FR2819201B1 - Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion - Google Patents

Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion

Info

Publication number
FR2819201B1
FR2819201B1 FR0100228A FR0100228A FR2819201B1 FR 2819201 B1 FR2819201 B1 FR 2819201B1 FR 0100228 A FR0100228 A FR 0100228A FR 0100228 A FR0100228 A FR 0100228A FR 2819201 B1 FR2819201 B1 FR 2819201B1
Authority
FR
France
Prior art keywords
microemulsion
solid surface
cleaning
removing organic
mineral soiling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0100228A
Other languages
English (en)
Other versions
FR2819201A1 (fr
Inventor
Pascal Michaud
Jean Claude Lheureux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arkema France SA
Original Assignee
Atofina SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0100228A priority Critical patent/FR2819201B1/fr
Application filed by Atofina SA filed Critical Atofina SA
Priority to CA002434183A priority patent/CA2434183C/fr
Priority to DE60208154T priority patent/DE60208154D1/de
Priority to EP02710948A priority patent/EP1349678B1/fr
Priority to JP2002555945A priority patent/JP2004525753A/ja
Priority to KR10-2003-7009194A priority patent/KR100502532B1/ko
Priority to US10/250,914 priority patent/US7417018B2/en
Priority to AT02710948T priority patent/ATE313390T1/de
Priority to AU2002229853A priority patent/AU2002229853B2/en
Priority to PCT/FR2002/000035 priority patent/WO2002055223A1/fr
Priority to CNB028062698A priority patent/CN1236866C/zh
Priority to ES02710948T priority patent/ES2253518T3/es
Publication of FR2819201A1 publication Critical patent/FR2819201A1/fr
Application granted granted Critical
Publication of FR2819201B1 publication Critical patent/FR2819201B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/43—Solvents
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
    • C11D1/123—Sulfonic acids or sulfuric acid esters; Salts thereof derived from carboxylic acids, e.g. sulfosuccinates
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D17/00—Detergent materials or soaps characterised by their shape or physical properties
    • C11D17/0008—Detergent materials or soaps characterised by their shape or physical properties aqueous liquid non soap compositions
    • C11D17/0017—Multi-phase liquid compositions
    • C11D17/0021—Aqueous microemulsions
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5036—Azeotropic mixtures containing halogenated solvents
    • C11D7/5068—Mixtures of halogenated and non-halogenated solvents
    • C11D7/5077—Mixtures of only oxygen-containing solvents
    • C11D7/5081—Mixtures of only oxygen-containing solvents the oxygen-containing solvents being alcohols only
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/40—Specific cleaning or washing processes
    • C11D2111/44—Multi-step processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Detergent Compositions (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Drying Of Solid Materials (AREA)
FR0100228A 2001-01-09 2001-01-09 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion Expired - Fee Related FR2819201B1 (fr)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FR0100228A FR2819201B1 (fr) 2001-01-09 2001-01-09 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion
AU2002229853A AU2002229853B2 (en) 2001-01-09 2002-01-07 Method of cleaning a solid surface by removing organic and/or mineral soils using a microemulsion
EP02710948A EP1349678B1 (fr) 2001-01-09 2002-01-07 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion
JP2002555945A JP2004525753A (ja) 2001-01-09 2002-01-07 マイクロエマルションを用いて有機および／または無機の汚れを除去する固体表面洗浄方法
KR10-2003-7009194A KR100502532B1 (ko) 2001-01-09 2002-01-07 마이크로에멀젼을 사용한 유기 및/또는 무기 오염물의제거에 의한 고형 표면의 세정 방법
US10/250,914 US7417018B2 (en) 2001-01-09 2002-01-07 Method of cleaning a solid surface by removing organic and/or mineral soils using a microemulsion
CA002434183A CA2434183C (fr) 2001-01-09 2002-01-07 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion
DE60208154T DE60208154D1 (de) 2001-01-09 2002-01-07 Verfahren zum reinigen von harten oberflächen unter verwendung von einer mikroemulsion um organische und/oder mineralische flecken zu entfernen
PCT/FR2002/000035 WO2002055223A1 (fr) 2001-01-09 2002-01-07 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion
CNB028062698A CN1236866C (zh) 2001-01-09 2002-01-07 使用微乳液除去有机和/或无机污垢清洗固体表面的方法
ES02710948T ES2253518T3 (es) 2001-01-09 2002-01-07 Procedimiento de limpieza de una superficie solida por eliminacion de suciedades organicas y/o minerales por medio de microemulsion.
AT02710948T ATE313390T1 (de) 2001-01-09 2002-01-07 Verfahren zum reinigen von harten oberflächen unter verwendung von einer mikroemulsion um organische und/oder mineralische flecken zu entfernen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0100228A FR2819201B1 (fr) 2001-01-09 2001-01-09 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion

Publications (2)

Publication Number Publication Date
FR2819201A1 FR2819201A1 (fr) 2002-07-12
FR2819201B1 true FR2819201B1 (fr) 2003-02-21

Family

ID=8858628

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0100228A Expired - Fee Related FR2819201B1 (fr) 2001-01-09 2001-01-09 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion

Country Status (12)

Country Link
US (1) US7417018B2 (fr)
EP (1) EP1349678B1 (fr)
JP (1) JP2004525753A (fr)
KR (1) KR100502532B1 (fr)
CN (1) CN1236866C (fr)
AT (1) ATE313390T1 (fr)
AU (1) AU2002229853B2 (fr)
CA (1) CA2434183C (fr)
DE (1) DE60208154D1 (fr)
ES (1) ES2253518T3 (fr)
FR (1) FR2819201B1 (fr)
WO (1) WO2002055223A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4663891B2 (ja) * 2001-02-19 2011-04-06 東燃化学株式会社 熱可塑性樹脂成形体の洗浄方法およびこれを利用した熱可塑性樹脂微多孔膜の製造方法
CN1690120A (zh) * 2004-03-01 2005-11-02 三菱瓦斯化学株式会社 具有高减震能力的树脂组合物
FR2873689B1 (fr) * 2004-07-29 2006-10-13 Arkema Sa Composition a base de 1,1,1,3,3,-pentafluorobutane
JP3994992B2 (ja) * 2004-08-13 2007-10-24 三菱瓦斯化学株式会社 シリコン微細加工に用いる異方性エッチング剤組成物及びエッチング方法
AU2005316930B2 (en) * 2004-12-17 2009-06-18 Ventana Medical Systems, Inc. Methods and compositions for a microemulsion-based tissue treatment
JP6023641B2 (ja) 2013-04-25 2016-11-09 Ｊｘエネルギー株式会社 洗浄剤組成物
CN112404026B (zh) * 2020-09-11 2022-03-01 上海金堂轻纺新材料科技有限公司 一种除油污废水循环利用的工艺

