EP1100096B1 - Electronic device and manufacture thereof - Google Patents

Electronic device and manufacture thereof Download PDF

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Publication number
EP1100096B1
EP1100096B1 EP00919143A EP00919143A EP1100096B1 EP 1100096 B1 EP1100096 B1 EP 1100096B1 EP 00919143 A EP00919143 A EP 00919143A EP 00919143 A EP00919143 A EP 00919143A EP 1100096 B1 EP1100096 B1 EP 1100096B1
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EP
European Patent Office
Prior art keywords
electronic component
metal thin
electrode
thin films
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP00919143A
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German (de)
English (en)
French (fr)
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EP1100096A4 (en
EP1100096A1 (en
Inventor
Kazuyoshi Honda
Noriyasu Echigo
Masaru Odagiri
Takanori Sugimoto
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/33—Thin- or thick-film capacitors 
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/38—Multiple capacitors, i.e. structural combinations of fixed capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49822—Multilayer substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/162—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0213—Electrical arrangements not otherwise provided for
    • H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
    • H05K1/023—Reduction of cross-talk, noise or electromagnetic interference using auxiliary mounted passive components or auxiliary substances
    • H05K1/0231—Capacitors or dielectric substances
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0286—Programmable, customizable or modifiable circuits
    • H05K1/0287—Programmable, customizable or modifiable circuits having an universal lay-out, e.g. pad or land grid patterns or mesh patterns
    • H05K1/0289—Programmable, customizable or modifiable circuits having an universal lay-out, e.g. pad or land grid patterns or mesh patterns having a matrix lay-out, i.e. having selectively interconnectable sets of X-conductors and Y-conductors in different planes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/14—Structural association of two or more printed circuits
    • H05K1/141—One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0179—Thin film deposited insulating layer, e.g. inorganic layer for printed capacitor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/04—Assemblies of printed circuits
    • H05K2201/049—PCB for one component, e.g. for mounting onto mother PCB
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09218—Conductive traces
    • H05K2201/09236—Parallel layout
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10734—Ball grid array [BGA]; Bump grid array
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/403—Edge contacts; Windows or holes in the substrate having plural connections on the walls thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/467—Adding a circuit layer by thin film methods

Definitions

  • the present invention relates to a method for manufacturing an electronic component.
  • a capacitor is one of the important devices that secure the stability of the transmission line and the power supply line. In order to realize the high-speed operation, not only should the capacitor have high frequency performance, but also the wiring led thereto should have low impedance.
  • US 5,538,433 discloses an electrical connector including a laminated base board formed by laminating first to fourth conductive layers and dielectric layers alternately, and a plurality of connecting pins (signal pin and current source pin) penetrating the laminated base board.
  • the current source pin is electrically connected to the first conductive layer, and the signal pin is insulated from the conductive layers.
  • a plurality of connecting apertures are formed in the base board, and fifth conductive layers in these connecting apertures are electrically connected to the first to fourth conductive layers.
  • a method for manufacturing the electronic component according to the present invention is defined in claim 1.
  • a simple method can connect desired metal thin films to each other among metal thin films that are layered in the electronic component. Therefore, lead electrodes are formed on the metal thin films that are connected in this manner, enabling a plurality of metal thin films, which are connected, to function as electrode layers with the same electric potential.
  • the openings can be obtained by depositing the dielectric thin film and then irradiating a laser beam to a predetermined portion to remove a part of the dielectric thin film.
  • the dielectric thin film with the openings can be formed easily and efficiently on a desired position in a precise manner.
  • the laser beam is a carbon dioxide gas laser.
  • the dielectric thin film can be removed efficiently without causing a deterioration of the metal thin film.
  • the openings may be obtained by oil masking.
  • the dielectric thin film with the openings can be formed easily and efficiently at low cost.
  • an oil used for the oil masking is a hydrocarbon-based oil, a mineral oil or a fluorocarbon oil. Since these oils have an excellent wettability to the metal thin film and reliably prevent the resin thin film material from adhering, the opening with a clear border can be formed reliably.
  • the exposed portion of the metal thin film can be made into the lead electrode.
  • a conductive substance is put on a surface of the exposed part of the metal thin film.
  • the conductive substance is adhered to the exposed portion of the metal thin film so as to be on the same plane as or protrude from the outer surface of the electronic component because of easy leading out of the electrode and connection to the wiring board and the other electronic components.
  • the method for manufacturing the electronic component including a plurality of dielectric thin films includes depositing a dielectric thin film having an opening in a predetermined portion a plurality of times, so that a layered product that comprises the dielectric thin film with a penetrating hole that penetrates in a deposition direction is obtained.
  • a simple method can form the penetrating hole for the penetrating electrode that penetrates the electronic component in the deposition direction.
  • a conductive substance is filled in the penetrating hole of the layered product that is obtained.
  • a penetrating electrode that penetrates the electronic component in the deposition direction can be obtained.
  • the method for manufacturing the electronic component according to the present invention includes forming a metal thin film that is patterned in a stripe shape, forming a dielectric thin film having an opening in a region where the metal thin film is not formed, forming a metal thin film that is patterned in a stripe shape in a region without the opening on the dielectric thin film, and filling a conductive substance in the opening.
  • a simple method can form a penetrating electrode that penetrates the electronic component in the deposition direction and is not connected to the metal thin film in the electronic component.
  • a desired circuit configuration that is independent of such a penetrating electrode can be provided to the same electronic component.
  • the electronic component obtained by the method of the present invention mounts the electronic component obtained by the method of the present invention on a wiring board and dispose another electronic component (for example, a semiconductor chip) thereon to connect this electronic component to the wiring board via the penetrating electrode.
  • the electronic component obtained by the method of the present invention includes the metal thin films and the dielectric thin film that is interposed between the metal thin films, it is possible, for example; to form a capacitor in the electronic component.
  • the capacitor can be arranged near the semiconductor chip, thereby realizing a high frequency driving of the semiconductor chip and suppressing the size increase of the mounted area at the same time.
  • the conductive substance is electrically insulated from the metal thin films.
  • a circuit board and the other electronic component are electrically connected to each other via the penetrating electrode as if there was not the electronic component between them.
  • said metal thin films are formed so as to be substantially stripe-shaped. With this configuration, the electronic component having the above configuration can be manufactured efficiently.
  • the substantially stripe-shaped metal thin film is formed so that a direction of the stripe crosses the one formed thereunder (so that stripe directions of a metal thin film and its adjacent metal thin film are like skew lines).
  • a capacitance forming region can be formed in this portion.
  • the directions of the stripes of the metal thin films do not have to cross perpendicularly, and may cross obliquely.
  • both of the metal thin films that are formed on both sides of the dielectric thin film overlap with a predetermined size in a deposition direction.
  • a patterning shape of the metal thin film can be designed optionally, and the capacitance forming region can be formed at the same time.
  • an electrode that is electrically connected to at least a part of the metal thin films is formed on a surface substantially perpendicular to a surface on which the metal thin film is formed.
  • a plurality of the electrodes are formed and a part of or all of the electrodes are electrically insulated from each other.
  • a plurality of independent capacitors can be formed in the electronic component. Also, changing the size and number of the metal thin films connected to one electrode can change a capacitance of each capacitor.
  • the dielectric thin film has a second opening in a region where the metal thin films are formed and electrically connects both of the metal thin films that are formed on both sides of the dielectric thin film via the second opening.
  • the patterned metal thin film can be formed by forming the metal thin film after applying a solid mask or an evaporative mask, or by forming the metal thin film followed by a laser etching. With this configuration, the metal thin film with a desired shape can be obtained easily and efficiently.
  • the openings may not be formed in the dielectric thin film while manufacturing the layered product and holes may be formed after obtaining the layered product, thereby simplifying the apparatus for manufacturing the layered product.
  • the hole can be a penetrating hole that is formed so as not to penetrate said metal thin films.
  • the penetrating electrode can be formed easily.
  • a plurality of layers of the metal thin film are formed and the hole is formed so that a part of the metal thin films is exposed to an inner wall of the hole. Then, filling the conductive substance so as to be connected to the exposed metal thin film can form a lead electrode easily. It is possible for the hole here to penetrate or not to penetrate the electronic component.
  • the hole is formed by irradiating a laser beam.
  • the laser beam source used here is preferably selected considering whether or not it penetrates the metal thin film layers at the same time.
  • An electronic component that may be manufactured by the method of claim 1 according to the present invention includes electrode layers arranged in opposition to each other, a dielectric interposed between the electrode layers, a connecting electrode that is connected to at least one of the electrode layers, and penetrating electrodes that penetrate the electronic component without being connected to the electrode layers. Since the electronic component includes the penetrating electrodes, it is possible, for example, to mount the electronic component on a wiring board and dispose another electronic component (for example, a semiconductor chip) thereon to connect this electronic component to the wiring board via the penetrating electrode. Also, since the electronic component includes the electrode layers and the dielectric that is interposed between the electrode layers, it is possible, for example, to form a capacitor in the electronic component. As a result, while suppressing the size increase in a mounted area, the capacitor can be arranged near the semiconductor chip, thereby realizing a high frequency driving of the semiconductor chip and suppressing the size increase of the mounted area at the same time.
  • the penetrating electrodes mentioned above penetrate the electronic component in a direction substantially in parallel to the deposition direction of the electrode layer and the dielectric.
  • the electronic component with such a configuration is easy to manufacture.
  • the penetrating electrodes are arranged like lattice points
  • the electrode layers include a first electrode layer and a second electrode layer arranged between the penetrating electrodes, and the first electrode layer and the second electrode layer are arranged so as to be crossed with each other like a lattice when seen from a penetrating direction of the penetrating electrodes and so that the dielectric is interposed therebetween.
  • the electrode layers may include a first electrode layer and a second electrode layer that are arranged so as to have a facing portion with a predetermined size and so that the dielectric is interposed therebetween. With this configuration, a capacitor with a desired capacity can be formed easily in the electronic component.
  • the connecting electrode can be a lead electrode that is formed in the same plane as the penetrating electrode.
  • the lead electrode and the penetrating electrode can be formed so as to be exposed to the same surface of the electronic component.
  • the lead electrode can be connected to the wiring board, which is used for supplying voltage to the electrode layers in the electronic component, on the same plane as the penetrating electrode (for example, the bottom surface or the top surface of the electronic component) in a similar manner.
  • the mounted area can be further decreased.
  • another electronic component that is disposed on the electronic component can be connected to the lead electrode easily.
  • the connecting electrode can be an external electrode that is formed in a different plane than the penetrating electrode.
  • the penetrating electrode is formed so as to be exposed to the upper and lower outer surfaces of the electronic component, and the connecting electrode (the external electrode) is formed on the peripheral surface of the electronic component.
  • a plurality of capacitance forming regions are formed between the first electrode layers and the second electrode layers.
  • a capacitor can be formed inside the electronic component.
  • the connecting electrodes that are connected to the first electrode layers and the second electrode layers forming the capacitance forming regions are insulated from each other. With this configuration, a plurality of independent capacitors can be formed inside the electronic component.
  • Fig. 1 is a schematic plan view showing an example of an electronic component 10.
  • Fig. 2 is a perspective view showing an internal structure of a part of the electronic component of Fig. 1.
  • a plurality of first electrode layers 1 are formed so as to be stripe-shaped (band shaped) on substantially the same plane, and a plurality of second electrode layers 2 are formed so as to be stripe-shaped (band shaped) on substantially the same plane. They are layered so that a dielectric layer 3 is interposed between the first electrode layers 1 and the second electrode layers 2. By crossing the directions of the stripes of the first electrode layers 1 and the second electrode layers 2, capacitance forming regions 9 are formed at the intersections and function as capacitors.
  • a first lead electrode 4 is connected to the first electrode layer 1, and a second lead electrode 5 is connected to the second electrode layer 2. They can be used as joining terminals when the capacitance forming region 9 functions as a capacitor as is mentioned above.
  • the lead electrodes 4 and 5 may be formed so as to penetrate the electronic component 10 in the deposition direction as shown in Figs. 1 and 2, or to appear only on one surface of the electronic component. It is possible that one of the lead electrodes 4 and 5 is formed so as to penetrate the electronic component, and the other one appears only on one surface thereof.
  • penetrating electrodes 6 are formed in the electronic component 10. These penetrating electrodes 6 electrically connect the other electronic components that are arranged above and below the electronic component 10, as if there was not the electronic component between them.
  • a material for forming the electrode layers 1 and 2 can be a metal such as aluminum, copper or gold or a metal compound.
  • a material for forming the dielectric layer 3 can be a resin material such as acrylic resin, epoxy resin or vinyl resin, a ceramic material such as barium titanium oxide-based ceramic or strontium titanium oxide-based ceramic, a metallic oxide such as titanium oxide or aluminum oxide, or a semimetallic oxide such as silicon oxide.
  • a material for forming the lead electrodes 4 and 5 and the penetrating electrodes 6 can be a conductive paste or a conductive polymer in addition to a metal such as gold, silver, aluminum, copper or a solder material.
  • the electrode layers 1 and 2 can be formed by vacuum evaporation, sputtering or plating or the like. Also, the electrode layers 1 and 2 can be formed so as to be stripe-shaped by using a solid mask with patterning, using an evaporative mask of oil or the like, or laser etching accordingly.
  • the oil masking material can be various types of oils such as hydrocarbon-based oil, mineral oil or fluorocarbon oil.
  • the dielectric layer 3 can be formed by the following methods. When the resin-based material is used, it is vaporized by heating or atomized by ultrasonic waves or spraying, followed by being deposited. When the ceramic material or the metal-based material is used, sputtering, evaporation or the like can be selected.
  • openings are formed in the dielectric layer 3 by the following methods. After forming the dielectric layer, dielectric in a predetermined portion is removed by laser etching. Alternatively, after applying the evaporative mask such as oil, the dielectric layer is formed. A dotted evaporative mask can be applied effectively by an ink jet system in which micro-drops of a masking material are ejected from micropores.
  • the oil such as hydrocarbon-based oil, mineral oil or fluorocarbon oil can be used.
  • surplus masking material that remains after forming each layer can be removed by a far-infrared ray heater, an electron beam, an ultraviolet ray lamp irradiation or a plasma irradiation when necessary.
  • Fig. 3 is a schematic perspective view of an apparatus for describing a part of an example of steps of manufacturing the electronic components of Figs. 1 and 2.
  • a support is brought in from a chamber 11 for bringing in the support that is disposed on the right of the apparatus, taken through predetermined steps and then taken out from a gate 22 for taking out the support that is disposed on the left.
  • a plurality of chambers that are divided by each step are arranged between gate valves 12a and 12b and formed in a vacuum tank in which a predetermined degree of vacuum is maintained.
  • a conveyer system 21 that is disposed substantially in the center of the apparatus moves the support from one chamber to the other so that a predetermined processing is performed.
  • a substrate including, for example, sheet-like or plate-like resin, ceramics or metal can be used as the support, and dielectric thin films and metal thin films are deposited thereon.
  • a lower insulator film-forming source 13 forms a lower insulator film on the support surface.
  • a patterning mask or by irradiating a laser beam openings (holes) may be formed where the penetrating electrodes and the lead electrodes will be formed.
  • a combination of a metal thin film-forming source 14 and a patterning mask forms a first patterned metal thin-film (a first electrode layer).
  • a dielectric thin film-forming source 15 forms a first dielectric thin film (a dielectric layer).
  • a laser beam machine 16 removes the dielectric thin film where the lead electrodes and the penetrating electrodes will be formed.
  • a combination of a metal thin film-forming source 17 and a patterning mask forms a second patterned metal thin film (a second electrode layer).
  • a dielectric thin film-forming source 18 forms a second dielectric thin film (a dielectric layer).
  • a laser beam machine 19 removes the dielectric thin film where the lead electrodes and the penetrating electrodes will be formed.
  • the support is transmitted again to the metal thin film-forming source 14, the dielectric thin film-forming source 15, the laser beam machine 16, the metal thin film-forming source 17, the dielectric thin film-forming source 18 and the laser beam machine 19 in this order to be processed as above for a predetermined number of times.
  • an upper insulator film-forming source 20 forms an upper insulator film.
  • the penetrating electrode is formed as follows. A conductive paste is painted to fill a penetrating hole that is formed, and then hardened.
  • the lead electrode may be formed in a similar manner.
  • a conductive paste is painted to fill an opening that is formed in the upper insulator film and/or the lower insulator film so as to be connected to the metal thin film exposed to the opening.
  • the end of the lead electrode may be in the same plane as or slightly protrude from the surface of a layered product.
  • the layered product is cut into predetermined sizes where necessary.
  • the electronic component 10 formed according to the present invention is used, for example, by locating it between a carrier 28 that has a semiconductor chip 27 mounted thereon and a wiring board 30, as is schematically shown in Fig. 4.
  • a signal terminal 29a on the lower surface of the carrier 28 is connected to a wiring pattern 31, which is formed on the wiring board 30, via the penetrating electrode. 6 of the electronic component 10 when necessary.
  • one power terminal 29b on the lower surface of the carrier 28 is connected to the wiring board 30 via the penetrating electrode 6 and further to the first lead electrode 4.
  • the other power terminal 29b on the lower surface of the carrier 28 is connected to the wiring board 30 via the penetrating electrode 6 and further to the second lead electrode 5.
  • the penetrating electrode 6 and the lead electrodes 4 and 5 may be connected with the wiring pattern 31 on the surface of the wiring board 30 as is shown in Fig. 4, or with other means such as a connection inside the wiring board 30.
  • the capacitor formed between the first lead electrode 4 and the second lead electrode 5 does not substantially enlarge the mounted area and functions as a pass capacitor for power supply near the semiconductor chip. This is preferable in high frequency driving and a size reduction of the mounted area.
  • Aluminum was used as a metal thin film material, aluminum oxide was used as a dielectric material, and silver-based paste was used as a conductive paste.
  • an ink jet system was adopted. The ink jet system includes putting an oil masking material on a predetermined portion before forming the dielectric layer. Fluorocarbon oil was used as the oil masking material.
  • 484 penetrating electrodes with a diameter of 0.25 mm were formed on 0.8 mm-pitch lattice points, and 462 lead electrodes 4 of the electrode layers 1 and 462 lead electrodes 5 of the electrode layers 2 with a diameter of 0.25 mm respectively were formed on 0.8 mm-pitch lattice points between the penetrating electrodes.
  • the electrode layers 1 and 2 were both 0.65 mm-wide multiple stripes. Depositing the electrode layer with a thickness of 30 nm and the dielectric layer with a thickness of 0.5 ⁇ m was repeated so as to obtain 80 dielectric layers. Insulator layers with a thickness of 4 ⁇ m respectively were formed on the upper and lower sides of the layered product to improve its strength.
  • the upper and lower insulator layers were made of the same material as the dielectric layer for simplification.
  • the lower insulator layer was processed to form holes for the penetrating-electrodes and the lead electrodes by masking.
  • the upper insulator layer also was processed to form holes for the penetrating electrodes by masking.
  • a conductive paste was painted to fill the concave portion (opening) formed by the hole processing for the penetrating electrodes and the lead electrodes and hardened afterwards.
  • An LCR meter confirmed the result that a capacitor with a total capacity of 1 ⁇ F and tan ⁇ 1.2 % was formed inside the layered product having a thickness of about 50 ⁇ m. The same result was obtained when using a fine line of solder material instead of the conductive paste.
  • Fig. 5 is a schematic plan view showing another example of the electronic component 10.
  • Fig. 6 is a perspective view showing an internal structure of a part of the electronic component of Fig. 5.
  • a plurality of first electrode layers 1 are formed so as to be stripe-shaped on substantially the same plane, and a plurality of second electrode layers 2 are formed so as to be stripe-shaped on substantially the same plane. They are layered so that a dielectric layer 3 is interposed between the first electrode layers 1 and the second electrode layers 2.
  • capacitance forming regions 9 are formed at the intersections and function as capacitors.
  • External electrodes 7 and 8 are formed on the peripheral surfaces of the electronic component 10.
  • a first external electrode 7 is connected to the first electrode layer 1, and a second external electrode 8 is connected to the second electrode layer 2 in an electrical manner respectively. They can be used as joining terminals when the capacitance forming region 9 functions as capacitor as is mentioned above.
  • the external electrodes 7 and 8 may be formed on both sides of the electronic component facing each other as shown in Fig. 5 or only on one side thereof. It is possible to form one of the external electrodes 7 and 8 on both sides, and the other one only on one side of the electronic component. Also, the external electrodes 7 and 8 may be formed so as to reach both surfaces (top and bottom surfaces) in the deposition direction of the electronic component 10 as shown in Fig. 6, or only one surface thereof.
  • one of the external electrodes 7 and 8 reaches both surfaces, and the other one only one surface of the electronic component.
  • plural stripes of the electrode layers 1 (or 2) may be connected one external electrode 7 (or 8). Accordingly, a capacity of a formed capacitor can be changed.
  • penetrating electrodes 6 are formed in the electronic component 10. These penetrating electrodes 6 electrically connect the other electronic components that are arranged above and below the electronic component 10 as if there was not the electronic component between them.
  • a material for forming the electrode layers 1 and 2 can be a metal such as aluminum, copper or gold or a metal compound.
  • a material for forming the dielectric layer 3 can be a resin material such as acrylic resin, epoxy resin or vinyl resin, a ceramic material such as barium titanium oxide-based ceramic or strontium titanium oxide-based ceramic, a metallic oxide such as titanium oxide or aluminum oxide, or a semimetallic oxide such as silicon oxide.
  • a material for forming the external electrodes 7 and 8 and the penetrating electrodes 6 can be a conductive paste or a conductive polymer in addition to a metal such as gold, silver, aluminum, copper or a solder material.
  • the electrode layers 1 and 2 can be formed by vacuum evaporation, sputtering or plating or the like. Also, the electrode layers 1 and 2 can be formed so as to be stripe-shaped by using a solid mask with patterning, using an evaporative mask of oil or the like, or laser etching accordingly.
  • the oil masking material can be various types of oils such as hydrocarbon-based oil, mineral oil or fluorocarbon oil.
  • the dielectric layer 3 can be formed by the following methods. When the resin-based material is used, it is vaporized by heating or atomized by ultrasonic waves or spraying, followed by being deposited. When the ceramic material or the metal-based material is used, sputtering, evaporation or the like can be selected.
  • the external electrodes 7 and 8 can be formed by thermal spraying, plating or applying a conductive paste or the like.
  • openings are formed in the dielectric layer 3 by the following methods. After forming the dielectric layer, dielectric in a predetermined portion is removed by laser etching. Alternatively, after applying the evaporative mask such as oil, the dielectric layer is formed. A dotted evaporative mask can be applied effectively by an ink jet system in which micro-drops of a masking material are ejected from micropores.
  • the oil such as hydrocarbon-based oil, mineral oil or fluorocarbon oil can be used.
  • surplus masking material that remains after forming each layer can be removed by a far-infrared ray heater, an electron beam, an ultraviolet ray lamp irradiation or a plasma irradiation when necessary.
  • Fig. 7 is a schematic cross-sectional view showing a part of an example of an apparatus for manufacturing the electronic components of Figs. 5 and 6.
  • a vacuum tank 24 includes a plurality of chambers that are divided by each step. Exhaust systems 25 including a vacuum pump are connected to the chambers of metal thin film-forming sources 14 and 17. A predetermined degree of vacuum is maintained in each chamber in the vacuum tank. As a conveyer system, a support that rotationally moves in an arrow direction (a cylindrical can roller 23 in Fig. 7) is arranged substantially in the center of the vacuum tank 24.
  • an insulator film-forming source (a dielectric thin film-forming source 15 or 18 in Fig. 7) forms a lower insulator film on the can roller 23.
  • the film where the penetrating electrodes will be formed may be removed to form openings (holes) by a laser beam machine 16 or 19.
  • Shutters 26 of the metal thin film-forming sources 14 and 17 are closed here. Rotating the can roller 23 for a predetermined number of times forms the lower insulator film with a predetermined thickness. Subsequently, the shutter 26 is opened, then a combination of a metal thin film-forming source 14 and a patterning mask forms a first patterned metal thin film (a first electrode layer).
  • a dielectric thin film-forming source 15 forms a first dielectric thin film (a dielectric layer).
  • a laser beam machine 16 removes the dielectric thin film where the penetrating electrodes will be formed.
  • a combination of a metal thin film-forming source 17 and a patterning mask forms a second patterned metal thin film (a second electrode layer).
  • a dielectric thin film-forming source 18 forms a second dielectric thin film (a dielectric layer).
  • a laser beam machine 19 removes the dielectric thin film where the penetrating electrodes will be formed.
  • the support is transmitted again to the metal thin film-forming source 14, the dielectric thin film-forming source 15, the laser beam machine 16, the metal thin film-forming source 17, the dielectric thin film-forming source 18 and the laser beam machine 19 in this order to be processed as above for predetermined times.
  • the shutter 26 is closed, and then the insulator film-forming source (the dielectric thin film-forming source 15 or 18 in Fig. 7) forms an upper insulator film.
  • the film where the penetrating electrodes will be formed may be removed to form openings (holes) by the laser machine 16 or 19. Rotating the can roller 23 for a predetermined number of times forms the upper insulator film with a predetermined thickness.
  • the penetrating electrode is formed as follows. A conductive paste is painted to fill a penetrating hole that is formed, and then hardened.
  • the layered product is cut into predetermined sizes where necessary.
  • the external electrodes are formed on the sides of the layered product that is cut into the predetermined sizes by thermal spraying or applying a paste.
  • Forming the external electrodes separately by using a mask or a resist can control the number of stripe-shaped electrodes that are connected to the individual external electrodes.
  • the electronic component 10 formed is used, for example, by locating it between a carrier 28 that has a semiconductor chip 27 mounted thereon and a wiring board 30, as is schematically shown in Fig. 8.
  • a signal terminal 29a on the lower surface of the carrier 28 is connected to a wiring pattern 31, which is formed on the wiring board 30, via the penetrating electrode 6 of the electronic component 10 of the present invention when necessary.
  • one power terminal 29b on the lower surface of the carrier 28 is connected to the wiring board 30 via the penetrating electrode 6 and further to the first external electrode 7.
  • the other power terminal 29b on the lower surface of the carrier 28 is connected to the wiring board 30 via the penetrating electrode 6 and further to the second external electrode 8.
  • the penetrating electrode 6 and the external electrodes 7 and 8 may be connected with the wiring pattern 31 on the surface of the wiring board 30 as is shown in Fig. 8, or with other means such as the connection inside the wiring board 30 or that on the upper surface of the electronic component of the present invention.
  • the external electrodes 7 and 8 and the wiring board 30 may be connected with soldering 32 or with other means.
  • the capacitor formed between the first external electrode 7 and the second external electrode 8 does not substantially enlarge the mounted area and functions as a pass capacitor for power supply near the semiconductor chip. This is preferable in high frequency driving and a size reduction of the mounted area.
  • Aluminum was used as a metal thin film material, acrylate was used as a dielectric material, and silver-based paste was used as a conductive paste.
  • the method includes removing dielectric in a predetermined portion by laser etching after forming the dielectric layer. A carbon dioxide gas laser with an output of 10 W was used as the laser. Within an area 17 mm square, 484 penetrating electrodes with a diameter of 0.25 mm were formed on 0.8 mm-pitch lattice points. The electrode layers 1 and 2 were both 0.8 mm-wide multiple stripes.
  • Electrode layer with a thickness of 30 nm and the dielectric layer with a thickness of 0.25 ⁇ m was repeated so as to obtain 140 dielectric layers.
  • Insulator layers with a thickness of 5 ⁇ m respectively were formed on the upper and lower sides of the layered product to improve its strength.
  • the upper and lower insulator layers were made of the same material as the dielectric layer for simplification.
  • the upper and lower insulator layers were processed with a laser to form the penetrating electrodes.
  • the layered product was cut, and a brass layer with a thickness of 20 ⁇ m was formed on the cut surface by a thermal spraying, followed by forming a solder plated layer with a thickness of 60 ⁇ m, to make an external electrode.
  • a conductive paste was painted to fill the concave portion (opening) formed by the hole processing for the penetrating electrodes and hardened afterwards.
  • An LCR meter confirmed the result that a capacitor with a total capacity of 1 ⁇ F and tan ⁇ 0.8 % was formed inside the layered product having a thickness of about 50 ⁇ m.
  • Fig. 9 is a schematic plan view showing an example of another electronic component 10.
  • Fig. 10 is a perspective view showing an internal structure of a part of the electronic component of Fig. 9.
  • a plurality of first electrode layers 1 are formed in a predetermined pattern in substantially the same plane, and a plurality of second electrode layers 2 are formed in a predetermined pattern in substantially the same plane. They are layered so that a dielectric layer 3 is interposed between the first electrode layers 1 and the second electrode layers 2.
  • capacitance forming regions 9 are formed at the overlapped portions (facing portions) and function as capacitors. The capacitance can be changed by adjusting the size of each overlapped portion (the capacitance forming region 9).
  • a first lead electrode 4 is connected to the first electrode layer 1, and a second lead electrode 5 is connected to the second electrode layer 2. They can be used as joining terminals when the capacitance forming region 9 functions as capacitor as is mentioned above.
  • the lead electrodes 4 and 5 may be formed so as to penetrate the electronic component 10 in the deposition direction as shown in Figs. 9 and 10, or to appear only on one surface of the electronic component. It is possible that one of the lead electrodes 4 and 5 is formed so as to penetrate the electronic component, and the other one appears only on one surface thereof.
  • penetrating electrodes 6 are formed in the electronic component 10. These penetrating electrodes 6 electrically connect the other electronic components that are arranged above and below the electronic component 10, as if there was not the electronic component between them.
  • a material for forming the electrode layers 1 and 2 can be a metal such as aluminum, copper or gold or a metal compound.
  • a material for forming the dielectric layer 3 can be a resin material such as acrylic resin, epoxy resin or vinyl resin, a ceramic material such as barium titanium oxide-based ceramic or strontium titanium oxide-based ceramic, a metallic oxide such as titanium oxide or aluminum oxide, or a semimetallic oxide such as silicon oxide.
  • a material for forming the lead electrodes 4 and 5 and the penetrating electrodes 6 can be a conductive paste or a conductive polymer in addition to a metal such as gold, silver, aluminum, copper or a solder material.
  • the electrode layers 1 and 2 can be formed by vacuum evaporation, sputtering or plating or the like. Also, the electrode layers 1 and 2 can be formed in the predetermined pattern (shape) such as a polygonal shape by using a solid mask with patterning, using an evaporative mask of oil or the like, or laser etching accordingly.
  • the oil masking material can be various types of oils such as hydrocarbon-based oil, mineral oil or fluorocarbon oil.
  • the dielectric layer 3 can be formed by the following methods. When the resin based material is used, it is vaporized by heating or atomized by ultrasonic waves or spraying, followed by being deposited. When the ceramic material or the metal-based material is used, sputtering, evaporation or the like can be selected.
  • openings are formed in the dielectric layer 3 by the following methods. After forming the dielectric layer, dielectric in a predetermined portion is removed by laser etching. Alternatively, after applying the evaporative mask such as oil, the dielectric layer is formed. A dotted or linear evaporative mask also can be applied effectively by an ink jet system in which micro-drops of a masking material are ejected from micropores.
  • the oil such as hydrocarbon-based oil, mineral oil or fluorocarbon oil can be used.
  • surplus masking material that remains after forming each layer can be removed by a far-infrared ray heater, an electron beam, an ultraviolet ray lamp irradiation or a plasma irradiation when necessary.
  • the electronic component can be specifically manufactured, for example, by using the apparatus described in the first or second embodiment in a similar manner.
  • the electronic component 10 formed is used, for example, by locating it between a carrier 28 that has a semiconductor chip 27 mounted thereon and a wiring board 30, as is schematically shown in Fig. 11.
  • a signal terminal 29a on the lower surface of the carrier 28 is connected to a wiring pattern 31, which is formed on the wiring board 30, via the penetrating electrode 6 of the electronic component 10 of the present invention when necessary.
  • one power terminal 29b on the lower surface of the carrier 28 is connected to the wiring board 30 via the penetrating electrode 6 and further to the first lead electrode 4.
  • the other power terminal 29b on the lower surface of the carrier 28 is connected to the wiring board 30 via the penetrating electrode 6 and further to the second lead electrode 5.
  • the penetrating electrode 6 and the lead electrodes 4 and 5 may be connected with the wiring pattern 31 on the surface of the wiring board 30 as is shown in Fig. 11, or with other means such as the connection inside the wiring board 30.
  • the power terminal 29b on the lower side of the carrier 28 may be connected to the lead electrodes 4 and 5 on the lower side of the carrier, and then the electronic component 10 of the present invention may be connected to the wiring board 30 on the surface of the wiring board 30.
  • Numeral 9 in Fig. 11 denotes a capacitance forming region that is formed at the overlapped portion of the first and the second metal thin films.
  • the capacitor formed between the first lead electrode 4 and the second lead electrode 5 does not substantially enlarge the mounted area and functions as a pass capacitor for power supply near the semiconductor chip. This is preferable in high frequency driving and a size reduction of the mounted area.
  • Aluminum was used as a metal thin film material, aluminum oxide was used as a dielectric material, and silver-based paste was used as a conductive paste.
  • a solid mask with through holes was used, and when forming a dielectric layer, fluorocarbon oil was used as an oil masking material for depositing with an ink jet system.
  • 20 ⁇ 10 rows that is a total of 200 penetrating electrodes having a diameter of 0.3 mm with a 0.7 mm pitch, and rectangular electrode layers 1 and 2 with a width of 1 to 2 mm are formed in various lengths between the rows of the penetrating electrodes to make capacitors having different sizes of the overlapped portions of both electrodes.
  • a conductive paste is filled in portions defining a hole of 0.25 mm ⁇ 1 mm to form two lead electrodes in each capacitor. Depositing the electrode layer with a thickness of 30 nm and the dielectric layer with a thickness of 0.3 ⁇ m was repeated so as to obtain 130 dielectric layers. Insulator layers with a thickness of 8 ⁇ m respectively were formed on the upper and lower sides of the layered-product to improve its strength. The upper and lower insulator layers were made of the same material as the dielectric layer for simplification. The lower insulator layer was processed to form holes for the penetrating electrodes and the lead electrodes by masking. The upper insulator layer also was processed to form holes for the penetrating electrodes by masking. A conductive paste was painted to fill the concave portion (opening) formed by the hole processing for the penetrating electrodes and the lead electrodes and hardened afterwards.
