1997002452A patent/SG65873A1/en unknown
- 1997-07-14 JP JP18865297A patent/JPH1070185A/ja active Pending
- 1997-10-06 US US08/944,316 patent/US6076617A/en not_active Expired - Fee Related
-
2001
- 2001-04-10 HK HK01102554A patent/HK1032142A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
HK1032142A1 (en) | 2001-07-06 |
KR100287024B1 (ko) | 2001-04-16 |
DE19731174A1 (de) | 1998-01-15 |
DE19731174C2 (de) | 2002-06-20 |
US6076617A (en) | 2000-06-20 |
GB2315260A (en) | 1998-01-28 |
CN1173039A (zh) | 1998-02-11 |
SG65873A1 (en) | 1999-06-22 |
US5788082A (en) | 1998-08-04 |
KR980012233A (ko) | 1998-04-30 |
JPH1070185A (ja) | 1998-03-10 |
ITTO970606A1 (it) | 1999-01-08 |
NL1006529C2 (nl) | 1998-01-15 |
GB2315260B (en) | 2000-11-29 |
GB9714701D0 (en) | 1997-09-17 |
CN1145193C (zh) | 2004-04-07 |
FR2750963A1 (fr) | 1998-01-16 |
IT1293424B1 (it) | 1999-03-01 |
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