JPS6481222A - Illumination optical apparatus - Google Patents

Illumination optical apparatus

Info

Publication number
JPS6481222A
JPS6481222A JP62238225A JP23822587A JPS6481222A JP S6481222 A JPS6481222 A JP S6481222A JP 62238225 A JP62238225 A JP 62238225A JP 23822587 A JP23822587 A JP 23822587A JP S6481222 A JPS6481222 A JP S6481222A
Authority
JP
Japan
Prior art keywords
light source
lens
flux
source image
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62238225A
Other languages
Japanese (ja)
Other versions
JPH0744141B2 (en
Inventor
Koichi Matsumoto
Yuji Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62238225A priority Critical patent/JPH0744141B2/en
Priority to US07/237,847 priority patent/US4939630A/en
Publication of JPS6481222A publication Critical patent/JPS6481222A/en
Publication of JPH0744141B2 publication Critical patent/JPH0744141B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To prevent an optical element from being destroyed, by constituting light source image forming means with an optical integrator comprising a plurality of lens elements disposed in parallel and constituting such that a back focal point F may be placed back of a lens surface on the injection side. CONSTITUTION:A collimated flux of light supplied from a laser light source 11 receives the action of an optical integrator for forming a surface light source and is converged on a surface A of its injection side space as a plurality of converging points 12a. The flux is converted to a parallel flux of light by a positive lens 13 and introduced to a main optical integrator 1 as light source image forming means. The converging point of the flux of light is formed at a position spaced from the injection surface of a bar element 101 by a convex lens surface on a plane of incidence 101a of each bar element 101 and the light source image is formed at this point. Since a back focal point F is placed back of a lens surface on the injection side of each lens element, one light source image is formed on a space separated from the injection surface at each lens element and a plurality of light source images are formed.
JP62238225A 1986-09-09 1987-09-22 Lighting optics Expired - Lifetime JPH0744141B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62238225A JPH0744141B2 (en) 1987-09-22 1987-09-22 Lighting optics
US07/237,847 US4939630A (en) 1986-09-09 1988-08-26 Illumination optical apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62238225A JPH0744141B2 (en) 1987-09-22 1987-09-22 Lighting optics

Publications (2)

Publication Number Publication Date
JPS6481222A true JPS6481222A (en) 1989-03-27
JPH0744141B2 JPH0744141B2 (en) 1995-05-15

Family

ID=17027007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62238225A Expired - Lifetime JPH0744141B2 (en) 1986-09-09 1987-09-22 Lighting optics

Country Status (1)

Country Link
JP (1) JPH0744141B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5369659A (en) * 1993-12-07 1994-11-29 Cynosure, Inc. Fault tolerant optical system using diode laser array
US8915948B2 (en) 2002-06-19 2014-12-23 Palomar Medical Technologies, Llc Method and apparatus for photothermal treatment of tissue at depth
US9028536B2 (en) 2006-08-02 2015-05-12 Cynosure, Inc. Picosecond laser apparatus and methods for its operation and use
US9780518B2 (en) 2012-04-18 2017-10-03 Cynosure, Inc. Picosecond laser apparatus and methods for treating target tissues with same
US10245107B2 (en) 2013-03-15 2019-04-02 Cynosure, Inc. Picosecond optical radiation systems and methods of use
US10434324B2 (en) 2005-04-22 2019-10-08 Cynosure, Llc Methods and systems for laser treatment using non-uniform output beam
US11418000B2 (en) 2018-02-26 2022-08-16 Cynosure, Llc Q-switched cavity dumped sub-nanosecond laser

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147708A (en) * 1982-02-26 1983-09-02 Nippon Kogaku Kk <Nikon> Optical device for illumination
JPS60166951A (en) * 1984-02-10 1985-08-30 Canon Inc Illuminating optical device
JPS61212816A (en) * 1985-03-18 1986-09-20 Canon Inc Lighting equipment
JPS62100724A (en) * 1985-10-28 1987-05-11 Canon Inc Illuminating optical system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147708A (en) * 1982-02-26 1983-09-02 Nippon Kogaku Kk <Nikon> Optical device for illumination
JPS60166951A (en) * 1984-02-10 1985-08-30 Canon Inc Illuminating optical device
JPS61212816A (en) * 1985-03-18 1986-09-20 Canon Inc Lighting equipment
JPS62100724A (en) * 1985-10-28 1987-05-11 Canon Inc Illuminating optical system

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5369659A (en) * 1993-12-07 1994-11-29 Cynosure, Inc. Fault tolerant optical system using diode laser array
US8915948B2 (en) 2002-06-19 2014-12-23 Palomar Medical Technologies, Llc Method and apparatus for photothermal treatment of tissue at depth
US10434324B2 (en) 2005-04-22 2019-10-08 Cynosure, Llc Methods and systems for laser treatment using non-uniform output beam
US9028536B2 (en) 2006-08-02 2015-05-12 Cynosure, Inc. Picosecond laser apparatus and methods for its operation and use
US11712299B2 (en) 2006-08-02 2023-08-01 Cynosure, LLC. Picosecond laser apparatus and methods for its operation and use
US10966785B2 (en) 2006-08-02 2021-04-06 Cynosure, Llc Picosecond laser apparatus and methods for its operation and use
US10849687B2 (en) 2006-08-02 2020-12-01 Cynosure, Llc Picosecond laser apparatus and methods for its operation and use
US11095087B2 (en) 2012-04-18 2021-08-17 Cynosure, Llc Picosecond laser apparatus and methods for treating target tissues with same
US10581217B2 (en) 2012-04-18 2020-03-03 Cynosure, Llc Picosecond laser apparatus and methods for treating target tissues with same
US10305244B2 (en) 2012-04-18 2019-05-28 Cynosure, Llc Picosecond laser apparatus and methods for treating target tissues with same
US11664637B2 (en) 2012-04-18 2023-05-30 Cynosure, Llc Picosecond laser apparatus and methods for treating target tissues with same
US9780518B2 (en) 2012-04-18 2017-10-03 Cynosure, Inc. Picosecond laser apparatus and methods for treating target tissues with same
US12068571B2 (en) 2012-04-18 2024-08-20 Cynosure, Llc Picosecond laser apparatus and methods for treating target tissues with same
US10765478B2 (en) 2013-03-15 2020-09-08 Cynosurce, Llc Picosecond optical radiation systems and methods of use
US10285757B2 (en) 2013-03-15 2019-05-14 Cynosure, Llc Picosecond optical radiation systems and methods of use
US10245107B2 (en) 2013-03-15 2019-04-02 Cynosure, Inc. Picosecond optical radiation systems and methods of use
US11446086B2 (en) 2013-03-15 2022-09-20 Cynosure, Llc Picosecond optical radiation systems and methods of use
US11418000B2 (en) 2018-02-26 2022-08-16 Cynosure, Llc Q-switched cavity dumped sub-nanosecond laser
US11791603B2 (en) 2018-02-26 2023-10-17 Cynosure, LLC. Q-switched cavity dumped sub-nanosecond laser

Also Published As

Publication number Publication date
JPH0744141B2 (en) 1995-05-15

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