EP2090872A4 - Piezoelectric sensor and method for manufacturing the same - Google Patents

Piezoelectric sensor and method for manufacturing the same

Info

Publication number
EP2090872A4
EP2090872A4 EP07831449A EP07831449A EP2090872A4 EP 2090872 A4 EP2090872 A4 EP 2090872A4 EP 07831449 A EP07831449 A EP 07831449A EP 07831449 A EP07831449 A EP 07831449A EP 2090872 A4 EP2090872 A4 EP 2090872A4
Authority
EP
European Patent Office
Prior art keywords
manufacturing
same
piezoelectric sensor
piezoelectric
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP07831449A
Other languages
German (de)
French (fr)
Other versions
EP2090872A1 (en
Inventor
Koji Ito
Mitsuhiro Ando
Shunsuke Kogure
Hitoshi Takayanagi
Nobuhiro Moriyama
Iwao Matsunaga
Ryuichi Sudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kureha Corp
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Kureha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd, Kureha Corp filed Critical Aisin Seiki Co Ltd
Publication of EP2090872A1 publication Critical patent/EP2090872A1/en
Publication of EP2090872A4 publication Critical patent/EP2090872A4/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/098—Forming organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
EP07831449A 2006-11-13 2007-11-08 Piezoelectric sensor and method for manufacturing the same Ceased EP2090872A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006306177A JP5044196B2 (en) 2006-11-13 2006-11-13 Piezoelectric sensor and manufacturing method thereof
PCT/JP2007/071718 WO2008059751A1 (en) 2006-11-13 2007-11-08 Piezoelectric sensor and method for manufacturing the same

Publications (2)

Publication Number Publication Date
EP2090872A1 EP2090872A1 (en) 2009-08-19
EP2090872A4 true EP2090872A4 (en) 2011-08-24

Family

ID=39401558

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07831449A Ceased EP2090872A4 (en) 2006-11-13 2007-11-08 Piezoelectric sensor and method for manufacturing the same

Country Status (4)

Country Link
US (1) US8314536B2 (en)
EP (1) EP2090872A4 (en)
JP (1) JP5044196B2 (en)
WO (1) WO2008059751A1 (en)

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KR101598078B1 (en) * 2008-10-06 2016-02-29 삼성전자주식회사 Input apparatus using piezoelectric sensor and operation method using the same
GB2468870B (en) * 2009-03-25 2016-08-03 Peratech Holdco Ltd Sensor
WO2010123188A1 (en) * 2009-04-20 2010-10-28 (주)아이블포토닉스 Biosignal sensitive safety helmet and band
JP2011047893A (en) 2009-08-28 2011-03-10 Nissha Printing Co Ltd Pressure detection unit
JP2011222679A (en) * 2010-04-07 2011-11-04 Daikin Ind Ltd Transparent piezoelectric sheet
CN101859868B (en) * 2010-05-31 2011-11-23 中南大学 Interdigited electrode
US8963534B2 (en) * 2012-06-27 2015-02-24 Chung-Yuan Christian University Triaxial piezoelectric sensor
JP6013120B2 (en) * 2012-10-03 2016-10-25 積水化学工業株式会社 Piezoelectric sensor
US9207134B2 (en) * 2013-04-04 2015-12-08 Chung-Yuan Christian University Electronic device and quad-axial force and torque measurement sensor thereof
ITTO20130307A1 (en) 2013-04-17 2014-10-18 Itt Italia Srl METHOD TO REALIZE A BRAKE ELEMENT, IN PARTICULAR A BRAKE PAD, SENSORIZED, SENSORED BRAKE PAD, VEHICLE BRAKE SYSTEM AND ASSOCIATED METHOD
WO2015005238A1 (en) 2013-07-10 2015-01-15 積水化学工業株式会社 Piezoelectric sensor
JP5950052B2 (en) * 2013-09-20 2016-07-13 株式会社村田製作所 Touch sensor
WO2015100170A1 (en) * 2013-12-23 2015-07-02 Drexel University Piezoelectric plate sensor and uses thereof
JP6004123B2 (en) * 2013-12-24 2016-10-05 株式会社村田製作所 Method for manufacturing piezoelectric sensor
JP6052434B2 (en) * 2013-12-24 2016-12-27 株式会社村田製作所 Method for manufacturing piezoelectric sensor
KR101536973B1 (en) * 2014-01-28 2015-07-22 한국기계연구원 Composite including piezoelectric fibers consisting of single crystal and magnetoelectric composite laminate containing the same
JP6234858B2 (en) * 2014-03-24 2017-11-22 積水化学工業株式会社 Piezoelectric sensor
FR3019291B1 (en) * 2014-03-31 2017-12-01 Institut Francais Des Sciences Et Technologies Des Transp De L'amenagement Et Des Reseaux ACQUISITION DEVICE, METHOD FOR MANUFACTURING THE SAME, FORCE MEASURING METHOD
JP6079931B2 (en) * 2014-04-18 2017-02-15 株式会社村田製作所 Press sensor
JP6108138B2 (en) * 2014-04-30 2017-04-05 株式会社村田製作所 Insulating substrate with conductive pattern
JP6324803B2 (en) * 2014-05-13 2018-05-16 住友電気工業株式会社 Pressure-sensitive sensor and manufacturing method thereof
WO2016060427A1 (en) * 2014-10-15 2016-04-21 중앙대학교 산학협력단 Sensor unit using electro-active polymer for wireless transmission/reception of deformation information, and sensor using same
EP3223684B1 (en) * 2014-11-24 2022-10-26 Tarkett GDL Monitoring system with pressure sensor in floor covering
US9939035B2 (en) 2015-05-28 2018-04-10 Itt Italia S.R.L. Smart braking devices, systems, and methods
KR102432009B1 (en) * 2015-09-03 2022-08-12 엘지이노텍 주식회사 Pressure sensor
ITUB20153706A1 (en) 2015-09-17 2017-03-17 Itt Italia Srl BRAKING DEVICE FOR HEAVY VEHICLE AND METHOD OF PREVENTING BRAKE OVERHEATING IN A HEAVY VEHICLE
ITUB20153709A1 (en) 2015-09-17 2017-03-17 Itt Italia Srl DATA ANALYSIS AND MANAGEMENT DEVICE GENERATED BY A SENSORIZED BRAKE SYSTEM FOR VEHICLES
ITUA20161336A1 (en) 2016-03-03 2017-09-03 Itt Italia Srl DEVICE AND METHOD FOR IMPROVING THE PERFORMANCE OF A VEHICLE ANTI-LOCK AND ANTI-SLIP SYSTEM
IT201600077944A1 (en) 2016-07-25 2018-01-25 Itt Italia Srl DEVICE FOR DETECTION OF RESIDUAL BRAKING TORQUE IN A VEHICLE EQUIPPED WITH DISC BRAKES
GB201617171D0 (en) 2016-10-10 2016-11-23 Universitetet I Troms� - Norges Arktiske Universitet Piezoelectric films
US10553097B2 (en) * 2017-11-09 2020-02-04 Chukwunoso ARINZE Interactive smart seat system
US11245065B1 (en) 2018-03-22 2022-02-08 Facebook Technologies, Llc Electroactive polymer devices, systems, and methods
US10962791B1 (en) 2018-03-22 2021-03-30 Facebook Technologies, Llc Apparatuses, systems, and methods for fabricating ultra-thin adjustable lenses
US11048075B1 (en) 2018-03-29 2021-06-29 Facebook Technologies, Llc Optical lens assemblies and related methods
CN111493817B (en) * 2019-01-31 2023-10-10 周冠谦 Ductile flexible sensing device
JP7016198B2 (en) 2019-03-29 2022-02-04 国立大学法人山形大学 Piezoelectric sensor
JP7156324B2 (en) * 2019-05-14 2022-10-19 株式会社村田製作所 Deformation detection sensor
IT201900015839A1 (en) 2019-09-06 2021-03-06 Itt Italia Srl BRAKE PAD FOR VEHICLES AND ITS PRODUCTION PROCESS
JP7395371B2 (en) * 2020-01-30 2023-12-11 株式会社バルカー Sensing device for footwear
EP4326586A1 (en) 2021-05-25 2024-02-28 ITT Italia S.r.l. A method and a device for estimating residual torque between the braked and braking elements of a vehicle

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0219149A1 (en) * 1985-09-11 1987-04-22 Océ-Nederland B.V. System for determining the pressure in the nip between two rollers
EP0576400A1 (en) * 1992-06-24 1993-12-29 Algra Holding Ag Method of making piezoelectric pressure-sensitive key or keyboard and product of the method
US20060144154A1 (en) * 2002-10-01 2006-07-06 Naohiro Ueno Piezoelectric sensor and input device comprising same

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JPS61165438A (en) * 1985-01-16 1986-07-26 株式会社　小島製作所 Fixing jig to concrete molding frame of drain instrument
JPS61165438U (en) * 1985-04-02 1986-10-14
JPS6256829A (en) * 1985-09-05 1987-03-12 Daikin Ind Ltd Impact sensor
JPH05249135A (en) * 1991-03-25 1993-09-28 Fujikura Ltd Manufacture of piezoelectric acceleration sensor
JPH0749354A (en) * 1993-08-04 1995-02-21 Fujikura Ltd Piezoelectric vibration sensor
JP3365832B2 (en) * 1993-09-08 2003-01-14 株式会社日立ユニシアオートモティブ Piezoelectric element
JP2734997B2 (en) * 1994-09-02 1998-04-02 松下電器産業株式会社 Piezoelectric sensor
JPH1076843A (en) * 1996-09-06 1998-03-24 Matsushita Electric Ind Co Ltd Device for preventing object from being pinched
JPH10332509A (en) 1997-05-27 1998-12-18 Amp Japan Ltd Piezoelectric pressure sensor
JP2000337979A (en) * 1999-05-27 2000-12-08 Tokai Rubber Ind Ltd Distribution sensor
FI108986B (en) * 1999-07-01 2002-04-30 Emfitech Oy Process for producing a sensor element and a sensor element
JP2003066154A (en) * 2001-08-21 2003-03-05 Hitachi Zosen Corp Stress meter and seismometer using the same
JP2003185507A (en) * 2001-12-19 2003-07-03 Yukio Fujimoto Tape and method for measuring stress distribution
JP2005156531A (en) * 2003-11-05 2005-06-16 Sony Corp Pressure sensor and biological information processor
JP5646989B2 (en) * 2008-03-21 2014-12-24 日本碍子株式会社 Piezoelectric / electrostrictive element and manufacturing method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0219149A1 (en) * 1985-09-11 1987-04-22 Océ-Nederland B.V. System for determining the pressure in the nip between two rollers
EP0576400A1 (en) * 1992-06-24 1993-12-29 Algra Holding Ag Method of making piezoelectric pressure-sensitive key or keyboard and product of the method
US20060144154A1 (en) * 2002-10-01 2006-07-06 Naohiro Ueno Piezoelectric sensor and input device comprising same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2008059751A1 *

Also Published As

Publication number Publication date
JP5044196B2 (en) 2012-10-10
US20090289529A1 (en) 2009-11-26
JP2008122215A (en) 2008-05-29
WO2008059751A1 (en) 2008-05-22
US8314536B2 (en) 2012-11-20
EP2090872A1 (en) 2009-08-19

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