CA2434183A1 - Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion - Google Patents

Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion Download PDF

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Publication number
CA2434183A1
CA2434183A1 CA002434183A CA2434183A CA2434183A1 CA 2434183 A1 CA2434183 A1 CA 2434183A1 CA 002434183 A CA002434183 A CA 002434183A CA 2434183 A CA2434183 A CA 2434183A CA 2434183 A1 CA2434183 A1 CA 2434183A1
Authority
CA
Canada
Prior art keywords
cleaning
solid surface
microemulsion
removing organic
mineral soils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002434183A
Other languages
English (en)
Other versions
CA2434183C (fr
Inventor
Pascal Michaud
Jean-Claude Lheureux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arkema France SA
Original Assignee
Atofina
Pascal Michaud
Jean-Claude Lheureux
Arkema France
Arkema
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atofina, Pascal Michaud, Jean-Claude Lheureux, Arkema France, Arkema filed Critical Atofina
Publication of CA2434183A1 publication Critical patent/CA2434183A1/fr
Application granted granted Critical
Publication of CA2434183C publication Critical patent/CA2434183C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/43—Solvents
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
    • C11D1/123—Sulfonic acids or sulfuric acid esters; Salts thereof derived from carboxylic acids, e.g. sulfosuccinates
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D17/00—Detergent materials or soaps characterised by their shape or physical properties
    • C11D17/0008—Detergent materials or soaps characterised by their shape or physical properties aqueous liquid non soap compositions
    • C11D17/0017—Multi-phase liquid compositions
    • C11D17/0021—Aqueous microemulsions
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5036—Azeotropic mixtures containing halogenated solvents
    • C11D7/5068—Mixtures of halogenated and non-halogenated solvents
    • C11D7/5077—Mixtures of only oxygen-containing solvents
    • C11D7/5081—Mixtures of only oxygen-containing solvents the oxygen-containing solvents being alcohols only
    • C11D2111/14—
    • C11D2111/44—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Abstract

L'invention concerne un procédé de nettoyage d'une surface solide qui compre nd les étapes suivantes: a) nettoyage de ladite surface solide au moyen d'une composition de nettoyage de type microémulsion, e) égouttage de ladite surfa ce nettoyée, f) rinçage de ladite surface égouttée avec un solvant organique ou un mélange de solvants organiques de bas point d'ébullition, et g) séchage d e ladite surface rincée avec le solvant organique ou le mélange de solvants organiques utilisé en c).
CA002434183A 2001-01-09 2002-01-07 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion Expired - Fee Related CA2434183C (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0100228A FR2819201B1 (fr) 2001-01-09 2001-01-09 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion
FR01/00228 2001-01-09
PCT/FR2002/000035 WO2002055223A1 (fr) 2001-01-09 2002-01-07 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion

Publications (2)

Publication Number Publication Date
CA2434183A1 true CA2434183A1 (fr) 2002-07-18
CA2434183C CA2434183C (fr) 2009-10-06

Family

ID=8858628

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002434183A Expired - Fee Related CA2434183C (fr) 2001-01-09 2002-01-07 Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion

Country Status (12)

Country Link
US (1) US7417018B2 (fr)
EP (1) EP1349678B1 (fr)
JP (1) JP2004525753A (fr)
KR (1) KR100502532B1 (fr)
CN (1) CN1236866C (fr)
AT (1) ATE313390T1 (fr)
AU (1) AU2002229853B2 (fr)
CA (1) CA2434183C (fr)
DE (1) DE60208154D1 (fr)
ES (1) ES2253518T3 (fr)
FR (1) FR2819201B1 (fr)
WO (1) WO2002055223A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4663891B2 (ja) * 2001-02-19 2011-04-06 東燃化学株式会社 熱可塑性樹脂成形体の洗浄方法およびこれを利用した熱可塑性樹脂微多孔膜の製造方法
CN1690120A (zh) * 2004-03-01 2005-11-02 三菱瓦斯化学株式会社 具有高减震能力的树脂组合物
FR2873689B1 (fr) * 2004-07-29 2006-10-13 Arkema Sa Composition a base de 1,1,1,3,3,-pentafluorobutane
JP3994992B2 (ja) * 2004-08-13 2007-10-24 三菱瓦斯化学株式会社 シリコン微細加工に用いる異方性エッチング剤組成物及びエッチング方法
EP2390648A1 (fr) * 2004-12-17 2011-11-30 Ventana Medical Systems, Inc. Procédés et compositions pour traitement tissulaire à base de microémulsion
JP6023641B2 (ja) 2013-04-25 2016-11-09 Ｊｘエネルギー株式会社 洗浄剤組成物
CN112404026B (zh) * 2020-09-11 2022-03-01 上海金堂轻纺新材料科技有限公司 一种除油污废水循环利用的工艺

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US4650493A (en) * 1980-12-22 1987-03-17 A.B. Electrolux Method of washing textile objects and a device for performing the method
US4975468A (en) * 1989-04-03 1990-12-04 Affinity Biotech, Inc. Fluorinated microemulsion as oxygen carrier
US4956115A (en) * 1989-05-23 1990-09-11 Hoechst Celanese Corporation Water borne solvent strippers
US5196136A (en) * 1991-06-20 1993-03-23 E. I. Du Pont De Nemours And Company Cleaning composition of hydrocarbon component, surfactant and multibasic ester additive
US6090901A (en) * 1991-07-05 2000-07-18 Biocompatibles Limited Polymeric surface coatings
US5213624A (en) * 1991-07-19 1993-05-25 Ppg Industries, Inc. Terpene-base microemulsion cleaning composition
MX9206771A (es) * 1991-12-02 1993-06-01 Allied Signal Inc Mejoras en sistema de limpieza por solventes multiples
FR2691473B1 (fr) * 1992-05-21 2002-05-17 Atochem Elf Sa Compositions pour le démouillage ou le dégraissage de surfaces solides.
EP0692021B1 (fr) * 1993-04-02 2002-05-15 The Dow Chemical Company Compositions de microemulsion et d'emulsion nettoyantes
US5464480A (en) * 1993-07-16 1995-11-07 Legacy Systems, Inc. Process and apparatus for the treatment of semiconductor wafers in a fluid
US5911837A (en) * 1993-07-16 1999-06-15 Legacy Systems, Inc. Process for treatment of semiconductor wafers in a fluid
US5571337A (en) * 1994-11-14 1996-11-05 Yieldup International Method for cleaning and drying a semiconductor wafer
US5634978A (en) * 1994-11-14 1997-06-03 Yieldup International Ultra-low particle semiconductor method
WO1996038522A1 (fr) * 1995-06-02 1996-12-05 Ashland Inc. Nettoyants en micro-emulsions stables ayant une faible teneur en matieres organiques volatiles
US6030754A (en) * 1996-02-05 2000-02-29 Texas Instruments Incorporated Photoresist removal without organic solvent following ashing operation
US5888308A (en) * 1997-02-28 1999-03-30 International Business Machines Corporation Process for removing residue from screening masks with alkaline solution
US5938856A (en) * 1997-06-13 1999-08-17 International Business Machines Corporation Process of removing flux residue from microelectronic components
US6165962A (en) * 1997-07-31 2000-12-26 E. I. Du Pont De Nemours And Comapny Aqueous microemulsions
US5908822A (en) * 1997-10-28 1999-06-01 E. I. Du Pont De Nemours And Company Compositions and processes for drying substrates
US6120613A (en) * 1998-04-30 2000-09-19 Micell Technologies, Inc. Carbon dioxide cleaning and separation systems
US6159827A (en) * 1998-04-13 2000-12-12 Mitsui Chemicals, Inc. Preparation process of semiconductor wafer
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FR2795088B1 (fr) 1999-06-21 2002-05-24 Atofina Compositions de nettoyage a froid du type microemulsions
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DE60137229D1 (de) * 2001-10-22 2009-02-12 Viroblock Sa Non-phospholipid Vesikel (npLV) und ihre Verwendung in kosmetischen, therapeutischen und prophylaktischen Anwendungen
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KR100480606B1 (ko) * 2002-08-01 2005-04-06 삼성전자주식회사 아이피에이 증기 건조 방식을 이용한 반도체 웨이퍼 건조장치

Also Published As

Publication number Publication date
CA2434183C (fr) 2009-10-06
AU2002229853B2 (en) 2007-08-02
US7417018B2 (en) 2008-08-26
FR2819201A1 (fr) 2002-07-12
CN1496288A (zh) 2004-05-12
FR2819201B1 (fr) 2003-02-21
EP1349678B1 (fr) 2005-12-21
ATE313390T1 (de) 2006-01-15
WO2002055223A1 (fr) 2002-07-18
CN1236866C (zh) 2006-01-18
DE60208154D1 (de) 2006-01-26
KR20030070099A (ko) 2003-08-27
JP2004525753A (ja) 2004-08-26
EP1349678A1 (fr) 2003-10-08
KR100502532B1 (ko) 2005-07-20
US20040092420A1 (en) 2004-05-13
AU2002229853B8 (en) 2002-07-24
ES2253518T3 (es) 2006-06-01

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