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DE3152654C2 (de) * 1980-12-22 1987-07-16 Electrolux Ab Verfahren zum Waschen von Textilgegenst{nden und Vorrichtung zur Durchf}hrung des Verfahrens
US4975468A (en) * 1989-04-03 1990-12-04 Affinity Biotech, Inc. Fluorinated microemulsion as oxygen carrier
US4956115A (en) * 1989-05-23 1990-09-11 Hoechst Celanese Corporation Water borne solvent strippers
US5196136A (en) * 1991-06-20 1993-03-23 E. I. Du Pont De Nemours And Company Cleaning composition of hydrocarbon component, surfactant and multibasic ester additive
US6090901A (en) * 1991-07-05 2000-07-18 Biocompatibles Limited Polymeric surface coatings
US5213624A (en) * 1991-07-19 1993-05-25 Ppg Industries, Inc. Terpene-base microemulsion cleaning composition
MX9206771A (es) * 1991-12-02 1993-06-01 Allied Signal Inc Mejoras en sistema de limpieza por solventes multiples
FR2691473B1 (fr) * 1992-05-21 2002-05-17 Atochem Elf Sa Compositions pour le démouillage ou le dégraissage de surfaces solides.
JPH08508536A (ja) * 1993-04-02 1996-09-10 ザ ダウ ケミカル カンパニー 微小エマルジョン及びエマルジョン洗剤組成物
US5464480A (en) * 1993-07-16 1995-11-07 Legacy Systems, Inc. Process and apparatus for the treatment of semiconductor wafers in a fluid
US5911837A (en) * 1993-07-16 1999-06-15 Legacy Systems, Inc. Process for treatment of semiconductor wafers in a fluid
US5571337A (en) * 1994-11-14 1996-11-05 Yieldup International Method for cleaning and drying a semiconductor wafer
US5634978A (en) * 1994-11-14 1997-06-03 Yieldup International Ultra-low particle semiconductor method
WO1996038522A1 (fr) * 1995-06-02 1996-12-05 Ashland Inc. Nettoyants en micro-emulsions stables ayant une faible teneur en matieres organiques volatiles
US6030754A (en) * 1996-02-05 2000-02-29 Texas Instruments Incorporated Photoresist removal without organic solvent following ashing operation
US5888308A (en) * 1997-02-28 1999-03-30 International Business Machines Corporation Process for removing residue from screening masks with alkaline solution
US5938856A (en) * 1997-06-13 1999-08-17 International Business Machines Corporation Process of removing flux residue from microelectronic components
US6165962A (en) * 1997-07-31 2000-12-26 E. I. Du Pont De Nemours And Comapny Aqueous microemulsions
US5908822A (en) * 1997-10-28 1999-06-01 E. I. Du Pont De Nemours And Company Compositions and processes for drying substrates
US6120613A (en) * 1998-04-30 2000-09-19 Micell Technologies, Inc. Carbon dioxide cleaning and separation systems
US6159827A (en) * 1998-04-13 2000-12-12 Mitsui Chemicals, Inc. Preparation process of semiconductor wafer
US6159917A (en) * 1998-12-16 2000-12-12 3M Innovative Properties Company Dry cleaning compositions containing hydrofluoroether
FR2795088B1 (fr) * 1999-06-21 2002-05-24 Atofina Compositions de nettoyage a froid du type microemulsions
US6593283B2 (en) * 2000-04-28 2003-07-15 Ecolab Inc. Antimicrobial composition
US6730595B2 (en) * 2000-12-12 2004-05-04 Mitsui Chemicals, Inc. Protecting method for semiconductor wafer and surface protecting adhesive film for semiconductor wafer used in said method
EP1304103B1 (fr) * 2001-10-22 2008-12-31 Viroblock SA Vesicles non-phospholipidiques (npLV) et leur utilisation en cosmetique, therapeutique et preventive
CA2463964A1 (fr) * 2001-10-26 2003-05-08 Unilever Plc Procede de nettoyage a sec
KR100480606B1 (ko) * 2002-08-01 2005-04-06 삼성전자주식회사 아이피에이 증기 건조 방식을 이용한 반도체 웨이퍼 건조장치

Also Published As

Publication number Publication date
US20040092420A1 (en) 2004-05-13
CA2434183A1 (fr) 2002-07-18
JP2004525753A (ja) 2004-08-26
ES2253518T3 (es) 2006-06-01
KR100502532B1 (ko) 2005-07-20
CN1236866C (zh) 2006-01-18
KR20030070099A (ko) 2003-08-27
US7417018B2 (en) 2008-08-26
CN1496288A (zh) 2004-05-12
AU2002229853B2 (en) 2007-08-02
CA2434183C (fr) 2009-10-06
DE60208154D1 (de) 2006-01-26
AU2002229853B8 (en) 2002-07-24
WO2002055223A1 (fr) 2002-07-18
EP1349678A1 (fr) 2003-10-08
FR2819201A1 (fr) 2002-07-12
ATE313390T1 (de) 2006-01-15
EP1349678B1 (fr) 2005-12-21

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Legal Events

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Effective date: 20190906