DE3783863T2 - Transistor mit hoher elektronenmobilitaet. - Google Patents

Transistor mit hoher elektronenmobilitaet.

Info

Publication number
DE3783863T2
DE3783863T2 DE8787309477T DE3783863T DE3783863T2 DE 3783863 T2 DE3783863 T2 DE 3783863T2 DE 8787309477 T DE8787309477 T DE 8787309477T DE 3783863 T DE3783863 T DE 3783863T DE 3783863 T2 DE3783863 T2 DE 3783863T2
Authority
DE
Germany
Prior art keywords
transistor
electron mobility
high electron
mobility
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787309477T
Other languages
English (en)
Other versions
DE3783863D1 (de
Inventor
Masahiko Takikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3783863D1 publication Critical patent/DE3783863D1/de
Publication of DE3783863T2 publication Critical patent/DE3783863T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
    • H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/26—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys
    • H01L29/267—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, elements provided for in two or more of the groups H01L29/16, H01L29/18, H01L29/20, H01L29/22, H01L29/24, e.g. alloys in different semiconductor regions, e.g. heterojunctions

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Recrystallisation Techniques (AREA)
DE8787309477T 1986-10-31 1987-10-27 Transistor mit hoher elektronenmobilitaet. Expired - Fee Related DE3783863T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61258147A JPS63114176A (ja) 1986-10-31 1986-10-31 高速電界効果半導体装置

Publications (2)

Publication Number Publication Date
DE3783863D1 DE3783863D1 (de) 1993-03-11
DE3783863T2 true DE3783863T2 (de) 1993-05-19

Family

ID=17316175

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787309477T Expired - Fee Related DE3783863T2 (de) 1986-10-31 1987-10-27 Transistor mit hoher elektronenmobilitaet.

Country Status (4)

Country Link
US (1) US4958203A (de)
EP (1) EP0266166B1 (de)
JP (1) JPS63114176A (de)
DE (1) DE3783863T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5689125A (en) * 1995-06-12 1997-11-18 The United States Of America As Represented By The Secretary Of The Air Force Cadmium sulfide interface layers for improving III-V semiconductor device performance and characteristics
US5804842A (en) * 1995-06-20 1998-09-08 Nec Research Institute, Inc. Optically writing erasable conductive patterns at a bandgap-engineered heterojunction
US6117697A (en) * 1998-07-27 2000-09-12 The United States Of America As Represented By The Secretary Of The Air Force Solid state magnetic field sensor method
US9620592B2 (en) * 2015-02-12 2017-04-11 International Business Machines Corporation Doped zinc oxide and n-doping to reduce junction leakage
CN111524958B (zh) * 2019-02-01 2023-05-02 联华电子股份有限公司 一种高电子迁移率晶体管

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0033037B1 (de) * 1979-12-28 1990-03-21 Fujitsu Limited Halbleitervorrichtungen mit Heteroübergang
JPS57147284A (en) * 1981-03-06 1982-09-11 Fujitsu Ltd Semiconductor device
JPS5963768A (ja) * 1982-10-05 1984-04-11 Agency Of Ind Science & Technol 電界効果型半導体装置
JPS605570A (ja) * 1983-06-09 1985-01-12 Fujitsu Ltd 半導体装置の製造方法
US4745447A (en) * 1985-06-14 1988-05-17 American Telephone And Telegraph Company, At&T Bell Laboratories Gallium arsenide on gallium indium arsenide Schottky barrier device
US4705361A (en) * 1985-11-27 1987-11-10 Texas Instruments Incorporated Spatial light modulator
JP2845566B2 (ja) * 1990-04-16 1999-01-13 松下電器産業株式会社 熱交換器

Also Published As

Publication number Publication date
EP0266166A3 (en) 1989-02-22
EP0266166A2 (de) 1988-05-04
EP0266166B1 (de) 1993-01-27
JPH0260225B2 (de) 1990-12-14
DE3783863D1 (de) 1993-03-11
US4958203A (en) 1990-09-18
JPS63114176A (ja) 1988-05-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee