EP1349678A1 - Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion - Google Patents
Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsionInfo
- Publication number
- EP1349678A1 EP1349678A1 EP02710948A EP02710948A EP1349678A1 EP 1349678 A1 EP1349678 A1 EP 1349678A1 EP 02710948 A EP02710948 A EP 02710948A EP 02710948 A EP02710948 A EP 02710948A EP 1349678 A1 EP1349678 A1 EP 1349678A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- organic solvent
- mixture
- parts
- weight
- organic solvents
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000007787 solid Substances 0.000 title claims abstract description 19
- 239000004530 micro-emulsion Substances 0.000 title claims description 19
- 229910052500 inorganic mineral Inorganic materials 0.000 title description 11
- 239000011707 mineral Substances 0.000 title description 11
- 239000002689 soil Substances 0.000 title description 2
- 239000000203 mixture Substances 0.000 claims abstract description 50
- 239000003960 organic solvent Substances 0.000 claims abstract description 47
- 238000009835 boiling Methods 0.000 claims abstract description 13
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 12
- -1 alkyl radical Chemical class 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 6
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 claims description 6
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims description 5
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- NKDDWNXOKDWJAK-UHFFFAOYSA-N dimethoxymethane Chemical compound COCOC NKDDWNXOKDWJAK-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 150000002334 glycols Chemical class 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 239000004094 surface-active agent Substances 0.000 claims description 3
- 239000003039 volatile agent Substances 0.000 claims description 3
- RIQRGMUSBYGDBL-UHFFFAOYSA-N 1,1,1,2,2,3,4,5,5,5-decafluoropentane Chemical compound FC(F)(F)C(F)C(F)C(F)(F)C(F)(F)F RIQRGMUSBYGDBL-UHFFFAOYSA-N 0.000 claims description 2
- FRCHKSNAZZFGCA-UHFFFAOYSA-N 1,1-dichloro-1-fluoroethane Chemical compound CC(F)(Cl)Cl FRCHKSNAZZFGCA-UHFFFAOYSA-N 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 150000001768 cations Chemical class 0.000 claims description 2
- 125000004122 cyclic group Chemical group 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229930195734 saturated hydrocarbon Natural products 0.000 claims description 2
- WZEOZJQLTRFNCU-UHFFFAOYSA-N trifluoro(trifluoromethoxy)methane Chemical compound FC(F)(F)OC(F)(F)F WZEOZJQLTRFNCU-UHFFFAOYSA-N 0.000 claims description 2
- 125000001931 aliphatic group Chemical group 0.000 claims 1
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 17
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 9
- 239000002904 solvent Substances 0.000 description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 8
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 6
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- CUVLMZNMSPJDON-UHFFFAOYSA-N 1-(1-butoxypropan-2-yloxy)propan-2-ol Chemical compound CCCCOCC(C)OCC(C)O CUVLMZNMSPJDON-UHFFFAOYSA-N 0.000 description 3
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- BPIUIOXAFBGMNB-UHFFFAOYSA-N 1-hexoxyhexane Chemical compound CCCCCCOCCCCCC BPIUIOXAFBGMNB-UHFFFAOYSA-N 0.000 description 2
- NTKBNCABAMQDIG-UHFFFAOYSA-N 3-butoxypropan-1-ol Chemical compound CCCCOCCCO NTKBNCABAMQDIG-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 2
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- POLCUAVZOMRGSN-UHFFFAOYSA-N dipropyl ether Chemical compound CCCOCCC POLCUAVZOMRGSN-UHFFFAOYSA-N 0.000 description 2
- 229960001484 edetic acid Drugs 0.000 description 2
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- NKJOXAZJBOMXID-UHFFFAOYSA-N 1,1'-Oxybisoctane Chemical compound CCCCCCCCOCCCCCCCC NKJOXAZJBOMXID-UHFFFAOYSA-N 0.000 description 1
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- BWPAALSUQKGDBR-UHFFFAOYSA-N 1-hexoxypropan-2-ol Chemical compound CCCCCCOCC(C)O BWPAALSUQKGDBR-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 239000003139 biocide Substances 0.000 description 1
- ZXMYWJRDSDSYLF-UHFFFAOYSA-N butyl acetate;methyl formate Chemical compound COC=O.CCCCOC(C)=O ZXMYWJRDSDSYLF-UHFFFAOYSA-N 0.000 description 1
