FR2750962B1 - Conteneur pour tranches, notamment de semiconducteurs et porte verrouillable pour ce conteneur - Google Patents

Conteneur pour tranches, notamment de semiconducteurs et porte verrouillable pour ce conteneur

Info

Publication number
FR2750962B1
FR2750962B1 FR9708865A FR9708865A FR2750962B1 FR 2750962 B1 FR2750962 B1 FR 2750962B1 FR 9708865 A FR9708865 A FR 9708865A FR 9708865 A FR9708865 A FR 9708865A FR 2750962 B1 FR2750962 B1 FR 2750962B1
Authority
FR
France
Prior art keywords
container
wafers
lockable door
especially semiconductors
semiconductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9708865A
Other languages
English (en)
Other versions
FR2750962A1 (fr
Inventor
David L Nyseth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fluoroware Inc
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of FR2750962A1 publication Critical patent/FR2750962A1/fr
Application granted granted Critical
Publication of FR2750962B1 publication Critical patent/FR2750962B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Closures For Containers (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR9708865A 1996-07-12 1997-07-11 Conteneur pour tranches, notamment de semiconducteurs et porte verrouillable pour ce conteneur Expired - Fee Related FR2750962B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/678,885 US5711427A (en) 1996-07-12 1996-07-12 Wafer carrier with door

Publications (2)

Publication Number Publication Date
FR2750962A1 FR2750962A1 (fr) 1998-01-16
FR2750962B1 true FR2750962B1 (fr) 1999-03-05

Family

ID=24724702

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9708865A Expired - Fee Related FR2750962B1 (fr) 1996-07-12 1997-07-11 Conteneur pour tranches, notamment de semiconducteurs et porte verrouillable pour ce conteneur

Country Status (12)

Country Link
US (1) US5711427A (fr)
JP (1) JP3280282B2 (fr)
KR (1) KR100283960B1 (fr)
CN (1) CN1135200C (fr)
DE (1) DE19731183C2 (fr)
FR (1) FR2750962B1 (fr)
GB (1) GB2315261B (fr)
HK (1) HK1010279A1 (fr)
IT (1) IT1293423B1 (fr)
MY (1) MY126374A (fr)
NL (1) NL1006528C2 (fr)
SG (1) SG50867A1 (fr)

Families Citing this family (79)

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EP0857150B1 (fr) 1995-10-13 2002-03-27 Empak, Inc. Nacelle a porte laterale definissant un micro-environnement de 300 mm et permettant une mise a la masse des objets contenus
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door
US6736268B2 (en) * 1997-07-11 2004-05-18 Entegris, Inc. Transport module
US6010008A (en) * 1997-07-11 2000-01-04 Fluoroware, Inc. Transport module
US5957292A (en) * 1997-08-01 1999-09-28 Fluoroware, Inc. Wafer enclosure with door
TWI237305B (en) * 1998-02-04 2005-08-01 Nikon Corp Exposure apparatus and positioning apparatus of substrate receiving cassette
US6474474B2 (en) * 1998-02-06 2002-11-05 Sumitomo Metal Industries, Ltd. Sheet support container
US6186331B1 (en) * 1998-04-06 2001-02-13 Dainichi Shoji K.K. Container
US8083272B1 (en) * 1998-06-29 2011-12-27 Industrial Technology Research Institute Mechanically actuated air tight device for wafer carrier
US6095335A (en) * 1998-07-10 2000-08-01 H-Square Corporation Wafer support device having a retrofit to provide size convertibility
US6244812B1 (en) 1998-07-10 2001-06-12 H-Square Corporation Low profile automated pod door removal system
US6245229B1 (en) 1998-07-31 2001-06-12 Amway Corporation Point-of-use water treatment system
JP3556480B2 (ja) * 1998-08-17 2004-08-18 信越ポリマー株式会社 精密基板収納容器
US6082540A (en) * 1999-01-06 2000-07-04 Fluoroware, Inc. Cushion system for wafer carriers
US6206196B1 (en) * 1999-01-06 2001-03-27 Fluoroware, Inc. Door guide for a wafer container
US6464081B2 (en) 1999-01-06 2002-10-15 Entegris, Inc. Door guide for a wafer container
US6520726B1 (en) 1999-03-03 2003-02-18 Pri Automation, Inc. Apparatus and method for using a robot to remove a substrate carrier door
WO2000054311A1 (fr) * 1999-03-11 2000-09-14 Applied Materials, Inc. Appareil pour elever et abaisser un objet
JP3954287B2 (ja) * 1999-06-28 2007-08-08 東京エレクトロン株式会社 ウェハキャリア用蓋体の着脱装置
US6945405B1 (en) 1999-07-08 2005-09-20 Entegris, Inc. Transport module with latching door
DE10084776T5 (de) * 1999-07-08 2005-12-01 Entegris, Inc., Chaska Transportmodul mit verriegelbarer Tür
JP3405937B2 (ja) * 1999-08-11 2003-05-12 ティーディーケイ株式会社 クリーンボックスの蓋ラッチ機構
TW433258U (en) * 2000-06-23 2001-05-01 Ind Tech Res Inst Improved door body structure for a pod
KR20020009186A (ko) * 2000-07-25 2002-02-01 윤종용 웨이퍼의 백-엔드 공정에 사용되는 웨이퍼 캐리어
CN1486388A (zh) * 2000-12-13 2004-03-31 恩特格里斯开曼有限公司 横向浮动的卡锁锁芯组件
AU2002227395A1 (en) 2000-12-13 2002-06-24 Entergris Cayman Ltd. System for preventing improper insertion of foup door into foup
DE60218652T2 (de) * 2001-05-17 2007-11-08 Ebara Corp. Substrattransportbehälter
US6923325B2 (en) 2001-07-12 2005-08-02 Entegris, Inc. Horizontal cassette
KR100567507B1 (ko) * 2001-07-23 2006-04-03 미라이얼 가부시키가이샤 박판 지지 용기용 덮개, 박판 지지 용기 및 간이 착탈 기구
TW511649U (en) * 2001-09-12 2002-11-21 Ind Tech Res Inst Wafer retainer
WO2003042071A1 (fr) * 2001-11-14 2003-05-22 Entegris, Inc. Porte-tranches et systeme de maintien de tranches
CN100374358C (zh) * 2001-11-27 2008-03-12 诚实公司 通过门形成接地线路的前开口式晶片容器
US7121414B2 (en) * 2001-12-28 2006-10-17 Brooks Automation, Inc. Semiconductor cassette reducer
CN100429133C (zh) * 2002-01-15 2008-10-29 诚实公司 晶片运载器上的门和带有沙漏型槽的闭锁装置
US6955382B2 (en) 2002-01-15 2005-10-18 Entegris, Inc. Wafer carrier door and latching mechanism with c-shaped cam follower
US6644477B2 (en) * 2002-02-26 2003-11-11 Entegris, Inc. Wafer container cushion system
US7175026B2 (en) 2002-05-03 2007-02-13 Maxtor Corporation Memory disk shipping container with improved contaminant control
US20040074808A1 (en) * 2002-07-05 2004-04-22 Entegris, Inc. Fire retardant wafer carrier
TW549564U (en) * 2002-10-22 2003-08-21 Power Geode Technology Co Ltd Structure for manually opening wafer pot
TW566803U (en) * 2003-04-04 2003-12-11 Tatung Co Door lid locking mechanism
TWI239931B (en) * 2003-05-19 2005-09-21 Miraial Co Ltd Lid unit for thin plate supporting container and thin plate supporting container
US7455181B2 (en) * 2003-05-19 2008-11-25 Miraial Co., Ltd. Lid unit for thin plate supporting container
US7347329B2 (en) * 2003-10-24 2008-03-25 Entegris, Inc. Substrate carrier
US7344030B2 (en) * 2003-11-07 2008-03-18 Entegris, Inc. Wafer carrier with apertured door for cleaning
US7182203B2 (en) * 2003-11-07 2007-02-27 Entegris, Inc. Wafer container and door with vibration dampening latching mechanism
US7325693B2 (en) * 2003-11-16 2008-02-05 Entegris, Inc. Wafer container and door with cam latching mechanism
US7100772B2 (en) * 2003-11-16 2006-09-05 Entegris, Inc. Wafer container with door actuated wafer restraint
TWI276580B (en) * 2003-12-18 2007-03-21 Miraial Co Ltd Lid unit for thin-plate supporting container
US7077270B2 (en) 2004-03-10 2006-07-18 Miraial Co., Ltd. Thin plate storage container with seal and cover fixing means
US7578407B2 (en) * 2004-04-18 2009-08-25 Entegris, Inc. Wafer container with sealable door
JP4573566B2 (ja) * 2004-04-20 2010-11-04 信越ポリマー株式会社 収納容器
US20060045663A1 (en) * 2004-08-05 2006-03-02 Ravinder Aggarwal Load port with manual FOUP door opening mechanism
US7720558B2 (en) 2004-09-04 2010-05-18 Applied Materials, Inc. Methods and apparatus for mapping carrier contents
CN1760092B (zh) * 2004-10-14 2010-12-22 未来儿株式会社 薄板支持容器用盖体
KR101262402B1 (ko) * 2005-05-31 2013-05-08 가부시키가이샤 반테크 박판 반송 용기의 개폐 구조
JP4668133B2 (ja) * 2006-06-28 2011-04-13 三甲株式会社 ウエハ容器の位置決め構造
JP4841383B2 (ja) * 2006-10-06 2011-12-21 信越ポリマー株式会社 蓋体及び基板収納容器
WO2009096635A1 (fr) * 2008-01-31 2009-08-06 Dae Ryuk Can Co., Ltd. Capsule de versage comportant une partie de paille de type à deux étages
WO2009114798A2 (fr) * 2008-03-13 2009-09-17 Entegris, Inc. Récipient à plaquettes pourvu de composants de contrôle environnemental tubulaires
TWI358379B (en) * 2008-08-14 2012-02-21 Gudeng Prec Industral Co Ltd A wafer container with at least one latch
US7909166B2 (en) * 2008-08-14 2011-03-22 Gudeng Precision Industrial Co, Ltd Front opening unified pod with latch structure
TWI341816B (en) * 2008-08-14 2011-05-11 Gudeng Prec Industral Co Ltd A wafer container having the latch and inflatable seal element
US8276758B2 (en) * 2008-08-14 2012-10-02 Gudeng Precision Industrial Co, Ltd Wafer container with at least one oval latch
TW201010916A (en) * 2008-09-12 2010-03-16 Gudeng Prec Industral Co Ltd Wafer container with roller
TWI373295B (en) * 2008-10-29 2012-09-21 Asustek Comp Inc Electronic-device casing and electrical apparatus
TWI485796B (zh) * 2008-11-21 2015-05-21 Gudeng Prec Industral Co Ltd 容置薄板之容器
TWI365030B (en) * 2009-06-25 2012-05-21 Wistron Corp Covering mechanism for covering an opening of a housing
TWI394695B (zh) 2010-04-29 2013-05-01 Gudeng Prec Industral Co Ltd 一種具有橢圓門閂結構之前開式晶圓盒
TW201138002A (en) 2010-04-29 2011-11-01 Gudeng Prec Industral Co Ltd A wafer container with oval latch
WO2012054627A2 (fr) * 2010-10-19 2012-04-26 Entegris, Inc. Boîtier pour plaquette à ouverture frontale comprenant un coussinet de plaquette
CN102800612A (zh) * 2011-05-27 2012-11-28 家登精密工业股份有限公司 传送盒
TW201251567A (en) * 2011-06-15 2012-12-16 Wistron Corp Cover module
TWM434763U (en) * 2012-03-22 2012-08-01 Gudeng Prec Ind Co Ltd Containers for packaging semiconductor components
JP6231012B2 (ja) * 2012-11-28 2017-11-15 信越ポリマー株式会社 基板収納容器
WO2014176558A1 (fr) 2013-04-26 2014-10-30 Entegris, Inc. Contenant pour plaquettes doté d'un mécanisme de verrouillage pour des plaquettes de grand diamètre
KR102113139B1 (ko) * 2013-09-11 2020-05-20 미라이얼 가부시키가이샤 기판수납용기
TWI690468B (zh) 2015-07-13 2020-04-11 美商恩特葛瑞斯股份有限公司 具有強化圍阻的基板容器
CN105291030A (zh) * 2015-11-03 2016-02-03 贾振东 一种新型折叠螺丝刀
CN110475179B (zh) * 2019-09-20 2020-11-03 歌尔科技有限公司 一种tws耳机充电盒

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US4534389A (en) * 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
US4674939A (en) * 1984-07-30 1987-06-23 Asyst Technologies Sealed standard interface apparatus
US4815912A (en) * 1984-12-24 1989-03-28 Asyst Technologies, Inc. Box door actuated retainer
US4739882A (en) * 1986-02-13 1988-04-26 Asyst Technologies Container having disposable liners
US4697704A (en) * 1986-06-30 1987-10-06 Royal Master Systems, Inc. Storage container for floppy discs
US4966284A (en) * 1987-07-07 1990-10-30 Empak, Inc. Substrate package
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DE4207341C1 (fr) * 1992-03-09 1993-07-15 Acr Automation In Cleanroom Gmbh, 7732 Niedereschach, De
US5555981A (en) * 1992-05-26 1996-09-17 Empak, Inc. Wafer suspension box
DE69219329T2 (de) * 1992-08-04 1997-10-30 Ibm Tragbare abdichtbare unter Druck stehende Behältern zum Speichern von Halbleiterwafern in einer Schützenden gasartigen Umgebung
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US5482161A (en) * 1994-05-24 1996-01-09 Fluoroware, Inc. Mechanical interface wafer container
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Also Published As

Publication number Publication date
JPH1070184A (ja) 1998-03-10
GB2315261A (en) 1998-01-28
IT1293423B1 (it) 1999-03-01
MY126374A (en) 2006-09-29
KR980012234A (ko) 1998-04-30
HK1010279A1 (en) 1999-06-17
KR100283960B1 (ko) 2001-04-02
JP3280282B2 (ja) 2002-04-30
FR2750962A1 (fr) 1998-01-16
DE19731183C2 (de) 2001-12-06
NL1006528C2 (nl) 1998-01-15
CN1179007A (zh) 1998-04-15
SG50867A1 (en) 1998-07-20
DE19731183A1 (de) 1998-01-15
ITTO970605A1 (it) 1999-01-08
US5711427A (en) 1998-01-27
CN1135200C (zh) 2004-01-21
GB2315261B (en) 2000-04-12
GB9714702D0 (en) 1997-09-17

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse

Effective date: 20070330