WO2002070199A1 - Dispositif de polissage de disque optique - Google Patents
Dispositif de polissage de disque optique Download PDFInfo
- Publication number
- WO2002070199A1 WO2002070199A1 PCT/JP2002/001981 JP0201981W WO02070199A1 WO 2002070199 A1 WO2002070199 A1 WO 2002070199A1 JP 0201981 W JP0201981 W JP 0201981W WO 02070199 A1 WO02070199 A1 WO 02070199A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polishing
- optical disk
- disk
- sheet
- elastic mechanism
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 177
- 230000003287 optical effect Effects 0.000 title claims abstract description 62
- 238000010008 shearing Methods 0.000 claims abstract description 4
- 230000002093 peripheral effect Effects 0.000 abstract description 7
- 238000007599 discharging Methods 0.000 abstract description 2
- 238000011156 evaluation Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 4
- 238000007665 sagging Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000005070 ripening Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
- G11B23/50—Reconditioning of record carriers; Cleaning of record carriers ; Carrying-off electrostatic charges
- G11B23/505—Reconditioning of record carriers; Cleaning of record carriers ; Carrying-off electrostatic charges of disk carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/20—Mountings for the wheels
Definitions
- the present invention relates to a polishing apparatus for repairing optical disks such as CD, DVD, VD, and LD. Background art
- optical disks that have been sold in large quantities cannot read data once the surface is scratched, so it is desirable to repair them so that they can be reused. Also, discarding a large number of unusable optical discs is not desirable for effective use of resources.
- the elastic body 35 of the polishing pad C2 does not have appropriate flexibility, so that shavings (polycarbonate powder, etc.) are discharged during polishing. Becomes difficult and the polishing sheet surface becomes clogged. As a result, the polishing ability is reduced, and the accumulated shavings cause scratches on the optical disk surface.
- the plane of rotation of the optical disk and the plane of rotation of the polishing sheet 36 must be kept parallel. As shown in FIG. 6B, the planarity of the polished surface cannot be sufficiently corrected during polishing.
- the present invention firstly comprises a disk drive unit A for rotating an optical disk, and a polishing mechanism B for polishing the surface of the optical disk.
- the polishing mechanism B has an elastic mechanism D for elastically holding a polishing pad C,
- the present invention it is possible to promote the discharge of shavings during polishing to prevent clogging of the polishing sheet surface and to prevent the occurrence of scratches on the optical disk surface due to the clogging. it can.
- the elasticity of the polishing sheet can be regulated to eliminate the surface sagging and uneven polishing of the optical disk outer peripheral edge.
- the present invention comprises a disk drive section A for rotating an optical disk, and a polishing mechanism B for polishing the surface of the optical disk.
- the polishing mechanism B has an elastic mechanism D for elastically holding a polishing pad C,
- the elastic mechanism D is to provide an optical disc polishing apparatus having a structure having elasticity in a pressing direction against an optical disc and rigidity in a shearing direction.
- the plane parallel accuracy between the rotating surface of the optical disc and the rotating surface of the polishing sheet can be corrected, so that an appropriate pressure required for polishing can be uniformly applied to the polished surface. Sag and uneven polishing can be eliminated.
- the present invention comprises a disk drive unit A for rotating an optical disk and a polishing mechanism B for polishing the surface of the optical disk, and the disk angular velocity of the disk drive unit A is ⁇ a
- An object of the present invention is to provide a polishing apparatus for an optical disk, in which the ratio of the polishing sheet B and the polishing sheet angular velocity of the polishing mechanism B satisfies the range of 0.2 ⁇ aZ ⁇ b ⁇ 1.5.
- the polishing efficiency can be improved and a sufficient amount of polishing can be obtained. Discharge of shavings can be facilitated and occurrence of clogging can be suppressed. Also, the durability of the polishing sheet can be improved.
- FIG. 1 is a perspective view showing a configuration relationship between a disk drive unit and a polishing mechanism.
