ES2663098T3 - Método de producción de un sensor de temperatura impreso - Google Patents

Método de producción de un sensor de temperatura impreso Download PDF

Info

Publication number
ES2663098T3
ES2663098T3 ES11824675.0T ES11824675T ES2663098T3 ES 2663098 T3 ES2663098 T3 ES 2663098T3 ES 11824675 T ES11824675 T ES 11824675T ES 2663098 T3 ES2663098 T3 ES 2663098T3
Authority
ES
Spain
Prior art keywords
silicon
contacts
temperature
particles
thermistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES11824675.0T
Other languages
English (en)
Spanish (es)
Inventor
David Thomas Britton
Margit Harting
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PST Sensors Pty Ltd
Original Assignee
PST Sensors Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PST Sensors Pty Ltd filed Critical PST Sensors Pty Ltd
Application granted granted Critical
Publication of ES2663098T3 publication Critical patent/ES2663098T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01Manufacture or treatment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
    • G01K7/226Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor using microstructures, e.g. silicon spreading resistance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/02Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/04Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/04Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient
    • H01C7/041Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient formed as one or more layers or coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Thermistors And Varistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
ES11824675.0T 2010-09-13 2011-09-13 Método de producción de un sensor de temperatura impreso Active ES2663098T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ZA201006532 2010-09-13
ZA201006532 2010-09-13
PCT/IB2011/054001 WO2012035494A1 (en) 2010-09-13 2011-09-13 Printed temperature sensor

Publications (1)

Publication Number Publication Date
ES2663098T3 true ES2663098T3 (es) 2018-04-11

Family

ID=45831072

Family Applications (1)

Application Number Title Priority Date Filing Date
ES11824675.0T Active ES2663098T3 (es) 2010-09-13 2011-09-13 Método de producción de un sensor de temperatura impreso

Country Status (9)

Country Link
US (1) US9029180B2 (enExample)
EP (1) EP2616784B1 (enExample)
JP (1) JP5806316B2 (enExample)
KR (1) KR20130128383A (enExample)
CN (1) CN103210290B (enExample)
ES (1) ES2663098T3 (enExample)
RU (1) RU2013116739A (enExample)
WO (1) WO2012035494A1 (enExample)
ZA (1) ZA201301890B (enExample)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011047171A2 (en) 2009-10-16 2011-04-21 Kesumo, Llc Foot-operated controller
WO2013114291A1 (en) * 2012-01-30 2013-08-08 Pst Sensors (Proprietary) Limited Thermal imaging sensors
US9076419B2 (en) 2012-03-14 2015-07-07 Bebop Sensors, Inc. Multi-touch pad controller
DE102012111458B4 (de) * 2012-11-27 2022-12-08 Tdk Electronics Ag Halbleitervorrichtung
US20150108632A1 (en) * 2013-10-23 2015-04-23 Nano And Advanced Materials Institute Limited Thin film with negative temperature coefficient behavior and method of making thereof
JP6024642B2 (ja) * 2013-10-25 2016-11-16 株式会社デンソー 熱電変換装置およびその製造方法
WO2015096927A1 (en) * 2013-12-27 2015-07-02 Arcelik Anonim Sirketi An induction cooker, the safe utilization of which is provided
US9281104B2 (en) * 2014-03-11 2016-03-08 Nano And Advanced Materials Institute Limited Conductive thin film comprising silicon-carbon composite as printable thermistors
JP6574443B2 (ja) * 2014-04-15 2019-09-11 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. 温度測定のための低コストで磁気共鳴安全なプローブ
US9965076B2 (en) * 2014-05-15 2018-05-08 Bebop Sensors, Inc. Piezoresistive sensors and applications
US9442614B2 (en) 2014-05-15 2016-09-13 Bebop Sensors, Inc. Two-dimensional sensor arrays
US9753568B2 (en) 2014-05-15 2017-09-05 Bebop Sensors, Inc. Flexible sensors and applications
US10362989B2 (en) 2014-06-09 2019-07-30 Bebop Sensors, Inc. Sensor system integrated with a glove
SG10201900469PA (en) 2014-07-22 2019-02-27 Brewer Science Inc Thin-film resistive-based sensor
US9931778B2 (en) 2014-09-18 2018-04-03 The Boeing Company Extruded deposition of fiber reinforced polymers
US9863823B2 (en) 2015-02-27 2018-01-09 Bebop Sensors, Inc. Sensor systems integrated with footwear
KR102381654B1 (ko) * 2015-03-23 2022-04-04 삼성디스플레이 주식회사 온도 검출 소자 및 이를 이용한 온도 센서
JP6532259B2 (ja) * 2015-03-27 2019-06-19 東京コスモス電機株式会社 温度センサ
US10082381B2 (en) 2015-04-30 2018-09-25 Bebop Sensors, Inc. Sensor systems integrated with vehicle tires
US9827996B2 (en) 2015-06-25 2017-11-28 Bebop Sensors, Inc. Sensor systems integrated with steering wheels
WO2017022373A1 (ja) 2015-07-31 2017-02-09 株式会社村田製作所 温度センサ
US10034609B2 (en) * 2015-11-05 2018-07-31 Nano And Advanced Materials Institute Limited Temperature sensor for tracking body temperature based on printable nanomaterial thermistor
EP3377867A1 (en) * 2015-11-18 2018-09-26 PST Sensors (Pty) Limited Digital sensor
US10393598B1 (en) * 2015-12-03 2019-08-27 FluxTeq LLC Heat flux gage
CN107560750A (zh) * 2016-06-30 2018-01-09 国神光电科技(上海)有限公司 一种测温电路及一种测温结构
CN106322457B (zh) * 2016-09-09 2018-10-23 深圳拓邦股份有限公司 一种电磁灶
DE102016119340A1 (de) * 2016-10-11 2018-04-12 Heraeus Sensor Technology Gmbh Verfahren zur Herstellung eines Sensors, Sensor und Verwendung eines Sensors
WO2018073826A1 (en) * 2016-10-22 2018-04-26 Lapidot Matan Mobile inspection system for the detection of defect occurrence and location
CN106556474A (zh) * 2016-11-23 2017-04-05 合肥舒实工贸有限公司 热敏电阻温度传感器
CN106370318A (zh) * 2016-11-23 2017-02-01 合肥舒实工贸有限公司 热敏电阻温度传感器
CN106644144A (zh) * 2016-11-23 2017-05-10 合肥舒实工贸有限公司 热敏电阻温度传感器
CN106556473A (zh) * 2016-11-23 2017-04-05 合肥舒实工贸有限公司 热敏电阻温度传感器
EP3373310A1 (en) * 2017-03-06 2018-09-12 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Printed temperature sensor
DE102017105317B3 (de) * 2017-03-14 2018-05-09 Helmholtz-Zentrum Dresden - Rossendorf E.V. Vorrichtung zum Charakterisieren des elektrischen Widerstandes eines Messobjekts
KR101923074B1 (ko) 2017-03-21 2018-11-28 부경대학교 산학협력단 저온 센서용 금 나노입자-실리콘 복합소재
CN107063492A (zh) * 2017-04-20 2017-08-18 武汉大学 一种印刷型温度传感器及应用该温度传感器的疏散标志
KR20190004974A (ko) * 2017-07-05 2019-01-15 주식회사 이엠따블유 프린팅 공정을 이용한 센서의 제조방법 및 이에 의해 제조된 센서
EP3435048A1 (de) * 2017-07-25 2019-01-30 Heraeus Sensor Technology GmbH Sensor zur erfassung eines räumlichen temperaturprofils und verfahren zur herstellung einer sensoreinheit
US11300458B2 (en) 2017-09-05 2022-04-12 Littelfuse, Inc. Temperature sensing tape, assembly, and method of temperature control
US11231331B2 (en) 2017-09-05 2022-01-25 Littelfuse, Inc. Temperature sensing tape
KR102073720B1 (ko) * 2017-12-15 2020-02-05 (주) 텔로팜 최소 침습 기술을 이용한 식물의 수액 흐름 측정용 마이크로 니들 프로브 장치
EP3521786B8 (en) 2018-01-31 2020-11-18 ABB Power Grids Switzerland AG Wound electrical component with printed electronics sensor
DE102018102471B3 (de) * 2018-02-05 2019-02-21 Leoni Kabel Gmbh Vorrichtung und Verfahren zur Messung einer Temperaturverteilung auf einer Oberfläche
JP6524567B1 (ja) * 2018-02-28 2019-06-05 株式会社Gceインスティチュート 熱電素子、熱電装置、及び熱電素子の形成方法
KR102007446B1 (ko) * 2018-05-21 2019-10-21 해성디에스 주식회사 센서 유닛, 이를 포함하는 온도 센서, 센서 유닛의 제조방법 및 이를 이용하여 제조된 온도 센서
US10884496B2 (en) 2018-07-05 2021-01-05 Bebop Sensors, Inc. One-size-fits-all data glove
KR102131121B1 (ko) * 2018-08-28 2020-07-07 건국대학교 산학협력단 플렉시블 온도 센서를 활용한 온도 제어 시스템
US11280685B2 (en) 2018-10-01 2022-03-22 Goodrich Corporation Additive manufactured resistance temperature detector
US11085833B2 (en) * 2018-10-31 2021-08-10 Xerox Corporation Temperature sensor ink composition with metal oxide nanoparticles
US11187590B2 (en) 2018-11-13 2021-11-30 Institut National D'optique Microbolometer detectors and arrays for printed photonics applications
KR102205001B1 (ko) * 2019-01-28 2021-01-18 순천대학교 산학협력단 롤투롤 그라비아 인쇄를 이용한 온도 센서 태그 제조 방법
CN109781291B (zh) * 2019-02-02 2021-10-26 五邑大学 一种柔性温度传感器
JP7374589B2 (ja) * 2019-02-06 2023-11-07 日東電工株式会社 温度センサフィルム、導電フィルムおよびその製造方法
US11480481B2 (en) 2019-03-13 2022-10-25 Bebop Sensors, Inc. Alignment mechanisms sensor systems employing piezoresistive materials
TWI728345B (zh) * 2019-04-19 2021-05-21 美宸科技股份有限公司 柔性感測器
DE102019122364A1 (de) * 2019-08-20 2021-02-25 Schreiner Group Gmbh & Co. Kg Gegenstand zur Durchführung einer elektrischen Messung an einer Messschicht
DE102019127915A1 (de) * 2019-10-16 2021-04-22 Tdk Electronics Ag Sensorelement und Verfahren zur Herstellung eines Sensorelements
DE102019127924B3 (de) 2019-10-16 2021-01-21 Tdk Electronics Ag Bauelement und Verfahren zur Herstellung eines Bauelements
WO2021214461A1 (en) * 2020-04-22 2021-10-28 Nanoco 2D Materials Limited Negative Temperature Coefficient (NTC) Thermistors Utilising Transition Metal Dichalcogenide Quantum Dots
KR102418224B1 (ko) * 2020-04-24 2022-07-08 성균관대학교산학협력단 탈부착이 가능한 수유병 센싱 장치 및 상기 장치를 포함하는 수유병 모니터링 시스템
JP7519043B2 (ja) 2020-06-12 2024-07-19 Tianma Japan株式会社 熱電変換素子及び熱電変換モジュール
US11688614B2 (en) * 2021-04-28 2023-06-27 Kla Corporation Mitigating thermal expansion mismatch in temperature probe construction apparatus and method
FI129739B (en) * 2021-06-08 2022-08-15 Teknologian Tutkimuskeskus Vtt Oy Improved negative temperature coefficient thermistor
CN114980382B (zh) * 2022-05-09 2025-02-25 闽都创新实验室 一种微型加热器及其应用
CN120188011A (zh) * 2022-11-09 2025-06-20 力特保险丝公司 包括具有多个结晶点的温度传感器元件的温度感测带
TWI898800B (zh) * 2024-08-23 2025-09-21 國巨股份有限公司 電阻器及其製作方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4200970A (en) 1977-04-14 1980-05-06 Milton Schonberger Method of adjusting resistance of a thermistor
US4415607A (en) * 1982-09-13 1983-11-15 Allen-Bradley Company Method of manufacturing printed circuit network devices
JPS61160902A (ja) * 1985-01-08 1986-07-21 松下電器産業株式会社 薄膜サ−ミスタ
EP0290159B1 (en) 1987-04-21 1994-12-21 TDK Corporation PTC heating device
JPH0515750Y2 (enExample) 1987-04-21 1993-04-26
JPH0436072Y2 (enExample) 1987-11-16 1992-08-26
JP2701565B2 (ja) * 1991-03-22 1998-01-21 松下電器産業株式会社 薄膜サーミスタおよびその製造方法
US5363084A (en) 1993-02-26 1994-11-08 Lake Shore Cryotronics, Inc. Film resistors having trimmable electrodes
US5758575A (en) 1995-06-07 1998-06-02 Bemis Company Inc. Apparatus for printing an electrical circuit component with print cells in liquid communication
CA2224236A1 (en) 1995-10-07 1997-04-17 Img Group Limited An electrical circuit component formed of a conductive liquid printed directly onto a substrate
JP2001272282A (ja) * 2000-03-24 2001-10-05 Toshiba Corp 温度検出回路及び同回路を備えたディスク記憶装置
JP2003168340A (ja) * 2001-12-03 2003-06-13 Fujikura Ltd メンブレンスイッチおよびその製造方法
US6794245B2 (en) * 2002-07-18 2004-09-21 Micron Technology, Inc. Methods of fabricating double-sided hemispherical silicon grain electrodes and capacitor modules
US6807503B2 (en) 2002-11-04 2004-10-19 Brion Technologies, Inc. Method and apparatus for monitoring integrated circuit fabrication
ES2548627T3 (es) 2003-01-30 2015-10-19 Pst Sensors (Pty) Limited Dispositivo semiconductor de película fina y procedimiento de fabricación de un dispositivo semiconductor de película fina
CN100385217C (zh) * 2004-12-22 2008-04-30 中国科学院合肥智能机械研究所 一种柔性温度传感器阵列的制备方法
CN1664523A (zh) * 2005-01-13 2005-09-07 中国电子科技集团公司第十三研究所 纳米尺度微型温度传感器的制作方法
KR101462435B1 (ko) 2005-06-30 2014-11-17 피에스티 센서스 (피티와이) 리미티드 표면이 변형된 반도체 나노입자들
JP2007027541A (ja) * 2005-07-20 2007-02-01 Tateyama Kagaku Kogyo Kk Ntcサーミスタ素子とその製造方法
CN101248222B (zh) 2005-08-23 2015-05-13 Pst传感器(私人)有限公司 粒子半导体材料的掺杂
KR101407252B1 (ko) 2005-12-22 2014-06-16 피에스티 센서스 (피티와이) 리미티드 후막 반도체성 잉크
US8637138B2 (en) * 2005-12-27 2014-01-28 Palo Alto Research Center Incorporated Layered structures on thin substrates
US20070234918A1 (en) 2006-03-31 2007-10-11 Edward Hirahara System and method for making printed electronic circuits using electrophotography
JP4997933B2 (ja) * 2006-11-17 2012-08-15 パナソニック株式会社 サーミスタ
US8434704B2 (en) 2008-04-09 2013-05-07 Pst Sensors (Proprietary) Limited Method of producing stable oxygen terminated semiconducting nanoparticles
JP5186007B2 (ja) * 2008-11-17 2013-04-17 アルプス電気株式会社 サーミスタ及びその製造方法
US8895962B2 (en) * 2010-06-29 2014-11-25 Nanogram Corporation Silicon/germanium nanoparticle inks, laser pyrolysis reactors for the synthesis of nanoparticles and associated methods

Also Published As

Publication number Publication date
CN103210290A (zh) 2013-07-17
KR20130128383A (ko) 2013-11-26
US20130203201A1 (en) 2013-08-08
JP2013538462A (ja) 2013-10-10
CN103210290B (zh) 2015-12-09
EP2616784A1 (en) 2013-07-24
WO2012035494A1 (en) 2012-03-22
RU2013116739A (ru) 2014-10-20
EP2616784B1 (en) 2017-12-20
US9029180B2 (en) 2015-05-12
EP2616784A4 (en) 2015-09-09
ZA201301890B (en) 2014-05-28
JP5806316B2 (ja) 2015-11-10

Similar Documents

Publication Publication Date Title
ES2663098T3 (es) Método de producción de un sensor de temperatura impreso
ES2687656T3 (es) Sensor de temperatura de área grande
Nikolic et al. Investigation of ZnFe2O4 spinel ferrite nanocrystalline screen‐printed thick films for application in humidity sensing
TWI785017B (zh) 印刷式溫度感測器及其製造方法
BRPI0816607A2 (pt) elemento de detecção para detectar um analito químico orgânico, sensor e método para detectar um analito químico orgânico
KR20140128395A (ko) 플렉시블 온도 및 스트레인 센서들
JP2013538462A5 (enExample)
US20190331536A1 (en) Temperature sensor
Li et al. Fast response and high stability Mn–Co–Ni–Al–O NTC microbeads thermistors
US9320145B2 (en) Assembling and packaging a discrete electronic component
Hsiao et al. Printed micro-sensors for simultaneous temperature and humidity detection
ES2676021T3 (es) Partículas conductoras, pasta metálica y electrodo
Jakubowska et al. New conductive thick-film paste based on silver nanopowder for high power and high temperature applications
Matusiak et al. Electrical properties of graphite-glass thick-film resistors
KR102265670B1 (ko) 고감도 온도 센서 및 이의 제조방법
US20160131537A1 (en) Temperature sensor with heat-sensitive paste
JP2020038084A (ja) 温度センサー及び温度測定装置
US20160155546A1 (en) Thermistor element
CN203118696U (zh) 一种片式热敏电阻器
JP3161093U (ja) 折り返し導体を有する導電膜フィルムヒーター
Niu et al. Aerosol Jet Printing of Synthesized Ag/Ag Nanowires Hybrid Inks for Highly Sensitive, Wide‐Range Conformal Temperature Sensing
CN207689413U (zh) 一种高灵敏度的贴片式高分子湿敏电容
JP4009933B2 (ja) 電気伝導性酸化物並びに電気伝導性酸化物を用いて構成したセンサー
Middlemiss et al. Printed resistors forflexible electronics—thermal variance mitigation and tolerance improvement via oxide-metal coatings
KR20230154690A (ko) 온도 센서 및 그의 제조 방법