DE69210328T2 - Lateraler, bipolarer Halbleitertransistor mit isolierter Steuerelektrode - Google Patents

Lateraler, bipolarer Halbleitertransistor mit isolierter Steuerelektrode

Info

Publication number
DE69210328T2
DE69210328T2 DE69210328T DE69210328T DE69210328T2 DE 69210328 T2 DE69210328 T2 DE 69210328T2 DE 69210328 T DE69210328 T DE 69210328T DE 69210328 T DE69210328 T DE 69210328T DE 69210328 T2 DE69210328 T2 DE 69210328T2
Authority
DE
Germany
Prior art keywords
lateral
control electrode
semiconductor transistor
bipolar semiconductor
isolated control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69210328T
Other languages
English (en)
Other versions
DE69210328D1 (de
Inventor
Johnny Kin On Sin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of DE69210328D1 publication Critical patent/DE69210328D1/de
Application granted granted Critical
Publication of DE69210328T2 publication Critical patent/DE69210328T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42356—Disposition, e.g. buried gate electrode
    • H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395—Vertical transistors, e.g. vertical IGBT
    • H01L29/7398—Vertical transistors, e.g. vertical IGBT with both emitter and collector contacts in the same substrate side

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Bipolar Transistors (AREA)
  • Thin Film Transistor (AREA)
DE69210328T 1991-08-07 1992-07-28 Lateraler, bipolarer Halbleitertransistor mit isolierter Steuerelektrode Expired - Fee Related DE69210328T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/741,288 US5227653A (en) 1991-08-07 1991-08-07 Lateral trench-gate bipolar transistors

Publications (2)

Publication Number Publication Date
DE69210328D1 DE69210328D1 (de) 1996-06-05
DE69210328T2 true DE69210328T2 (de) 1996-11-07

Family

ID=24980123

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69210328T Expired - Fee Related DE69210328T2 (de) 1991-08-07 1992-07-28 Lateraler, bipolarer Halbleitertransistor mit isolierter Steuerelektrode

Country Status (5)

Country Link
US (1) US5227653A (de)
EP (1) EP0526939B1 (de)
JP (1) JP2633145B2 (de)
KR (1) KR100278526B1 (de)
DE (1) DE69210328T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2272572B (en) * 1992-11-09 1996-07-10 Fuji Electric Co Ltd Insulated-gate bipolar transistor and process of producing the same
EP1179853A1 (de) * 1994-09-16 2002-02-13 Kabushiki Kaisha Toshiba Halbleiteranordnung mit hoher Durchbruchsspannung
DE69624305T2 (de) * 1995-03-23 2003-06-26 Koninkl Philips Electronics Nv Halbleiteranordnung mit einem ligbt element
US5776813A (en) * 1997-10-06 1998-07-07 Industrial Technology Research Institute Process to manufacture a vertical gate-enhanced bipolar transistor
DE19750413A1 (de) * 1997-11-14 1999-05-20 Asea Brown Boveri Bipolartransistor mit isolierter Steuerelektrode (IGBT)
DE19800647C1 (de) 1998-01-09 1999-05-27 Siemens Ag SOI-Hochspannungsschalter
JP3641547B2 (ja) * 1998-03-25 2005-04-20 株式会社豊田中央研究所 横型ｍｏｓ素子を含む半導体装置
WO1999056323A1 (fr) * 1998-04-27 1999-11-04 Mitsubishi Denki Kabushiki Kaisha Dispositif semi-conducteur et son procede de fabrication
KR100370129B1 (ko) 2000-08-01 2003-01-30 주식회사 하이닉스반도체 반도체 소자 및 그의 제조방법
JP4290378B2 (ja) * 2002-03-28 2009-07-01 Ｎｅｃエレクトロニクス株式会社 横型パワーｍｏｓトランジスタおよびその製造方法
US7759731B2 (en) * 2006-08-28 2010-07-20 Advanced Analogic Technologies, Inc. Lateral trench MOSFET with direct trench polysilicon contact and method of forming the same
CN101840935B (zh) * 2010-05-17 2012-02-29 电子科技大学 Soi横向mosfet器件
CN105990408A (zh) * 2015-02-02 2016-10-05 无锡华润上华半导体有限公司 横向绝缘栅双极型晶体管
CN110459606B (zh) * 2019-08-29 2023-03-24 电子科技大学 一种具有自偏置pmos的横向沟槽型igbt及其制备方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4199774A (en) * 1978-09-18 1980-04-22 The Board Of Trustees Of The Leland Stanford Junior University Monolithic semiconductor switching device
US4546367A (en) * 1982-06-21 1985-10-08 Eaton Corporation Lateral bidirectional notch FET with extended gate insulator
EP0273030A3 (de) * 1982-12-13 1988-09-21 General Electric Company Laterale Gleichrichter mit isoliertem Gate
US4963951A (en) * 1985-11-29 1990-10-16 General Electric Company Lateral insulated gate bipolar transistors with improved latch-up immunity
US4767722A (en) * 1986-03-24 1988-08-30 Siliconix Incorporated Method for making planar vertical channel DMOS structures
DE3855922T2 (de) * 1987-02-26 1998-01-02 Toshiba Kawasaki Kk An-Steuertechnik für Thyristor mit isolierter Steuerelektrode
DE3820677A1 (de) * 1987-07-13 1989-01-26 Bbc Brown Boveri & Cie Feldeffektgesteuertes, bipolares leistungshalbleiter-bauelement und verfahren zu dessen herstellung
US4914058A (en) * 1987-12-29 1990-04-03 Siliconix Incorporated Grooved DMOS process with varying gate dielectric thickness
JP2788269B2 (ja) * 1988-02-08 1998-08-20 株式会社東芝 半導体装置およびその製造方法
US5049968A (en) * 1988-02-08 1991-09-17 Kabushiki Kaisha Toshiba Dielectrically isolated substrate and semiconductor device using the same
US5016067A (en) * 1988-04-11 1991-05-14 Texas Instruments Incorporated Vertical MOS transistor
JPH0783118B2 (ja) * 1988-06-08 1995-09-06 三菱電機株式会社 半導体装置およびその製造方法
US4951102A (en) * 1988-08-24 1990-08-21 Harris Corporation Trench gate VCMOS
DE68929359T2 (de) * 1988-09-22 2002-08-22 Koninkl Philips Electronics Nv Laterale bipolare Transistoranordnungen mit isolierter Steuerelektrode mit geteilter Anode
DE68926384T2 (de) * 1988-11-29 1996-10-10 Toshiba Kawasaki Kk Lateraler Leitfähigkeitsmodulations-MOSFET
JPH0716009B2 (ja) * 1988-12-02 1995-02-22 株式会社日立製作所 横型絶縁ゲートバイポーラトランジスタ
JP2536137B2 (ja) * 1989-03-28 1996-09-18 富士電機株式会社 伝導度変調型ｍｏｓｆｅｔを備えた半導体装置

Also Published As

Publication number Publication date
DE69210328D1 (de) 1996-06-05
JP2633145B2 (ja) 1997-07-23
US5227653A (en) 1993-07-13
JPH05206159A (ja) 1993-08-13
KR930005238A (ko) 1993-03-23
EP0526939B1 (de) 1996-05-01
EP0526939A1 (de) 1993-02-10
KR100278526B1 (ko) 2001-02-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee