SG10201900469PA - Thin-film resistive-based sensor - Google Patents

Thin-film resistive-based sensor

Info

Publication number
SG10201900469PA
SG10201900469PA SG10201900469PA SG10201900469PA SG10201900469PA SG 10201900469P A SG10201900469P A SG 10201900469PA SG 10201900469P A SG10201900469P A SG 10201900469PA SG 10201900469P A SG10201900469P A SG 10201900469PA SG 10201900469P A SG10201900469P A SG 10201900469PA
Authority
SG
Singapore
Prior art keywords
thin
sensing layer
active
sensor
film resistive
Prior art date
Application number
SG10201900469PA
Inventor
Ryan E Giedd
Vijaya Kayastha
Jonathan Fury
Robert Christian Cox
Original Assignee
Brewer Science Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brewer Science Inc filed Critical Brewer Science Inc
Publication of SG10201900469PA publication Critical patent/SG10201900469PA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

THIN-FILM RESISTIVE-BASED SENSOR Printed resistive-based sensors and transducers comprising a thin, electronically "active" sensing layer within a dielectric and/or metallic layered structure are provided. The electronic resistance of the active sensing layer is measured during a change in the sensor environment. By utilizing a multi- layered architecture around the active sensing layer, the electronic signal of the sensing element can be improved. By carefully selecting the architecture and materials that surround the active sensing layer, the sensitivity, stability, and selectivity of the sensor to detect changes in the environment are improved. This design allows for a number of specific application areas for environmental sensing. Fig. 5
SG10201900469PA 2014-07-22 2015-07-22 Thin-film resistive-based sensor SG10201900469PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462027753P 2014-07-22 2014-07-22
US201562172546P 2015-06-08 2015-06-08

Publications (1)

Publication Number Publication Date
SG10201900469PA true SG10201900469PA (en) 2019-02-27

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201900469PA SG10201900469PA (en) 2014-07-22 2015-07-22 Thin-film resistive-based sensor
SG11201700395XA SG11201700395XA (en) 2014-07-22 2015-07-22 Thin-film resistive-based sensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201700395XA SG11201700395XA (en) 2014-07-22 2015-07-22 Thin-film resistive-based sensor

Country Status (9)

Country Link
US (1) US10352726B2 (en)
EP (1) EP3172582A4 (en)
JP (1) JP2017531163A (en)
KR (1) KR20170033865A (en)
CN (1) CN106716152A (en)
SG (2) SG10201900469PA (en)
TW (1) TWI711806B (en)
WO (1) WO2016014689A1 (en)
ZA (1) ZA201700388B (en)

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Also Published As

Publication number Publication date
SG11201700395XA (en) 2017-02-27
US10352726B2 (en) 2019-07-16
EP3172582A1 (en) 2017-05-31
TW201617585A (en) 2016-05-16
TWI711806B (en) 2020-12-01
CN106716152A (en) 2017-05-24
JP2017531163A (en) 2017-10-19
ZA201700388B (en) 2019-05-29
WO2016014689A1 (en) 2016-01-28
KR20170033865A (en) 2017-03-27
US20160025517A1 (en) 2016-01-28
EP3172582A4 (en) 2018-02-28

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