DE68907121T2 - Beschleunigungsaufnehmer. - Google Patents

Beschleunigungsaufnehmer.

Info

Publication number
DE68907121T2
DE68907121T2 DE89106211T DE68907121T DE68907121T2 DE 68907121 T2 DE68907121 T2 DE 68907121T2 DE 89106211 T DE89106211 T DE 89106211T DE 68907121 T DE68907121 T DE 68907121T DE 68907121 T2 DE68907121 T2 DE 68907121T2
Authority
DE
Germany
Prior art keywords
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89106211T
Other languages
English (en)
Other versions
DE68907121D1 (de
Inventor
Toshitaka Yamada
Tiaki Mizuno
Masahito Imai
Haruyuki Ikeo
Hirohito Daini Shinwa-Ry Sioya
Masahito Muto
Motomi Iyoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Application granted granted Critical
Publication of DE68907121D1 publication Critical patent/DE68907121D1/de
Publication of DE68907121T2 publication Critical patent/DE68907121T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/03—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses by using non-electrical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/003—Details of instruments used for damping

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
DE89106211T 1988-04-11 1989-04-07 Beschleunigungsaufnehmer. Expired - Fee Related DE68907121T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8844788 1988-04-11

Publications (2)

Publication Number Publication Date
DE68907121D1 DE68907121D1 (de) 1993-07-22
DE68907121T2 true DE68907121T2 (de) 1994-01-27

Family

ID=13943054

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89106211T Expired - Fee Related DE68907121T2 (de) 1988-04-11 1989-04-07 Beschleunigungsaufnehmer.

Country Status (4)

Country Link
US (1) US4967597A (de)
EP (1) EP0340476B1 (de)
KR (1) KR920007252B1 (de)
DE (1) DE68907121T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3116409B2 (ja) * 1991-05-07 2000-12-11 株式会社デンソー 半導体歪みセンサ
US5408112A (en) * 1991-06-03 1995-04-18 Nippondenso Co., Ltd. Semiconductor strain sensor having improved resistance to bonding strain effects
JP2861477B2 (ja) * 1991-06-03 1999-02-24 株式会社デンソー 半導体歪みセンサ
US5656846A (en) * 1991-06-18 1997-08-12 Nec Corporation Semiconductor acceleration sensor and method of fabrication thereof
EP0534366B1 (de) * 1991-09-24 1996-06-05 Murata Manufacturing Co., Ltd. Beschleunigungsmessaufnehmer
US5549785A (en) * 1992-09-14 1996-08-27 Nippondenso Co., Ltd. Method of producing a semiconductor dynamic sensor
DE4234238A1 (de) * 1992-10-10 1994-04-14 Bosch Gmbh Robert Beschleunigungssensor
GB2282891B (en) * 1993-10-13 1997-09-03 Tokai Rika Co Ltd Acceleration detecting apparatus
DE4341271B4 (de) * 1993-12-03 2005-11-03 Robert Bosch Gmbh Beschleunigungssensor aus kristallinem Material und Verfahren zur Herstellung dieses Beschleunigungssensors
JPH0850142A (ja) * 1994-08-04 1996-02-20 Mitsubishi Electric Corp 半導体加速度センサ及びその製造方法
US5587531A (en) * 1995-07-11 1996-12-24 Kansei Corporation Semiconductor strain gauge acceleration sensor
JP2800112B2 (ja) * 1996-02-28 1998-09-21 株式会社エスアイアイ・アールディセンター 半導体装置
EP0793103A3 (de) * 1996-02-27 1998-10-07 Seiko Instruments R&D Center Inc. Halbleiter-Beschleunigungssensor
CA2254535C (en) 1998-11-26 2003-10-28 Canpolar East Inc. Sensor for detection of acceleration and attitude within a vehicle
CA2254538C (en) 1998-11-26 2006-02-07 Canpolar East Inc. Collision deformation sensor for use in the crush zone of a vehicle
CA2366030A1 (en) 2001-12-20 2003-06-20 Global E Bang Inc. Profiling system
US7109580B2 (en) * 2004-03-03 2006-09-19 Hymite A/S Hermetically sealed package for optical, electronic, opto-electronic and other devices

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3363470A (en) * 1964-07-20 1968-01-16 Raphael O. Yavne Accelerometer
GB1155286A (en) * 1966-10-25 1969-06-18 Ether Eng Ltd Improvements in or relating to Transducer Devices.
US3557628A (en) * 1967-12-27 1971-01-26 Toyoda Chuo Kenkyusho Kk Accelerometer
DE2014210A1 (de) * 1970-03-24 1971-10-14 Fiala E Beschleunigungsgeber
US3884085A (en) * 1972-04-05 1975-05-20 Robinson Halpern Company Accelerometer assembly
JPS5015669A (de) * 1973-06-12 1975-02-19
DE2655604C2 (de) * 1976-12-08 1984-11-29 Robert Bosch Gmbh, 7000 Stuttgart Verzögerungsaufnehmer zur Auslösung von Insassenschutzvorrichtungen im Kraftfahrzeug
DE2801969C2 (de) * 1978-01-18 1982-11-04 Robert Bosch Gmbh, 7000 Stuttgart Sensor für Schwingungen
DE2835999A1 (de) * 1978-08-17 1980-03-06 Bosch Gmbh Robert Beschleunigungsaufnehmer, insbesondere zur ausloesung von insassenschutzvorrichtungen in kraftfahrzeugen
JPS6111625A (ja) * 1984-06-28 1986-01-20 Hitachi Ltd 液封型圧力センサとその製造方法
JPS61178664A (ja) * 1985-02-04 1986-08-11 Nissan Motor Co Ltd 半導体加速度センサ
JPS62193566A (ja) * 1986-02-19 1987-08-25 Hitachi Ltd 電力変換装置
EP0454190A3 (en) * 1986-09-22 1992-01-08 Nippondenso Co., Ltd. Semiconductor accelerometer

Also Published As

Publication number Publication date
US4967597A (en) 1990-11-06
KR900016762A (ko) 1990-11-14
KR920007252B1 (ko) 1992-08-28
EP0340476A1 (de) 1989-11-08
DE68907121D1 (de) 1993-07-22
EP0340476B1 (de) 1993-06-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee