EP1369200B1 - Vorrichtung zum polieren von optischen platten - Google Patents

Vorrichtung zum polieren von optischen platten Download PDF

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Publication number
EP1369200B1
EP1369200B1 EP02701709A EP02701709A EP1369200B1 EP 1369200 B1 EP1369200 B1 EP 1369200B1 EP 02701709 A EP02701709 A EP 02701709A EP 02701709 A EP02701709 A EP 02701709A EP 1369200 B1 EP1369200 B1 EP 1369200B1
Authority
EP
European Patent Office
Prior art keywords
polishing
optical disk
disk
sheet
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
EP02701709A
Other languages
English (en)
French (fr)
Other versions
EP1369200A4 (de
EP1369200A1 (de
Inventor
Takakazu Elm Inc. Miyahara
Jiro Elm Inc. Genozono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ELM Inc
Original Assignee
ELM Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ELM Inc filed Critical ELM Inc
Publication of EP1369200A1 publication Critical patent/EP1369200A1/de
Publication of EP1369200A4 publication Critical patent/EP1369200A4/de
Application granted granted Critical
Publication of EP1369200B1 publication Critical patent/EP1369200B1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
    • G11B23/50—Reconditioning of record carriers; Cleaning of record carriers ; Carrying-off electrostatic charges
    • G11B23/505—Reconditioning of record carriers; Cleaning of record carriers ; Carrying-off electrostatic charges of disk carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/20—Mountings for the wheels

Definitions

  • the present invention relates to a polishing apparatus for restoring optical disks, such as CD, DVD, VD and LD.
  • US 5,938,510 which is regarded to represent the closest state of the art according to the preamble of claim 1, discloses a disc cleaner/scourer/polisher device comprising two holders, one holder holding a scouring member for scratch removal and one holder holding a scouring member for polishing, both scouring the annular portion of the planar side of the supported disc.
  • Each holder has a respective pressing/lifting mechanism for moving the respective holder relative to the planar side of the supported disc for effecting/breaking the contact of the respective scouring member with an annular portion of the planar side of the supported disc, independent of at least one other of the holders.
  • US 5,860,851 discloses a polishing apparatus comprising an elastic member interposed between a polishing table and a polishing cloth, with that polishing cloth being moveable independent of the elastic member.
  • US 4,825,497 discloses a disk cleaner comprising a driving mechanism which is operated when a lid is positioned in a closed condition relative to a main casing.
  • the driving mechanism is operatively connected to another mechanism for rotating and revolving a cleaner body to clean the disk.
  • optical disks have been selling in large quantities. When a flaw or flaws are made on its surface, it is sometimes impossible to read data from the disk. It is therefore desirable to repair the disk and restore it to a readable state. In view of resource saving, it is not desirable to dispose of such reusable optical disks in large quantities.
  • Fig. 5 shows an example of a conventional disk polishing apparatus.
  • the apparatus is composed of a disk rotator A2 for rotating an object 31 and a polishing mechanism B2 for polishing the surface of the object 31.
  • a polishing pad C2 is attached to a rotating substrate 33 fixed to a rotation shaft 32 via such an attachment means as "Velcro" (registered trademark).
  • a polishing sheet 36 is attached to the bottom of a spongy elastic body 35.
  • Fig. 6a shows the case of polishing the surface of an optical disk with the above-constructed polishing apparatus.
  • the elastic body 35 of the polishing pad C2 is too soft, deformation occurs in the polishing face.
  • roundness E is formed on the outer edge of the optical disk 31.
  • the elastic body 35 of the polishing pad C2 When, on the other hand, the elastic body 35 of the polishing pad C2 is not pliable, the pressure contact between the polishing face and the surface of the optical disk is tightened in part. It is therefore difficult to eliminate abrasive filings (e.g. polycarbonate powder), which clog the surface of the polishing sheet. Thus, the polishing power decreases and the accumulated filings cause small shallow cuts (i.e. scratches) on the surface of the optical disk.
  • abrasive filings e.g. polycarbonate powder
  • the problems to be solved by the present invention are as follows: (1) to obtain an appropriate pressure required for polishing; (2) to correct the accuracy of parallelism between the rotation planes of an optical disk and a polishing sheet; (3) to remove roundness formed on the outer edge of an optical disk and unevenness in polishing; and (4) to prevent clogging of the surface of a polishing sheet by the active elimination of abrasive filings and an occurrence of scratches on the surface of an optical disk due to the clogging.
  • the polishing mechanism B has an elastic mechanism D for elastically holding a polishing pad C and the elastic mechanism D is constructed to have elasticity in the direction perpendicular to the rotation plane of the optical disk and rigidity in the direction parallel to the rotation plane of the optical disk.
  • an apparatus for polishing an optical disk composed of a disk rotator A for rotating an optical disk and a polishing mechanism B for polishing the surface of the optical disk wherein the ratio of the disk angular speed omega a of the disk rotator A to the polishing sheet angular speed omega b of the polishing mechanism B satisfies the range of 0.2 ⁇ ⁇ a/ ⁇ b ⁇ 1.5.
  • a wet polishing apparatus is used in the present embodiment.
  • the wet polishing apparatus when the surface 2a of a polishing sheet of a polishing pad C is pressed into contact with the surface 1a of an optical disk for the purpose of polishing, such liquid as water is supplied to the interface between the surfaces 1a and 2a. Thereby, frictional heat is eased and the elimination of filings is attained in the course of polishing.
  • Figs. 1 and 2 show an apparatus for polishing an optical disk according to the present embodiment.
  • the apparatus is composed of a disk rotator A for rotating an optical disk 1 and a polishing mechanism B for polishing the surface of the optical disk.
  • the polishing mechanism B has an elastic mechanism D for elastically holding a polishing pad C.
  • the optical disk 1 is mounted on a rotating substrate 4 coupled with a rotation shaft 3.
  • the elastic mechanism D is constructed so that a second rigid body 7 is connected to a first rigid body 6 in a floating state, as shown in Figs. 2 and 3.
  • the polishing pad C is attached to the second rigid body 7.
  • plural shafts 7a project upward from its circumferential vicinity.
  • the first rigid body 6 is coupled with a rotation shaft 5.
  • plural shaft holes 6a are provided in its circumferential vicinity.
  • the shaft 7a is fitted into the shaft hole 6a through a coil spring 8 between rigid bodies 6 and 7.
  • the shaft 7a is capable of sliding and is fixed by a fixing member 9.
  • the elastic mechanism D is therefore constructed to have elasticity in the direction perpendicular to the rotation plane of the optical disk 1 and rigidity in the direction parallel to the rotation plane of the optical disk 1.
  • a magnetic body 10 is provided on the bottom of the second rigid body 7. The magnetic body 10 is magnetically joined with a metal substrate 11 of the polishing pad C as described later.
  • a polishing sheet 2 is attached via an elastic sheet 12 to the metal substrate 11 joined with the magnetic body 10.
  • the polishing pad C can be attached to the second rigid body 7 by a Hook-and-Loop fastener, such as "Velcro” (registered trademark), in addition to the magnetic attachment/detachment means.
  • a Hook-and-Loop fastener such as "Velcro” (registered trademark)
  • the integrated elastic mechanism D and polishing pad C may be attached to and detached from the rotation shaft 5.
  • Figs. 4a and 4b show another type of the elastic mechanism D.
  • a magnetic body 20 is attached via a ring 29 to a ribbed elastic body 28 fixed to a rotation shaft 25 of a polishing mechanism B1.
  • Fig. 4b which is a plan view of the elastic mechanism shown in Fig. 4a
  • the ribbed elastic body 28 is formed so that an inner part 28a is connected to an outer part 28b by ribs 28d while creating a space 28c.
  • the elastic mechanism D1 is thus constructed. Therefore, the elastic mechanism D 1 is also constructed to have elasticity in the direction perpendicular to the rotation plane of the optical disk and rigidity in the direction parallel to the rotation plane of the optical disk.
  • the polishing pads were prepared by using the elastic sheets that differed in material and thickness. Next, these polishing pads were attached to the polishing mechanism B of the polishing apparatus according to the present embodiment. The surface of the polishing sheet of each polishing pad was pressed into contact with the surface of the optical disk with a pressure required for polishing. Samples 1-6 were thus obtained. Reference is made to Table 1, which shows the deformation amount ⁇ x of the surface of the polishing sheet in this case. Table 1 also shows the comprehensive as well as the individual rating regarding clogging of the surface of the polishing sheet and roundness formed on the outer edge of the optical disk. In the present experiment, the rotation speed of the disk rotator A is 500 rpm and that of the polishing mechanism B is 1200 rpm. The disk rotator A and the polishing mechanism B rotate in the same direction.
  • the deformation amount (depression amount) ⁇ x when the deformation amount (depression amount) ⁇ x is small, the surface of the polishing sheet is likely to be clogged; when it is large, roundness is likely to be formed on the outer edge of the optical disk; and it is preferable to set the deformation amount (depression amount) ⁇ x within the range of 0.005 mm to 0.3 mm, more preferably within the range of 0.01 mm to 0.1 mm.
  • the disk angular speed ⁇ a of the disk rotator A and the polishing sheet angular speed ⁇ b of the polishing mechanism B were regulated to set the angular speed ratio at the values shown in Table 2.
  • Samples 1-7 were thus obtained. As for these samples, an amount of polishing was measured. In the meantime, the elimination of filings, an occurrence of clogging, etc. were rated. These measurement and ratings are comprehensively shown in the column of "Rating of Amount of Polishing" of Table 2.
  • TABLE 2 Sample No. Disk Angular Speed / Polishing Sheet Angular Speed ( ⁇ a/ ⁇ b) Rating of Amount of Polishing 1 0.1 ⁇ 2 0.2 ⁇ 3 0.4 ⁇ 4 0.6 ⁇ 5 1.0 ⁇ 6 1.5 ⁇ 7 2.0 ⁇
  • the polishing sheet always effects polishing in the direction La parallel to a trace of polishing Ka, as shown in Fig. 7a.
  • the same abrasive grains of the polishing sheet always polish a peak part Y of the traces of polishing Ka
  • the other ones always polish a valley part T thereof. Therefore, the polishing efficiency is low and the amount of polishing decreases. Further, the polishing sheet is likely to be clogged because it is difficult to eliminate the filings. Thereby, endurance of the polishing sheet decreases.
  • the polishing sheet effects polishing in the direction Lc nearly perpendicular to a trace of polishing Kc, as shown in Fig. 7c. Therefore, differently from the case of the sample No. 1, the same part of the abrasive grains does not polish the peak part Y. That is, the peak part Y and valley part T are polished alternatively. In this case, the filings produced by polishing the peak part T are actively eliminated through the valley part T and thereby an occurrence of clogging is prevented.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Head (AREA)

Claims (6)

  1. Vorrichtung zum Polieren einer optischen Scheibe, umfassend eine Scheibenrotationsvorrichtung (A) zum Drehen einer optischen Scheibe (1) und einen einzelnen Poliermechanismus (B) zum Polieren der Oberfläche der optischen Scheibe, wobei:
    der Poliermechanismus (B) aufweist: einen elastischen Mechanismus (D) zum elastischen Halten eines Polierpads (C);
    ein Polierblatt des Polierpads (C);
    wobei der elastische Mechanismus (D) so konstruiert ist, dass er Elastizität in der Richtung senkrecht zu der Rotationsebene der optischen Scheibe (1) und Steifigkeit in der Richtung parallel zu der Rotationsebene der optischen Scheibe (1) aufweist, dadurch gekennzeichnet, dass
    der elastische Mechanismus (D) elastische Glieder (8) in der Nähe seines Umfangs aufweist und dass das Polierblatt des Polierpads (C) eine derartige Elastizität aufweist, dass der Verformungsbetrag Δx 0,005 mm bis 0,3 mm beträgt, wenn das Polierblatt mit der Oberfläche der optischen Scheibe (1) mit einem zum Polieren erforderlichen Druck in Kontakt kommt.
  2. Vorrichtung nach Anspruch 1 zum Polieren einer optischen Scheibe (1), wobei das Verhältnis der Scheiben-Winkelgeschwindigkeit ωa der Scheibenrotationsvorrichtung (A) zu der Polierblatt-Winkelgeschwindigkeit ωb des Poliermechanismus (B) den Bereich von 0,2<ωa/ωb<1,5 erfüllt.
  3. Vorrichtung zum Polieren einer optischen Scheibe (1) nach Anspruch 1 oder 2, wobei der elastische Mechanismus (D) umfasst:
    a) ein erstes Plattenglied (7);
    b) ein zweites Plattenglied (6), welches gegenüber einem an dem ersten Plattenglied (7) bereitgestellten Stabglied (7d) gleitet; und
    c) ein elastisches Glied (8) mit dem Stabglied (7a) durch Einfügen zwischen dem ersten Plattenglied (7) und dem zweiten Plattenglied (6) gefügt.
  4. Vorrichtung zum Polieren einer optischen Scheibe (1) nach Anspruch 1 oder 2, wobei der elastische Mechanismus (D) ein mit Rippen versehener elastischer Körper ist.
  5. Vorrichtung zum Polieren einer optischen Scheibe (1) nach einem der Ansprüche 1 bis 4, wobei das Polierpad (C) mittels eines magnetischen Befestigungs-/Trennmittels oder eines Haken-und-Schlaufen-Befestigungsmittels mit dem elastischen Mechanismus (D) verbunden und von demselben getrennt wird.
  6. Vorrichtung zum Polieren einer optischen Scheibe (1) nach einem der Ansprüche 1 bis 5, wobei die integrierten Komponenten elastischer Mechanismus (D) und Polierpad (C) mit einer Rotationswelle (5) verbunden und von derselben getrennt werden.
EP02701709A 2001-03-05 2002-03-04 Vorrichtung zum polieren von optischen platten Expired - Fee Related EP1369200B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001111994 2001-03-05
JP2001111994 2001-03-05
PCT/JP2002/001981 WO2002070199A1 (fr) 2001-03-05 2002-03-04 Dispositif de polissage de disque optique

Publications (3)

Publication Number Publication Date
EP1369200A1 EP1369200A1 (de) 2003-12-10
EP1369200A4 EP1369200A4 (de) 2005-11-23
EP1369200B1 true EP1369200B1 (de) 2007-08-01

Family

ID=18963484

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02701709A Expired - Fee Related EP1369200B1 (de) 2001-03-05 2002-03-04 Vorrichtung zum polieren von optischen platten

Country Status (6)

Country Link
US (1) US6869344B2 (de)
EP (1) EP1369200B1 (de)
JP (1) JPWO2002070199A1 (de)
DE (1) DE60221502T2 (de)
ES (1) ES2287242T3 (de)
WO (1) WO2002070199A1 (de)

Cited By (1)

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CN109531338A (zh) * 2018-12-29 2019-03-29 重庆荣成玻璃制品有限公司 玻璃吹压生产装置

