DE69526718D1 - Temperatursensoren und Verfahren zur Messung der Temperatur eines Werkstücks - Google Patents

Temperatursensoren und Verfahren zur Messung der Temperatur eines Werkstücks

Info

Publication number
DE69526718D1
DE69526718D1 DE69526718T DE69526718T DE69526718D1 DE 69526718 D1 DE69526718 D1 DE 69526718D1 DE 69526718 T DE69526718 T DE 69526718T DE 69526718 T DE69526718 T DE 69526718T DE 69526718 D1 DE69526718 D1 DE 69526718D1
Authority
DE
Germany
Prior art keywords
temperature
workpiece
measuring
heat
shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69526718T
Other languages
English (en)
Other versions
DE69526718T2 (de
Inventor
Akihiro Hosokawa
Masahiko Kowaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of DE69526718D1 publication Critical patent/DE69526718D1/de
Publication of DE69526718T2 publication Critical patent/DE69526718T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69526718T 1995-01-17 1995-12-28 Temperatursensoren und Verfahren zur Messung der Temperatur eines Werkstücks Expired - Fee Related DE69526718T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/373,401 US5716133A (en) 1995-01-17 1995-01-17 Shielded heat sensor for measuring temperature

Publications (2)

Publication Number Publication Date
DE69526718D1 true DE69526718D1 (de) 2002-06-20
DE69526718T2 DE69526718T2 (de) 2003-01-02

Family

ID=23472257

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69526718T Expired - Fee Related DE69526718T2 (de) 1995-01-17 1995-12-28 Temperatursensoren und Verfahren zur Messung der Temperatur eines Werkstücks

Country Status (5)

Country Link
US (1) US5716133A (de)
EP (1) EP0723141B1 (de)
JP (1) JPH08271346A (de)
AT (1) ATE217707T1 (de)
DE (1) DE69526718T2 (de)

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EP0723141B1 (de) 2002-05-15
US5716133A (en) 1998-02-10

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