- QRTXZGIQTYDABO-UHFFFAOYSA-N carbanolate Chemical compound CNC(=O)OC1=CC(C)=C(C)C=C1Cl QRTXZGIQTYDABO-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000010730 cutting oil Substances 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 239000000645 desinfectant Substances 0.000 description 1
- IPKKHRVROFYTEK-UHFFFAOYSA-N dipentyl phthalate Chemical compound CCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCC IPKKHRVROFYTEK-UHFFFAOYSA-N 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000000417 fungicide Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-N hexane carboxylic acid Natural products CCCCCCC(O)=O MNWFXJYAOYHMED-UHFFFAOYSA-N 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000002304 perfume Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000003352 sequestering agent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/123—Sulfonic acids or sulfuric acid esters; Salts thereof derived from carboxylic acids, e.g. sulfosuccinates
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D17/00—Detergent materials or soaps characterised by their shape or physical properties
- C11D17/0008—Detergent materials or soaps characterised by their shape or physical properties aqueous liquid non soap compositions
- C11D17/0017—Multi-phase liquid compositions
- C11D17/0021—Aqueous microemulsions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5036—Azeotropic mixtures containing halogenated solvents
- C11D7/5068—Mixtures of halogenated and non-halogenated solvents
- C11D7/5077—Mixtures of only oxygen-containing solvents
- C11D7/5081—Mixtures of only oxygen-containing solvents the oxygen-containing solvents being alcohols only
-
- C11D2111/14—
-
- C11D2111/44—
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Definitions
- the present invention relates to a cleaning method, more precisely it relates to a method for removing organic and / or mineral soiling from a solid surface (or substrate).
- a cleaning process making it possible to remove all organic and / or mineral soiling and traces of water from a solid surface (or substrate) characterized in that it comprises the following steps: a) cleaning of said solid surface by means of a cleaning composition of microemulsion type, b) draining said cleaned surface, c) rinsing said drained surface with an organic solvent or a mixture of organic solvents of low boiling point, and d) drying of said rinsed surface with the organic solvent or the mixture of organic solvents used in c).
- the cleaning composition of microemulsion type used according to the invention has the advantage of being able to effectively remove from the solid surface to be cleaned any organic and / or mineral soiling.
- This cleaning composition of microemulsion type is described in patent application FR 2 795 088. It comprises in particular:
- R 1 and R 2 each independently represent a linear or branched C 5 -C 20 alkyl radical
- - M is a cation chosen from Na ⁇ , K ⁇ and NR ⁇ R each independently representing hydrogen or a C 1 -C 4 alkyl radical; (A) + (B) + (C) representing 100 parts by weight.
- the cleaning step a) can be carried out in an immersion tank or a shower bath in combination with ultrasonic waves, vibrations or mechanical shaking.
- the cleaning composition of microemulsion type will be used at a temperature ranging from room temperature (about 20 ° C) to 60 ° C and, preferably, at a temperature between 20 ° C and 40 ° C.
- the cleaning time of the solid surface - step a) - depends on the type of soiling and its adhesion to the solid surface.
- the organic solvent (s) (B) contained in the cleaning composition of microemulsion type used in step a) are preferably chosen from aliphatic hydrocarbons, monoethers of alkylene glycols and monoethers of dialkylene glycols.
- Aliphatic hydrocarbons can be linear, branched, cyclic hydrocarbons or combinations thereof. They contain in particular from 3 to 24 carbon atoms, preferably 6 to 24 carbon atoms. Examples of commercially available aliphatic hydrocarbons are:
- the monoethers of the alkylene glycols can in particular be the monoethers of propylene glycol C 4 -C 25 , such as the monomethyl ether of propylene glycol (PM), the monoethyl ether of propylene glycol (PE), the mono-n ether.
