FR2351497A1 - Dispositif permettant le trace programme de figures de formes differentes - Google Patents
Dispositif permettant le trace programme de figures de formes differentesInfo
- Publication number
- FR2351497A1 FR2351497A1 FR7614719A FR7614719A FR2351497A1 FR 2351497 A1 FR2351497 A1 FR 2351497A1 FR 7614719 A FR7614719 A FR 7614719A FR 7614719 A FR7614719 A FR 7614719A FR 2351497 A1 FR2351497 A1 FR 2351497A1
- Authority
- FR
- France
- Prior art keywords
- onto object
- screen
- real image
- picture elements
- lens arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7614719A FR2351497A1 (fr) | 1976-05-14 | 1976-05-14 | Dispositif permettant le trace programme de figures de formes differentes |
NLAANVRAGE7705207,A NL177578C (nl) | 1976-05-14 | 1977-05-11 | Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel. |
SE7705531A SE415309B (sv) | 1976-05-14 | 1977-05-12 | Anordning innefattande ett foremal som er paverkbart medelst korpuskularstralning |
GB20082/77A GB1570347A (en) | 1976-05-14 | 1977-05-12 | Device which makes it possible to effect the programmed tracing of figures which have different shapes |
CA278,403A CA1085073A (fr) | 1976-05-14 | 1977-05-13 | Dispositif permettant le trace programme de figures ayant des formes differentes |
US05/796,708 US4110622A (en) | 1976-05-14 | 1977-05-13 | Device which makes it possible to effect the programmed tracing of figures which have different shapes |
DE19772721704 DE2721704A1 (de) | 1976-05-14 | 1977-05-13 | Korpuskularoptikvorrichtung |
JP5592077A JPS538064A (en) | 1976-05-14 | 1977-05-14 | Particle optical device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7614719A FR2351497A1 (fr) | 1976-05-14 | 1976-05-14 | Dispositif permettant le trace programme de figures de formes differentes |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2351497A1 true FR2351497A1 (fr) | 1977-12-09 |
FR2351497B1 FR2351497B1 (fr) | 1980-09-05 |
Family
ID=9173192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7614719A Granted FR2351497A1 (fr) | 1976-05-14 | 1976-05-14 | Dispositif permettant le trace programme de figures de formes differentes |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2351497A1 (fr) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2382091A1 (fr) * | 1977-02-23 | 1978-09-22 | Ibm | Procede et dispositif de formation d'un faisceau electronique de taille variable |
FR2400256A1 (fr) * | 1977-08-10 | 1979-03-09 | Ibm | Systeme a faisceau d'electrons pouvant projeter des caracteres |
FR2415367A1 (fr) * | 1978-01-19 | 1979-08-17 | Zeiss Jena Veb Carl | Procede et dispositif pour le reglage d'un appareil de traitement a rayonnement electronique |
FR2524198A1 (fr) * | 1982-03-04 | 1983-09-30 | Varian Associates | Appareil d'exposition par faisceau de particules chargees utilisant un balayage par une ligne variable |
EP0075504B1 (fr) * | 1981-09-22 | 1986-01-29 | Thomson-Csf | Dispositif de limitation angulaire dans un système à faisceau de particules chargées |
-
1976
- 1976-05-14 FR FR7614719A patent/FR2351497A1/fr active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2382091A1 (fr) * | 1977-02-23 | 1978-09-22 | Ibm | Procede et dispositif de formation d'un faisceau electronique de taille variable |
FR2400256A1 (fr) * | 1977-08-10 | 1979-03-09 | Ibm | Systeme a faisceau d'electrons pouvant projeter des caracteres |
FR2415367A1 (fr) * | 1978-01-19 | 1979-08-17 | Zeiss Jena Veb Carl | Procede et dispositif pour le reglage d'un appareil de traitement a rayonnement electronique |
EP0075504B1 (fr) * | 1981-09-22 | 1986-01-29 | Thomson-Csf | Dispositif de limitation angulaire dans un système à faisceau de particules chargées |
FR2524198A1 (fr) * | 1982-03-04 | 1983-09-30 | Varian Associates | Appareil d'exposition par faisceau de particules chargees utilisant un balayage par une ligne variable |
Also Published As
Publication number | Publication date |
---|---|
FR2351497B1 (fr) | 1980-09-05 |
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