DE69833550D1 - Verfahren zur herstellung von tief- und reliefmustern und deren anwendung zur erzeugung von farbfiltermaterialien für flüssigkristallanzeigen - Google Patents

Verfahren zur herstellung von tief- und reliefmustern und deren anwendung zur erzeugung von farbfiltermaterialien für flüssigkristallanzeigen

Info

Publication number
DE69833550D1
DE69833550D1 DE69833550T DE69833550T DE69833550D1 DE 69833550 D1 DE69833550 D1 DE 69833550D1 DE 69833550 T DE69833550 T DE 69833550T DE 69833550 T DE69833550 T DE 69833550T DE 69833550 D1 DE69833550 D1 DE 69833550D1
Authority
DE
Germany
Prior art keywords
production
liquid crystal
color filter
crystal displays
filter materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69833550T
Other languages
English (en)
Other versions
DE69833550T2 (de
Inventor
Kinji Matsushima
Tomonobu Sumino
Yukihiro Andou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Publication of DE69833550D1 publication Critical patent/DE69833550D1/de
Application granted granted Critical
Publication of DE69833550T2 publication Critical patent/DE69833550T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133519—Overcoatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
DE69833550T 1997-06-26 1998-06-26 Verfahren zum Bilden von Mustern von Erhebungen und Vertiefungen und Verwendung der Muster in der Herstellung von Farbfiltern und Flüssigkristalldisplays Expired - Fee Related DE69833550T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP18586597 1997-06-26
JP18586597 1997-06-26
JP18586697 1997-06-26
JP18586697 1997-06-26
JP32293997 1997-11-25
JP32293997 1997-11-25
PCT/JP1998/002887 WO1999000705A1 (fr) 1997-06-26 1998-06-26 Procedes de formation de motifs creux et en relief et utilisation de ces motifs dans la fabrication de filtres de couleur d'ecrans a cristaux liquides

Publications (2)

Publication Number Publication Date
DE69833550D1 true DE69833550D1 (de) 2006-04-27
DE69833550T2 DE69833550T2 (de) 2006-08-10

Family

ID=27325639

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69833550T Expired - Fee Related DE69833550T2 (de) 1997-06-26 1998-06-26 Verfahren zum Bilden von Mustern von Erhebungen und Vertiefungen und Verwendung der Muster in der Herstellung von Farbfiltern und Flüssigkristalldisplays

Country Status (7)

Country Link
US (1) US6187485B1 (de)
EP (1) EP0921440B1 (de)
JP (2) JP3947232B2 (de)
KR (1) KR100578605B1 (de)
DE (1) DE69833550T2 (de)
TW (1) TW581911B (de)
WO (1) WO1999000705A1 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4810713B2 (ja) * 1999-06-07 2011-11-09 大日本印刷株式会社 カラーフィルタの製造方法
JP2001042339A (ja) * 1999-08-02 2001-02-16 Minolta Co Ltd 液晶光変調素子
JP3498020B2 (ja) * 1999-09-29 2004-02-16 Ｎｅｃ液晶テクノロジー株式会社 アクティブマトリックス基板及びその製造方法
US6738125B2 (en) 1999-12-27 2004-05-18 Sharp Kabushiki Kaisha Liquid crystal display apparatus and method for manufacturing same
JP2001222107A (ja) * 2000-02-10 2001-08-17 Dainippon Printing Co Ltd パターン形成用の感光性樹脂組成物およびカラーフィルタ
JP2001305557A (ja) * 2000-04-21 2001-10-31 Nec Corp 液晶表示装置
KR100371175B1 (ko) * 2000-10-07 2003-02-06 엘지전자 주식회사 액정 디스플레이의 홀로그램 디퓨저 및 그 제조방법
JP4153159B2 (ja) * 2000-12-18 2008-09-17 富士フイルム株式会社 ネガ型感光性熱硬化性樹脂組成物、ネガ型感光性熱硬化性樹脂層転写材料、及びネガ型耐性画像形成方法
JP2002350864A (ja) * 2001-05-25 2002-12-04 Matsushita Electric Ind Co Ltd 液晶表示装置の製造方法
JP4703045B2 (ja) * 2001-07-10 2011-06-15 大日本印刷株式会社 カラーフィルタの製造方法
JP4703048B2 (ja) * 2001-07-17 2011-06-15 大日本印刷株式会社 カラーフィルタの製造方法
KR100806182B1 (ko) * 2001-09-28 2008-02-21 엘지.필립스 엘시디 주식회사 반사형 액정표시장치용 콜레스테릭 액정 컬러필터 및 그의제조방법
JP3929444B2 (ja) * 2001-11-12 2007-06-13 エルエス ケーブル リミテッド トリアジン環を主鎖にする感光性高分子液晶配向剤とそれを用いた液晶配向膜、該配向膜を適用した液晶素子及び該配向膜を製造する方法
KR100863164B1 (ko) 2002-05-17 2008-10-13 옵트렉스 가부시키가이샤 광반사성 구조체, 그 제조방법 및 표시장치
US7172922B2 (en) * 2002-08-19 2007-02-06 Tower Semiconductor Ltd. CMOS image sensor array with black pixel using negative-tone resist support layer
US6638786B2 (en) * 2002-10-25 2003-10-28 Hua Wei Semiconductor (Shanghai ) Co., Ltd. Image sensor having large micro-lenses at the peripheral regions
JP3990307B2 (ja) * 2003-03-24 2007-10-10 株式会社クラレ 樹脂成形品の製造方法、金属構造体の製造方法、チップ
JP4608861B2 (ja) * 2003-09-02 2011-01-12 セイコーエプソン株式会社 液晶表示装置の製造方法、液晶表示装置および電子機器
EP1676155A1 (de) * 2003-09-15 2006-07-05 Koninklijke Philips Electronics N.V. Reflektierende struktur mit gerichtetheit der diffusen reflexion und vorrichtung damit
KR101121211B1 (ko) * 2004-02-17 2012-03-23 치 메이 옵토일렉트로닉스 코포레이션 Ｌｃｄ 장치, 컬러 필터 기판, 및 돌출 구조체, 및 이들의제조방법
US7012754B2 (en) * 2004-06-02 2006-03-14 Micron Technology, Inc. Apparatus and method for manufacturing tilted microlenses
KR101066480B1 (ko) * 2004-06-22 2011-09-21 엘지디스플레이 주식회사 컬러 필터 기판의 제조 방법
JP2006030650A (ja) * 2004-07-16 2006-02-02 Koninkl Philips Electronics Nv カラーフィルタ及びその製造方法並びにカラーフィルタを用いた液晶表示装置
JP4244933B2 (ja) * 2005-01-19 2009-03-25 セイコーエプソン株式会社 液晶表示装置
JP4396614B2 (ja) * 2005-09-21 2010-01-13 エプソンイメージングデバイス株式会社 液晶装置及び電子機器
JP5144055B2 (ja) * 2005-11-15 2013-02-13 三星電子株式会社 表示基板及びこれを有する表示装置
KR101299693B1 (ko) * 2006-06-29 2013-08-28 가부시키가이샤 아루박 액정 표시 장치용 컬러 필터 기판 및 그의 제조 방법
JP2008275691A (ja) * 2007-04-25 2008-11-13 Sekisui Chem Co Ltd 液晶配向用突起形成用ネガ型レジスト、液晶配向用突起、カラーフィルター、及び、液晶表示装置
JP2009008713A (ja) * 2007-06-26 2009-01-15 Toppan Printing Co Ltd カラーフィルタ
JP2009031778A (ja) * 2007-06-27 2009-02-12 Mitsubishi Chemicals Corp 感光性組成物、方法、硬化物及び液晶表示装置
JP4480740B2 (ja) * 2007-07-03 2010-06-16 シャープ株式会社 固体撮像素子およびその製造方法、電子情報機器
WO2011105117A1 (ja) 2010-02-24 2011-09-01 シャープ株式会社 液晶表示パネル
CN104937448B (zh) * 2013-09-06 2017-05-24 亚斯卡奈特股份有限公司 具备平行配置的光反射部的光控制面板的制造方法
CN112083594A (zh) * 2019-06-13 2020-12-15 夏普株式会社 彩色滤光片基板及其制造方法、以及液晶显示装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6145224A (ja) * 1984-08-10 1986-03-05 Alps Electric Co Ltd 液晶表示素子の製造方法
US5055439A (en) 1989-12-27 1991-10-08 International Business Machines Corporation Photoacid generating composition and sensitizer therefor
JPH04170547A (ja) 1990-11-01 1992-06-18 Fuji Photo Film Co Ltd 光硬化性樹脂組成物
JPH04180066A (ja) 1990-11-15 1992-06-26 Sanyo Chem Ind Ltd カラーフィルター保護材および保護層の形成法
JP3148429B2 (ja) * 1992-02-04 2001-03-19 新日本製鐵株式会社 光重合性不飽和化合物及びアルカリ現像型感光性樹脂組成物
JPH05295080A (ja) 1992-04-15 1993-11-09 Nippon Kayaku Co Ltd 樹脂組成物、透明薄膜の形成法及び透明薄膜
TW353858B (en) 1994-07-07 1999-03-01 Morton Int Inc Method of forming a multilayer printed circuit board and product thereof
JP3427508B2 (ja) * 1994-08-31 2003-07-22 ジェイエスアール株式会社 着色ミクロパターンの形成方法
US5631120A (en) * 1994-09-02 1997-05-20 Motorola, Inc. Method of forming a pattern with step features in a photopolymer
JPH0894824A (ja) 1994-09-29 1996-04-12 Toppan Printing Co Ltd カラーフィルタの製造方法
JP3478353B2 (ja) 1994-10-11 2003-12-15 住友ベークライト株式会社 樹脂組成物、永久レジスト樹脂組成物及びこれらの硬化物
JP3540436B2 (ja) 1995-06-02 2004-07-07 株式会社東芝 感光性組成物

Also Published As

Publication number Publication date
JP3947232B2 (ja) 2007-07-18
US6187485B1 (en) 2001-02-13
KR100578605B1 (ko) 2006-05-24
TW581911B (en) 2004-04-01
JP4200168B2 (ja) 2008-12-24
EP0921440A4 (de) 1999-10-06
KR20000068331A (ko) 2000-11-25
WO1999000705A1 (fr) 1999-01-07
DE69833550T2 (de) 2006-08-10
EP0921440B1 (de) 2006-02-22
EP0921440A1 (de) 1999-06-09
JP2006338032A (ja) 2006-12-14

Similar Documents

Publication Publication Date Title
DE69833550D1 (de) Verfahren zur herstellung von tief- und reliefmustern und deren anwendung zur erzeugung von farbfiltermaterialien für flüssigkristallanzeigen
DE69504569D1 (de) Verfahren zur Herstellung eines Farbfilters und einer Flüssigkristallanzeigevorrichtung
DE69433673D1 (de) Verfahren zum Wahrnehmen und Beobachten von leicht unregelmässigen Oberflächenzuständen und Verwendung zur Herstellung von Flüssigkrystallanzeigen
DE68920702T2 (de) Flüssigkristall-Anzeigevorrichtung, Farbfilter hierfür und Verfahren zur Herstellung des Farbfilters.
DE69614435D1 (de) Verfahren und Gerät zur Herstellung von Farbfiltern, Farbfilter, Flüssigkristallanzeigegerät und Anordnung mit diesem Flüssigkristallanzeigegerät
DE69528316T2 (de) Farbfilter, Verfahren zu seiner Herstellung, und Flüssigkristall-Anzeigevorrichtung mit demselben Farbfilter
DE69910875D1 (de) Tinte, Farbfilter, Flüssigkristallanzeige und Computer, sowie Verfahren zur Herstellung des Farbfilters
DE69007593T2 (de) Verfahren zur Herstellung einer Farbfilteranordnung für eine Flüssigkristallanzeige.
DE69312956D1 (de) Fluoraliphatische endgruppen und carboxylendgruppen enthaltende polysiloxane, verfahren zu deren herstellung und deren anwendung in der behandlung von faserigen substraten
DE69512288T2 (de) Verfahren zur Herstellung von Hexafluorpropan und Perfluorpropan
DE69908693D1 (de) Tinte, Farbfilter, Flüssigkristallanzeige und Computer, sowie Verfahren zur Herstellung des Farbfilters
DE59506573D1 (de) Verfahren zur Herstellung von Filtern
DE69123327T2 (de) Farbfilterbeschichtungsmaterial für flüssigkristallanzeige, farbfiltermaterial, bildung einer beschichtung und herstellung eines farbfilters
DE69529504T2 (de) Flüssigkristallvorrichtung und Verfahren zur Herstellung einer Flüssigkristallvorrichtung
DE69310003D1 (de) Verfahren zur Herstellung von Glasscheiben für Flüssigkristallanzeigen
DE69520139T2 (de) Verfahren zur herstellung von flüssigkristallcomposit
DE69518028D1 (de) Verfahren zur Herstellung eines Farbfilters und mehrfarbige Flüssigkristallgeräte
DE59500785D1 (de) Verfahren zur Herstellung von Purpurpigmenten
DE69503185D1 (de) Verfahren zur Reinigung von Alpha-Olefinen zur Anwendung in Polymerisation und Verfahren zur Herstellung von Poly-alpha-Olefinen
DE3780676D1 (de) Verfahren zur modifizierung von oberflaechen und anwendung dieser methode zur herstellung von geschichteten strukturen.
DE69809248T2 (de) Farbstoffzwischenverbindungen und verfahren zur herstellung von farstoffen
DE69814203D1 (de) Flüssigkristallverbindungen und Verfahren zur Herstellung
DE69414371T2 (de) Verfahren zur Herstellung von flüssigen Düngemitteln
DE69123306D1 (de) Verfahren zur Herstellung von Farbfiltern
DE69614345T2 (de) Rührvorrichtung für viskose Flüssigkeiten und Verfahren zur Herstellung von Polycarbonat unter Verwendung der Rührvorrichtung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee