DE68907981D1 - Beschleunigungsmesser. - Google Patents

Beschleunigungsmesser.

Info

Publication number
DE68907981D1
DE68907981D1 DE8989303120T DE68907981T DE68907981D1 DE 68907981 D1 DE68907981 D1 DE 68907981D1 DE 8989303120 T DE8989303120 T DE 8989303120T DE 68907981 T DE68907981 T DE 68907981T DE 68907981 D1 DE68907981 D1 DE 68907981D1
Authority
DE
Germany
Prior art keywords
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989303120T
Other languages
English (en)
Other versions
DE68907981T2 (de
Inventor
Seikou Suzuki
Shigeki Tsuchitani
Satoshi Shimada
Masayuki Miki
Shigeyuki Kobori
Masahiro Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE68907981D1 publication Critical patent/DE68907981D1/de
Application granted granted Critical
Publication of DE68907981T2 publication Critical patent/DE68907981T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE89303120T 1988-04-01 1989-03-30 Beschleunigungsmesser. Expired - Fee Related DE68907981T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63078034A JPH0672899B2 (ja) 1988-04-01 1988-04-01 加速度センサ

Publications (2)

Publication Number Publication Date
DE68907981D1 true DE68907981D1 (de) 1993-09-09
DE68907981T2 DE68907981T2 (de) 1994-01-20

Family

ID=13650530

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89303120T Expired - Fee Related DE68907981T2 (de) 1988-04-01 1989-03-30 Beschleunigungsmesser.

Country Status (5)

Country Link
US (1) US5095750A (de)
EP (1) EP0338688B1 (de)
JP (1) JPH0672899B2 (de)
KR (1) KR930001730B1 (de)
DE (1) DE68907981T2 (de)

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JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
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JP2769379B2 (ja) * 1990-03-06 1998-06-25 株式会社日立製作所 車体制御装置
GB9007483D0 (en) * 1990-04-03 1990-05-30 Kellett Michael A Servo accelerometer and control systems therefor
JP2760628B2 (ja) * 1990-04-12 1998-06-04 株式会社日立製作所 Ｐｗｍ静電サーボ式加速度計
US5277053A (en) * 1990-04-25 1994-01-11 Litton Systems, Inc. Square law controller for an electrostatic force balanced accelerometer
DE69116435T2 (de) * 1990-05-30 1996-08-14 Hitachi Automotive Eng Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen
US5142921A (en) * 1990-10-29 1992-09-01 Litton Systems, Inc. Force balance instrument with electrostatic charge control
US5221400A (en) * 1990-12-11 1993-06-22 Delco Electronics Corporation Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection
JP2581324B2 (ja) * 1990-12-27 1997-02-12 株式会社日立製作所 加速度センサ
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
JPH05322921A (ja) * 1992-05-19 1993-12-07 Hitachi Ltd 加速度センサ及びこれを用いたエアバッグシステム
JP2761303B2 (ja) * 1991-03-20 1998-06-04 株式会社日立製作所 エアバッグシステムの衝突検出装置
JP2773495B2 (ja) * 1991-11-18 1998-07-09 株式会社日立製作所 三次元加速度センサ
DE9202533U1 (de) * 1992-02-27 1992-04-23 Mannesmann Kienzle Gmbh, 78052 Villingen-Schwenningen Beschleunigungsgeber
FR2689627B1 (fr) * 1992-04-07 1997-06-20 Sextant Avionique Perfectionnement aux micro-capteurs pendulaires asservis.
US5325065A (en) * 1992-05-18 1994-06-28 Motorola, Inc. Detection circuit with dummy integrator to compensate for switch charge insection and amplifier offset voltage
JP2999088B2 (ja) * 1993-04-28 2000-01-17 株式会社日立製作所 エアバッグシステム
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
FI93580C (fi) * 1993-10-08 1995-04-25 Vaisala Oy Menetelmä ja laitteisto epäsymmetrisen paine-eroanturin takaisinkytkemiseksi
JPH07191055A (ja) * 1993-12-27 1995-07-28 Hitachi Ltd 静電容量式加速度センサ
JP3269274B2 (ja) * 1994-03-15 2002-03-25 株式会社デンソー 加速度センサ
JP2561040B2 (ja) * 1994-11-28 1996-12-04 日本電気株式会社 容量型センサの容量変化検出回路およびその検出方法
JP3322067B2 (ja) * 1995-04-24 2002-09-09 株式会社デンソー 物理量検出装置
US5596144A (en) * 1995-08-04 1997-01-21 Delco Electronics Corporation Piezoresistive force rebalance accelerometer
JP3435979B2 (ja) * 1996-04-26 2003-08-11 株式会社デンソー 物理量検出装置
US5698770A (en) * 1996-06-06 1997-12-16 Trw Inc. Method and apparatus for trimming gain of an accelerometer
JPH11258265A (ja) * 1998-03-16 1999-09-24 Akebono Brake Ind Co Ltd 半導体加速度センサ及びその製造方法
DE19929767C2 (de) * 1999-06-29 2002-06-13 Litef Gmbh Beschleunigungsmeßeinrichtung
JP2001104636A (ja) * 1999-10-04 2001-04-17 Shinsedai Kk 体感ボールゲーム装置
US6674383B2 (en) * 2000-11-01 2004-01-06 Onix Microsystems, Inc. PWM-based measurement interface for a micro-machined electrostatic actuator
DE10118299B4 (de) * 2001-04-12 2005-02-10 Conti Temic Microelectronic Gmbh Verfahren zur Bestimmung des ohmschen Anteils des Innenwiderstands eines Kondensators und Vorrichtung zur Durchführung des Verfahrens
JP2003248016A (ja) * 2002-02-21 2003-09-05 Denso Corp 容量式加速度センサ
DE60306892T2 (de) * 2003-05-02 2007-08-30 Stmicroelectronics S.R.L., Agrate Brianza Verfahren und Anordnung zur Messung der Kopplungskapazität zwischen zwei Leiterbahnen
WO2005083451A1 (en) * 2004-02-27 2005-09-09 Bae Systems Plc Accelerometer
US7788977B2 (en) * 2005-06-01 2010-09-07 Citizen Holdings Co., Ltd. Physical quantity sensor
DE102008023535B4 (de) * 2008-05-14 2011-05-12 Texas Instruments Deutschland Gmbh Elektronische Vorrichtung und Verfahren zur Auswertung einer variablen Kapazität
JP2010145274A (ja) * 2008-12-19 2010-07-01 Panasonic Corp 慣性センサ
JP2011021964A (ja) * 2009-07-15 2011-02-03 Mtc:Kk 密封性能測定装置
JP5284911B2 (ja) * 2009-08-31 2013-09-11 日立オートモティブシステムズ株式会社 静電容量型物理量センサ及び角速度センサ
US9525925B2 (en) * 2011-02-25 2016-12-20 Infineon Technologies Ag Sensor with movable part and biasing
JP2012255669A (ja) * 2011-06-07 2012-12-27 Nippon Dempa Kogyo Co Ltd 加速度計測装置
FR3002324B1 (fr) * 2013-02-19 2016-01-22 Sagem Defense Securite Capteur a accelerometre pendulaire electrostatique et procede de commande d'un tel capteur
US20140260617A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Fully differential capacitive architecture for mems accelerometer
US20140260618A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Force feedback electrodes in mems accelerometer
GB2524245A (en) * 2014-03-17 2015-09-23 Atlantic Inertial Systems Ltd Accelerometers
DE102015212669B4 (de) * 2015-07-07 2018-05-03 Infineon Technologies Ag Kapazitive mikroelektromechanische Vorrichtung und Verfahren zum Ausbilden einer kapazitiven mikroelektromechanischen Vorrichtung
GB2547415A (en) 2016-02-09 2017-08-23 Atlantic Inertial Systems Ltd Inertial sensors
CN112334867A (zh) * 2018-05-24 2021-02-05 纽约州立大学研究基金会 电容传感器
GB2593132A (en) 2019-11-01 2021-09-22 Atlantic Inertial Systems Ltd Methods for closed loop operation of capacitive accelerometers
EP3862757B1 (de) 2020-02-07 2024-03-27 Atlantic Inertial Systems Limited Verfahren für den betrieb von kapazitiven beschleunigungsmessern in geschlossenen regelkreisen und solche kapazitiven beschleunigungsmesser

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DE2326233C2 (de) * 1973-05-23 1986-02-06 Hans-Werner Dr.-Ing. 6382 Friedrichsdorf Fischer Verfahren zur Linearisierung der selbsttätigen elektrostatischen Kraftkompensation
FR2454103A1 (fr) * 1979-04-11 1980-11-07 Sagem Perfectionnements aux accelerometres pendulaires asservis
US4315434A (en) * 1980-05-21 1982-02-16 The United States Of America As Represented By The Secretary Of The Army Pulse width modulation (PWM) with jewel pivot accelerometer
US4336718A (en) * 1980-09-08 1982-06-29 Lear Siegler, Inc. Control circuit for accelerometer
GB2096326B (en) * 1981-04-06 1984-08-15 Secr Defence Force-balance pendulum accelerometers
US4598586A (en) * 1984-08-31 1986-07-08 Northrop Corporation Compensation of gain temperature coefficient in an optical pick-off for an accelerometer
FR2580389B2 (fr) * 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
GB8718004D0 (en) * 1987-07-29 1987-12-16 Marconi Co Ltd Accelerometer
JPH0237993A (ja) * 1988-07-27 1990-02-07 Motoomi Ogata 鉄筋の溶接継手用バッキング部材
US4987779A (en) * 1989-02-28 1991-01-29 United Technologies Corporation Pulse-driven accelerometer arrangement
JPH0642997B2 (ja) * 1989-06-01 1994-06-08 古河アルミニウム工業株式会社 ブレージング用アルミニウム薄板の製造方法
JPH0237991A (ja) * 1989-06-01 1990-02-07 Furukawa Alum Co Ltd ブレージング用アルミニウム薄板の製造方法

Also Published As

Publication number Publication date
US5095750A (en) 1992-03-17
KR930001730B1 (ko) 1993-03-12
EP0338688A1 (de) 1989-10-25
KR890016389A (ko) 1989-11-29
DE68907981T2 (de) 1994-01-20
JPH0672899B2 (ja) 1994-09-14
EP0338688B1 (de) 1993-08-04
JPH01253657A (ja) 1989-10-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee