DE69515014T2 - Verfahren zur Herstellung eines hochporösen nicht verdampfbaren Gettermaterials und damit hergestelltes Material - Google Patents

Verfahren zur Herstellung eines hochporösen nicht verdampfbaren Gettermaterials und damit hergestelltes Material

Info

Publication number
DE69515014T2
DE69515014T2 DE69515014T DE69515014T DE69515014T2 DE 69515014 T2 DE69515014 T2 DE 69515014T2 DE 69515014 T DE69515014 T DE 69515014T DE 69515014 T DE69515014 T DE 69515014T DE 69515014 T2 DE69515014 T2 DE 69515014T2
Authority
DE
Germany
Prior art keywords
getter
alloy
weight
alloys
powder mixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69515014T
Other languages
German (de)
English (en)
Other versions
DE69515014D1 (de
Inventor
Sergio Carella
Andrea Conte
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IT94MI002449A external-priority patent/IT1276898B1/it
Priority claimed from ITMI950779A external-priority patent/IT1273571B/it
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Application granted granted Critical
Publication of DE69515014D1 publication Critical patent/DE69515014D1/de
Publication of DE69515014T2 publication Critical patent/DE69515014T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/1003—Use of special medium during sintering, e.g. sintering aid
    • B22F3/1007—Atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/11—Making porous workpieces or articles
    • B22F3/1121—Making porous workpieces or articles by using decomposable, meltable or sublimatable fillers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02—Preparation of oxygen
    • C01B13/0229—Purification or separation processes
    • C01B13/0248—Physical processing only
    • C01B13/0259—Physical processing only by adsorption on solids
    • C01B13/0281—Physical processing only by adsorption on solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C01B21/045—Physical processing only by adsorption in solids
    • C01B21/0483—Physical processing only by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • C01B23/0052—Physical processing only by adsorption in solids
    • C01B23/0084—Physical processing only by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen; Reversible storage of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification
    • C01B3/508—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification by using hydrogen storage media
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen; Reversible storage of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification
    • C01B3/56—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/045—Alloys based on refractory metals
    • C22C1/0458—Alloys based on titanium, zirconium or hafnium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00—Treatment under specific atmosphere
    • B22F2201/10—Inert gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00—Treatment under specific atmosphere
    • B22F2201/20—Use of vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/042—Purification by adsorption on solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465—Composition of the impurity
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0465—Composition of the impurity
    • C01B2203/047—Composition of the impurity the impurity being carbon monoxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Combustion & Propulsion (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Powder Metallurgy (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Gas Separation By Absorption (AREA)
DE69515014T 1994-12-02 1995-11-29 Verfahren zur Herstellung eines hochporösen nicht verdampfbaren Gettermaterials und damit hergestelltes Material Expired - Lifetime DE69515014T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT94MI002449A IT1276898B1 (it) 1994-12-02 1994-12-02 Processo per la produzione di materiali getter non evaporabili ad elevata porosita' e materiali cosi' ottenuti
ITMI950779A IT1273571B (it) 1995-04-14 1995-04-14 Processo per la produzione di materiali getter non evaporabili ad elevata porosita' e capacita' di assorbimento di idrogeno e materiali cosi' ottenuti

Publications (2)

Publication Number Publication Date
DE69515014D1 DE69515014D1 (de) 2000-03-16
DE69515014T2 true DE69515014T2 (de) 2000-07-20

Family

ID=26331215

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69515014T Expired - Lifetime DE69515014T2 (de) 1994-12-02 1995-11-29 Verfahren zur Herstellung eines hochporösen nicht verdampfbaren Gettermaterials und damit hergestelltes Material

Country Status (10)

Country Link
US (2) US6027986A (enExample)
EP (1) EP0719609B1 (enExample)
JP (1) JP2785119B2 (enExample)
KR (1) KR100209121B1 (enExample)
CN (1) CN1074697C (enExample)
AT (1) ATE189637T1 (enExample)
BR (1) BR9505627A (enExample)
DE (1) DE69515014T2 (enExample)
MY (1) MY114207A (enExample)
TW (1) TW287117B (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6110807A (en) * 1995-06-07 2000-08-29 Saes Getters S.P.A. Process for producing high-porosity non-evaporable getter materials
WO1998010461A1 (en) * 1996-09-04 1998-03-12 Saes Getters S.P.A. Thin-film phosphors for field emission displays
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
IT1297013B1 (it) 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
EP0993047A1 (fr) * 1998-10-06 2000-04-12 Koninklijke Philips Electronics N.V. Dispositif semi-conducteur avec des éléments de circuits intégrés du groupe III-V ayant des moyens pour prévenir la pollution par l'hydrogène
JP3420520B2 (ja) 1999-01-13 2003-06-23 キヤノン株式会社 非蒸発性ゲッターの製造方法及び画像形成装置
KR100702710B1 (ko) * 1999-06-02 2007-04-02 사에스 게터스 에스.페.아. 활성화 처리와 무관하게 수소를 흡착할 수 있는 복합 물질 및 이의 제조 방법
US6420002B1 (en) 1999-08-18 2002-07-16 Guardian Industries Corp. Vacuum IG unit with spacer/pillar getter
IT1318061B1 (it) * 2000-06-28 2003-07-21 Getters Spa Catodi per deposizione catodica di leghe getter e processo per la loro produzione.
US6956268B2 (en) * 2001-05-18 2005-10-18 Reveo, Inc. MEMS and method of manufacturing MEMS
JP2003022744A (ja) * 2001-07-06 2003-01-24 Sony Corp 非蒸発型ゲッター、表示装置およびこれらの製造方法
JP3998948B2 (ja) * 2001-10-31 2007-10-31 セイコーインスツル株式会社 圧電振動子及びその製造方法
TWI245308B (en) * 2002-09-13 2005-12-11 Getters Spa Non-evaporable getter compositions which can be reactivated at low temperature after exposure to reactive gases at a higher temperature
ITMI20031178A1 (it) * 2003-06-11 2004-12-12 Getters Spa Depositi multistrato getter non evaporabili ottenuti per
US20050069475A1 (en) * 2003-09-30 2005-03-31 Hage Daniel B. System and process for reducing impurities
EP2126155B1 (en) * 2006-12-15 2019-03-13 BAE Systems PLC Improvements relating to thin film getter devices
ITMI20070301A1 (it) * 2007-02-16 2008-08-17 Getters Spa Supporti comprendenti materiali getter e sorgenti di metalli alcalini o alcalino-terrosi per sistemi di termoregolazione basati su effetto tunnel
CN101978463B (zh) 2008-03-28 2013-02-13 工程吸气公司 包括吸气剂泵和离子泵的组合式抽气系统
ITMI20090402A1 (it) 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
KR101151859B1 (ko) * 2010-03-26 2012-05-31 주식회사엑스엘 비확산 게터가 장착된 엑스선관
ITMI20111870A1 (it) * 2011-10-14 2013-04-15 Getters Spa Composizioni di getter non evaporabili che possono essere riattivate a bassa temperatura dopo l'esposizione a gas reattivi ad una temperatura maggiore
ITMI20120872A1 (it) 2012-05-21 2013-11-22 Getters Spa Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e azoto
ES2846725T3 (es) * 2013-03-04 2021-07-29 Panasonic Ip Man Co Ltd Procedimiento de fabricación de un cristal de vidriera múltiple
JP2015110214A (ja) * 2013-11-01 2015-06-18 大学共同利用機関法人 高エネルギー加速器研究機構 非蒸発型ゲッタ材、非蒸発型ゲッタモジュール、及び非蒸発型ゲッタポンプ
ITMI20131921A1 (it) * 2013-11-20 2015-05-21 Getters Spa Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e monossido di carbonio
PL3176135T3 (pl) * 2014-07-30 2019-10-31 Agc Inc Wielowarstwowa szyba próżniowa
CN105783296B (zh) * 2014-12-24 2018-06-15 北京有色金属研究总院 多孔吸氢元件及其在太阳能集热管中的安装方法
ITUA20163861A1 (it) 2016-05-27 2017-11-27 Getters Spa Non-evaporable getter alloys particularly suitable for hydrogen and carbon monoxide sorption
JP6843380B2 (ja) * 2016-12-13 2021-03-17 有限会社真空実験室 非蒸発型ゲッター粉末材料、非蒸発型ゲッター粉末材料の製造方法、非蒸発型ゲッター及び非蒸発型ゲッターポンプ
US11524271B2 (en) 2017-08-28 2022-12-13 Industry-University Cooperation Foundation Hanyang University Erica Campus Thin film getter and manufacturing method therefor
GB202103659D0 (en) 2021-03-17 2021-04-28 Johnson Matthey Plc Getter activation and use
CN114749144A (zh) * 2022-04-27 2022-07-15 中山金石新材料科技有限公司 用于维持高真空环境的可再生复合吸气剂及其制作方法
CN116275106A (zh) * 2023-02-28 2023-06-23 上海联泰科技股份有限公司 一种多孔结构锆钒铁吸气剂及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2204714C3 (de) * 1972-02-01 1979-10-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von Getterkörpern
IT1198325B (it) 1980-06-04 1988-12-21 Getters Spa Struttura e composizione getteranti,particolarmente adatti per basse temperature
US4671889A (en) * 1982-08-10 1987-06-09 Horst Schreiner Molded getter bodies and method of producing the same
US4428856A (en) 1982-09-30 1984-01-31 Boyarina Maya F Non-evaporable getter
IT1255438B (it) 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method

Also Published As

Publication number Publication date
CN1074697C (zh) 2001-11-14
KR960021130A (ko) 1996-07-18
JP2785119B2 (ja) 1998-08-13
ATE189637T1 (de) 2000-02-15
TW287117B (enExample) 1996-10-01
US5879583A (en) 1999-03-09
EP0719609A3 (en) 1997-06-25
CN1132655A (zh) 1996-10-09
DE69515014D1 (de) 2000-03-16
KR100209121B1 (ko) 1999-07-15
EP0719609B1 (en) 2000-02-09
EP0719609A2 (en) 1996-07-03
US6027986A (en) 2000-02-22
BR9505627A (pt) 1997-09-16
MY114207A (en) 2002-08-30
JPH08225806A (ja) 1996-09-03

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