DE69431032T2 - Beschichtetes schneidwerkzeug und verfahren zu dessen herstellung - Google Patents
Beschichtetes schneidwerkzeug und verfahren zu dessen herstellungInfo
- Publication number
- DE69431032T2 DE69431032T2 DE69431032T DE69431032T DE69431032T2 DE 69431032 T2 DE69431032 T2 DE 69431032T2 DE 69431032 T DE69431032 T DE 69431032T DE 69431032 T DE69431032 T DE 69431032T DE 69431032 T2 DE69431032 T2 DE 69431032T2
- Authority
- DE
- Germany
- Prior art keywords
- titanium
- substrate
- layer
- titanium carbonitride
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 186
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 238000000034 method Methods 0.000 title claims description 58
- 239000010936 titanium Substances 0.000 claims abstract description 184
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 183
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 183
- 239000010410 layer Substances 0.000 claims abstract description 143
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims abstract description 110
- 239000011247 coating layer Substances 0.000 claims abstract description 97
- 239000000460 chlorine Substances 0.000 claims abstract description 73
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims abstract description 72
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 72
- 239000011248 coating agent Substances 0.000 claims abstract description 47
- 238000000576 coating method Methods 0.000 claims abstract description 47
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims abstract description 21
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000002356 single layer Substances 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims description 179
- 238000005229 chemical vapour deposition Methods 0.000 claims description 46
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 34
- 239000013078 crystal Substances 0.000 claims description 34
- 229910052799 carbon Inorganic materials 0.000 claims description 23
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 22
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 claims description 18
- -1 compounds aluminium oxide Chemical class 0.000 claims description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 15
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 13
- 238000002441 X-ray diffraction Methods 0.000 claims description 11
- 239000011195 cermet Substances 0.000 claims description 10
- 150000001247 metal acetylides Chemical class 0.000 claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims 7
- 229910052582 BN Inorganic materials 0.000 claims 5
- 229910010293 ceramic material Inorganic materials 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 claims 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 2
- 229910052796 boron Inorganic materials 0.000 claims 2
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 2
- 230000000737 periodic effect Effects 0.000 claims 2
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 2
- 239000000463 material Substances 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 293
- 230000000052 comparative effect Effects 0.000 description 30
- 238000005755 formation reaction Methods 0.000 description 29
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 28
- 230000015572 biosynthetic process Effects 0.000 description 28
- 239000010730 cutting oil Substances 0.000 description 22
- 239000007789 gas Substances 0.000 description 19
- 239000000047 product Substances 0.000 description 19
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- 239000000919 ceramic Substances 0.000 description 13
- 238000000151 deposition Methods 0.000 description 13
- 230000008021 deposition Effects 0.000 description 13
- 238000011156 evaluation Methods 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- 230000006911 nucleation Effects 0.000 description 10
- 238000010899 nucleation Methods 0.000 description 10
- 230000002159 abnormal effect Effects 0.000 description 8
- 238000005530 etching Methods 0.000 description 8
- 239000002994 raw material Substances 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 5
- 230000006872 improvement Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000002411 adverse Effects 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 230000035515 penetration Effects 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 238000011835 investigation Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 229910021607 Silver chloride Inorganic materials 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000012153 distilled water Substances 0.000 description 2
- 238000004453 electron probe microanalysis Methods 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000005480 shot peening Methods 0.000 description 2
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005261 decarburization Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 235000002639 sodium chloride Nutrition 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12049—Nonmetal component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
Landscapes
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Turning (AREA)
- Chemical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Scissors And Nippers (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12871393 | 1993-05-31 | ||
| JP19724093 | 1993-08-09 | ||
| JP08144594A JP3353449B2 (ja) | 1994-04-20 | 1994-04-20 | 被覆切削工具 |
| JP11081194A JP3384110B2 (ja) | 1993-05-31 | 1994-05-25 | 被覆切削工具とその製造方法 |
| PCT/JP1994/000882 WO1994028191A1 (en) | 1993-05-31 | 1994-05-31 | Coated cutting tool and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69431032D1 DE69431032D1 (de) | 2002-08-29 |
| DE69431032T2 true DE69431032T2 (de) | 2003-01-30 |
Family
ID=27466570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69431032T Expired - Lifetime DE69431032T2 (de) | 1993-05-31 | 1994-05-31 | Beschichtetes schneidwerkzeug und verfahren zu dessen herstellung |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5915162A (https=) |
| EP (1) | EP0653499B1 (https=) |
| KR (1) | KR0165923B1 (https=) |
| AT (1) | ATE221142T1 (https=) |
| DE (1) | DE69431032T2 (https=) |
| TW (1) | TW293037B (https=) |
| WO (1) | WO1994028191A1 (https=) |
Families Citing this family (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69521410T2 (de) * | 1994-10-04 | 2001-10-04 | Sumitomo Electric Industries, Ltd. | Beschichtete hartlegierung |
| SE514181C2 (sv) * | 1995-04-05 | 2001-01-15 | Sandvik Ab | Belagt hårmetallskär för fräsning av gjutjärn |
| US5786069A (en) | 1995-09-01 | 1998-07-28 | Sandvik Ab | Coated turning insert |
| WO1997020082A1 (en) * | 1995-11-30 | 1997-06-05 | Sandvik Ab, (Publ) | Coated turning insert and method of making it |
| SE9504304D0 (sv) | 1995-11-30 | 1995-11-30 | Sandvik Ab | Coated milling insert |
| US6062776A (en) * | 1995-11-30 | 2000-05-16 | Sandvik Ab | Coated cutting insert and method of making it |
| SE509560C2 (sv) * | 1996-09-06 | 1999-02-08 | Sandvik Ab | Belagt hårdmetallskär för bearbetning av gjutjärn |
| USRE40005E1 (en) | 1996-09-06 | 2008-01-15 | Sandvik Intellectual Property Ab | Coated cutting insert |
| US6071560A (en) * | 1997-09-12 | 2000-06-06 | Balzers Aktiengesellschaft | Tool with tool body and protective layer system |
| SE9802488D0 (sv) * | 1998-07-09 | 1998-07-09 | Sandvik Ab | Coated grooving or parting insert |
| US6251508B1 (en) * | 1998-12-09 | 2001-06-26 | Seco Tools Ab | Grade for cast iron |
| US6221469B1 (en) * | 1998-12-09 | 2001-04-24 | Seco Tools Ab | Grade for steel |
| SE519110C2 (sv) * | 1999-05-04 | 2003-01-14 | Sandvik Ab | Belagt kiselnitridbaserat skärverktyg |
| US6472060B1 (en) * | 2000-01-19 | 2002-10-29 | Seco Tools Ab | Coated body with nanocrystalline CVD coating for enhanced edge toughness and reduced friction |
| JP4437353B2 (ja) | 2000-03-30 | 2010-03-24 | 株式会社タンガロイ | 被覆切削工具およびその製造方法 |
| SE0002448D0 (sv) * | 2000-06-28 | 2000-06-28 | Hoeganaes Ab | method of producig powder metal components |
| DE60107177T2 (de) * | 2000-09-07 | 2005-11-03 | NGK Spark Plug Co., Ltd., Nagoya | Beschichtetes Schneidwerkzeug |
| US6933509B1 (en) | 2001-09-11 | 2005-08-23 | Allasso Industries, Inc. | Apparatus and method using fractionated irradiation to harden metal |
| US6750459B1 (en) | 2001-09-11 | 2004-06-15 | Allasso Industries, Inc. | Apparatus and method using irradiation to harden metal |
| US6761851B1 (en) | 2001-09-11 | 2004-07-13 | Allasso Industries, Inc. | Apparatus and method for hardening metal by varying the engagement between irradiation and metal |
| KR20030052469A (ko) * | 2001-12-21 | 2003-06-27 | 한국야금 주식회사 | 내마모성 및 인성이 향상된 피복 초경합금 절삭공구의제조방법 |
| KR100457658B1 (ko) * | 2002-01-16 | 2004-11-17 | 한국야금 주식회사 | 내마모성 및 인성이 향상된 피복 초경합금 절삭공구 |
| SE527349C2 (sv) * | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret |
| US20070054146A1 (en) * | 2003-04-28 | 2007-03-08 | Tatsuhiko Aizawa | High-speed machining tool |
| DE10320652A1 (de) * | 2003-05-07 | 2004-12-02 | Kennametal Widia Gmbh & Co.Kg | Werkzeug, insbesondere Schneidwerkzeug und Verfahren zur CVD-Abscheidung einer zweiphasigen Schicht auf einem Substratkörper |
| US7455918B2 (en) * | 2004-03-12 | 2008-11-25 | Kennametal Inc. | Alumina coating, coated product and method of making the same |
| KR101225803B1 (ko) * | 2004-04-13 | 2013-01-23 | 스미또모 덴꼬오 하드메탈 가부시끼가이샤 | 표면 피복 절삭 공구 |
| WO2005121038A2 (en) * | 2004-06-07 | 2005-12-22 | Colorado School Of Mines | Coating for glass molding dies and forming tools |
| RU2296813C2 (ru) * | 2004-07-13 | 2007-04-10 | Государственное образовательное учреждение высшего профессионального образования "Тольяттинский государственный университет" | Способ упрочнения инструмента |
| JP2006082207A (ja) * | 2004-09-17 | 2006-03-30 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
| SE528107C2 (sv) * | 2004-10-04 | 2006-09-05 | Sandvik Intellectual Property | Belagt hårdmetallskär, speciellt användbart för höghastighetsbearbetning av metalliska arbetsstycken |
| KR20070092945A (ko) * | 2004-12-22 | 2007-09-14 | 스미또모 덴꼬오 하드메탈 가부시끼가이샤 | 표면 피복 절삭 공구 |
| JP4753249B2 (ja) * | 2006-01-13 | 2011-08-24 | 株式会社神戸製鋼所 | ガラス成形用金型 |
| US8080312B2 (en) * | 2006-06-22 | 2011-12-20 | Kennametal Inc. | CVD coating scheme including alumina and/or titanium-containing materials and method of making the same |
| JP2009095907A (ja) * | 2007-10-15 | 2009-05-07 | Sumitomo Electric Hardmetal Corp | 刃先交換型切削チップ |
| KR100920835B1 (ko) * | 2007-12-20 | 2009-10-08 | 주식회사 하이닉스반도체 | 반도체 메모리 장치 |
| WO2009096476A1 (ja) * | 2008-01-29 | 2009-08-06 | Kyocera Corporation | 切削工具 |
| WO2012018063A1 (ja) * | 2010-08-04 | 2012-02-09 | 株式会社タンガロイ | 被覆工具 |
| DE102010039035A1 (de) * | 2010-08-06 | 2012-02-09 | Walter Ag | Schneidwerkzeug mit mehrlagiger Beschichtung |
| US8734070B2 (en) | 2010-10-20 | 2014-05-27 | Kennametal Inc. | Toolholder with externally-mounted dynamic absorber |
| AT510963B1 (de) † | 2011-03-18 | 2012-08-15 | Boehlerit Gmbh & Co Kg | Beschichteter körper und verfahren zu dessen herstellung |
| EP2700460B1 (en) * | 2011-04-20 | 2018-11-07 | Tungaloy Corporation | Coated cutting tool |
| US8524360B2 (en) | 2011-08-29 | 2013-09-03 | Kennametal Inc. | Cutting insert with a titanium oxycarbonitride coating and method for making the same |
| JP6272356B2 (ja) | 2013-12-26 | 2018-01-31 | 京セラ株式会社 | 切削工具 |
| US9764986B2 (en) | 2015-01-22 | 2017-09-19 | Kennametal Inc. | Low temperature CVD coatings and applications thereof |
| CN121380952A (zh) * | 2017-04-07 | 2026-01-23 | 山特维克知识产权股份有限公司 | 涂层切削工具 |
| JP6784928B2 (ja) | 2018-09-04 | 2020-11-18 | 株式会社タンガロイ | 被覆切削工具 |
| DE112019004438T5 (de) | 2018-09-05 | 2021-05-20 | Kyocera Corporation | Beschichtetes werkzeug und schneidwerkzeug |
| US11998991B2 (en) | 2018-09-05 | 2024-06-04 | Kyocera Corporation | Coated tool and cutting tool |
| US11964328B2 (en) | 2018-09-05 | 2024-04-23 | Kyocera Corporation | Coated tool and cutting tool |
| JP7142097B2 (ja) | 2018-09-05 | 2022-09-26 | 京セラ株式会社 | 被覆工具及び切削工具 |
| WO2020050263A1 (ja) | 2018-09-05 | 2020-03-12 | 京セラ株式会社 | 被覆工具及び切削工具 |
| WO2020050264A1 (ja) * | 2018-09-05 | 2020-03-12 | 京セラ株式会社 | 被覆工具及び切削工具 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3656995A (en) * | 1969-05-02 | 1972-04-18 | Texas Instruments Inc | Chemical vapor deposition coatings on titanium |
| US3771976A (en) * | 1971-01-08 | 1973-11-13 | Texas Instruments Inc | Metal carbonitride-coated article and method of producing same |
| US4150195A (en) * | 1976-06-18 | 1979-04-17 | Sumitomo Electric Industries, Ltd. | Surface-coated cemented carbide article and a process for the production thereof |
| US4282289A (en) * | 1980-04-16 | 1981-08-04 | Sandvik Aktiebolag | Method of preparing coated cemented carbide product and resulting product |
| JPS6077972A (ja) * | 1983-10-05 | 1985-05-02 | Toshiba Tungaloy Co Ltd | 高温特性にすぐれた多層被覆工具材料 |
| JPS6089574A (ja) * | 1983-10-21 | 1985-05-20 | Mitsubishi Metal Corp | 切削工具および耐摩耗工具用表面被覆焼結硬質合金部材 |
| JPS61170559A (ja) * | 1985-01-21 | 1986-08-01 | Sumitomo Electric Ind Ltd | 被覆超硬合金 |
| JPH0732961B2 (ja) * | 1986-10-03 | 1995-04-12 | 三菱マテリアル株式会社 | 表面被覆炭化タングステン基超硬合金製切削工具 |
| JPH0773802B2 (ja) * | 1987-07-10 | 1995-08-09 | 住友電気工業株式会社 | 被覆超硬合金工具 |
| DE3841731C1 (en) * | 1988-12-10 | 1990-04-12 | Krupp Widia Gmbh, 4300 Essen, De | Process for coating a tool base, and tool produced by this process |
| US4984940A (en) * | 1989-03-17 | 1991-01-15 | Kennametal Inc. | Multilayer coated cemented carbide cutting insert |
| JPH03190604A (ja) * | 1989-12-15 | 1991-08-20 | Mitsubishi Materials Corp | 硬質層被覆炭化タングステン基超硬合金製工具部材 |
| US5075181A (en) * | 1989-05-05 | 1991-12-24 | Kennametal Inc. | High hardness/high compressive stress multilayer coated tool |
| US5436071A (en) * | 1990-01-31 | 1995-07-25 | Mitsubishi Materials Corporation | Cermet cutting tool and process for producing the same |
| JP2775955B2 (ja) * | 1990-01-31 | 1998-07-16 | 三菱マテリアル株式会社 | 耐摩耗性に優れたコーティングサーメットの製造法 |
| JPH0413874A (ja) * | 1990-05-02 | 1992-01-17 | Mitsubishi Materials Corp | 炭化チタン被覆工具部材 |
| US5250367A (en) * | 1990-09-17 | 1993-10-05 | Kennametal Inc. | Binder enriched CVD and PVD coated cutting tool |
| JP2985300B2 (ja) * | 1990-12-25 | 1999-11-29 | 三菱マテリアル株式会社 | 硬質層被覆サーメット |
| US5372873A (en) * | 1992-10-22 | 1994-12-13 | Mitsubishi Materials Corporation | Multilayer coated hard alloy cutting tool |
| US5374471A (en) * | 1992-11-27 | 1994-12-20 | Mitsubishi Materials Corporation | Multilayer coated hard alloy cutting tool |
| SE501527C2 (sv) * | 1992-12-18 | 1995-03-06 | Sandvik Ab | Sätt och alster vid beläggning av ett skärande verktyg med ett aluminiumoxidskikt |
-
1994
- 1994-05-31 EP EP94916435A patent/EP0653499B1/en not_active Expired - Lifetime
- 1994-05-31 AT AT94916435T patent/ATE221142T1/de not_active IP Right Cessation
- 1994-05-31 KR KR1019950700369A patent/KR0165923B1/ko not_active Expired - Lifetime
- 1994-05-31 US US08/379,624 patent/US5915162A/en not_active Expired - Lifetime
- 1994-05-31 WO PCT/JP1994/000882 patent/WO1994028191A1/ja not_active Ceased
- 1994-05-31 DE DE69431032T patent/DE69431032T2/de not_active Expired - Lifetime
- 1994-06-11 TW TW083105374A patent/TW293037B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP0653499B1 (en) | 2002-07-24 |
| KR0165923B1 (ko) | 1999-01-15 |
| WO1994028191A1 (en) | 1994-12-08 |
| US5915162A (en) | 1999-06-22 |
| DE69431032D1 (de) | 2002-08-29 |
| EP0653499A4 (en) | 1997-11-12 |
| TW293037B (https=) | 1996-12-11 |
| EP0653499A1 (en) | 1995-05-17 |
| ATE221142T1 (de) | 2002-08-15 |
| KR950702648A (ko) | 1995-07-29 |
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