- PM monomethyl ether of propylene glycol
- PE monoethyl ether of propylene glycol
- PNP propylene glycol propyl
- PTB propylene glycol mono-tert.-butyl ether
- PPB propylene glycol mono-n-butyl ether
- PNB propylene glycol mono-hexyl ether
- the monoethers of the dialkylene glycols can for example be the monomethyl ether of dipropylene glycol (DPM), the mono-n-propyl ether of dipropylene glycol (DPNP), the mono-tert.-butyl ether of dipropylene glycol (DPTB) , the mono-n-butyl ether of dipropylene glycol (DPNB) and the monohexyl ether of dipropylene glycol; and the n-butyl ether of diethylene glycol (Butyl Diglycol Ether - BDG), the hexyl ether of diethylene glycol and the octyl ether of diethylene glycol.
- the composition which can be used according to the invention can also contain:
- At least one sequestering agent such as ethylene diamine tetra acetic acid (EDTA) and its salts, in a proportion of 0.01 to 0.1 parts by weight per 100 parts by weight of (A) + (B) + (C); and or
- At least one anti-corrosion agent chosen in particular from organic acids of RCOOH type, R being a C 4 hydrocarbon radical- C 24 , and the amines, in an amount in particular from 0.01 to 0.5 part by weight per 100 parts by weight of (A) + (B) + (C); and or
- At least one additive in the usual quantities, chosen from disinfectants, fungicides (quaternary ammonium salts) and biocides (organic peroxides, hydrogen peroxide, active halogen compounds, inorganic phenolic salts, ammonium salts quaternaries, organometallic derivatives, organosulfur derivatives); and or
- the cleaned solid surface is subjected to a draining step b) which consists in removing said cleaned solid surface from the cleaning composition and dripping it at room temperature for a period ranging from 30 seconds to 1 minute.
- the drained solid surface is subjected to a rinsing step c) which is carried out with an organic solvent or a mixture of organic solvents, inert, preferably non-flammable and of low boiling point.
- This rinsing step is carried out at a temperature 10 to 15 ° C lower, preferably 5 ° C lower than the boiling point of the organic solvent or the most volatile compound in the mixture of organic solvents used for said rinsing step .
- azeotropic or quasi-azeotropic mixtures will be used in particular.
- organic solvent or mixture of organic solvents with a low boiling point is used to denote an organic solvent or a mixture of organic solvents having a boiling point at most equal to 90 ° C. and preferably between 25 ° C. and 70 ° C.
- the organic solvent or the mixture of organic solvents can in particular be chosen from: - aliphatic alcohols such as methanol, ethanol, isopropanol, butanol;
- aliphatic esters such as ethyl acetate, butyl acetate; methyl formate;
- - aliphatic ketones such as acetone, methyl ethyl ketone
- - aliphatic ethers such as tetrahydrofuran (THF), diethyl ether, dipropyl ether, dibutyl ether;
- HFCs hydrofluorocarbons
- hydrofluorochlorocarbons such as 1, 1-dichloro-1-fluoroethane (141 b), hydrofluoroethers such as perfluoromethyl ether (C 4 F 9 OCH 3 ); or the mixture of at least two of the above-mentioned compounds.
- azeotropic or quasi-azeotropic mixtures of at least two of the abovementioned compounds will be used.
- azeotropic or quasi-azeotropic mixtures which can be used according to the present invention as a rinsing solvent, there may be mentioned:
- the azeotropes mentioned in patent application FR 2 781 499-1 A1 such as the binary azeotrope 4310 mee / 365 mfc (9/91), (the figures in parentheses indicate the percentages by weight respectively of the constituents of the azeotrope) , the ternary azeotrope 4310 mee / 365 mfc / CH 3 OH (12/83/5);
- the azeotropes mentioned in patent application FR 2 792 648 such as the binary azeotrope 4310 mee / trichlorethylene (89/1 1), the ternary azeotrope 4310 mee / trichlorethylene / CH 3 OH (84.5 / 9.5 / 6), the ternary azeotrope 4310 mee / trichlorethylene / isopropanol (88.2 / 9.6 / 2.2), the ternary azeotrope 4310 mee / trichlorethylene / methylal (87/9/4);
- - the azeotropes mentioned in patent application FR 2 792 647 such as the quaternary azeotrope 365 mfc / CH 2 CI 2 / CH 3 OH / 4310 mee (56.2 / 39.8 / 3.5 / 0.5) ;
- - the azeotropes or quasi-azeotropes mentioned in patent application FR 2 766 836 such as the ternary quasi-azeotrope 365 mfc / CH 2 CI 2 / CH 3 OH (89/7/4);
- - the azeotropes mentioned in patent application FR 2 759 090 such as the binary azeotrope 4310 mee / CH 2 CI 2 (50/50).
- the ternary azeotrope 4310 mee / 365 mfc / CH 3 OH (12.83.5), the binary azeotrope .4310 mee / CH 2 CI 2 (50/50) is particularly preferred.
- the drying step d) is carried out by exposing the rinsed solid surface to the steam produced by the heating of the organic solvent or of the mixture of organic solvents used in the rinsing step c). In the case of a mixture of non-azeotropic solvents, the rinsed surface will be dried with the vapor of the most volatile compound.
- the drying time is at least 20 seconds and preferably between 30 seconds and 1 minute.
- the method according to the present invention is particularly applicable for the removal of organic and / or mineral soiling from solid surfaces of metal parts, ceramics, glasses, plastics, printed circuits (electronic parts, semi-finished parts drivers).
- the process of the present invention makes it possible to obtain clean solid surfaces, free of any organic and / or mineral soiling as well as traces of water.
- the parts cleaned using the method according to the invention can be used immediately for other treatment operations such as, for example, painting, electroplating.
- the device for implementing the method according to the invention can be constituted by the sequence of the following devices:
- This tank can be provided with heating means and means making it possible to produce ultrasound.
- the part (or parts) to be cleaned, placed on a basket, is immersed in a bath of the microemulsion type composition at a temperature and for a duration as defined above.
- the part is then removed from the bath and then drained, preferably above an inclined plane which allows the return of the microemulsion type composition in the cleaning tank and then it is directed to the rinse / drying cycle. Rinsing steps. - drying are preferably carried out in a commercial machine comprising at least two tanks provided with heating and condensing means.
- a first tank optionally provided with means for producing ultrasound
- the part is rinsed by immersion in a bath of organic solvent or of a mixture of organic solvents brought to a temperature as defined above. Then, the part is removed from said bath and then conveyed to the second tank to be dried there.
- This second tank contains the organic solvent or the mixture of organic solvents used in the previous rinsing tank which is brought to its boiling point.
- the part is therefore dried by the vapors of the organic solvent or of the mixture of organic solvents used for rinsing. These vapors are condensed by means of a refrigerated condensing coil and recycled into the liquid rinsing tank.
- the following examples illustrate the invention.
- DPNB dipropylene glycol
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0100228A FR2819201B1 (fr) | 2001-01-09 | 2001-01-09 | Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion |
FR0100228 | 2001-01-09 | ||
PCT/FR2002/000035 WO2002055223A1 (fr) | 2001-01-09 | 2002-01-07 | Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1349678A1 true EP1349678A1 (fr) | 2003-10-08 |
EP1349678B1 EP1349678B1 (fr) | 2005-12-21 |
Family
ID=8858628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02710948A Expired - Lifetime EP1349678B1 (fr) | 2001-01-09 | 2002-01-07 | Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion |
Country Status (12)
Country | Link |
---|---|
US (1) | US7417018B2 (fr) |
EP (1) | EP1349678B1 (fr) |
JP (1) | JP2004525753A (fr) |
KR (1) | KR100502532B1 (fr) |
CN (1) | CN1236866C (fr) |
AT (1) | ATE313390T1 (fr) |
AU (1) | AU2002229853B2 (fr) |
CA (1) | CA2434183C (fr) |
DE (1) | DE60208154D1 (fr) |
ES (1) | ES2253518T3 (fr) |
FR (1) | FR2819201B1 (fr) |
WO (1) | WO2002055223A1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4663891B2 (ja) * | 2001-02-19 | 2011-04-06 | 東燃化学株式会社 | 熱可塑性樹脂成形体の洗浄方法およびこれを利用した熱可塑性樹脂微多孔膜の製造方法 |
CN1690120A (zh) * | 2004-03-01 | 2005-11-02 | 三菱瓦斯化学株式会社 | 具有高减震能力的树脂组合物 |
FR2873689B1 (fr) * | 2004-07-29 | 2006-10-13 | Arkema Sa | Composition a base de 1,1,1,3,3,-pentafluorobutane |
JP3994992B2 (ja) * | 2004-08-13 | 2007-10-24 | 三菱瓦斯化学株式会社 | シリコン微細加工に用いる異方性エッチング剤組成物及びエッチング方法 |
EP2392908B1 (fr) * | 2004-12-17 | 2019-08-21 | Ventana Medical Systems, Inc. | Procédés pour la préparation d'un échantillon biologique inclus en paraffine pour la coloration. |
JP6023641B2 (ja) | 2013-04-25 | 2016-11-09 | Jxエネルギー株式会社 | 洗浄剤組成物 |
CN112404026B (zh) * | 2020-09-11 | 2022-03-01 | 上海金堂轻纺新材料科技有限公司 | 一种除油污废水循环利用的工艺 |
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-
2001
- 2001-01-09 FR FR0100228A patent/FR2819201B1/fr not_active Expired - Fee Related
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2002
- 2002-01-07 CA CA002434183A patent/CA2434183C/fr not_active Expired - Fee Related
- 2002-01-07 US US10/250,914 patent/US7417018B2/en not_active Expired - Fee Related
- 2002-01-07 WO PCT/FR2002/000035 patent/WO2002055223A1/fr active IP Right Grant
- 2002-01-07 ES ES02710948T patent/ES2253518T3/es not_active Expired - Lifetime
- 2002-01-07 EP EP02710948A patent/EP1349678B1/fr not_active Expired - Lifetime
- 2002-01-07 CN CNB028062698A patent/CN1236866C/zh not_active Expired - Fee Related
- 2002-01-07 DE DE60208154T patent/DE60208154D1/de not_active Expired - Fee Related
- 2002-01-07 KR KR10-2003-7009194A patent/KR100502532B1/ko active IP Right Grant
- 2002-01-07 AU AU2002229853A patent/AU2002229853B2/en not_active Ceased
- 2002-01-07 AT AT02710948T patent/ATE313390T1/de not_active IP Right Cessation
- 2002-01-07 JP JP2002555945A patent/JP2004525753A/ja active Pending
Non-Patent Citations (1)
Title |
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See references of WO02055223A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP1349678B1 (fr) | 2005-12-21 |
AU2002229853B8 (en) | 2002-07-24 |
ES2253518T3 (es) | 2006-06-01 |
DE60208154D1 (de) | 2006-01-26 |
AU2002229853B2 (en) | 2007-08-02 |
CA2434183A1 (fr) | 2002-07-18 |
WO2002055223A1 (fr) | 2002-07-18 |
FR2819201B1 (fr) | 2003-02-21 |
JP2004525753A (ja) | 2004-08-26 |
KR20030070099A (ko) | 2003-08-27 |
FR2819201A1 (fr) | 2002-07-12 |
CN1496288A (zh) | 2004-05-12 |
ATE313390T1 (de) | 2006-01-15 |
US20040092420A1 (en) | 2004-05-13 |
KR100502532B1 (ko) | 2005-07-20 |
CA2434183C (fr) | 2009-10-06 |
CN1236866C (zh) | 2006-01-18 |
US7417018B2 (en) | 2008-08-26 |
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