DE69709525T2 - Verfahren zur herstellung einer zinnoxidbeschichtung auf glas - Google Patents

Verfahren zur herstellung einer zinnoxidbeschichtung auf glas

Info

Publication number
DE69709525T2
DE69709525T2 DE69709525T DE69709525T DE69709525T2 DE 69709525 T2 DE69709525 T2 DE 69709525T2 DE 69709525 T DE69709525 T DE 69709525T DE 69709525 T DE69709525 T DE 69709525T DE 69709525 T2 DE69709525 T2 DE 69709525T2
Authority
DE
Germany
Prior art keywords
glass
tin oxide
doped tin
coating
fluorine doped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69709525T
Other languages
English (en)
Other versions
DE69709525D1 (de
Inventor
Michel J Soubeyrand
Anthony C Halliwell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington Group Ltd
Pilkington North America Inc
Original Assignee
Pilkington PLC
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pilkington PLC, Libbey Owens Ford Co filed Critical Pilkington PLC
Publication of DE69709525D1 publication Critical patent/DE69709525D1/de
Application granted granted Critical
Publication of DE69709525T2 publication Critical patent/DE69709525T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C03C17/2453—Coating containing SnO2
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/24—Doped oxides
    • C03C2217/241—Doped oxides with halides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
  • Chemically Coating (AREA)
  • Chemical Vapour Deposition (AREA)
DE69709525T 1996-05-06 1997-05-06 Verfahren zur herstellung einer zinnoxidbeschichtung auf glas Expired - Lifetime DE69709525T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/642,921 US5698262A (en) 1996-05-06 1996-05-06 Method for forming tin oxide coating on glass
PCT/US1997/007597 WO1997042357A1 (en) 1996-05-06 1997-05-06 Method for forming tin oxide coating on glass

Publications (2)

Publication Number Publication Date
DE69709525D1 DE69709525D1 (de) 2002-02-14
DE69709525T2 true DE69709525T2 (de) 2002-08-29

Family

ID=24578594

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69709525T Expired - Lifetime DE69709525T2 (de) 1996-05-06 1997-05-06 Verfahren zur herstellung einer zinnoxidbeschichtung auf glas

Country Status (13)

Country Link
US (1) US5698262A (de)
EP (1) EP0839218B1 (de)
JP (1) JP4322314B2 (de)
KR (1) KR100577945B1 (de)
CN (1) CN1122115C (de)
AT (1) ATE211779T1 (de)
AU (1) AU2828197A (de)
BR (1) BR9702244A (de)
CA (1) CA2225961A1 (de)
DE (1) DE69709525T2 (de)
PL (1) PL185373B1 (de)
RU (1) RU2194089C2 (de)
WO (1) WO1997042357A1 (de)

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KR19990028727A (ko) 1999-04-15
JP4322314B2 (ja) 2009-08-26
DE69709525D1 (de) 2002-02-14
AU2828197A (en) 1997-11-26
CN1196760A (zh) 1998-10-21
MX9800254A (es) 1998-07-31
EP0839218A1 (de) 1998-05-06
EP0839218B1 (de) 2002-01-09
BR9702244A (pt) 1999-02-17
JPH11509895A (ja) 1999-08-31
CA2225961A1 (en) 1997-11-13
PL185373B1 (pl) 2003-04-30
PL324429A1 (en) 1998-05-25
KR100577945B1 (ko) 2006-08-30
US5698262A (en) 1997-12-16
CN1122115C (zh) 2003-09-24
WO1997042357A1 (en) 1997-11-13
RU2194089C2 (ru) 2002-12-10
ATE211779T1 (de) 2002-01-15

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