EP0906888A1 - Dispositif pour éviter le gouttage à un orifice de distribution - Google Patents

Dispositif pour éviter le gouttage à un orifice de distribution Download PDF

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Publication number
EP0906888A1
EP0906888A1 EP98115683A EP98115683A EP0906888A1 EP 0906888 A1 EP0906888 A1 EP 0906888A1 EP 98115683 A EP98115683 A EP 98115683A EP 98115683 A EP98115683 A EP 98115683A EP 0906888 A1 EP0906888 A1 EP 0906888A1
Authority
EP
European Patent Office
Prior art keywords
line
liquid
arrangement according
chamber
outlet opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98115683A
Other languages
German (de)
English (en)
Other versions
EP0906888B1 (fr
Inventor
Franz Sumnitsch
Willibald Pirker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research AG
Original Assignee
SEZ AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SEZ AG filed Critical SEZ AG
Publication of EP0906888A1 publication Critical patent/EP0906888A1/fr
Application granted granted Critical
Publication of EP0906888B1 publication Critical patent/EP0906888B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67C—CLEANING, FILLING WITH LIQUIDS OR SEMILIQUIDS, OR EMPTYING, OF BOTTLES, JARS, CANS, CASKS, BARRELS, OR SIMILAR CONTAINERS, NOT OTHERWISE PROVIDED FOR; FUNNELS
    • B67C3/00—Bottling liquids or semiliquids; Filling jars or cans with liquids or semiliquids using bottling or like apparatus; Filling casks or barrels with liquids or semiliquids
    • B67C3/02—Bottling liquids or semiliquids; Filling jars or cans with liquids or semiliquids using bottling or like apparatus
    • B67C3/22—Details
    • B67C3/26—Filling-heads; Means for engaging filling-heads with bottle necks
    • B67C3/2608—Filling-heads; Means for engaging filling-heads with bottle necks comprising anti-dripping means

Definitions

  • the invention relates to an arrangement for preventing Leakage of liquids from line openings.
  • Such Lines are used, for example, in manufacturing from semiconductor wafers to these treatment liquids to apply.
  • Such lines are e.g. in etching devices as described in EP 0 444 714 B are used.
  • Valves are often used which suck back a small amount of liquid when closing.
  • these valves with a 1 ⁇ 4-inch hose (inside diameter approx. 5 mm, cross section approx. 0.2 cm 2 )
  • suck-back valves suck the liquid column back approx. 10 cm, which is approx. 2 ml liquid.
  • a 1 ⁇ 4 inch hose results in a flow rate of approx. 2 m / sec. Since silicon wafers are getting bigger (currently diameters up to 300 mm), an ever increasing volume flow is necessary for the treatment. Volume flows of up to 6 l / min are currently required.
  • a dosing device is known from EP 402 535 B1 a valve, an adjustable piston and at the outlet opening has a porous insert.
  • the piston moves after the Closing the valve away from the outlet opening, so that in the Area of the outlet opening creates negative pressure, the liquid should prevent dripping out of the outlet opening.
  • DD 250 846 A3 there is a chamber valve for drip-free Closing liquid containers described, the of of the liquid to be dosed through a chamber Cuff is formed.
  • the cuff is open Valve compressed (small interior of the chamber) and at closed valve stretched (large interior of the chamber).
  • the chamber is created by increasing its volume when Closing the valve (stretching the cuff) a negative pressure, causing the liquid to withdraw from the exit opening becomes.
  • the liquid remains with the valve according to DD 250 846 A3 in the chamber of the valve and / or in the area between the outlet opening and valve. Gassing liquids would drip this facility anyway.
  • the object of the invention is to provide an arrangement with which the dripping, even with high volume flow and / or when conveying liquids containing gas, is reliably prevented.
  • the above object is reliable solved and dripping from line openings in particular even with high volume flow and in the case of gas containing Liquids reliably prevented, as liquid is immediate is sucked away in front of the outlet opening of the line, so that liquid no longer comes out of the opening of the line can leak (drip).
  • this is all about Exit opening provided a chamber that in due course is subjected to negative pressure.
  • FIG. 1 shows a section of an arrangement according to the invention, a section along the line B-B in Fig. 2, Fig. 2 along the line A-A in Fig. 1 and Fig. 3, for example Embodiment of the circuit of the arrangement according to the invention.
  • shut-off device cf. FIG. 3
  • suction valve suction-back valve
  • the line 2 is one Device 1 assigned, which is used to prevent dripping Liquid from the outlet opening 6 to the line 2 prevent.
  • On the housing 4 is one Line 5 connected via the negative pressure in the chamber 3 can be generated.
  • the line 5 with a Vacuum source (see. Fig. 3) connected, in which to Vacuum source leading line 5 shut-off devices provided could be.
  • the through openings 7 In the wall of line 2 are in the area of Chamber 3 several through openings 7 (in principle, one is sufficient only through opening 7) is provided.
  • the through openings 7 can be designed as a perforation, that is a very have a small diameter.
  • the distance of the area, in which the through openings 7 are provided in the pipeline 2 are, from the outlet opening 6 of the line 2 can be any be chosen small.
  • measures can be provided with which the Passages 7 closed in the wall of line 2 when liquid flows through line 2.
  • Such Measures can be shut-off devices, e.g. in form of a relative to the end of the line 2 rotatable sleeve in which Holes are provided. If the sleeve is turned so that the holes in the sleeve are aligned with the passage opening 7, acts the negative pressure in the chamber 3 for suction of liquid residues.
  • FIG. 3 A possible circuit, like the device 1 only when needed made effective, that is, the chamber 3 is subjected to negative pressure can be shown in Fig. 3.
  • Line 8 is a compressed air line that divides into two branches.
  • the simultaneous shutdown of the liquid flow 9 in the Line 2 and switching on the negative pressure in chamber 3 can be ensured in the following way.
  • Via a venturi nozzle 12 is with the compressed air flow 11 in one branch of the Compressed air line 8 generates a suction stream 10 that the chamber 3 applied with negative pressure.
  • the valve 13 for the liquid flow can, but does not have to be designed as a return valve.
  • the vacuum can be generated by a vacuum pump.
  • the suction flow is via its own valve switched. The simultaneous shutdown of the liquid flow and switching on of the suction flow takes place in this Case e.g. electric.
  • Droplet suction device 1 To prevent liquid from dripping out of the outlet opening 6 to prevent a line 2 is the end of line 2 one Droplet suction device 1 assigned.
  • the droplet suction device 1 has a housing 4, which is the end of the line 2 surrounds to form a chamber 3.
  • Chamber 3 stands with the inside of the line 2 through openings 7 in Connection and can be used for suction in the area of the outlet opening 6 after switching off the liquid flow through the line 2 remaining liquid residues a line 5 are subjected to negative pressure. It will proposed a circuit which the droplet suction device 1 only starts up, e.g. the chamber 3 with negative pressure acted upon when the liquid flow through line 2 interrupted by a shut-off device assigned to line 2 is.

Landscapes

  • Coating Apparatus (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
EP98115683A 1997-09-18 1998-08-20 Dispositif pour éviter le gouttage à un orifice de distribution Expired - Lifetime EP0906888B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AT0157897A AT407385B (de) 1997-09-18 1997-09-18 Anordnung um das nachtropfen von flüssigkeiten aus leitungen zu verhindern
AT157897 1997-09-18
AT1578/97 1997-09-18

Publications (2)

Publication Number Publication Date
EP0906888A1 true EP0906888A1 (fr) 1999-04-07
EP0906888B1 EP0906888B1 (fr) 2001-07-11

Family

ID=3516448

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98115683A Expired - Lifetime EP0906888B1 (fr) 1997-09-18 1998-08-20 Dispositif pour éviter le gouttage à un orifice de distribution

Country Status (7)

Country Link
US (1) US6056208A (fr)
EP (1) EP0906888B1 (fr)
JP (1) JP3437773B2 (fr)
KR (1) KR100493254B1 (fr)
AT (1) AT407385B (fr)
DE (1) DE59800986D1 (fr)
TW (1) TW440539B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106956790A (zh) * 2017-03-31 2017-07-18 长春北方化工灌装设备股份有限公司 一种基于内回流式充料枪的防爆灌装机器人系统
CN107619012A (zh) * 2017-09-29 2018-01-23 重庆尚洁日化用品有限公司 一种洗发水灌装机

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6789748B2 (en) * 2001-02-14 2004-09-14 Valiant Corporation Water jet
US7320414B2 (en) * 2002-07-09 2008-01-22 Terrence Robert Davis Beverage dispense
JP2006010038A (ja) * 2004-06-29 2006-01-12 Smc Corp サックバックバルブ
JP2006010037A (ja) * 2004-06-29 2006-01-12 Smc Corp サックバックバルブ
US20060046499A1 (en) * 2004-08-20 2006-03-02 Dolechek Kert L Apparatus for use in thinning a semiconductor workpiece
US7288489B2 (en) * 2004-08-20 2007-10-30 Semitool, Inc. Process for thinning a semiconductor workpiece
US7193295B2 (en) * 2004-08-20 2007-03-20 Semitool, Inc. Process and apparatus for thinning a semiconductor workpiece
US7354649B2 (en) 2004-08-20 2008-04-08 Semitool, Inc. Semiconductor workpiece
US20060040111A1 (en) * 2004-08-20 2006-02-23 Dolechek Kert L Process chamber and system for thinning a semiconductor workpiece
EP1890823B1 (fr) 2005-05-06 2013-08-14 Dieter Wurz Buse de pulverisation, dispositif de pulverisation et procede permettant de faire fonctionner une buse de pulverisation et un dispositif de pulverisation
JP5440011B2 (ja) * 2009-07-31 2014-03-12 カシオ計算機株式会社 吐出ノズル、吐出装置及び塗布装置
EP2519341B1 (fr) * 2009-12-29 2018-01-03 Indian Oil Corporation Limited Buse d'injection et procédé d'atomisation d'une charge hydrocarbonée liquide
TWI585885B (zh) * 2015-09-11 2017-06-01 辛耘企業股份有限公司 管尾關斷裝置以及基板處理裝置
US10023333B2 (en) * 2016-03-07 2018-07-17 The Procter & Gamble Company Vacuum assisted nozzle and apparatus
NL2019096B1 (en) * 2017-06-20 2018-12-27 Suss Microtec Lithography Gmbh Nozzle tip adapter, nozzle assembly as well as nozzle
JP7312304B2 (ja) * 2018-09-21 2023-07-20 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、及び基板処理方法
US10988363B1 (en) 2019-02-06 2021-04-27 Owens-Brockway Glass Container Inc. System for preventing dripping from nozzles in a container filling system
CN111960362B (zh) * 2020-07-28 2021-12-14 江苏源泉泵业股份有限公司 一种水泵式灌装设备
CN114572439B (zh) * 2022-04-07 2023-10-17 台州市祥珑食品容器科技股份有限公司 一种灌装管控制结构
CN114890366B (zh) * 2022-05-28 2024-05-24 佛山市晋雄实业有限公司 一种瓶装化妆品定量包装装置及方法
EP4375230A1 (fr) * 2022-11-25 2024-05-29 Alfa Laval Corporate AB Dispositif de remplissage pour remplir des récipients avec des produits liquides

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3792724A (en) * 1972-05-15 1974-02-19 Delamere & Williams Co Ltd Bag filling machine
GB2002331A (en) * 1977-08-09 1979-02-21 Albro Fillers & Eng Co Ltd Filling-nozzle wipers
EP0103484A2 (fr) * 1982-09-13 1984-03-21 Laub, Herman, III Machine de remplissage de liquides mousseux
DD250846A3 (de) 1985-08-30 1987-10-28 Colditz Veb Porzellan Kammerventil zum tropfenfreien schliessen von fluessigkeitsbehaeltern
EP0402535A1 (fr) 1989-06-15 1990-12-19 Shikoku Kakoki Co., Ltd. Dispositif pour éviter que le liquide des têtes de remplissage ne goutte dans les machines de remplissage
EP0444714A1 (fr) 1987-11-09 1991-09-04 SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung Gesellschaft m.b.H. Dispositif support pour le traitement d'objet en forme de disque
FR2665682A1 (fr) * 1990-08-13 1992-02-14 Colgate Palmolive Co Buse anti-goutte et procede de remplissage de poches souples.

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DE250846C (fr) *
US3583634A (en) * 1968-12-02 1971-06-08 Fmc Corp Spray nozzle
US4362572A (en) * 1981-06-25 1982-12-07 Burroughs Corporation Method and apparatus for cleaning ink jet printer heads
JPS58156567U (ja) * 1982-04-12 1983-10-19 トヨタ自動車株式会社 高粘弾性流体用ノズル
US4634027A (en) * 1985-01-04 1987-01-06 Mvm Valve Co., Inc. Liquid dispensing apparatus and an anti-drip valve cartridge therefor
US4911267A (en) * 1987-08-31 1990-03-27 Yohwa Trading Co., Ltd. Oiler with drippage preventing device
JPH0494589A (ja) * 1990-08-10 1992-03-26 Matsushita Electric Ind Co Ltd 電子部品固定用接着剤塗布装置
JPH04309460A (ja) * 1991-04-04 1992-11-02 Matsushita Electric Ind Co Ltd クリームはんだ塗布装置
JPH06244543A (ja) * 1993-02-17 1994-09-02 Matsushita Electric Ind Co Ltd 接着剤塗布装置用の接着剤塗布ノズル
JPH0768208A (ja) * 1993-09-06 1995-03-14 Matsushita Electric Ind Co Ltd 間欠塗布装置
JPH0975818A (ja) * 1995-09-20 1997-03-25 Matsushita Electric Ind Co Ltd 塗布装置
US5756155A (en) * 1996-01-22 1998-05-26 Taiwan Semiconductor Manufacturing Company, Ltd. Combination nozzle and vacuum hood that is self cleaning
US5720433A (en) * 1996-01-30 1998-02-24 Dexter Corporation Draw back valve for a glue gun
US5830334A (en) * 1996-11-07 1998-11-03 Kobayashi; Hideyuki Nozzle for fast plating with plating solution jetting and suctioning functions
JP3940853B2 (ja) * 1997-03-11 2007-07-04 Ｓｍｃ株式会社 サックバックバルブ
JP3951150B2 (ja) * 1997-04-09 2007-08-01 Ｓｍｃ株式会社 サックバックバルブ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3792724A (en) * 1972-05-15 1974-02-19 Delamere & Williams Co Ltd Bag filling machine
GB2002331A (en) * 1977-08-09 1979-02-21 Albro Fillers & Eng Co Ltd Filling-nozzle wipers
EP0103484A2 (fr) * 1982-09-13 1984-03-21 Laub, Herman, III Machine de remplissage de liquides mousseux
DD250846A3 (de) 1985-08-30 1987-10-28 Colditz Veb Porzellan Kammerventil zum tropfenfreien schliessen von fluessigkeitsbehaeltern
EP0444714A1 (fr) 1987-11-09 1991-09-04 SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung Gesellschaft m.b.H. Dispositif support pour le traitement d'objet en forme de disque
EP0402535A1 (fr) 1989-06-15 1990-12-19 Shikoku Kakoki Co., Ltd. Dispositif pour éviter que le liquide des têtes de remplissage ne goutte dans les machines de remplissage
FR2665682A1 (fr) * 1990-08-13 1992-02-14 Colgate Palmolive Co Buse anti-goutte et procede de remplissage de poches souples.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106956790A (zh) * 2017-03-31 2017-07-18 长春北方化工灌装设备股份有限公司 一种基于内回流式充料枪的防爆灌装机器人系统
CN106956790B (zh) * 2017-03-31 2020-12-29 长春融成智能设备制造股份有限公司 一种基于内回流式充料枪的防爆灌装机器人系统
CN107619012A (zh) * 2017-09-29 2018-01-23 重庆尚洁日化用品有限公司 一种洗发水灌装机

Also Published As

Publication number Publication date
EP0906888B1 (fr) 2001-07-11
KR100493254B1 (ko) 2005-10-25
KR19990029405A (ko) 1999-04-26
JP3437773B2 (ja) 2003-08-18
JPH11179265A (ja) 1999-07-06
US6056208A (en) 2000-05-02
TW440539B (en) 2001-06-16
AT407385B (de) 2001-02-26
DE59800986D1 (de) 2001-08-16
ATA157897A (de) 2000-07-15

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