- FIG. 2 is a side view of a polishing mechanism with a polishing pad attached.
- FIG. 3 is a partial sectional view of a polishing mechanism without a polishing pad.
- FIG. 4a is a partial cross-sectional view of an elastic mechanism having another specification.
- FIG. 4b is a plan view of the flexible mechanism of FIG. 4a.
- FIG. 5 is a side view showing a configuration relationship between a conventional disk drive unit and a polishing mechanism.
- FIG. 6a is a partial sectional action explanatory view of a conventional polishing mechanism.
- FIG. 6b is an explanatory view of a partial cross section of a conventional polishing mechanism.
- FIG. 7a is a plan view of a disk of Sample 1 of Experimental Example 2 and a perspective view of polishing marks.
- FIG. 7b is a plan view of the disk of Sample 7 of Experimental Example 2.
- FIG. 7c is a plan view of a disk of Sample 4 of Experimental Example 2 and a perspective view of polishing marks.
- the optical disk polishing apparatus includes a disk drive section A for rotating the optical disk 1, and a polishing mechanism B for polishing the optical disk surface.
- B has an elastic mechanism D that elastically holds the polishing pad C I do.
- the disk drive unit A mounts the optical disk 1 on a rotating substrate 4 coupled to a rotating shaft 3.
- the polishing mechanism B includes a second rigid body between a first rigid body 6 connected to the rotating shaft 5 and a second rigid body 7 to which the polishing pad C is attached.
- a plurality of shafts 7a protruding upward from the vicinity of the outer periphery of 7 are slidably fitted into a plurality of shaft holes 6a provided near the outer periphery of the first rigid body 6 with the coiled spring 8 interposed therebetween, and fixed.
- the elastic mechanism D is configured by connecting the second rigid body 7 to the first rigid body 6 in a floating manner.
- the elastic mechanism D has a structure having elasticity in the direction of pressing against the optical disc 1 and rigidity in the shearing direction.
- a magnetic body 10 magnetically bonded to a metal substrate 11 of a polishing pad C described later is formed.
- the polishing sheet 2 is bonded to the metal substrate 11 bonded to the magnetic body 10 via the elastic sheet 12.
- a surface fastener for example, Magic Tape (registered trademark)
- Magic Tape registered trademark
- the above-mentioned elastic mechanism D and the polishing pad C are integrated, and then the integrated elastic mechanism D and the polishing pad C are combined with the above-mentioned polishing mechanism.
- the rotary shaft 5 may be detachably attached.
- FIGS. 4a and 4b show another specification of the elastic mechanism D.
- a rib-like elastic body 28 fixed to a rotating shaft 25 of a polishing mechanism B1 is provided with a ring 29.
- the magnetic body 20 As shown in Fig. 4b (plan view of the elastic mechanism in Fig. 4a), the inner peripheral portion 28a and the outer peripheral portion 28b are connected by a rib 28d so as to form a space 28c.
- the rib-like elastic body 28 is formed, and the elastic mechanism D1 is formed.
- the elastic mechanism D1 also has a property in the pressure contact direction to the optical disc and a rigidity in the shear direction.
- a polishing pad using elastic sheets having different materials and thicknesses is prepared. Then, these polishing pads were attached to the polishing mechanism B of the polishing apparatus according to the present embodiment, and the polishing sheet surfaces of the respective polishing pads were pressed against the optical disk surface at a pressure required for polishing, whereby samples 1 to 6 were obtained. At this time, the deformation amount ⁇ of the polishing sheet surface is as shown in Table 1. In addition, the evaluation of the clogging of the polishing sheet surface, the evaluation of the surface sagging of the outer peripheral edge of the optical disk, and the comprehensive evaluation were also performed, and the results are similarly shown in Table 1. In this experiment, the rotation speed of the disk drive unit was set at 500 rpm, the rotation speed of the polishing mechanism B was set at 1200 rpm, and each rotation direction was the same.
- the polishing sheet was directly attached to the metal substrate 11 of the polishing pad without using the elastic sheet.
- various synthetic rubbers were used as the elastic sheets, and their thicknesses were also different.
- the disk angular velocity ⁇ a of the disk drive unit A and the polishing sheet angular velocity ⁇ b of the polishing mechanism B are adjusted so that the ratio thereof becomes a value shown in Table 2.
- the polishing amount was measured for these samples, and at the same time, the discharge of shavings and the occurrence of clogging were also evaluated. The results are shown in the polishing amount evaluation column in Table 2.
- the ratio between the disk angular velocity and the polishing sheet angular velocity be an appropriate ratio, but it is preferable that these ratios be in the range of 0.2 and oa / ob ⁇ l.5. It was found that it was preferably in the range of 0.4 and ca / b ⁇ 1.0.
- the present invention it is possible to promote the discharge of shavings during polishing to prevent clogging of the polishing sheet surface and to prevent scratches on the optical disk surface due to the clogging. it can.
- the plane parallel accuracy between the rotating surface of the optical disc and the rotating surface of the polishing sheet it is possible to uniformly obtain an appropriate pressure necessary for polishing the polished surface.
- polishing unevenness can be eliminated.
- the polishing efficiency can be improved and a sufficient amount of polishing can be obtained. Make it easier to discharge The occurrence of clogging can be suppressed. Also, the durability of the polishing sheet can be improved.
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002569349A JPWO2002070199A1 (ja) | 2001-03-05 | 2002-03-04 | 光ディスクの研磨装置 |
US10/468,893 US6869344B2 (en) | 2001-03-05 | 2002-03-04 | Apparatus for polishing optical disk |
DE60221502T DE60221502T2 (de) | 2001-03-05 | 2002-03-04 | Vorrichtung zum polieren von optischen platten |
EP02701709A EP1369200B1 (fr) | 2001-03-05 | 2002-03-04 | Dispositif de polissage de disque optique |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001111994 | 2001-03-05 | ||
JP2001-111994 | 2001-03-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002070199A1 true WO2002070199A1 (fr) | 2002-09-12 |
Family
ID=18963484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/001981 WO2002070199A1 (fr) | 2001-03-05 | 2002-03-04 | Dispositif de polissage de disque optique |
Country Status (6)
Country | Link |
---|---|
US (1) | US6869344B2 (fr) |
EP (1) | EP1369200B1 (fr) |
JP (1) | JPWO2002070199A1 (fr) |
DE (1) | DE60221502T2 (fr) |
ES (1) | ES2287242T3 (fr) |
WO (1) | WO2002070199A1 (fr) |
Cited By (2)
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CN108406506A (zh) * | 2018-02-12 | 2018-08-17 | 广西农垦糖业集团星星制糖有限公司 | 一种截止阀拍修复机 |
CN109605198A (zh) * | 2018-11-30 | 2019-04-12 | 天津大学 | 一种用于机器人抛光的柔性抛光装置 |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7104871B1 (en) * | 1997-06-20 | 2006-09-12 | Kennedy Michael S | Method and apparatus for reconditioning compact discs |
DE102004001546A1 (de) * | 2004-01-10 | 2005-08-04 | August Rüggeberg Gmbh & Co. Kg | Werkzeug |
FR2900356B1 (fr) * | 2006-04-27 | 2008-07-18 | Essilor Int | Outil de surfacage d'une surface optique |
EP1985876B1 (fr) * | 2007-04-23 | 2011-06-08 | HTC Sweden AB | Support de rectificateur dans un dispositif d'usinage |
KR100893067B1 (ko) * | 2008-02-22 | 2009-04-17 | 이중호 | 플랙시블 래핑기 |
FR2935628B1 (fr) * | 2008-09-10 | 2011-10-14 | Essilor Int | Outil de surfacage a qualite optique |
US20100087124A1 (en) * | 2008-10-07 | 2010-04-08 | Farzad Saghian | Cd repair apparatus |
KR101034506B1 (ko) * | 2008-11-28 | 2011-05-17 | 세메스 주식회사 | 연마 유닛, 이를 갖는 기판 연마 장치 및 이를 이용한 기판연마 방법 |
JP5408788B2 (ja) * | 2009-03-06 | 2014-02-05 | エルジー・ケム・リミテッド | フロートガラス研磨システム |
JP5388212B2 (ja) * | 2009-03-06 | 2014-01-15 | エルジー・ケム・リミテッド | フロートガラス研磨システム用下部ユニット |
JP5408790B2 (ja) * | 2009-03-06 | 2014-02-05 | エルジー・ケム・リミテッド | フロートガラス研磨システム |
JP5408789B2 (ja) * | 2009-03-06 | 2014-02-05 | エルジー・ケム・リミテッド | フロートガラス研磨システム |
US20100330890A1 (en) * | 2009-06-30 | 2010-12-30 | Zine-Eddine Boutaghou | Polishing pad with array of fluidized gimballed abrasive members |
KR101342952B1 (ko) * | 2009-10-08 | 2013-12-18 | 주식회사 엘지화학 | 유리판 연마 시스템 및 방법 |
CN101884981B (zh) * | 2010-06-10 | 2012-12-26 | 北京中电科电子装备有限公司 | 晶片清洁装置 |
US20130181465A1 (en) * | 2012-01-17 | 2013-07-18 | Elm Inc. | Optical disc restoration method and system |
DE202012002267U1 (de) * | 2012-03-07 | 2012-04-18 | Jakob Löwer Inh. von Schumann GmbH & Co. KG | Tellerschleifer einer Vorrichtung zum Entgraten und/oder Verrunden von metallenen Werkstücken im Durchlaufverfahren |
US9620166B2 (en) | 2012-05-18 | 2017-04-11 | Venmill Industries | Methods for restoring optical discs |
US9754622B2 (en) | 2014-03-07 | 2017-09-05 | Venmill Industries Incorporated | Methods for optimizing friction between a pad and a disc in an optical disc restoration device |
DE102012213749A1 (de) * | 2012-08-03 | 2014-02-06 | Robert Bosch Gmbh | Schleiftellerfederplatte |
US9387569B2 (en) * | 2013-04-27 | 2016-07-12 | John Blick | Leather head finishing system having plurality of apertures and angled shoe rails |
US10449651B2 (en) * | 2017-05-16 | 2019-10-22 | Diamond Productions Ltd. | Quick attachment abrasive assembly for power concrete treating machines |
CN107262412A (zh) * | 2017-07-26 | 2017-10-20 | 谢剑和 | 一种刹车离合片生产用除尘装置 |
CN109531338B (zh) * | 2018-12-29 | 2020-06-30 | 重庆荣成玻璃制品有限公司 | 玻璃吹压生产装置 |
EP3800008A1 (fr) | 2019-10-02 | 2021-04-07 | Optikron GmbH | Dispositif et procédé de meulage et / ou de polissage des surfaces planes des pièces |
CN112222989A (zh) * | 2020-09-28 | 2021-01-15 | 万华化学集团电子材料有限公司 | 基于单晶硅片的可调式磨削装置及用于单晶硅片的磨削加工方法 |
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JPH05285825A (ja) * | 1992-02-12 | 1993-11-02 | Sumitomo Metal Ind Ltd | 研磨装置及びこれを用いた研磨方法 |
JPH081504A (ja) * | 1994-06-20 | 1996-01-09 | Hitachi Ltd | 塗装パテの研摩方法 |
JPH0997772A (ja) * | 1995-07-21 | 1997-04-08 | Toshiba Corp | 研磨パッド、研磨装置及び研磨方法 |
JPH1190815A (ja) * | 1997-09-25 | 1999-04-06 | Fujitsu Ltd | 研磨装置 |
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GB2189923B (en) * | 1986-03-24 | 1990-09-05 | Hitachi Maxell | Disc cleaner |
US4956944A (en) * | 1987-03-19 | 1990-09-18 | Canon Kabushiki Kaisha | Polishing apparatus |
US5334254A (en) * | 1992-10-21 | 1994-08-02 | Paul J. Gelardi | Non-abrasive disc cleaner |
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KR100213855B1 (ko) * | 1994-04-22 | 1999-08-02 | 니시무로 타이조 | 분리형 연마정반 및 그를 이용한 연마장치 |
US5607341A (en) * | 1994-08-08 | 1997-03-04 | Leach; Michael A. | Method and structure for polishing a wafer during manufacture of integrated circuits |
JP3007566B2 (ja) * | 1996-02-16 | 2000-02-07 | 株式会社共立 | ディスククリーナ |
TW378166B (en) * | 1996-10-25 | 2000-01-01 | Toshiba Machine Co Ltd | Headstock of a polishing machine |
US5827111A (en) * | 1997-12-15 | 1998-10-27 | Micron Technology, Inc. | Method and apparatus for grinding wafers |
JP3070917B2 (ja) * | 1998-06-16 | 2000-07-31 | 株式会社共立 | ディスククリーナ |
JP3124276B1 (ja) * | 2000-03-28 | 2001-01-15 | 株式会社共立 | ディスククリーナ |
-
2002
- 2002-03-04 WO PCT/JP2002/001981 patent/WO2002070199A1/fr active IP Right Grant
- 2002-03-04 JP JP2002569349A patent/JPWO2002070199A1/ja active Pending
- 2002-03-04 DE DE60221502T patent/DE60221502T2/de not_active Expired - Lifetime
- 2002-03-04 EP EP02701709A patent/EP1369200B1/fr not_active Expired - Fee Related
- 2002-03-04 ES ES02701709T patent/ES2287242T3/es not_active Expired - Lifetime
- 2002-03-04 US US10/468,893 patent/US6869344B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH05285825A (ja) * | 1992-02-12 | 1993-11-02 | Sumitomo Metal Ind Ltd | 研磨装置及びこれを用いた研磨方法 |
JPH081504A (ja) * | 1994-06-20 | 1996-01-09 | Hitachi Ltd | 塗装パテの研摩方法 |
JPH0997772A (ja) * | 1995-07-21 | 1997-04-08 | Toshiba Corp | 研磨パッド、研磨装置及び研磨方法 |
JPH1190815A (ja) * | 1997-09-25 | 1999-04-06 | Fujitsu Ltd | 研磨装置 |
Non-Patent Citations (1)
Title |
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See also references of EP1369200A4 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108406506A (zh) * | 2018-02-12 | 2018-08-17 | 广西农垦糖业集团星星制糖有限公司 | 一种截止阀拍修复机 |
CN109605198A (zh) * | 2018-11-30 | 2019-04-12 | 天津大学 | 一种用于机器人抛光的柔性抛光装置 |
CN109605198B (zh) * | 2018-11-30 | 2020-07-03 | 天津大学 | 一种用于机器人抛光的柔性抛光装置 |
Also Published As
Publication number | Publication date |
---|---|
DE60221502D1 (de) | 2007-09-13 |
DE60221502T2 (de) | 2008-04-17 |
EP1369200B1 (fr) | 2007-08-01 |
ES2287242T3 (es) | 2007-12-16 |
US20040072515A1 (en) | 2004-04-15 |
JPWO2002070199A1 (ja) | 2004-07-02 |
US6869344B2 (en) | 2005-03-22 |
EP1369200A1 (fr) | 2003-12-10 |
EP1369200A4 (fr) | 2005-11-23 |
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