FI20060177L - Menetelmä tuottaa hyvälaatuisia pintoja ja hyvälaatuisen pinnan omaava tuote - Google Patents

Menetelmä tuottaa hyvälaatuisia pintoja ja hyvälaatuisen pinnan omaava tuote Download PDF

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Publication number
FI20060177L
FI20060177L FI20060177A FI20060177A FI20060177L FI 20060177 L FI20060177 L FI 20060177L FI 20060177 A FI20060177 A FI 20060177A FI 20060177 A FI20060177 A FI 20060177A FI 20060177 L FI20060177 L FI 20060177L
Authority
FI
Finland
Prior art keywords
good quality
product
method produces
quality surface
produces good
Prior art date
Application number
FI20060177A
Other languages
English (en)
Swedish (sv)
Other versions
FI20060177A0 (fi
Inventor
Reijo Lappalainen
Vesa Myllymaeki
Lasse Pulli
Juha Maekitalo
Original Assignee
Picodeon Ltd Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Picodeon Ltd Oy filed Critical Picodeon Ltd Oy
Priority to FI20060177A priority Critical patent/FI20060177L/fi
Publication of FI20060177A0 publication Critical patent/FI20060177A0/fi
Priority to FI20060357A priority patent/FI124239B/fi
Priority to CN200780006700.XA priority patent/CN101389441B/zh
Priority to RU2008137492/02A priority patent/RU2467092C2/ru
Priority to EP20070704872 priority patent/EP1993775A1/en
Priority to EP07704867A priority patent/EP1993774A2/en
Priority to JP2008555823A priority patent/JP5237125B2/ja
Priority to EP20070704871 priority patent/EP1994194A1/en
Priority to FI20075141A priority patent/FI124524B/fi
Priority to JP2008555824A priority patent/JP2009527914A/ja
Priority to CNA2007800063615A priority patent/CN101389439A/zh
Priority to CN200780006479.8A priority patent/CN101389440B/zh
Priority to FI20075136A priority patent/FI124359B/fi
Priority to PCT/FI2007/050097 priority patent/WO2007096476A2/en
Priority to JP2008555814A priority patent/JP5437640B2/ja
Priority to JP2008555815A priority patent/JP5383204B2/ja
Priority to JP2008555821A priority patent/JP5237123B2/ja
Priority to FI20075134A priority patent/FI124358B/fi
Priority to DK07712590.4T priority patent/DK1991716T3/da
Priority to KR1020087023133A priority patent/KR101395513B1/ko
Priority to KR1020087023134A priority patent/KR101395393B1/ko
Priority to PCT/FI2007/050104 priority patent/WO2007096483A2/en
Priority to US12/280,657 priority patent/US8741749B2/en
Priority to US12/280,636 priority patent/US20090136739A1/en
Priority to US12/280,641 priority patent/US20080311345A1/en
Priority to PCT/FI2007/050107 priority patent/WO2007096486A1/en
Priority to PCT/FI2007/000046 priority patent/WO2007096461A2/en
Priority to KR1020087023172A priority patent/KR101399235B1/ko
Priority to EP07704813A priority patent/EP1991386A2/en
Priority to PCT/FI2007/050106 priority patent/WO2007096485A2/en
Priority to FI20075131A priority patent/FI20075131L/fi
Priority to EP07704875A priority patent/EP1993778A2/en
Priority to US12/280,602 priority patent/US20090126787A1/en
Priority to FI20075140A priority patent/FI123964B/fi
Priority to RU2008137489/02A priority patent/RU2467850C2/ru
Priority to EP20070704877 priority patent/EP1993780A1/en
Priority to FI20075133A priority patent/FI124360B/fi
Priority to CN201410149093.4A priority patent/CN104167464A/zh
Priority to KR1020087023252A priority patent/KR101398379B1/ko
Priority to EP20070704876 priority patent/EP1993779A2/en
Priority to JP2008555822A priority patent/JP5237124B2/ja
Priority to CNA2007800103487A priority patent/CN101421071A/zh
Priority to KR1020087023171A priority patent/KR101395425B1/ko
Priority to EP07712590A priority patent/EP1991716B1/en
Priority to FI20070158A priority patent/FI20070158L/fi
Priority to JP2008555820A priority patent/JP5237122B2/ja
Priority to US12/280,650 priority patent/US20090017318A1/en
Priority to US12/224,316 priority patent/US20090169871A1/en
Priority to PCT/FI2007/000048 priority patent/WO2007096463A2/en
Priority to US12/280,631 priority patent/US20100221489A1/en
Priority to FI20075137A priority patent/FI124357B/fi
Priority to KR1020087023267A priority patent/KR101367839B1/ko
Priority to EP20070704878 priority patent/EP1994195A1/en
Priority to AT07712590T priority patent/ATE525493T1/de
Priority to PCT/FI2007/050108 priority patent/WO2007096487A1/en
Priority to PCT/FI2007/050103 priority patent/WO2007096482A2/en
Priority to BRPI0707014-4A priority patent/BRPI0707014A2/pt
Priority to JP2008555825A priority patent/JP5414279B2/ja
Priority to EP20070704873 priority patent/EP1993776A2/en
Priority to FI20075139A priority patent/FI124523B/fi
Priority to PCT/FI2007/050101 priority patent/WO2007096480A1/en
Priority to US12/280,622 priority patent/US20090061210A1/en
Priority to EP20070704874 priority patent/EP1993777A2/en
Priority to US12/280,609 priority patent/US8486073B2/en
Priority to CA002642867A priority patent/CA2642867A1/en
Priority to PCT/FI2007/050102 priority patent/WO2007096481A1/en
Priority to RU2008137490/02A priority patent/RU2467851C2/ru
Priority to KR1020087023268A priority patent/KR20090015021A/ko
Priority to RU2008137493/02A priority patent/RU2435871C2/ru
Priority to FI20075138A priority patent/FI123716B/fi
Priority to PCT/FI2007/050105 priority patent/WO2007096484A2/en
Publication of FI20060177L publication Critical patent/FI20060177L/fi
Priority to IL193646A priority patent/IL193646A0/en
Priority to KR1020087023253A priority patent/KR101467584B1/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C23C14/0611—Diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
FI20060177A 2006-02-23 2006-02-23 Menetelmä tuottaa hyvälaatuisia pintoja ja hyvälaatuisen pinnan omaava tuote FI20060177L (fi)

Priority Applications (73)

Application Number Priority Date Filing Date Title
FI20060177A FI20060177L (fi) 2006-02-23 2006-02-23 Menetelmä tuottaa hyvälaatuisia pintoja ja hyvälaatuisen pinnan omaava tuote
FI20060357A FI124239B (fi) 2006-02-23 2006-04-12 Elementti, jossa on sähköä johtava kalvomainen rakenne lämmittävän ja/tai jäähdyttävän vaikutuksen synnyttämiseksi sähkövirran avulla
CN200780006700.XA CN101389441B (zh) 2006-02-23 2007-02-23 塑料基底上的涂层方法和涂覆的塑料产品
RU2008137492/02A RU2467092C2 (ru) 2006-02-23 2007-02-23 Способ нанесения покрытия и металлическое изделие, снабженное покрытием
EP20070704872 EP1993775A1 (en) 2006-02-23 2007-02-23 Coating on a glass substrate and a coated glass product
EP07704867A EP1993774A2 (en) 2006-02-23 2007-02-23 Coating on a medical substrate and a coated medical product
JP2008555823A JP5237125B2 (ja) 2006-02-23 2007-02-23 金属基材上のコーティングおよびコーティングした製品
EP20070704871 EP1994194A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
FI20075141A FI124524B (fi) 2006-02-23 2007-02-23 Järjestely ja menetelmä puolijohteen valmistamiseksi
JP2008555824A JP2009527914A (ja) 2006-02-23 2007-02-23 太陽電池ならびに太陽電池を生産する装置および方法
CNA2007800063615A CN101389439A (zh) 2006-02-23 2007-02-23 太阳能电池以及用于生产太阳能电池的设备和方法
CN200780006479.8A CN101389440B (zh) 2006-02-23 2007-02-23 利用碳氮化物的涂覆以及碳氮化物涂覆的产品
