DE69206770T2 - Dreiachsiger Beschleunigungsmesser - Google Patents

Dreiachsiger Beschleunigungsmesser

Info

Publication number
DE69206770T2
DE69206770T2 DE69206770T DE69206770T DE69206770T2 DE 69206770 T2 DE69206770 T2 DE 69206770T2 DE 69206770 T DE69206770 T DE 69206770T DE 69206770 T DE69206770 T DE 69206770T DE 69206770 T2 DE69206770 T2 DE 69206770T2
Authority
DE
Germany
Prior art keywords
triaxial accelerometer
triaxial
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69206770T
Other languages
English (en)
Other versions
DE69206770D1 (de
Inventor
Ljubisa Ristic
Michael F Calaway
Ronald J Gutteridge
William C Dunn
Wu Koucheng
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of DE69206770D1 publication Critical patent/DE69206770D1/de
Publication of DE69206770T2 publication Critical patent/DE69206770T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
DE69206770T 1991-12-19 1992-09-28 Dreiachsiger Beschleunigungsmesser Expired - Fee Related DE69206770T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US81006391A 1991-12-19 1991-12-19

Publications (2)

Publication Number Publication Date
DE69206770D1 DE69206770D1 (de) 1996-01-25
DE69206770T2 true DE69206770T2 (de) 1996-07-11

Family

ID=25202899

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69206770T Expired - Fee Related DE69206770T2 (de) 1991-12-19 1992-09-28 Dreiachsiger Beschleunigungsmesser

Country Status (4)

Country Link
US (1) US5487305A (de)
EP (1) EP0547742B1 (de)
JP (1) JP3327595B2 (de)
DE (1) DE69206770T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009002702B4 (de) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
DE112012001271B4 (de) 2011-03-17 2022-12-22 Hitachi Astemo, Ltd. Halbleitersensor zur Erfassung einer physikalischen Größe

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US20060207327A1 (en) * 2005-03-16 2006-09-21 Zarabadi Seyed R Linear accelerometer
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DE112007002378T5 (de) 2006-10-24 2009-09-03 Bradley Fixtures Corp., Menomonee Falls Kapazitive Messung für Waschraum-Armaturen
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Publication number Priority date Publication date Assignee Title
DE102009002702B4 (de) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
DE112012001271B4 (de) 2011-03-17 2022-12-22 Hitachi Astemo, Ltd. Halbleitersensor zur Erfassung einer physikalischen Größe

Also Published As

Publication number Publication date
EP0547742A1 (de) 1993-06-23
JP3327595B2 (ja) 2002-09-24
EP0547742B1 (de) 1995-12-13
JPH05249138A (ja) 1993-09-28
US5487305A (en) 1996-01-30
DE69206770D1 (de) 1996-01-25

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