JP6231012B2 - 基板収納容器 - Google Patents
基板収納容器 Download PDFInfo
- Publication number
- JP6231012B2 JP6231012B2 JP2014550151A JP2014550151A JP6231012B2 JP 6231012 B2 JP6231012 B2 JP 6231012B2 JP 2014550151 A JP2014550151 A JP 2014550151A JP 2014550151 A JP2014550151 A JP 2014550151A JP 6231012 B2 JP6231012 B2 JP 6231012B2
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- JP
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- Prior art keywords
- lid
- cover plate
- positioning
- opening
- lid body
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D43/00—Lids or covers for rigid or semi-rigid containers
- B65D43/14—Non-removable lids or covers
- B65D43/22—Devices for holding in closed position, e.g. clips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67376—Closed carriers characterised by sealing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S206/00—Special receptacle or package
- Y10S206/832—Semiconductor wafer boat
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Description
蓋体は、容器本体の開口部に嵌め合わされる蓋本体と、この蓋本体の開口面を覆うカバープレートとを含み、
施錠機構は、蓋体の蓋本体に支持されてカバープレートの外部から回転操作される回転操作体と、この回転操作体の回転に応じてスライドし、蓋本体の周壁から出没して容器本体の開口部内周に接触する複数の施錠部材とを含み、
蓋体のカバープレートの蓋本体の対向する対向面に、施錠機構の回転操作体の周縁部に点接触又は線接触する姿勢制御部材を設け、この姿勢制御部材により、回転操作体の姿勢を制御するようにしたことを特徴としている。
蓋体のカバープレートに光透過性を付与し、このカバープレートには、位置決め凹部と被検出部とをそれぞれ形成し、
位置決め手段は、蓋本体の対向面に複数形成される第一の位置決め部材と、カバープレートの対向面に複数形成される第二の位置決め部材とを含み、複数の第一の位置決め部材を間隔をおき形成してその大きさを相互に異ならせ、各第一の位置決め部材を屈曲してその両端部付近間に開口を区画し、複数の第二の位置決め部材を間隔をおき形成してその大きさを相互に相違させるとともに、各第二の位置決め部材を屈曲して第一の位置決め部材に沿わせ、各第二の位置決め部材を屈曲してその両端部付近間に開口を区画することができる。
10 蓋体
11 蓋本体
12 正面
13 隆起部
14 設置領域
19 カバープレート
20 螺子孔
23 位置決め凹部
24 被検出部
25 包囲リブ
30 施錠機構
31 回転操作体
33 回転プレート
33A 回転プレート
35 被接触部
36 ラッチバー(施錠部材)
40 固定手段
41 雌螺子ボス
42 雄螺子
50 位置決め手段
51 第一の位置決め部材
51A 第一の位置決め部材
52 開口
53 第二の位置決め部材
53A 第二の位置決め部材
54 開口
55 隙間
56 突部
60 姿勢制御部材
Claims (2)
- 基板を収納する容器本体と、この容器本体の開口部を開閉する蓋体と、容器本体の開口部を閉鎖した蓋体を施錠する施錠機構とを備えた基板収納容器であって、
蓋体は、容器本体の開口部に嵌め合わされる蓋本体と、この蓋本体の開口面を覆うカバープレートとを含み、
施錠機構は、蓋体の蓋本体に支持されてカバープレートの外部から回転操作される回転操作体と、この回転操作体の回転に応じてスライドし、蓋本体の周壁から出没して容器本体の開口部内周に接触する複数の施錠部材とを含み、
蓋体のカバープレートの蓋本体の対向する対向面に、施錠機構の回転操作体の周縁部に点接触又は線接触する姿勢制御部材を設け、この姿勢制御部材により、回転操作体の姿勢を制御するようにしたことを特徴とする基板収納容器。 - 蓋体の蓋本体とカバープレートとを固定する固定手段と、蓋体の蓋本体とカバープレートとを位置決めする位置決め手段とを含み、
蓋体のカバープレートに光透過性を付与し、このカバープレートには、位置決め凹部と被検出部とをそれぞれ形成し、
位置決め手段は、蓋本体の対向面に複数形成される第一の位置決め部材と、カバープレートの対向面に複数形成される第二の位置決め部材とを含み、複数の第一の位置決め部材を間隔をおき形成してその大きさを相互に異ならせ、各第一の位置決め部材を屈曲してその両端部付近間に開口を区画し、複数の第二の位置決め部材を間隔をおき形成してその大きさを相互に相違させるとともに、各第二の位置決め部材を屈曲して第一の位置決め部材に沿わせ、各第二の位置決め部材を屈曲してその両端部付近間に開口を区画した請求項1記載の基板収納容器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012259818 | 2012-11-28 | ||
JP2012259818 | 2012-11-28 | ||
PCT/JP2013/081389 WO2014084115A1 (ja) | 2012-11-28 | 2013-11-21 | 基板収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2014084115A1 JPWO2014084115A1 (ja) | 2017-01-05 |
JP6231012B2 true JP6231012B2 (ja) | 2017-11-15 |
Family
ID=50827753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014550151A Active JP6231012B2 (ja) | 2012-11-28 | 2013-11-21 | 基板収納容器 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9711385B2 (ja) |
JP (1) | JP6231012B2 (ja) |
KR (1) | KR102131473B1 (ja) |
TW (1) | TWI597804B (ja) |
WO (1) | WO2014084115A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10153187B2 (en) * | 2014-11-11 | 2018-12-11 | Applied Materials, Inc. | Methods and apparatus for transferring a substrate |
CN110770889B (zh) * | 2017-04-06 | 2023-10-27 | 未来儿股份有限公司 | 基板收纳容器 |
WO2019239495A1 (ja) * | 2018-06-12 | 2019-12-19 | ミライアル株式会社 | 基板収納容器 |
CN114743905B (zh) * | 2022-04-19 | 2023-11-17 | 荣耀半导体材料(嘉善)有限公司 | 一种半导体晶片收纳容器 |
TWI822366B (zh) * | 2022-09-28 | 2023-11-11 | 家登精密工業股份有限公司 | 鎖附導正結構 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5570987A (en) * | 1993-12-14 | 1996-11-05 | W. L. Gore & Associates, Inc. | Semiconductor wafer transport container |
US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
US5957292A (en) * | 1997-08-01 | 1999-09-28 | Fluoroware, Inc. | Wafer enclosure with door |
JPH11159218A (ja) * | 1997-11-26 | 1999-06-15 | Shin Etsu Polymer Co Ltd | 精密基板容器のドアラッチ機構 |
US8083272B1 (en) * | 1998-06-29 | 2011-12-27 | Industrial Technology Research Institute | Mechanically actuated air tight device for wafer carrier |
US6430877B1 (en) * | 1998-07-13 | 2002-08-13 | Asyst Technologies, Inc. | Pod door alignment device |
JP4208308B2 (ja) | 1998-10-29 | 2009-01-14 | 北海製罐株式会社 | フルオープン缶蓋 |
JP3904772B2 (ja) * | 1999-09-30 | 2007-04-11 | 信越ポリマー株式会社 | 精密基板収納容器 |
US6457598B1 (en) * | 2001-03-20 | 2002-10-01 | Prosys Technology Integration, Inc. | Module cover assembly with door latch transmission mechanism for wafer transport module |
TW534165U (en) * | 2002-09-04 | 2003-05-21 | Ind Tech Res Inst | Latch locking mechanism used in doors of wafer boxes |
US7182203B2 (en) * | 2003-11-07 | 2007-02-27 | Entegris, Inc. | Wafer container and door with vibration dampening latching mechanism |
JP3593122B2 (ja) * | 2003-12-12 | 2004-11-24 | 信越ポリマー株式会社 | 精密基板収納容器 |
JP4764001B2 (ja) * | 2003-12-18 | 2011-08-31 | ミライアル株式会社 | 薄板支持容器用蓋体 |
JP4540529B2 (ja) | 2005-04-18 | 2010-09-08 | 信越ポリマー株式会社 | 収納容器 |
JP4647417B2 (ja) * | 2005-07-08 | 2011-03-09 | 信越ポリマー株式会社 | 基板収納容器の蓋体開閉方法 |
US7909166B2 (en) * | 2008-08-14 | 2011-03-22 | Gudeng Precision Industrial Co, Ltd | Front opening unified pod with latch structure |
CN102939254A (zh) | 2010-02-19 | 2013-02-20 | 信越聚合物株式会社 | 基板收纳容器 |
JP5627509B2 (ja) | 2011-03-01 | 2014-11-19 | 信越ポリマー株式会社 | 基板収納容器 |
TWM437839U (en) * | 2012-03-22 | 2012-09-21 | Gudeng Prec Ind Co Ltd | Container for storage of semiconductor device |
-
2013
- 2013-11-21 WO PCT/JP2013/081389 patent/WO2014084115A1/ja active Application Filing
- 2013-11-21 KR KR1020157013568A patent/KR102131473B1/ko active IP Right Grant
- 2013-11-21 US US14/648,101 patent/US9711385B2/en active Active
- 2013-11-21 JP JP2014550151A patent/JP6231012B2/ja active Active
- 2013-11-28 TW TW102143547A patent/TWI597804B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20150088800A (ko) | 2015-08-03 |
TW201442157A (zh) | 2014-11-01 |
TWI597804B (zh) | 2017-09-01 |
US9711385B2 (en) | 2017-07-18 |
KR102131473B1 (ko) | 2020-07-07 |
WO2014084115A1 (ja) | 2014-06-05 |
US20150318195A1 (en) | 2015-11-05 |
JPWO2014084115A1 (ja) | 2017-01-05 |
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