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FR2900356B1 (fr) * 2006-04-27 2008-07-18 Essilor Int Outil de surfacage d'une surface optique
EP1985876B1 (de) * 2007-04-23 2011-06-08 HTC Sweden AB Schleifhalter eines Bearbeitungsgeräts
KR100893067B1 (ko) * 2008-02-22 2009-04-17 이중호 플랙시블 래핑기
FR2935628B1 (fr) * 2008-09-10 2011-10-14 Essilor Int Outil de surfacage a qualite optique
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KR101034506B1 (ko) * 2008-11-28 2011-05-17 세메스 주식회사 연마 유닛, 이를 갖는 기판 연마 장치 및 이를 이용한 기판연마 방법
JP5388212B2 (ja) * 2009-03-06 2014-01-15 エルジー・ケム・リミテッド フロートガラス研磨システム用下部ユニット
JP5408790B2 (ja) * 2009-03-06 2014-02-05 エルジー・ケム・リミテッド フロートガラス研磨システム
JP5408789B2 (ja) * 2009-03-06 2014-02-05 エルジー・ケム・リミテッド フロートガラス研磨システム
JP5408788B2 (ja) * 2009-03-06 2014-02-05 エルジー・ケム・リミテッド フロートガラス研磨システム
US20100330890A1 (en) * 2009-06-30 2010-12-30 Zine-Eddine Boutaghou Polishing pad with array of fluidized gimballed abrasive members
KR101342952B1 (ko) * 2009-10-08 2013-12-18 주식회사 엘지화학 유리판 연마 시스템 및 방법
CN101884981B (zh) * 2010-06-10 2012-12-26 北京中电科电子装备有限公司 晶片清洁装置
US20130181465A1 (en) * 2012-01-17 2013-07-18 Elm Inc. Optical disc restoration method and system
DE202012002267U1 (de) * 2012-03-07 2012-04-18 Jakob Löwer Inh. von Schumann GmbH & Co. KG Tellerschleifer einer Vorrichtung zum Entgraten und/oder Verrunden von metallenen Werkstücken im Durchlaufverfahren
US9754622B2 (en) 2014-03-07 2017-09-05 Venmill Industries Incorporated Methods for optimizing friction between a pad and a disc in an optical disc restoration device
US9620166B2 (en) 2012-05-18 2017-04-11 Venmill Industries Methods for restoring optical discs
DE102012213749A1 (de) * 2012-08-03 2014-02-06 Robert Bosch Gmbh Schleiftellerfederplatte
US9387569B2 (en) * 2013-04-27 2016-07-12 John Blick Leather head finishing system having plurality of apertures and angled shoe rails
US10449651B2 (en) * 2017-05-16 2019-10-22 Diamond Productions Ltd. Quick attachment abrasive assembly for power concrete treating machines
CN107262412A (zh) * 2017-07-26 2017-10-20 谢剑和 一种刹车离合片生产用除尘装置
CN108406506A (zh) * 2018-02-12 2018-08-17 广西农垦糖业集团星星制糖有限公司 一种截止阀拍修复机
CN109605198B (zh) * 2018-11-30 2020-07-03 天津大学 一种用于机器人抛光的柔性抛光装置
EP3800008A1 (de) 2019-10-02 2021-04-07 Optikron GmbH Vorrichtung und verfahren zum schleifen und/oder polieren planer flächen von werkstücken
CN112222989A (zh) * 2020-09-28 2021-01-15 万华化学集团电子材料有限公司 基于单晶硅片的可调式磨削装置及用于单晶硅片的磨削加工方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109531338A (zh) * 2018-12-29 2019-03-29 重庆荣成玻璃制品有限公司 玻璃吹压生产装置
CN109531338B (zh) * 2018-12-29 2020-06-30 重庆荣成玻璃制品有限公司 玻璃吹压生产装置

Also Published As

Publication number Publication date
EP1369200A4 (de) 2005-11-23
EP1369200A1 (de) 2003-12-10
WO2002070199A1 (fr) 2002-09-12
US20040072515A1 (en) 2004-04-15
JPWO2002070199A1 (ja) 2004-07-02
US6869344B2 (en) 2005-03-22
DE60221502D1 (de) 2007-09-13
DE60221502T2 (de) 2008-04-17
ES2287242T3 (es) 2007-12-16

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