DE3884665D1 - Hochleistungstransistor mit Seitenwandemitter. - Google Patents

Hochleistungstransistor mit Seitenwandemitter.

Info

Publication number
DE3884665D1
DE3884665D1 DE88104842T DE3884665T DE3884665D1 DE 3884665 D1 DE3884665 D1 DE 3884665D1 DE 88104842 T DE88104842 T DE 88104842T DE 3884665 T DE3884665 T DE 3884665T DE 3884665 D1 DE3884665 D1 DE 3884665D1
Authority
DE
Germany
Prior art keywords
high power
power transistor
emitter
sidewall
sidewall emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88104842T
Other languages
English (en)
Other versions
DE3884665T2 (de
Inventor
Michael Daniel Monkowski
Joseph Francis Shepard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE3884665D1 publication Critical patent/DE3884665D1/de
Application granted granted Critical
Publication of DE3884665T2 publication Critical patent/DE3884665T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41708—Emitter or collector electrodes for bipolar transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42304—Base electrodes for bipolar transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66234—Bipolar junction transistors [BJT]
    • H01L29/66272—Silicon vertical transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73—Bipolar junction transistors
    • H01L29/732—Vertical transistors
    • H01L29/7322—Vertical transistors having emitter-base and base-collector junctions leaving at the same surface of the body, e.g. planar transistor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Bipolar Transistors (AREA)
DE88104842T 1987-05-11 1988-03-25 Hochleistungstransistor mit Seitenwandemitter. Expired - Fee Related DE3884665T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/048,346 US4847670A (en) 1987-05-11 1987-05-11 High performance sidewall emitter transistor

Publications (2)

Publication Number Publication Date
DE3884665D1 true DE3884665D1 (de) 1993-11-11
DE3884665T2 DE3884665T2 (de) 1994-05-11

Family

ID=21954085

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88104842T Expired - Fee Related DE3884665T2 (de) 1987-05-11 1988-03-25 Hochleistungstransistor mit Seitenwandemitter.

Country Status (7)

Country Link
US (1) US4847670A (de)
EP (1) EP0290763B1 (de)
JP (1) JPH0646638B2 (de)
AU (1) AU601575B2 (de)
BR (1) BR8801815A (de)
CA (1) CA1277780C (de)
DE (1) DE3884665T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4980738A (en) * 1988-06-29 1990-12-25 Texas Instruments Incorporated Single polysilicon layer transistor with reduced emitter and base resistance
JPH06101473B2 (ja) * 1988-12-05 1994-12-12 日本電気株式会社 半導体装置
US5001538A (en) * 1988-12-28 1991-03-19 Synergy Semiconductor Corporation Bipolar sinker structure and process for forming same
US4994400A (en) * 1989-01-27 1991-02-19 Tektronix, Inc. Method of fabricating a semiconductor device using a tri-layer structure and conductive sidewalls
US5144403A (en) * 1989-02-07 1992-09-01 Hewlett-Packard Company Bipolar transistor with trench-isolated emitter
US5008210A (en) * 1989-02-07 1991-04-16 Hewlett-Packard Company Process of making a bipolar transistor with a trench-isolated emitter
US4902639A (en) * 1989-08-03 1990-02-20 Motorola, Inc. Process for making BiCMOS integrated circuit having a shallow trench bipolar transistor with vertical base contacts
US5306649A (en) * 1991-07-26 1994-04-26 Avantek, Inc. Method for producing a fully walled emitter-base structure in a bipolar transistor
US5194926A (en) * 1991-10-03 1993-03-16 Motorola Inc. Semiconductor device having an inverse-T bipolar transistor
JPH0758120A (ja) * 1993-08-11 1995-03-03 Nec Corp 半導体装置及びその製造方法
US6501134B1 (en) * 2001-01-09 2002-12-31 Advanced Micro Devices, Inc. Ultra thin SOI devices with improved short-channel control
US6803642B2 (en) 2001-12-06 2004-10-12 International Business Machines Corporation Bipolar device having non-uniform depth base-emitter junction
US7372091B2 (en) * 2004-01-27 2008-05-13 Micron Technology, Inc. Selective epitaxy vertical integrated circuit components
US7504685B2 (en) 2005-06-28 2009-03-17 Micron Technology, Inc. Oxide epitaxial isolation
US7335927B2 (en) * 2006-01-30 2008-02-26 Internatioanl Business Machines Corporation Lateral silicided diodes

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53132275A (en) * 1977-04-25 1978-11-17 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and its production
US4234357A (en) * 1979-07-16 1980-11-18 Trw Inc. Process for manufacturing emitters by diffusion from polysilicon
US4252581A (en) * 1979-10-01 1981-02-24 International Business Machines Corporation Selective epitaxy method for making filamentary pedestal transistor
US4338138A (en) * 1980-03-03 1982-07-06 International Business Machines Corporation Process for fabricating a bipolar transistor
US4381953A (en) * 1980-03-24 1983-05-03 International Business Machines Corporation Polysilicon-base self-aligned bipolar transistor process
US4319932A (en) * 1980-03-24 1982-03-16 International Business Machines Corporation Method of making high performance bipolar transistor with polysilicon base contacts
US4484211A (en) * 1981-02-04 1984-11-20 Matsushita Electric Industrial Co., Ltd. Oxide walled emitter
US4539742A (en) * 1981-06-22 1985-09-10 Tokyo Shibaura Denki Kabushiki Kaisha Semiconductor device and method for manufacturing the same
NL8105920A (nl) * 1981-12-31 1983-07-18 Philips Nv Halfgeleiderinrichting en werkwijze voor het vervaardigen van een dergelijke halfgeleiderinrichting.
US4507171A (en) * 1982-08-06 1985-03-26 International Business Machines Corporation Method for contacting a narrow width PN junction region
JPS5934660A (ja) * 1982-08-21 1984-02-25 Mitsubishi Electric Corp 半導体装置
US4521952A (en) * 1982-12-02 1985-06-11 International Business Machines Corporation Method of making integrated circuits using metal silicide contacts
NL8402859A (nl) * 1984-09-18 1986-04-16 Philips Nv Werkwijze voor het vervaardigen van submicrongroeven in bijvoorbeeld halfgeleidermateriaal en met deze werkwijze verkregen inrichtingen.
JPS61187365A (ja) * 1985-02-15 1986-08-21 Fujitsu Ltd 半導体装置の製造方法
EP0239652B1 (de) * 1986-03-22 1991-07-24 Deutsche ITT Industries GmbH Verfahren zum Herstellen einer monolithisch integrierten Schaltung mit mindestens einem bipolaren Planartransistor

Also Published As

Publication number Publication date
CA1277780C (en) 1990-12-11
EP0290763A1 (de) 1988-11-17
EP0290763B1 (de) 1993-10-06
AU1566788A (en) 1988-11-17
JPS63292674A (ja) 1988-11-29
AU601575B2 (en) 1990-09-13
JPH0646638B2 (ja) 1994-06-15
DE3884665T2 (de) 1994-05-11
BR8801815A (pt) 1988-11-29
US4847670A (en) 1989-07-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee