EP2090872A4 - Piezoelektrischer sensor und verfahren zu seiner herstellung - Google Patents

Piezoelektrischer sensor und verfahren zu seiner herstellung

Info

Publication number
EP2090872A4
EP2090872A4 EP07831449A EP07831449A EP2090872A4 EP 2090872 A4 EP2090872 A4 EP 2090872A4 EP 07831449 A EP07831449 A EP 07831449A EP 07831449 A EP07831449 A EP 07831449A EP 2090872 A4 EP2090872 A4 EP 2090872A4
Authority
EP
European Patent Office
Prior art keywords
manufacturing
same
piezoelectric sensor
piezoelectric
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP07831449A
Other languages
English (en)
French (fr)
Other versions
EP2090872A1 (de
Inventor
Koji Ito
Mitsuhiro Ando
Shunsuke Kogure
Hitoshi Takayanagi
Nobuhiro Moriyama
Iwao Matsunaga
Ryuichi Sudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kureha Corp
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Kureha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd, Kureha Corp filed Critical Aisin Seiki Co Ltd
Publication of EP2090872A1 publication Critical patent/EP2090872A1/de
Publication of EP2090872A4 publication Critical patent/EP2090872A4/de
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/02Forming enclosures or casings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/06Forming electrodes or interconnections, e.g. leads or terminals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/09Forming piezoelectric or electrostrictive materials
    • H10N30/098Forming organic materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/30Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302Sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/857Macromolecular compositions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/88Mounts; Supports; Enclosures; Casings
    • H10N30/883Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
EP07831449A 2006-11-13 2007-11-08 Piezoelektrischer sensor und verfahren zu seiner herstellung Ceased EP2090872A4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006306177A JP5044196B2 (ja) 2006-11-13 2006-11-13 圧電センサ及びその製造方法
PCT/JP2007/071718 WO2008059751A1 (fr) 2006-11-13 2007-11-08 Capteur piézoélectrique et procédé de fabrication de celui-ci

Publications (2)

Publication Number Publication Date
EP2090872A1 EP2090872A1 (de) 2009-08-19
EP2090872A4 true EP2090872A4 (de) 2011-08-24

Family

ID=39401558

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07831449A Ceased EP2090872A4 (de) 2006-11-13 2007-11-08 Piezoelektrischer sensor und verfahren zu seiner herstellung

Country Status (4)

Country Link
US (1) US8314536B2 (de)
EP (1) EP2090872A4 (de)
JP (1) JP5044196B2 (de)
WO (1) WO2008059751A1 (de)

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KR101598078B1 (ko) * 2008-10-06 2016-02-29 삼성전자주식회사 압전 센서를 이용한 입력 장치 및 그의 운용 방법
GB2468870B (en) * 2009-03-25 2016-08-03 Peratech Holdco Ltd Sensor
WO2010123188A1 (ko) * 2009-04-20 2010-10-28 (주)아이블포토닉스 생체신호 감지형 안전모 및 벤드
JP2011047893A (ja) 2009-08-28 2011-03-10 Nissha Printing Co Ltd 圧力検出ユニット
JP2011222679A (ja) * 2010-04-07 2011-11-04 Daikin Ind Ltd 透明圧電シート
CN101859868B (zh) * 2010-05-31 2011-11-23 中南大学 叉指状电极
US8963534B2 (en) * 2012-06-27 2015-02-24 Chung-Yuan Christian University Triaxial piezoelectric sensor
JP6013120B2 (ja) * 2012-10-03 2016-10-25 積水化学工業株式会社 圧電センサ
US9207134B2 (en) * 2013-04-04 2015-12-08 Chung-Yuan Christian University Electronic device and quad-axial force and torque measurement sensor thereof
ITTO20130307A1 (it) 2013-04-17 2014-10-18 Itt Italia Srl Metodo per realizzare un elemento frenante, in particolare una pastiglia freno, sensorizzato, pastiglia freno sensorizzata, impianto frenante di veicolo e metodo associato
US10768066B2 (en) 2013-07-10 2020-09-08 Sekisui Chemical Co., Ltd. Piezoelectric sensor including overlapping cutout sections in a signal electrode, a first ground electrode, and a second electrode
EP3048512A4 (de) * 2013-09-20 2017-05-31 Murata Manufacturing Co., Ltd. Berührungssensor
US10197565B2 (en) 2013-12-23 2019-02-05 Drexel University Piezoelectric plate sensor and uses thereof
JP6052434B2 (ja) * 2013-12-24 2016-12-27 株式会社村田製作所 圧電センサの製造方法
JP6004123B2 (ja) * 2013-12-24 2016-10-05 株式会社村田製作所 圧電センサの製造方法
KR101536973B1 (ko) * 2014-01-28 2015-07-22 한국기계연구원 단결정 압전 섬유 포함 복합체 및 이를 포함하는 자기전기 복합재료 적층체
JP6234858B2 (ja) * 2014-03-24 2017-11-22 積水化学工業株式会社 圧電センサ
FR3019291B1 (fr) * 2014-03-31 2017-12-01 Institut Francais Des Sciences Et Technologies Des Transp De L'amenagement Et Des Reseaux Dispositif d'acquisition, procede de fabrication de celui-ci, procede de mesure de force
WO2015159628A1 (ja) * 2014-04-18 2015-10-22 株式会社村田製作所 押圧センサ
WO2015166700A1 (ja) * 2014-04-30 2015-11-05 株式会社 村田製作所 導電パターン付絶縁基材
JP6324803B2 (ja) * 2014-05-13 2018-05-16 住友電気工業株式会社 感圧センサ及びその製造方法
WO2016060427A1 (ko) * 2014-10-15 2016-04-21 중앙대학교 산학협력단 변형 정보의 무선 송수신을 위한 전기활성고분자를 이용한 센서 유닛 및 이를 이용한 센서
KR20170093158A (ko) * 2014-11-24 2017-08-14 타케트 지디엘 에스에이 바닥재에 압력 센서를 갖는 모니터링 시스템
US9939035B2 (en) 2015-05-28 2018-04-10 Itt Italia S.R.L. Smart braking devices, systems, and methods
KR102432009B1 (ko) * 2015-09-03 2022-08-12 엘지이노텍 주식회사 압력 센서
ITUB20153709A1 (it) 2015-09-17 2017-03-17 Itt Italia Srl Dispositivo di analisi e gestione dei dati generati da un sistema frenante sensorizzato per veicoli
ITUB20153706A1 (it) 2015-09-17 2017-03-17 Itt Italia Srl Dispositivo frenante per veicolo pesante e metodo di prevenzione del surriscaldamento dei freni in un veicolo pesante
ITUA20161336A1 (it) 2016-03-03 2017-09-03 Itt Italia Srl Dispositivo e metodo per il miglioramento delle prestazioni di un sistema antibloccaggio e antiscivolamento di un veicolo
IT201600077944A1 (it) 2016-07-25 2018-01-25 Itt Italia Srl Dispositivo per il rilevamento della coppia residua di frenatura in un veicolo equipaggiato con freni a disco
GB201617171D0 (en) 2016-10-10 2016-11-23 Universitetet I Troms� - Norges Arktiske Universitet Piezoelectric films
US10553097B2 (en) 2017-11-09 2020-02-04 Chukwunoso ARINZE Interactive smart seat system
US11245065B1 (en) 2018-03-22 2022-02-08 Facebook Technologies, Llc Electroactive polymer devices, systems, and methods
US10962791B1 (en) 2018-03-22 2021-03-30 Facebook Technologies, Llc Apparatuses, systems, and methods for fabricating ultra-thin adjustable lenses
US11048075B1 (en) 2018-03-29 2021-06-29 Facebook Technologies, Llc Optical lens assemblies and related methods
CN111493817B (zh) * 2019-01-31 2023-10-10 周冠谦 具延展性的柔性感测装置
US11389115B2 (en) 2019-03-29 2022-07-19 National University Corporation Yamagata University Piezoelectric sensor
JP7156324B2 (ja) * 2019-05-14 2022-10-19 株式会社村田製作所 変形検知センサ
IT201900015839A1 (it) 2019-09-06 2021-03-06 Itt Italia Srl Pastiglia freno per veicoli e suo processo di produzione
JP7395371B2 (ja) * 2020-01-30 2023-12-11 株式会社バルカー 履物用センシング装置
US20240241003A1 (en) 2021-05-25 2024-07-18 Itt Italia S.R.L. A method and a device for estimating residual torque between the braked and braking elements of a vehicle

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0219149A1 (de) * 1985-09-11 1987-04-22 Océ-Nederland B.V. System zur Bestimmung des Drucks zwischen zwei Walzen
EP0576400A1 (de) * 1992-06-24 1993-12-29 Algra Holding Ag Verfahren zur Herstellung einer piezoelektrischen drucksensitiven Taste oder Tastatur und durch dieses Verfahren erhaltenes Produkt
US20060144154A1 (en) * 2002-10-01 2006-07-06 Naohiro Ueno Piezoelectric sensor and input device comprising same

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JPS61165438A (ja) * 1985-01-16 1986-07-26 株式会社 小島製作所 排水器具のコンクリ−ト型枠への固定治具
JPS61165438U (de) * 1985-04-02 1986-10-14
JPS6256829A (ja) * 1985-09-05 1987-03-12 Daikin Ind Ltd 衝撃センサ
JPH05249135A (ja) * 1991-03-25 1993-09-28 Fujikura Ltd 圧電型加速度センサの製造方法
JPH0749354A (ja) * 1993-08-04 1995-02-21 Fujikura Ltd 圧電型振動センサ
JP3365832B2 (ja) * 1993-09-08 2003-01-14 株式会社日立ユニシアオートモティブ 圧電素子
JP2734997B2 (ja) * 1994-09-02 1998-04-02 松下電器産業株式会社 圧電センサ
JPH1076843A (ja) 1996-09-06 1998-03-24 Matsushita Electric Ind Co Ltd 挟み込み防止装置
JPH10332509A (ja) 1997-05-27 1998-12-18 Amp Japan Ltd 圧電式圧力センサ
JP2000337979A (ja) * 1999-05-27 2000-12-08 Tokai Rubber Ind Ltd 分布センサ
FI108986B (fi) * 1999-07-01 2002-04-30 Emfitech Oy Menetelmä anturielementin valmistamiseksi ja anturielementti
JP2003066154A (ja) * 2001-08-21 2003-03-05 Hitachi Zosen Corp 応力計およびこれを用いた地震計
JP2003185507A (ja) * 2001-12-19 2003-07-03 Yukio Fujimoto 応力分布測定テープおよび応力分布測定方法
JP2005156531A (ja) * 2003-11-05 2005-06-16 Sony Corp 圧力センサおよび生体情報処理装置
JP5646989B2 (ja) * 2008-03-21 2014-12-24 日本碍子株式会社 圧電/電歪素子及びその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0219149A1 (de) * 1985-09-11 1987-04-22 Océ-Nederland B.V. System zur Bestimmung des Drucks zwischen zwei Walzen
EP0576400A1 (de) * 1992-06-24 1993-12-29 Algra Holding Ag Verfahren zur Herstellung einer piezoelektrischen drucksensitiven Taste oder Tastatur und durch dieses Verfahren erhaltenes Produkt
US20060144154A1 (en) * 2002-10-01 2006-07-06 Naohiro Ueno Piezoelectric sensor and input device comprising same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2008059751A1 *

Also Published As

Publication number Publication date
US20090289529A1 (en) 2009-11-26
EP2090872A1 (de) 2009-08-19
JP5044196B2 (ja) 2012-10-10
WO2008059751A1 (fr) 2008-05-22
US8314536B2 (en) 2012-11-20
JP2008122215A (ja) 2008-05-29

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