FI20075136A FI124359B (fi) 2006-02-23 2007-02-23 Muovisubstraatin päällystäminen ja päällystetty muovituote
PCT/FI2007/050097 WO2007096476A2 (en) 2006-02-23 2007-02-23 Coating on a medical substrate and a coated medical product
JP2008555814A JP5437640B2 (ja) 2006-02-23 2007-02-23 高品質の表面を製造するための方法および高品質の表面を有する製品
JP2008555815A JP5383204B2 (ja) 2006-02-23 2007-02-23 エレメント
JP2008555821A JP5237123B2 (ja) 2006-02-23 2007-02-23 プラスチック基材の塗装方法及び塗装されたプラスチック製品
FI20075134A FI124358B (fi) 2006-02-23 2007-02-23 Lasisubstraatin päällystäminen ja päällystetty lasituote
DK07712590.4T DK1991716T3 (da) 2006-02-23 2007-02-23 Element
KR1020087023133A KR101395513B1 (ko) 2006-02-23 2007-02-23 플라스틱 기재 상의 코팅 및 코팅된 플라스틱 제품
KR1020087023134A KR101395393B1 (ko) 2006-02-23 2007-02-23 금속 기재 상의 코팅 및 코팅된 금속 제품
PCT/FI2007/050104 WO2007096483A2 (en) 2006-02-23 2007-02-23 Coating on a stone or ceramic substrate and a coated stone or ceramic product
US12/280,657 US8741749B2 (en) 2006-02-23 2007-02-23 Semiconductor and an arrangement and a method for producing a semiconductor
US12/280,636 US20090136739A1 (en) 2006-02-23 2007-02-23 Coating on a plastic substrate and a coated plastic product
US12/280,641 US20080311345A1 (en) 2006-02-23 2007-02-23 Coating With Carbon Nitride and Carbon Nitride Coated Product
PCT/FI2007/050107 WO2007096486A1 (en) 2006-02-23 2007-02-23 Solar cell and an arrangement and a method for producing a solar cell
PCT/FI2007/000046 WO2007096461A2 (en) 2006-02-23 2007-02-23 Method for producing high-quality surfaces and a product having a high-quality surface
KR1020087023172A KR101399235B1 (ko) 2006-02-23 2007-02-23 탄소 질화물 코팅 및 탄소 질화물 코팅된 제품
EP07704813A EP1991386A2 (en) 2006-02-23 2007-02-23 Method for producing high-quality surfaces and a product having a high-quality surface
PCT/FI2007/050106 WO2007096485A2 (en) 2006-02-23 2007-02-23 Coating on a metal substrate and a coated metal product
FI20075131A FI20075131L (fi) 2006-02-23 2007-02-23 Lääketieteellisen alustan päällystäminen ja päällystetty lääketieteellinen tuote
EP07704875A EP1993778A2 (en) 2006-02-23 2007-02-23 Coating with carbon nitride and carbon nitride coated product
US12/280,602 US20090126787A1 (en) 2006-02-23 2007-02-23 Solar cell and an arrangement and a method for producing a solar cell
FI20075140A FI123964B (fi) 2006-02-23 2007-02-23 Aurinkokenno ja järjestely ja menetelmä aurinkokennon valmistamiseksi
RU2008137489/02A RU2467850C2 (ru) 2006-02-23 2007-02-23 Покрытие из нитрида углерода и изделие с таким покрытием
EP20070704877 EP1993780A1 (en) 2006-02-23 2007-02-23 Solar cell and an arrangement and a method for producing a solar cell
FI20075133A FI124360B (fi) 2006-02-23 2007-02-23 Kuitualustalle päällystäminen ja päällystetty kuitutuote
CN201410149093.4A CN104167464A (zh) 2006-02-23 2007-02-23 太阳能电池以及用于生产太阳能电池的设备和方法
KR1020087023252A KR101398379B1 (ko) 2006-02-23 2007-02-23 반도체 및 반도체를 생산하는 설비 및 방법
EP20070704876 EP1993779A2 (en) 2006-02-23 2007-02-23 Coating on a metal substrate and a coated metal product
JP2008555822A JP5237124B2 (ja) 2006-02-23 2007-02-23 窒化炭素を用いたコーティングおよび窒化炭素をコーティングした製品
CNA2007800103487A CN101421071A (zh) 2006-02-23 2007-02-23 制造高质量表面的方法和具有高质量表面的产品
KR1020087023171A KR101395425B1 (ko) 2006-02-23 2007-02-23 유리 기재 상의 코팅 및 코팅된 유리 제품
EP07712590A EP1991716B1 (en) 2006-02-23 2007-02-23 Element
FI20070158A FI20070158L (fi) 2006-02-23 2007-02-23 Järjestely
JP2008555820A JP5237122B2 (ja) 2006-02-23 2007-02-23 ガラス基材の塗装方法及び塗装されたガラス製品
