FR2379159A2 - Dispositif permettant le trace programme de figures de formes differentes - Google Patents
Dispositif permettant le trace programme de figures de formes differentesInfo
- Publication number
- FR2379159A2 FR2379159A2 FR7702600A FR7702600A FR2379159A2 FR 2379159 A2 FR2379159 A2 FR 2379159A2 FR 7702600 A FR7702600 A FR 7702600A FR 7702600 A FR7702600 A FR 7702600A FR 2379159 A2 FR2379159 A2 FR 2379159A2
- Authority
- FR
- France
- Prior art keywords
- onto object
- screen
- real image
- picture elements
- lens arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
L'addition a pour objet une amélioration du dispositif selon le brevet principal. Une lentille de convergence constante est introduite dans le système optique. Cette lentille est composée d'un ensemble électromagnétique-électrostatique. Le courant d'excitation de la lentille électromagnétique entraîne une rotation de l'image du diaphragme dans le plan objet L'addition a les mêmes applications que le brevet principal.
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7702600A FR2379159A2 (fr) | 1977-01-31 | 1977-01-31 | Dispositif permettant le trace programme de figures de formes differentes |
NLAANVRAGE7705207,A NL177578C (nl) | 1976-05-14 | 1977-05-11 | Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel. |
SE7705531A SE415309B (sv) | 1976-05-14 | 1977-05-12 | Anordning innefattande ett foremal som er paverkbart medelst korpuskularstralning |
GB20082/77A GB1570347A (en) | 1976-05-14 | 1977-05-12 | Device which makes it possible to effect the programmed tracing of figures which have different shapes |
DE2721704A DE2721704C2 (de) | 1976-05-14 | 1977-05-13 | Korpuskularoptisches Gerät |
CA278,403A CA1085073A (fr) | 1976-05-14 | 1977-05-13 | Dispositif permettant le trace programme de figures ayant des formes differentes |
US05/796,708 US4110622A (en) | 1976-05-14 | 1977-05-13 | Device which makes it possible to effect the programmed tracing of figures which have different shapes |
JP5592077A JPS538064A (en) | 1976-05-14 | 1977-05-14 | Particle optical device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7702600A FR2379159A2 (fr) | 1977-01-31 | 1977-01-31 | Dispositif permettant le trace programme de figures de formes differentes |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2379159A2 true FR2379159A2 (fr) | 1978-08-25 |
FR2379159B2 FR2379159B2 (fr) | 1980-10-24 |
Family
ID=9186081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7702600A Granted FR2379159A2 (fr) | 1976-05-14 | 1977-01-31 | Dispositif permettant le trace programme de figures de formes differentes |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2379159A2 (fr) |
-
1977
- 1977-01-31 FR FR7702600A patent/FR2379159A2/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2379159B2 (fr) | 1980-10-24 |
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