EP2928632B1 - Wire management system - Google Patents

Wire management system Download PDF

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Publication number
EP2928632B1
EP2928632B1 EP13812164.5A EP13812164A EP2928632B1 EP 2928632 B1 EP2928632 B1 EP 2928632B1 EP 13812164 A EP13812164 A EP 13812164A EP 2928632 B1 EP2928632 B1 EP 2928632B1
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EP
European Patent Office
Prior art keywords
wire
cutting
spool
reservoir
storage spool
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Application number
EP13812164.5A
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German (de)
English (en)
French (fr)
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EP2928632A2 (en
Inventor
Stefan Huggenberger
Christoph Heiniger
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Precision Surfacing Solutions GmbH
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Precision Surfacing Solutions GmbH
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Application filed by Precision Surfacing Solutions GmbH filed Critical Precision Surfacing Solutions GmbH
Priority to EP13812164.5A priority Critical patent/EP2928632B1/en
Publication of EP2928632A2 publication Critical patent/EP2928632A2/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/0007—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0061—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of devices for guiding or feeding saw wires
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
    • B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
    • B23D61/185—Saw wires; Saw cables; Twisted saw strips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

Definitions

  • the invention refers to a wire management system for a wire saw having a cutting wire which is guided through a cutting area, a wire saw and a cutting method.
  • This invention particularly relates to the fixed abrasive sawing technology.
  • wafers for semiconductor application, solar cells or LEDs are cut more and more using fixed abrasives.
  • the abrasives are directly attached to the metal wire.
  • Such wire is called fixed abrasive wire (e.g. diamond wire).
  • Typical (brittle) materials sawn are GaAs, germanium, polycrystalline or monocrystalline or mono-like silicon, InP, quartzes, sapphire or other ceramic materials.
  • the wire guiding rolls of a wire saw are polyurethane coated having grooves on the wire receiving surface for guiding the cutting wire.
  • the diamond wire is webbed over the wire guiding rolls in those grooves.
  • the pitch of the grooves i.e. distance over which the groove pattern repeats itself
  • the wire diameter that is used will determine the thickness of the sawn wafers.
  • the cost of the process of fixed abrasive watering can be reduced considerably if the fixed abrasive wire can be continuously used in consecutive cuts even though part of the wire web was already used in a previous cut on condition that the remaining sawing capability of that used wire hasn't decreased too much.
  • the sawing capability can be measured by the wire deflection (bow of the wire) in the process. Wire that has lost its sawing potential will deflect more (have a higher bow) than fresh, unused wire.
  • Prior art document CH691292A5 shows in Fig. 1 a wire saw having a wire management system, the wire saw being ready to cut.
  • cutting wire is spooled off from a supply spool, runs thru the cutting area thereby forming a wire web, and is then spooled onto a receiving spool (disposal spool).
  • a receiving spool Normally, the supplying spool, the receiving spool and the wire guide roller forming the wire web are driven.
  • CH691292A5 discloses a wire management system as per the preamble of claim 1.
  • the wire runs in one direction for e.g. 500-600 meters, i.e. 500-600 additional meters are spooled off the supply spool and onto the receiving spool as compared to the starting point, but only e.g. 490 to 590 meters are spooled back from the receiving spool to the supply spool. In this way new wire is fed to the wire web. Once a cutting wire portion no longer reaches the work piece to be cut (i.e. more cutting wire is fed in behind this portion so that when the wire moves back, it does not reach the work piece any more), the wire should be exhausted: the diamonds on the cutting wire a grinded down or have detached from the wire.
  • JP2000158436 discloses a wire management system having subsequent to the supply spool an intermediate wheel. Cutting wire is spooled off from the supply spool, then runs to an intermediate wheel before running to the wire web. When the wire leaves the wire web, it goes to a second intermediate wheel before it is spooled onto the receiving spool. Clearly, cutting wire can be fed thru the wire web as long as the intermediate wheel can supply cutting wire without introducing new wire from the supply spool. Moreover, if the diameter of the intermediate wheel is D, ⁇ D wire can be used for cutting without the need of rotating the supply spool and receiving spool. However, the length of the wire portion which may be temporarily stored on the intermediate wheel is very short.
  • JP2000-024905 discloses wire saw having a wire management system.
  • Intermediate capstan drums are used for reducing the tension in the cutting wire so that the wire is spooled onto the supply and receiving spools with less tension. This may prevent the pulleys and rolls from wearing down too fast.
  • the tension in the wire cannot be reduced to zero, the wire will still harm itself as it is wound onto and off the reservoir spools.
  • each of these intermediate drums requires a separate drive having a highly dynamical control.
  • the object of the present invention is to overcome these problems and to provide a wire management system which prevents the cutting wire from damage.
  • the wire management system should particularly prevent wire breakage due to relative movement of the wire (wire to wire friction/scraping) on the spools.
  • the life time of the cutting wire should be increased by means of a wire management of low wear.
  • Low wear wire management allows to use the same wire portion much longer than in prior art.
  • the cycles of adding new cutting wire portion should be extendable by the invention.
  • the wire management system itself should be easy in construction, place-saving and cost-effective. With the wire management system it should be possible to store a large wire quantity at low space requirements.
  • the inventive wire management system efficiently reduces the risk of wire breakage, increases the life time of the cutting wire, reduces unwanted loss of abrasive particles such as diamonds from the wire. This is achieved by reducing the wear of the cutting wire during the cutting procedure.
  • the reservoir spool allows to carry a large amount of cutting wire in overlapping windings.
  • the storage spool allows to carry the cutting wire in non-overlapping windings.
  • the storage spool temporarily carries that wire portion which is used during a Pilgrim cycle, i.e. cutting wire is moved in a first direction and then reversed. During winding and/or unwinding the cutting wire from the storage spool the wire is not spooled on a reservoir of multiple windings but is directly in contact with the wire contact surface of the storage spool.
  • the invention also allows to manage a large wire quantity (i.e. very long wire sections) within a Pilgrim cycle. Nevertheless, it is possible to add any desired amount of a new wire to and/or to remove any desired amount of used wire from that wire portion which runs in one or more cycles through the cutting area.
  • Density of wire windings means the number of wire windings per unit length along the axis of the spool.
  • the storage spool Preferably on the storage spool no more than 10 windings overlap with each other, preferably no more than 5 windings overlap and ideally no wires overlap.
  • the cutting wire is carried throughout the storage spool in non-overlapping windings, preferably over at least the largest part of the storage spool.
  • the rotational speeds of the reservoir spool and the associated storage spool is during the predominant phase of the cutting cycles essentially equal. Only when the wire is wound consecutively on two spools (first reservoir spool and then storage spool or vice versa) the speed of the wire receiving surface is important. Moreover, if the surface speeds of the reservoir spool and the storage spool are not identical, the wire will have to be accelerated or decelerated as it adapts the speed of the spool it is wound onto. Since the diameter of the reservoir spool changes as the wire is used up, this speed difference has to be mitigated by changing the rotational speed, by means of a tensioning system for the wire or both. After the transition, the rotational speeds should be identical except for small adjustments in the tension in the wire crossing from one spool to the next.
  • the wire guiding means is movable along the axis of the storage spool and/or along the axis of the reservoir spool.
  • the aim of the invention is, to keep the density of windings on the storage spool much smaller than the windings on the reservoir spool.
  • the cutting wire is carried throughout the storage spool in non-overlapping windings.
  • the low wear of the cutting wire is caused by the use of a storage spool with a lower winding density or non-overlapping windings at all.
  • the longer life time of the cutting wire allows to reduce the addition of new wire portions during the Pilgrim cycles.
  • a preferred embodiment of the invention allows the use of a diamond cutting wire having a large diamond density.
  • wires typically have around 600 diamonds per mm 2 .
  • Wires with high density may have 800 or even more diamonds per mm 2 on its surface.
  • the diamond density amounts to at least 800, more preferred at least 1.000 diamond grains per mm 2 cutting wire surface.
  • the spooling from/on the storage spool of non-overlapping (or few overlapping) windings is very gentle for the cutting wire (i.e. the wear originating from spooling up and spooling off is negligible). The abrasion and detaching of diamonds can be avoided.
  • synchronizing means are provided, such that one of the reservoir spool and the storage spool does not rotate faster than the other spool. Such a synchronization may be accomplished mechanically or by means of a control device. Storage spool and reservoir spool should rotate at least essentially at the same rotational speed, in order to prevent the wire from distorting and/or twisting.
  • a very simple and space saving construction is achieved by the coinciding rotational axes of the storage spool and the reservoir spool.
  • the run of the cutting wire from one spool to the other spool may be realized in an uncomplicated way.
  • the wire guiding means is preferably adapted to facilitate the incremental addition of new wire of the reservoir spool of the wire supplying unit to the cutting area and/or to dispose worn wire to the reservoir spool of the receiving unit.
  • the storage spool and the reservoir spool are arranged such that one end of the storage spool faces towards one end of the reservoir spool.
  • the rotational axes coincides with the spool axes.
  • the diameter of the wire carrying surface of the storage spool is larger than the diameter of the wire carrying surface of the reservoir spool. This allows to hold a large amount of wire in the reservoir spool in multiple overlapping windings. On the other hand the wire does not overlap on the storage spool and such the diameter can be larger. A larger diameter also allows to temporarily store a larger amount of wire in non-overlapping manner.
  • the diameters of the storage spool and the reservoir spool in the transition region are essentially the same. This allows an undisturbed transition when taking of cutting wire, i.e. when changing the take-off from one spool to the other spool.
  • the diameter of the storage spool and the diameter of the reservoir spool are essentially identical.
  • the wire carrying surface of the storage spool may have about the same diameter as the wire carrying surface of the reservoir spool or the diameter of the reservoir spool being fully loaded with cutting wire has the same or larger diameter than the wire carrying surface of the storage spool.
  • the diameter of the wire winding top surface diminishes.
  • the wire carrying surface is that surface of the spool being in contact with the wire and the wire winding top surface is the top surface formed by the wire windings on that spool.
  • the length of the wire carrying surface of the storage spool is larger than the length of the wire carrying surface of the reservoir spool. This allows the temporary storage of a large amount of cutting wire.
  • the reservoir spool is mounted to the storage spool in a detachable manner.
  • an empty reservoir spool may be easily exchanged by a new reservoir spool loaded by new cutting wire.
  • the reservoir spool is formed sleeve-like and put over an end region of the storage spool.
  • the detachable reservoir spools may be constructed light weighted and cost effective and may be easily and concentrically mounted to the storage spool.
  • At least one of the wire supplying unit and the wire receiving unit comprises a synchronizing means being capable of synchronizing the rotational speed of the reservoir spool and the rotational speed of the storage spool with each other.
  • a synchronizing means being capable of synchronizing the rotational speed of the reservoir spool and the rotational speed of the storage spool with each other.
  • the reservoir spool and the storage spool may be mounted on a common axle.
  • the axle may be supported between the reservoir spool and the storage spool by a support. In this way the reservoir spool can be mounted from one side only and thus being readily exchangeable.
  • the mounting further can have a (static or rotating, free or forced) slanted or tapered portion that facilitates the cross-over of the wire from the reservoir spool to the storage spool and vice versa.
  • the common axle is a machine axle, e.g. a common machine shaft.
  • the synchronizing means is a fixed connection between the storage spool and the reservoir spool and wherein the storage spool and the reservoir spool have a common rotational drive.
  • a mechanical connection which is a torque-proof connection, guarantees optimal synchronization of the spools.
  • each of the storage spool and the reservoir spool has its own rotational drive and wherein the synchronizing means is a control device connected to the rotational drives.
  • the rotational speed may be temporarily changed to equalize the 'surface speed' or circumferential speed (circumference where the wire is wound on). In this way the shock in the wire can be reduced when changing between spools. However, during most time of the cutting procedure the rotational speed must be equal.
  • Separate drives allow to take up the jump in the wire velocity when changing between the spools.
  • the transition between the spools is done preferably at very low rotational speeds such that other shock damping means such as a dancer pulley (maybe electrically driven) may easily compensate the occurring forces.
  • the traveler pulley may hold the tension of the wire within given tolerances.
  • the reservoir spool and the storage spool have normally the same rotational speed. Just in the transition area a slight deviation between the rotational speeds may be desired. This may be achieved by a control device which controls the separate drives.
  • an elastic material may be provided to damp the change in wire tension. It is important that the reservoir spool and the storage spool move synchronized with each other during the cutting procedure, thus avoiding wire breakage.
  • the storage spool and/or the reservoir spool may have a transition area facilitating the transition of the wire from one spool to the other. This area is not used for storing wire, but for making the transition smooth.
  • the transition area between the storage spool and the reservoir spool has a tapered or rounded shape, wherein preferably the transition area is formed by a separate member being inserted between storage spool and reservoir spool. This allows a smooth transition of the wire from the reservoir spool to the storage spool.
  • the transition area is formed of elastic material.
  • the wire guiding means comprises a traveler pulley which is movable along the rotational axis of the storage spool.
  • the linear movement of the traveler pulley allows to wind the wire on the storage spool in a defined manner, preferably in non-overlapping windings.
  • the path of the traveler pulley preferably extends over the length of the storage spool and over the length of the reservoir spool, such that wire can be directly taken from the reservoir spool when adding new wire.
  • the wire guiding means comprises at least one helical wire guiding groove on the wire carrying surface of the storage spool. This allows to prevent winding in undefined manner.
  • the storage spool is a drum.
  • the drum has preferably a relatively soft sheath or mantle (e.g. 98°shore).
  • the soft mantle can be replaced.
  • the storage spool may have an elastic coating that can be lathed or grinded several times to smooth the surface so that the drum can be used multiple times before the mantel has to be replaced.
  • the storage spool may have a mantle with a helical wire guiding groove. Since the wire has to be placed in a spiral around the spool, it is important that the wire stays in the right place. A helical groove may efficiently support this object.
  • the object is also achieved by means of a wire saw for cutting a piece of material, preferably semiconductor material, such as an ingot, brick or core, the wire saw has a cutting area, guiding means for guiding the cutting wire through the cutting area and driving means for driving the cutting wire in opposite directions characterized in that the wire saw comprises a wire management system according to one of the embodiments described above.
  • the work piece may be any material, typically brittle material such as sapphire, Boron, glass, quartz, silicon, etc.
  • the wire saw maybe used for cutting wafers (wire web), bricking (mesh of wires such as e.g. disclosed in WO2010128011A1 ), cropping, squaring (making round ingots square or semi-square, i.e. typical mono-crystalline shape with slanted corners), cutting rods and/or any other cutting action of brittle materials.
  • the cutting wire of the wire saw extends between the reservoir spool of the supplying unit and the reservoir spool of the receiving unit. I.e. the ends of the wire are fixed on the reservoir spools. In between those spools, the wire forms in the cutting area a cutting portion (e.g. a wire web or a single cutting range) for cutting a work piece.
  • a cutting portion e.g. a wire web or a single cutting range
  • the wire saw comprises at least two wire guide rollers forming from the cutting wire a wire web.
  • the invention may however also be used for squaring, bricking and cropping.
  • the cutting field may contain a single wire or multiple wires that are adjacent or are crossed.
  • the distance between the wires may be less than one millimeter (e.g. wafering) or more than 10 centimeters (e.g. bricking).
  • wire saw refers to all these types of saws.
  • the object is also achieved by a cutting method of cutting a piece of material, preferably semiconductor material, such as an ingot, brick or core, with a wire saw as mentioned above, wherein the moving direction of the cutting wire through the cutting area is alternately reversed, wherein during the movement of the cutting wire in a first direction, cutting wire is unwound from the storage spool of one of the wire supplying unit and the wire receiving unit.
  • a cutting method of cutting a piece of material, preferably semiconductor material, such as an ingot, brick or core with a wire saw as mentioned above, wherein the moving direction of the cutting wire through the cutting area is alternately reversed, wherein during the movement of the cutting wire in a first direction, cutting wire is unwound from the storage spool of one of the wire supplying unit and the wire receiving unit.
  • the movement of the cutting wire in the first direction is proceeded until at least 60%, preferably at least 80% of the length of the wire carrying surface of the storage spool is free from cutting wire, and then the moving direction of the cutting wire is reversed.
  • the wire may at least partially remain on the wire carrying surface of the storage spool so that it guides the wire when the direction is changed.
  • cutting wire is wound up on the storage spool of the other of the wire supplying unit and the wire receiving unit, and/or wherein the movement of the cutting wire in the first direction is reversed when still at least 40%, preferably at least 20% of the length of the wire carrying surface of the storage spool is free from cutting wire.
  • the movement of the cutting wire in the first direction is proceeded until the whole wire carrying surface of the storage spool is free from cutting wire and a portion of new cutting wire is unwound from the reservoir spool.
  • the cutting wire is a wire having fixed abrasives, preferably a diamond wire.
  • the wire may be a structured wire, e.g. as known from CN101628451A and/or from CN102152215A .
  • An embodiment of the cutting method is characterized in that unused wire is added to the cutting section, preferably in intervals.
  • a step wire is transferred from the reservoir spool of the wire supplying unit to the storage spool of the wire receiving unit via the cutting area (addition of 'new' wire portion).
  • another step wire is transferred from the storage spool of the wire supplying unit directly to the reservoir spool of the wire receiving unit via the cutting area (disposing worn wire portion).
  • the tensioning system for the cutting wire preferably consist of the dancer pulley being movable and mounted on a pulley arm.
  • a measurement device is integrated for measuring the actual tension. In such a manner a controlled winding process may be achieved by pre-calculating the optimal position of the traveler pulley.
  • the traveler pulley is controlled to take the exact position along the reservoir spool according to the windings.
  • a control is required to consider exactly the wire pitch on the spools and to prevent that the windings on the storage spool contact each other (non-overlapping). This is also guaranteed at high velocities.
  • cutting wire is unwound from the storage spool of a wire supplying unit and transferred to the wire web via the new wire side of the wire web and transferred from the wire web via the used wire side of the wire web to a wire receiving unit and there wound on the storage spool and wherein during the movement of the cutting wire in a second direction, cutting wire is unwound from the storage spool of the wire receiving unit and transferred to the wire web via the used wire side of the wire web and transferred from the wire web via the new wire side of the wire web to the wire supplying unit and there wound on the storage spool.
  • a freely defined piece of used cutting wire is transferred from the wire web via the used wire side of the wire web and wound on the reservoir spool of the wire receiving unit in order to be definitively stored there while a piece of cutting wire of similar length preferably equal length is unwound from the storage spool of the wire supplying unit and transferred to the wire web via the new wire side.
  • a freely defined piece of new cutting wire unwound from the reservoir spool of the wire supplying unit is transferred to the wire web via the new wire side of the wire web in order to partially renew the wire web while a piece of cutting wire of similar length preferably equal length is transferred from the wire web via the used wire side and wound on the storage spool of the wire receiving unit.
  • the cutting wire keeps moving in the same direction through the cutting area while it is directed by the wire guiding means to be subsequently wound on the storage spool of the wire receiving unit.
  • the cutting wire keeps moving in the same direction through the cutting area while it is directed by the wire guiding means to be subsequently unwound from the reservoir spool of the wire supplying unit.
  • the wire speed of the cutting wire is reduced below 20%, preferably below 5% of the maximal wire speed while being directed by the wire guiding means from the storage spool to the reservoir spool and vice versa.
  • the movement of the cutting wire in the first direction is continued until at least 80%, preferably almost 100% of the length of the wire carrying surface of the storage spool of the supplying unit is free from cutting wire, and then the moving direction of the cutting wire is reversed and subsequently the movement of the cutting wire in the second direction is continued until at least 80%, preferably almost 100% of the length of the wire carrying surface of the storage spool of the receiving unit is free from cutting wire.
  • one piece of used cutting wire after the other is deposited on the reservoir spool of the wire receiving unit until the reservoir spool of the wire supplying unit is completely empty and subsequently has to be exchanged by a new and full reservoir spool and equally the filled up reservoir spool of the wire receiving unit has to be exchanged by an empty reservoir spool.
  • the moving direction of the cutting wire is reversed before the cutting wire is completely unwound from the storage spool of the supplying unit, such that during the first cutting cycle a section of cutting wire, preferably an unused section of cutting wire, remains on the storage spool of the supplying unit without reaching the cutting area, and wherein during a second cutting cycle, comprising a plurality of reversals of the moving direction of the cutting wire, the moving direction of the cutting wire is reversed such that a section of cutting wire which during the first cutting cycle remained on the storage spool of the supplying unit without having reached the cutting area is fed towards and preferably brought into the cutting area.
  • the moving direction of the cutting wire is reversed during the second cutting cycle before the cutting wire is completely unwound from the storage spool of the receiving unit, such that during the second cutting cycle a used section of cutting wire is stored on the storage spool of the receiving unit without reaching the cutting area.
  • This embodiment allows to cut a piece of material by means of subsequent cutting cycles, each cutting cycle using a different section of cutting wire, that may or may not overlap. If a section of cutting wire is completely worn down (by abrasion of particles, e.g. diamonds) an adjacent section of cutting wire may be used. Such an unused section may be found on the storage spool of the supplying unit. Initially, there is enough wire stored on the storage spool of the supplying unit to provide wire length for at least two different cutting cycles. The changeover from a (used) section to a (unused) section may be done without winding new (unused) wire from the reservoir spool of the supplying unit and without winding old (used) wire onto the reservoir spool of the receiving unit. In such a manner transitions between the storage spool and the reservoir spool is avoided during a cut (i.e. completely cutting through a piece of material, an ingot, brick or core).
  • the force or pressure on the material to be cut is more uniformly distributed throughout the cutting cycles.
  • the addition of new wire does not change the force or pressure, since it is taken form the same spool, i.e. storage spool, with the same diameter and no sudden changes in wire tension occur.
  • the wire on the storage spool has approximately the same tension as the wire in the wire web (e.g. 20N - 25N).
  • the wire on the reservoir spool has usually a smaller tension (7N) .
  • there are no changes in cutting wire velocity, tension of the cutting wire, etc. since the wire is taken from the same spool.
  • deviations from an ideal cut of the wafers due to an inhomogeneous spool surface such as rills (grooves in axial direction of the wire), etc. may be avoided efficiently.
  • the cutting method comprises a step of transferring a used section of cutting wire from the storage spool of the receiving unit to the reservoir spool of the receiving unit, wherein the step of transferring is preferably done by completely unwinding the used section of cutting wire from the storage spool of the receiving unit (i.e. temporarily moving it towards or into the cutting area) followed by reversal of the moving direction of the cutting wire and winding the used section of cutting wire on the reservoir spool of the receiving unit.
  • a separate step is performed for removing the wire temporarily stored on the storage spool of the receiving unit to the respective reservoir spool.
  • the step of transferring a used section of cutting wire from the storage spool of the receiving unit to the reservoir spool of the receiving unit is done between two successive cuts.
  • the cut of materials is not influenced by this step of transferring, since it is performed between two cuts, i.e. when there is no material (to be cut) in contact with the wire web (cutting area).
  • Another aspect of the invention relates to the non-uniform abrasion of the cutting wire.
  • cutting wire is used section-wise, i.e. in a first cutting cycle a first section of cutting wire is used (i.e. brought in contact with the piece of material to be cut) and in a subsequent cycle a subsequent section of cutting wire is used for cutting.
  • the sections of cutting wire are objected to a non-uniform abrasion particularly in the end regions of that sections, leading to a loss of cutting wire which is still "sharp", i.e. to a sub-optimal exploitation of cutting wire.
  • This cutting method allows to optimally exploit the cutting wire, particularly also the end regions of the cutting wire sections used within a cutting cycle.
  • the principle will be explained in detail below and with respect to corresponding figures.
  • the overlapping range is located outside a range of wire points having between two successive reversals of the cutting wire within a cutting cycle essentially the same effective interaction length with the piece of material.
  • the second cutting section starts at the end of the complete usage section of the first cutting cycle. In that way the regions with less wear overlap. Surprisingly it was found that in this way the reduced wear of the overlapping sections adds up to the same amount of wear as in the complete usage section.
  • Fig. 1 shows a wire saw 8 for cutting a piece of material, preferably semiconductor, sapphire or quartz material in form of an ingot, brick or core.
  • the wire saw 8 has a cutting area 13 and wire guide rollers 14 guiding the cutting wire 3 through the cutting area 13 thereby forming from the cutting wire 3 a wire web.
  • the wire saw 8 comprises drives 15 for alternately driving the cutting wire 3 in a first direction and a second direction which is opposite to the first direction.
  • the wire saw according to the invention may also have wires crossing each other as is the case in a squarer.
  • the cutting web in the cutting area may also consist of a single wire.
  • Wire saw 8 has a wire management system 7 comprising a wire supplying unit 5 for supplying cutting wire 3 to the cutting area 13 of the wire saw 8 and a wire receiving unit 6 for receiving cutting wire 3 from the cutting area 13 of the wire saw 8.
  • a wire management system 7 comprising a wire supplying unit 5 for supplying cutting wire 3 to the cutting area 13 of the wire saw 8 and a wire receiving unit 6 for receiving cutting wire 3 from the cutting area 13 of the wire saw 8.
  • the moving direction of the wire 3 is alternately reversed such that also the supplying unit 5 has a receiving function and the receiving unit 6 has a supplying function depending on the actual moving direction.
  • the supplying unit 5 comprising the reservoir spool 1 with new wire.
  • the receiving unit 6 comprising a reservoir spool 1 for collecting used up wire for disposing of it.
  • both supplying unit 5 and receiving unit 6 are of similar construction.
  • Each unit comprises a rotatable reservoir spool 1 for carrying the cutting wire 3 in overlapping windings and a rotatable storage spool 2 for temporarily receiving the cutting wire 3 in windings (not shown).
  • a rotatable reservoir spool 1 for carrying the cutting wire 3 in overlapping windings
  • a rotatable storage spool 2 for temporarily receiving the cutting wire 3 in windings (not shown).
  • the windings on the storage spool 2 do not overlap.
  • the rotational axis 2b of the storage spool 2 coincides with the rotational axis 1b of the reservoir spool 1.
  • Each unit comprises a wire guiding means 9 adapted for guiding the cutting wire 3 when being wound up on (or wound from) the respective storage spool 2, such that the wire windings on the storage spool 2 do not overlap each other and/or have a lower density than the windings on the reservoir spool 1.
  • the wire guiding means 9 is a traveler pulley 4 which is movable in a direction which is essentially parallel to the rotational axes of the spools 1, 2.
  • Fig. 2 shows a supply unit 5 (or a receiving unit 6) in more detail.
  • the diameter of the wire carrying surface 2a of the storage spool 2 is larger than the diameter of the wire carrying surface 1a of the reservoir spool 1.
  • the length of the wire carrying surface 2a of the storage spool 2 is larger than the length of the wire carrying surface 1a of the reservoir spool 1.
  • Fig. 2 shows a situation in which storage spool 2 is almost completely wound with cutting wire 3.
  • wire When moving the cutting wire 3 in the direction of the cutting area 13 ( Fig. 13 ) wire is successively unwound from the storage spool 2.
  • Fig. 3 the cutting wire is partially unwound from storage spool 3 and in Fig. 4 storage spool 2 is free from cutting wire 3.
  • traveler pulley 4 continuously runs from right to left.
  • the wire supplying unit 5 and the wire receiving unit 6 each comprises a synchronizing means capable of synchronizing the rotational speed of the reservoir spool 1 and the rotational speed of the storage spool 2 with each other.
  • the synchronizing means consists of a fixed mechanical connection between the spools 1, 2. This ensures here, that the spools 1, 2 have the same rotational speed. In this case the storage spool 2 and the reservoir spool 1 have a common rotational drive.
  • each of the storage spool 2 and the reservoir spool 1 has its own rotational drive 10, 11, e.g. a motor.
  • synchronizing means is a control device 16 connected to both the rotational drives 10, 11 and controlling their rotational speed. If a synchronizing means is used for synchronization, the reservoir spool 1 and the storage spool 2 may be accelerated or decelerated independently to compensate of the difference in the diameter of their wire receiving surfaces or their wire windings top surfaces, respectively. Since the spools 1, 2 can be rotated independently, their speeds may also be changed independently and even in time parallel.
  • the rotational speed of the reservoir spool may be slightly higher so that when the wire crosses over from the reservoir spool to the storage spool, their wire winding top surfaces have the same speed. The same possibility may be used when going from the storage spool 2 to the reservoir spool 1.
  • the reservoir spool 1 is mounted to the storage spool 2 in a detachable manner. This may be accomplished e.g. by a de-lockable snap-action mechanism.
  • a complete spool can be attached to the storage spool or to a common axle.
  • a transition area 12 between the storage spool 2 and the reservoir spool 1 is provided.
  • the transition area 12 may be a simple connection rod ( Fig. 8 ) or may comprise guide elements for protecting the cutting wire in the transition area 12 ( Fig. 9 )
  • the transition area 12 has a tapered shape.
  • the transition area 12 may formed by a separate member being inserted between storage spool 2 and reservoir spool 1 and may be soft to protect the wire.
  • the reservoir spool 1 and the storage spool 2 may be mounted on a common axle ( Fig. 8 ).
  • the axle may be supported between the reservoir spool 1 and the storage spool 2 by a support ( Fig. 9 ).
  • the mounting further can have a (static or rotating, free or forced) slanted portion ( Fig. 9 ) that facilitates the cross-over of the wire 3 from the reservoir spool 1 to the storage spool 2 and vice versa.
  • the support further increases stiffness of the system.
  • the wire carrying surface 2a of the storage spool 2 may comprise wire guiding grooves with a spiral run.
  • the reservoir spool 1 and the receiving spool 2 rotate synchronically, i.e. have the same rotational speed.
  • the wire is mostly on the reservoir spool 1 of the supplying unit 5, but to a certain extent also around the storage spool 2.
  • the wire runs over a traveler pulley 4 (which is a roll positioning the wire when spooling wire onto or off a roll) to the wire web.
  • the distal end of the cutting wire 3 is connected to the reservoir spool 1 of the receiving unit 5.
  • Fig. 11 shows an embodiment of a reservoir spool 1 without flanges on its ends. Arranging the wire 3 in a trapezoid shape will hold the wire in the right place. If there are no flanges, the transition between reservoir spool and storage spool may be facilitated. The flange may also form the tapered shape of the transition area 12.
  • Rotating the storage spool 2 further removes virtually all wire 3 from the storage spool 2. Now there are two options:
  • the difference in speed may be adjusted, in order to unload the dancer pulley 20 and to avoid an impact.
  • the dancer pulley 20 should come as soon as possible in its neutral position.
  • the wire may experience a shock during the transition. Only if both, diameter of reservoir spool and storage spool, are constant, there arises no shock. If the wire speed is low, the system used for absorbing shocks in the wire 3 may be fast enough to balance this shock. This system may be comparable to the weights in JP2000158436 and in JP2000-024905 .
  • An additional shock absorber may be inserted in the path between the reservoir spool/storage spool and the cutting area (e.g.
  • the speed of that spool may be slightly higher so that the additional wire that has to be wound (coming from the difference in angle of the wire between the traveler pulley 4 and the storage spool 2 and the traveler pulley 4 and the reservoir spool 1 respectively) may be wound as fast as possible.
  • a de-coupling of the rotational speeds may also take place if the wire is not wound to the storage spool.
  • the traveller pulley 4 is adapted to align (automatically or manually) the wire segment extending between itself and the storage spool 2 or reservoir spool 1 with the wire carrying surface 2a of that spool. Since the diameter of the wire bearing surface 2a of the reservoir spool 1 changes more compared to that of the storage spool 2 (which only changes because of wear), it is especially preferred if the traveller pulley 4 is adjustable when serving the reservoir spool 1 and preferably lockable when serving the storage spool 2 so that it's position is fixed when serving the storage spool 2. Good alignment and locking in that position ensures a more steady behaviour of the wire, leading to less wear, better wafer quality and less wire breakage.
  • the roll and the drum are mechanically connected to each other, it is also possible to have a first rotational speed as long as the wire 3 is on the storage spool 2 and just when it no longer is on the storage spool 2 the rotational speed (of both, reservoir and storage spool) is increased (assuming that the reservoir spool has a smaller diameter).
  • the goal is to control the speed of the wire in the wire web because this results in the best wafer quality.
  • the speed of the wire outside the wire web may temporarily deviate from this speed due to the transition between a reservoir spool and a storage spool or to control the tension in the wire.
  • Figs. 12a to 12m show an embodiment of the inventive method of cutting a piece of material.
  • Fig. 12a the wire web 17 is set and the distal end of the cutting wire is connected to the reservoir spool 1 of the receiving unit 6 (i.e. at the used wire side 19 of the wire web 17).
  • Used wire side 19 is that side to which the wire leaves the cutting area 13 in the direction towards the receiving unit 6.
  • New wire side 18 is that side to which the wire leaves the cutting area 13 in the direction towards the supplying unit 5.
  • “New" and “used” refers to the fact, that the reservoir spool of the supplying unit 5 carries new (unused) wire and the reservoir spool of the receiving unit 6 carries old (already used) wire.
  • Figure 12a shows a reservoir spool and a storage spool with basically identical diameter.
  • Fig. 12b the cutting wire 3 moves in a first direction being transferred from the reservoir spool 1 of the supplying unit 5 via the new wire side 18 to the wire web 17 and being transferred via the used wire side 19 to the storage spool 2 of the receiving unit 6, such that its wire carrying surface holds preferably along its whole length a wire portion in non-overlapping windings.
  • Fig. 12c the storage spool 2 of the supplying unit 5 is wound up with cutting wire 3 coming from the wire web 17 via the new wire side 18 while the cutting wire 3 is unwound from the storage spool 2 of the receiving unit 6.
  • the cutting wire moves in the second direction. If desired the wire web 17 can already cut material.
  • Fig. 12f cutting is in progress.
  • the cutting wire 3 moves in the second direction and the wire 3 is wound on the storage spool 2 of the supplying unit 5.
  • Fig. 12g the storage spool 2 of the supplying unit 5 is completely filled.
  • the first cutting cycle is finished.
  • Wire 3 does not move.
  • the wire saw 8 is now ready for a subsequent sawing cycle.
  • the steps of Figs. 12e and 12f may be repeated as often as appropriate.
  • the wire saw 8 is ready for outward transfer of used wire (to the reservoir spool of the receiving unit) and loading of new wire (from the reservoir spool of the supplying unit).
  • a portion of a 'used' wire (old or worn wire) coming from the wire web 17 via the old wire side 19 is wound on the reservoir spool 1 of the receiving unit 6.
  • the amount of used wire to be wound to the reservoir spool 1 of the receiving unit 6 can be freely chosen depending on the specific process demand. If desired the wire web 17 can continue to cut material. Preferably the wire speed is slow.
  • the winding process on the reservoir spool is finished and the wire 3 passes the transition area between the reservoir spool 1 and storage spool 2 while moving.
  • the wire web 17 can cut material.
  • the wire speed is slow.
  • Fig. 12j the cutting wire 3 moves in the first direction and the wire 3 is wound on the storage spool 2 of the receiving unit 6.
  • the latter is e.g. filled to 95%.
  • Fig. 12m the storage spool 2 of the receiving unit 6 is completely filled again and the step of outward transfer of a used (old, worn) wire portion and loading of a new (unused, fresh) wire portion is completed. Now the cutting process continues with the steps shown in Fig. 12f - Fig. 12e - Fig. 12f and so on.
  • Figs. 13a to 13l show an alternative embodiment of the inventive method of cutting a piece of material.
  • Fig. 13a the wire web 17 is set and the distal end of the cutting wire is connected to the reservoir spool 1 of the receiving unit 6 at the used wire side 19 of the wire web 17.
  • Fig. 13b the cutting wire 3 moves in a first direction being transferred from the reservoir spool 1 of the supplying unit 5 via the new wire side 18 to the wire web 17 and being transferred via the used wire side 19 to the storage spool 2 of the receiving unit 6, such that its wire carrying surface holds a wire portion in non-overlapping windings.
  • Fig. 13d cutting is in progress.
  • the cutting wire 3 moves in the second direction and the wire 3 is wound on the storage spool 2 of the supplying unit 5.
  • Fig. 13f cutting is in progress.
  • the cutting wire 3 moves in the first direction and the wire 3 is wound on the storage spool 2 of the receiving unit 6 until the situation of Fig. 13c is reached.
  • the steps of Figs. 13d to 13f may be repeated as often as appropriate.
  • Fig. 13g contrary to the step shown in Fig. 13c the wire 3 continues to move in the first direction.
  • a desired portion of new wire of the reservoir spool 1 of the supplying unit 5 is transferred to the wire web 17 via the new wire side 18 and the same amount of the cutting wire 3 coming from the wire web 17 via the used wire side 19 is transferred to the storage spool 2 of the receiving unit 6.
  • cutting wire 3 is transferred from the storage spool 2 of the receiving unit 6 to the wire web 17 via the used wire side 19 and cutting wire is transferred from the wire web 17 via the new wire side 18 to the storage spool 2 of the supplying unit 5. If desired the wire web 17 can continue to cut material.
  • Fig. 13j the storage spool 2 of the supplying unit 5 is filled.
  • the methods shown in figures 12 and 13 respectively can be used interchangeably. It can be switched between the methods shown in Figs. 12 and Figs. 13 when the states are equal as shown in figures 12g and 13j .
  • a 'used' portion of the wire (old or worn wire) coming from the wire web 17 via the used wire side 19 is wound on the reservoir spool 1 of the receiving unit 6.
  • the amount of old wire can be freely chosen depending on the specific process demand. After the desired amount of old wire is wound on the reservoir spool 1 of the wire receiving unit 6 the wire 3 passes the transition area between the reservoir spool 1 and storage spool 2 while moving. If desired the wire web 17 can continue to cut material during the whole step shown in Fig. 13k .
  • the wire speed is slow.
  • Fig. 13l the step of loading a new (unused, fresh) wire portion and outward transfer of a used (old, worn) wire portion is completed. Now the cutting process continues with the steps shown in Fig. 13f - Fig. 13d - Fig. 13e - Fig. 13f and so on.
  • the direction of wire movement is indicated in these figures. During wire movement cutting action is usually performed.
  • Fig. 14 to 21 show an alternative embodiment of the cutting method.
  • Fig. 14 shows a first cutting cycle, comprising a plurality of reversals of the moving direction of the cutting wire 3.
  • the moving direction of the cutting wire 3 is reversed before the cutting wire 3 is completely unwound from the storage spool 2 of the supplying unit 5, such that during the first cutting cycle a section 22, preferably a unused section, of cutting wire 3 is stored on/remains on the storage spool 2 of the supplying unit 5 without reaching the cutting area 13.
  • Fig. 16 shows a second cutting cycle, comprising a plurality of reversals of the moving direction of the cutting wire 3.
  • the moving direction of the cutting wire 3 is reversed such that a section of cutting wire 3 which during the first cutting cycle has been stored on the storage spool 2 of the supplying unit 5 without having reached the cutting area 13 is brought into the cutting area 13, and that during the second cutting cycle the moving direction of the cutting wire 3 is reversed before the cutting wire 3 is completely unwound from the storage spool 2 of the receiving unit 6, such that during the second cutting cycle a used section 23 of cutting wire 3 is stored on the storage spool 2 of the receiving unit 6 without reaching the cutting area 13 (in consecutive reversals of the moving direction of cutting wire 3 aimed to cut material).
  • the steps of figure 15 are repeated until almost all wire on the storage spool 2 of supply unit 5 is used.
  • Figs. 15 through 16 Also visible in Figs. 15 through 16 is that overtime more and more used cutting wire (represented by dashed line) is temporarily stored on the storage spool 2 of the receiving unit 6
  • the cutting method comprises a step of transferring a used section of cutting wire 3 from the storage spool 2 of the receiving unit 6 to the reservoir spool 1 of the receiving unit 6. This is done - according to Fig. 18 - by completely unwinding the used section of cutting wire 3 from the storage spool 2 of the receiving unit 6 (i.e. pulling it into the cutting area 13, i.e. wire web) followed by reversal of the moving direction of the cutting wire 3 and winding the used section of cutting wire 3 on the reservoir spool 1 of the receiving unit 6 ( Fig. 19 ).
  • the illustrations of figs. 14 to 23 are just schematically.
  • the cutting wire may be wound on the reservoir spool of course in multiple overlapping windings/layers.
  • the step of transferring a used section of cutting wire 3 from the storage spool 2 of the receiving unit 6 to the reservoir spool 1 of the receiving unit 6 is done between two successive cuts, i.e. during this step no piece of material is cut or is in contact with the cutting wire.
  • the great advantage of this embodiment is that the interchange from used and unused cutting wire 3 can be accomplished during a cut (i.e. during the wire web is in contact with a piece of material) without taking wire from the reservoir spool 1.
  • To enable this wire length which is spooled from - or onto - the storage spool between two successive reversals is smaller than the length of cutting wire initially stored on the storage spool 2.
  • the interchange from used to unused cutting wire 3 can be done continuously by means of a difference between the pilgrim length during movement in a first direction and the mit length during the subsequent movement in the opposite direction.
  • Figs. 22 and 23 show the extent of wear of cutting wire sections.
  • the abscissa corresponds to the length of the cutting wire 3 and the ordinate to the wear or extent of abrasion.
  • the mark MAX denotes to the maximal possible extent of abrasion of cutting wire which is acceptable for cutting. Going beyond this point would lead to unacceptable risk of wire breakage and cuts of poor quality.
  • the abrasion profile of a wire section used within a cutting cycle comprising a plurality of reversals of the moving direction of the cutting wire 3 has an approximately trapezoidal shape.
  • the plateau of the abrasion function refers to a range 27 of wire points having between two successive reversals of a cutting cycle essentially the same effective interaction length with the piece of material: complete usage section.
  • a first section 24 of cutting wire 3 is used in the cutting area 13 for cutting the piece of material, the first section 24 being defined by all wire points that between reversals of the first cutting cycle come into contact at least once with the piece of material to be cut. Over time wear becomes successively larger. (dashed linesin Fig. 22 show intermediate abrasion states of the wire.)
  • a second section 25 of cutting wire 3 is used in the cutting area 13 for cutting the piece of material, the second section 25 being different to the first cutting section 24 and being defined by all points which between the reversals of the second cutting cycle come into contact with the piece of material to be cut.
  • the first section 24 of cutting wire 3 and the second section 25 of cutting wire 3 overlap in their end regions, forming overlapping range 26.
  • the extent of wear resulting from the first cutting cycle sums up with the extent of wear resulting from the second cutting cycle and surprisingly a constant wear along the whole wire length is obtained due to addition of virtual triangles in the end regions of the wire sections 24, 25.
  • the cutting wire 3 may be exploited to an optimal extent by constantly using overlapping cutting sections, preferably up to 100%, leaving only at the very beginning and at the very end of the entire cutting wire 3 regions with sub-optimal wear.
  • the overlapping range 26 is located outside, preferably immediately adjacent to a range 27, 28 of wire points having between two successive reversals of a cutting cycle essentially the same effective interaction length with the piece of material (plateau of Fig. 22 ).
  • This embodiment is shown in Fig. 23 , where the overlapping range 26 comprises two ramp-shaped ranges of the abrasion profile.
  • the wire segment may be used for a second consecutive cut without addition of a new wire portion from the reservoir spool. If the maximal wear off (MAX) is not reached after a second cut, the wire segment may be used for a third consecutive cut without addition of a new wire portion from the reservoir spool - and so forth. If the wire quality does not suffice for one complete cut, multiple wire sections may be used for one cut. Alternatively the cutting recipe may be chosen such (especially mit length and cutting pressure) so that after a number of complete cuts, the wire is almost completely worn off in the complete usage section.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
EP13812164.5A 2012-12-04 2013-12-04 Wire management system Active EP2928632B1 (en)

Priority Applications (1)

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EP12195539 2012-12-04
EP13812164.5A EP2928632B1 (en) 2012-12-04 2013-12-04 Wire management system
PCT/IB2013/060620 WO2014087340A2 (en) 2012-12-04 2013-12-04 Wire management system

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JP (2) JP6289492B2 (ko)
KR (1) KR102056958B1 (ko)
CN (2) CN106862663B (ko)
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PH (1) PH12015501093A1 (ko)
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Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2939778A1 (en) * 2014-04-29 2015-11-04 Applied Materials Switzerland Sàrl Quick mountable pulley for a wire saw device
EP3023184A1 (en) 2014-11-20 2016-05-25 Meyer Burger AG Method and device for cutting workpieces
EP3106256A1 (en) 2015-06-19 2016-12-21 Meyer Burger AG Method for cutting a workpiece
WO2017037825A1 (ja) * 2015-08-31 2017-03-09 コマツＮｔｃ 株式会社 ワイヤソー、及び、ワイヤソーの駆動方法
JP6402700B2 (ja) * 2015-10-20 2018-10-10 信越半導体株式会社 ワークの切断方法及びワイヤソー
CN105936096A (zh) * 2016-06-23 2016-09-14 无锡上机数控股份有限公司 一种金刚线数控收放线装置
JP2018051740A (ja) * 2016-09-30 2018-04-05 コマツＮｔｃ株式会社 ワイヤソー、および、ワイヤソーの駆動方法
JP2018051741A (ja) * 2016-09-30 2018-04-05 コマツＮｔｃ株式会社 ワイヤソー、および、ワイヤソーの駆動方法
EP3532231A1 (en) 2016-10-26 2019-09-04 Meyer Burger (Switzerland) AG Wire saw
JP6908386B2 (ja) * 2017-01-27 2021-07-28 コマツＮｔｃ株式会社 ワイヤソー及びワイヤによるワークの切断加工方法
JP6693460B2 (ja) 2017-04-04 2020-05-13 信越半導体株式会社 ワークの切断方法
TWI713832B (zh) * 2017-04-28 2020-12-21 友達晶材股份有限公司 晶圓切片機及其收放線裝置與晶圓切片的方法
KR102476617B1 (ko) * 2017-05-02 2022-12-12 신에쯔 한도타이 가부시키가이샤 워크의 절단 방법 및 접합 부재
WO2019008530A1 (en) 2017-07-07 2019-01-10 Meyer Burger (Switzerland) Ag METHOD FOR WINDING A CUTTING WIRE
CN109421182A (zh) * 2017-08-20 2019-03-05 无锡市瑞能科技有限公司 442金刚线改造六轮绕线方式
EP3998133B1 (en) * 2017-10-26 2024-02-21 Precision Surfacing Solutions GmbH Wire saw
CN108501232B (zh) * 2018-05-31 2024-07-05 扬州续笙新能源科技有限公司 一种用于多晶硅的金刚线切割装置及切割方法
KR102069000B1 (ko) * 2018-06-05 2020-02-11 삼익티에이치케이 주식회사 와이어 쏘의 와이어 공급 회수 장치
EP3587013A1 (en) 2018-06-21 2020-01-01 Meyer Burger AG Wire saw and method of determining a motion characteristic of a wire deflection pulley of a wire saw
EP3603914A1 (en) 2018-08-01 2020-02-05 Precision Surface Solutions GmbH Wire management system for a wire saw and method of operating a wire saw with such a system
MX2021003864A (es) * 2018-10-04 2021-05-27 Fujikura Ltd Tubo reticulado, unidad de proteccion de fibra optica, metodo de proteccion de fibra optica, y metodo de fabricacion de tubo reticulado.
CN109129949B (zh) * 2018-10-24 2024-02-23 乐山新天源太阳能科技有限公司 硅片多线切割机
IT201900013974A1 (it) * 2019-08-05 2021-02-05 Giorgio Cecchini Apparecchiatura e procedimento per la manutenzione di macchine per la lavorazione del marmo e del granito
TWI714312B (zh) * 2019-10-16 2020-12-21 溫芫鋐 用於製造車用導線之裝置及利用該裝置之製造方法
CN114309808A (zh) * 2020-10-09 2022-04-12 广东博智林机器人有限公司 切割装置
EP4029670A1 (en) 2021-01-15 2022-07-20 Lapmaster Wolters GmbH Device and method for cutting a solid substrate
CN113829530A (zh) * 2021-08-24 2021-12-24 隆基绿能科技股份有限公司 一种切割方法及硅片

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3209164C2 (de) 1982-03-13 1983-12-22 Messner, Caspar O.H., Prof.Dr.sc.techn., Zürich Drahtsäge
JPH022543Y2 (ko) * 1984-12-28 1990-01-22
US4655191A (en) 1985-03-08 1987-04-07 Motorola, Inc. Wire saw machine
DE4123095A1 (de) 1991-07-12 1993-01-14 Wacker Chemitronic Verfahren und vorrichtung zur herstellung von nahtlosen band- und drahtschlaufen, und deren verwendung als trennwerkzeuge in band- und drahtsaegen
JPH07314436A (ja) 1994-05-19 1995-12-05 M Setetsuku Kk ワイヤソー装置
DE19519460A1 (de) 1995-05-26 1996-11-28 Wacker Siltronic Halbleitermat Drahtsäge und Verfahren zum Abtrennen von Scheiben von einem Werkstück
JP3107143B2 (ja) * 1995-07-14 2000-11-06 株式会社東京精密 ワイヤソーのワイヤトラバース装置
CH691292A5 (fr) * 1995-10-03 2001-06-29 Hct Shaping Systems Sa Dispositif de sciage par fil équipé d'un système de gestion de fil permettant l'utilisation de bobines de fil de très grande longueur.
DE19828420B4 (de) 1998-06-25 2004-07-15 Siltronic Ag Verfahren zum Aufwickeln eines Sägedrahtes
JP2000024905A (ja) * 1998-07-14 2000-01-25 Tokyo Seimitsu Co Ltd 固定砥粒付ワイヤ及びワイヤソー
JP4049900B2 (ja) * 1998-08-20 2008-02-20 株式会社スーパーシリコン研究所 ワイヤソー切断装置
DE19841492A1 (de) * 1998-09-10 2000-03-23 Wacker Siltronic Halbleitermat Verfahren und Vorrichtung zum Abtrennen einer Vielzahl von Scheiben von einem sprödharten Werkstück
JP3068069B2 (ja) * 1998-11-30 2000-07-24 株式会社いわき機械設計事務所 ワイヤソーマシンのアキュームレータ
CH691202A5 (fr) 1999-01-04 2001-05-15 G & E Bouille Sa Fabrique De M Boîte de montre comprenant une parure placée annulairement.
US6837778B2 (en) * 2000-11-24 2005-01-04 Neomax Co., Ltd Method for cutting rare earth alloy, method for manufacturing rare earth magnet, and wire-saw machine
US6945242B2 (en) * 2001-10-17 2005-09-20 Neomax Co., Ltd. Cutting method using wire saw, wire saw device, and method of manufacturing rare-earth magnet
WO2003074229A1 (fr) * 2002-03-01 2003-09-12 Neomax Co., Ltd. Technique de coupe d'un alliage a base de terre rare
DE10220640A1 (de) 2002-05-08 2002-12-19 Wacker Siltronic Halbleitermat Verfahren und Vorrichtung zum Abtrennen von Scheiben von einem Werkstück
JP4411062B2 (ja) * 2003-12-25 2010-02-10 株式会社アライドマテリアル 超砥粒ワイヤソー巻き付け構造、超砥粒ワイヤソー切断装置および超砥粒ワイヤソーの巻き付け方法
US8205534B2 (en) * 2006-06-30 2012-06-26 Nagasaki University Cutting methods and cutting apparatus
DE102006050330B4 (de) * 2006-10-25 2009-10-22 Siltronic Ag Verfahren zum gleichzeitigen Auftrennen von wenigstens zwei zylindrischen Werkstücken in eine Vielzahl von Scheiben
DE102007019566B4 (de) 2007-04-25 2012-11-29 Siltronic Ag Drahtführungsrolle für Drahtsäge
JP4562801B2 (ja) * 2007-05-09 2010-10-13 株式会社カンタム１４ シリコン基材の加工方法および加工装置
JP5475772B2 (ja) * 2008-07-11 2014-04-16 サンーゴバン アブレイシブズ，インコーポレイティド ワイヤスライシングシステム
KR100888026B1 (ko) 2008-07-15 2009-03-09 홍덕정선 주식회사 소우 와이어
EP2218532B1 (en) 2009-02-17 2013-10-30 Applied Materials, Inc. Wire saw device and method for operating same
US20120048255A1 (en) 2009-05-04 2012-03-01 Daniel Fricker Wire saw
WO2011032600A1 (en) * 2009-09-18 2011-03-24 Applied Materials, Inc. Method for operating a wire saw device
US8991381B2 (en) * 2010-02-08 2015-03-31 Toyo Advanced Technologies Co., Ltd. Method of cutting workpiece with wire saw, and wire saw
MY159039A (en) * 2010-02-08 2016-12-15 Toyo Advanced Tech Co Ltd Wire saw
TWI488710B (zh) * 2010-02-11 2015-06-21 Toyo Advanced Tech Co Wire saws
WO2012018678A1 (en) 2010-08-06 2012-02-09 Brown University Methods of making nanowires
JP5072135B2 (ja) * 2010-09-27 2012-11-14 コマツＮｔｃ株式会社 ワイヤソーのワイヤ断線検知方法および装置
CN102152215A (zh) 2010-12-27 2011-08-17 长沙岱勒新材料科技有限公司 一种结构型电沉积磨料的线切割线
KR101084966B1 (ko) * 2011-01-31 2011-11-23 오성엘에스티(주) 잉곳 절단용 와이어쏘 장치의 단선감지방법
DE102011082366B3 (de) * 2011-09-08 2013-02-28 Siltronic Ag Einlagiges Wickeln von Sägedraht mit fest gebundenem Schneidkorn für Drahtsägen zum Abtrennen von Scheiben von einem Werkstück

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

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US10252357B2 (en) 2019-04-09
JP6598894B2 (ja) 2019-10-30
CN104411434A (zh) 2015-03-11
WO2014087340A2 (en) 2014-06-12
KR20150110493A (ko) 2015-10-02
MY178917A (en) 2020-10-22
PH12015501093A1 (en) 2015-07-27
EP2928632A2 (en) 2015-10-14
JP2018065247A (ja) 2018-04-26
JP2016500341A (ja) 2016-01-12
TWI682820B (zh) 2020-01-21
CN106862663A (zh) 2017-06-20
US20150298228A1 (en) 2015-10-22
WO2014087340A3 (en) 2014-07-31
TWI583468B (zh) 2017-05-21
TW201803669A (zh) 2018-02-01
KR102056958B1 (ko) 2019-12-30
CN106862663B (zh) 2019-01-04
TW201501844A (zh) 2015-01-16
JP6289492B2 (ja) 2018-03-07
CN104411434B (zh) 2016-11-16

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