FR2400256A1 - Systeme a faisceau d'electrons pouvant projeter des caracteres - Google Patents

Systeme a faisceau d'electrons pouvant projeter des caracteres

Info

Publication number
FR2400256A1
FR2400256A1 FR7820120A FR7820120A FR2400256A1 FR 2400256 A1 FR2400256 A1 FR 2400256A1 FR 7820120 A FR7820120 A FR 7820120A FR 7820120 A FR7820120 A FR 7820120A FR 2400256 A1 FR2400256 A1 FR 2400256A1
Authority
FR
France
Prior art keywords
electron beam
character
system capable
beam system
projecting characters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7820120A
Other languages
English (en)
Other versions
FR2400256B1 (fr
Inventor
Hans C Pfeiffer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2400256A1 publication Critical patent/FR2400256A1/fr
Application granted granted Critical
Publication of FR2400256B1 publication Critical patent/FR2400256B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

Abstract

Système à faisceau d'électrons pouvant projeter des caractères. Le système comprend des moyens de mise en forme du faisceau constitués par l'ouverture carrée 14. Le condensateur 15 focalise l'image de l'ouverture 14 dans le plan 16 d'un élément à caractères 17 comportant un certain nombre d'ouverture de dessins de caractères. Le moyen de déflexion 19 comprenant des plaques 20, 20', 21 et 21' permet de diriger le faisceau d'électrons sur le caractère 16 à projeter de l'élement 17. Ainsi un caractère choisi peut être projeté pour impressionner une couche photorésistante. Peut être utilisé pour la fabrication des circuits intégrés, de nature répétitive.
FR7820120A 1977-08-10 1978-06-29 Systeme a faisceau d'electrons pouvant projeter des caracteres Granted FR2400256A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82335277A 1977-08-10 1977-08-10

Publications (2)

Publication Number Publication Date
FR2400256A1 true FR2400256A1 (fr) 1979-03-09
FR2400256B1 FR2400256B1 (fr) 1982-02-05

Family

ID=25238513

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7820120A Granted FR2400256A1 (fr) 1977-08-10 1978-06-29 Systeme a faisceau d'electrons pouvant projeter des caracteres

Country Status (9)

Country Link
JP (1) JPS5429981A (fr)
BR (1) BR7804994A (fr)
CH (1) CH631574A5 (fr)
DE (1) DE2834391C2 (fr)
FR (1) FR2400256A1 (fr)
GB (1) GB1598219A (fr)
IT (1) IT1112285B (fr)
NL (1) NL7808162A (fr)
SE (1) SE425838B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2488043A1 (fr) * 1980-07-30 1982-02-05 Le N Proizv Dispositif a optique electronique pour l'etude d'echantillons
FR2507816A1 (fr) * 1981-06-15 1982-12-17 Nippon Telegraph & Telephone Systeme deflecteur de focalisation pour faisceau de particules chargees

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435173U (fr) * 1977-08-12 1979-03-07
JPS5463681A (en) * 1977-10-29 1979-05-22 Nippon Aviotronics Kk Electron beam exposure device
JPS61183926A (ja) * 1985-02-08 1986-08-16 Toshiba Corp 荷電ビ−ム照射装置
JPS62206828A (ja) * 1986-03-06 1987-09-11 Nec Corp 荷電粒子線描画装置
JPH02246318A (ja) * 1989-03-20 1990-10-02 Fujitsu Ltd 荷電粒子ビーム露光装置
JP2746098B2 (ja) * 1994-01-19 1998-04-28 日本電気株式会社 電子ビーム描画用アパーチャおよび電子ビーム描画方法
JP3206448B2 (ja) 1996-08-30 2001-09-10 日本電気株式会社 電子ビーム描画装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2460716B1 (de) * 1974-12-19 1976-05-06 Siemens Ag Korpuskularstrahloptisches geraet zur korpuskelbestrahlung eines praeparats
FR2329069A1 (fr) * 1975-10-23 1977-05-20 Rikagaku Kenkyusho Procede de projection d'un faisceau de particules chargees
FR2337420A1 (fr) * 1975-12-31 1977-07-29 Fujitsu Ltd Appareil lithographique a faisceau electronique
FR2351497A1 (fr) * 1976-05-14 1977-12-09 Thomson Csf Dispositif permettant le trace programme de figures de formes differentes
FR2393418A1 (fr) * 1977-05-31 1978-12-29 Rikagaku Kenkyusho Procede et appareil pour projeter un faisceau de particules electrisees sur une cible

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644700A (en) * 1969-12-15 1972-02-22 Ibm Method and apparatus for controlling an electron beam
US3956635A (en) * 1975-06-13 1976-05-11 International Business Machines Corporation Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns
GB1557924A (en) * 1976-02-05 1979-12-19 Western Electric Co Irradiation apparatus and methods
JPS5357764A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Electron beam exposure apparatus
CA1166766A (fr) * 1977-02-23 1984-05-01 Hans C. Pfeiffer Methode et dispositif pour obtenir un faisceau electronique de grosseur variable

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2460716B1 (de) * 1974-12-19 1976-05-06 Siemens Ag Korpuskularstrahloptisches geraet zur korpuskelbestrahlung eines praeparats
FR2329069A1 (fr) * 1975-10-23 1977-05-20 Rikagaku Kenkyusho Procede de projection d'un faisceau de particules chargees
FR2337420A1 (fr) * 1975-12-31 1977-07-29 Fujitsu Ltd Appareil lithographique a faisceau electronique
FR2351497A1 (fr) * 1976-05-14 1977-12-09 Thomson Csf Dispositif permettant le trace programme de figures de formes differentes
FR2393418A1 (fr) * 1977-05-31 1978-12-29 Rikagaku Kenkyusho Procede et appareil pour projeter un faisceau de particules electrisees sur une cible

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2488043A1 (fr) * 1980-07-30 1982-02-05 Le N Proizv Dispositif a optique electronique pour l'etude d'echantillons
FR2507816A1 (fr) * 1981-06-15 1982-12-17 Nippon Telegraph & Telephone Systeme deflecteur de focalisation pour faisceau de particules chargees

Also Published As

Publication number Publication date
DE2834391A1 (de) 1979-02-22
JPS5438035B2 (fr) 1979-11-19
IT1112285B (it) 1986-01-13
DE2834391C2 (de) 1986-04-17
BR7804994A (pt) 1979-04-17
FR2400256B1 (fr) 1982-02-05
CH631574A5 (en) 1982-08-13
SE425838B (sv) 1982-11-15
NL7808162A (nl) 1979-02-13
SE7808326L (sv) 1979-02-11
IT7826097A0 (it) 1978-07-26
SE7808326A (sv) 1979-02-11
GB1598219A (en) 1981-09-16
JPS5429981A (en) 1979-03-06

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Legal Events

Date Code Title Description
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