  • An LCR meter confirmed the result that nine capacitors, namely four capacitors with a capacity of 0.047 ⁇ F, two capacitors with a capacity of 0.068 ⁇ F, two capacitors with a capacity of 0.1 ⁇ F and one capacitor with a capacity of 0.47 ⁇ F, with tan ⁇ 1.2 % were formed inside the layered product having a thickness of about 60 ⁇ m.
  • a material for forming the electrode layers is not limited to that of the first to third embodiments and the Examples 1 to 3 described above, but can be a metal such as aluminum, copper or gold or a metal compound.
  • a material for forming the dielectric layer can be a resin material such as acrylic resin, epoxy resin or vinyl resin, a ceramic material such as barium titanium oxide-based ceramic or strontium titanium oxide-based ceramic, a metallic oxide such as titanium oxide or aluminum oxide, or a semimetallic oxide such as silicon oxide.
  • a material for forming the penetrating electrodes and the lead electrodes can be a conductive polymer or a metal such as gold, silver, aluminum, copper or a solder material in addition to the conductive paste.
  • a material for forming the external electrodes can be a single material selected from a conductive polymer and a metal such as brass, zinc, solder material, gold, silver and copper, in addition to the conductive paste.
  • the external electrodes can be formed with a combination thereof. For example, after forming a brass layer, a conductive paste layer may be formed thereon.
  • the electrode layers are arranged so as to be perpendicular to each other when seen from above in the deposition direction to form rectangular capacitance forming regions.
  • the capacitance forming regions do not have to be rectangular.
  • crossing stripe-shaped electrodes obliquely to each other can form the capacitance forming region, which is formed at the intersection, with the other shapes such as a parallelogram.
  • shapes of the lead electrodes and the penetrating electrodes are not limited to those schematically shown in the drawings, but can be changed into the other shapes.
  • one electronic component may include a mixture of the structures described in the first to third embodiments.
  • some of these electrodes may be connected to the lead electrodes of the first embodiment, and the others may be connected to the external electrodes of the second embodiment.
  • some of these electrodes may be connected to the lead electrodes of the first or third embodiment, and the others may be connected to the external electrodes of the second embodiment.
  • the openings (holes) for forming the penetrating electrodes and the lead electrodes in the dielectric layer are formed by laser etching or depositing the evaporative oil every time the dielectric layer is deposited, they do not have to be formed during deposition. For example, after depositing, irradiating a laser beam in a predetermined portion may form the openings (holes).
  • the penetrating electrode can be formed by forming a penetrating hole in a deposition direction so as not to contact any electrode layer and filling a conductive material in the penetrating hole.
  • the lead electrode can be formed by forming a hole having a predetermined depth (or a penetrating hole) so as to contact only a desired electrode layer and filling a conductive material therein so as to contact the electrode layer that is exposed to an inner wall (and a bottom portion) of this hole.
  • this lead electrode is electrically connected to the desired electrode layer.
  • the electronic component having the capacitor function may have the other functions (for example, a coil, a noise filter or a layered circuit board etc.) other than or along with the capacitor function.
  • the method for manufacturing the electronic component can form a capacitance forming region, a coil, a noise filter and a layered circuit board etc. near a semiconductor chip, thereby achieving a high frequency driving of the semiconductor chip and suppressing a size increase of a mounted area.
  • the present invention can be used, in particular, for an electronic equipment that is required to speed up the information processing effectively.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
EP00919143A 1999-04-23 2000-04-19 Electronic device and manufacture thereof Expired - Lifetime EP1100096B1 (en)

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JP11567399 1999-04-23
JP11567399A JP3701138B2 (ja) 1999-04-23 1999-04-23 電子部品の製造方法
PCT/JP2000/002570 WO2000065616A1 (fr) 1999-04-23 2000-04-19 Dispositif electronique et sa fabrication

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US20030133249A1 (en) 2003-07-17
DE60033353D1 (de) 2007-03-29
JP3701138B2 (ja) 2005-09-28
EP1100096A4 (en) 2005-04-13
CN1315044A (zh) 2001-09-26
KR20010053096A (ko) 2001-06-25
EP1100096A1 (en) 2001-05-16
CN100442404C (zh) 2008-12-10
TW452806B (en) 2001-09-01
MY126602A (en) 2006-10-31
US20060292813A1 (en) 2006-12-28
JP2000306771A (ja) 2000-11-02
WO2000065616A1 (fr) 2000-11-02
US6574087B1 (en) 2003-06-03
CN1681056A (zh) 2005-10-12
CN1201348C (zh) 2005-05-11
DE60033353T2 (de) 2007-11-29
MY139629A (en) 2009-10-30
US7118984B2 (en) 2006-10-10
KR100393875B1 (ko) 2003-08-06

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