US12/280,650 US20090017318A1 (en) 2006-02-23 2007-02-23 Coating on a metal substrate and a coated metal product
US12/224,316 US20090169871A1 (en) 2006-02-23 2007-02-23 Method for Producing High-Quality Surfaces and a Product Having a High-Quality Surface
PCT/FI2007/000048 WO2007096463A2 (en) 2006-02-23 2007-02-23 Element
US12/280,631 US20100221489A1 (en) 2006-02-23 2007-02-23 Coating on a glass substrate and a coated glass product
FI20075137A FI124357B (fi) 2006-02-23 2007-02-23 Kivi- tai keramiikkasubstraattien päällystäminen ja päällystetty kivi- tai keramiikkatuote
KR1020087023267A KR101367839B1 (ko) 2006-02-23 2007-02-23 고품질 표면을 생성하기 위한 방법과 고품질 표면을 가진 제품
EP20070704878 EP1994195A1 (en) 2006-02-23 2007-02-23 Semiconductor and an arrangement and a method for producing a semiconductor
AT07712590T ATE525493T1 (de) 2006-02-23 2007-02-23 Element
PCT/FI2007/050108 WO2007096487A1 (en) 2006-02-23 2007-02-23 Semiconductor and an arrangement and a method for producing a semiconductor
PCT/FI2007/050103 WO2007096482A2 (en) 2006-02-23 2007-02-23 Coating on a plastic substrate and a coated plastic product
BRPI0707014-4A BRPI0707014A2 (pt) 2006-02-23 2007-02-23 celula solar e um arranjo e um método para a produção de uma célula solar
JP2008555825A JP5414279B2 (ja) 2006-02-23 2007-02-23 半導体ならびに半導体を生産する装置および方法
EP20070704873 EP1993776A2 (en) 2006-02-23 2007-02-23 Coating on a plastic substrate and a coated plastic product
FI20075139A FI124523B (fi) 2006-02-23 2007-02-23 Metallisubstraatin päällystäminen ja päällystetty metallituote
PCT/FI2007/050101 WO2007096480A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
US12/280,622 US20090061210A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
EP20070704874 EP1993777A2 (en) 2006-02-23 2007-02-23 Coating on a stone or ceramic substrate and a coated stone or ceramic product
US12/280,609 US8486073B2 (en) 2006-02-23 2007-02-23 Coating on a medical substrate and a coated medical product
CA002642867A CA2642867A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
PCT/FI2007/050102 WO2007096481A1 (en) 2006-02-23 2007-02-23 Coating on a glass substrate and a coated glass product
RU2008137490/02A RU2467851C2 (ru) 2006-02-23 2007-02-23 Солнечный элемент и способ и система для его изготовления
KR1020087023268A KR20090015021A (ko) 2006-02-23 2007-02-23 요소
RU2008137493/02A RU2435871C2 (ru) 2006-02-23 2007-02-23 Способ получения поверхностей высокого качества и изделие с поверхностью высокого качества
FI20075138A FI123716B (fi) 2006-02-23 2007-02-23 Menetelmä tuotteen tietyn pinnan hiilinitridillä pinnoittamiseksi laserkasvatuksen avulla
PCT/FI2007/050105 WO2007096484A2 (en) 2006-02-23 2007-02-23 Coating with carbon nitride and carbon nitride coated product
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KR1020087023253A KR101467584B1 (ko) 2006-02-23 2008-09-23 태양 전지 및 태양 전지를 생산하는 설비 및 방법

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CN101389441A (zh) 2009-03-18
CN101421071A (zh) 2009-04-29
KR20090005302A (ko) 2009-01-13
CN101389441B (zh) 2014-09-10
WO2007096461A2 (en) 2007-08-30
EP1991386A2 (en) 2008-11-19
KR101367839B1 (ko) 2014-03-14
RU2435871C2 (ru) 2011-12-10
CN101389439A (zh) 2009-03-18
RU2008137493A (ru) 2010-03-27
CN101389440B (zh) 2014-10-15
CN101389440A (zh) 2009-03-18
US20090169871A1 (en) 2009-07-02
JP5437640B2 (ja) 2014-03-12
IL193646A0 (en) 2009-05-04
JP2009527642A (ja) 2009-07-30
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