DE3867748D1 - Beschleunigungsmesser. - Google Patents
Beschleunigungsmesser.Info
- Publication number
- DE3867748D1 DE3867748D1 DE8888306894T DE3867748T DE3867748D1 DE 3867748 D1 DE3867748 D1 DE 3867748D1 DE 8888306894 T DE8888306894 T DE 8888306894T DE 3867748 T DE3867748 T DE 3867748T DE 3867748 D1 DE3867748 D1 DE 3867748D1
- Authority
- DE
- Germany
- Prior art keywords
- accelerometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB878718004A GB8718004D0 (en) | 1987-07-29 | 1987-07-29 | Accelerometer |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3867748D1 true DE3867748D1 (de) | 1992-02-27 |
Family
ID=10621501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888306894T Expired - Fee Related DE3867748D1 (de) | 1987-07-29 | 1988-07-27 | Beschleunigungsmesser. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4920801A (de) |
EP (1) | EP0301816B1 (de) |
DE (1) | DE3867748D1 (de) |
GB (2) | GB8718004D0 (de) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3741036A1 (de) * | 1987-12-03 | 1989-06-15 | Fraunhofer Ges Forschung | Mikromechanischer beschleunigungsmesser |
US5121633A (en) * | 1987-12-18 | 1992-06-16 | Nissan Motor Co., Ltd. | Semiconductor accelerometer |
JPH0672899B2 (ja) * | 1988-04-01 | 1994-09-14 | 株式会社日立製作所 | 加速度センサ |
US5287724A (en) * | 1988-09-23 | 1994-02-22 | Automotive Systems Laboratory, Inc. | Method for calibrating an accelerometer |
US5253510A (en) * | 1989-06-22 | 1993-10-19 | I C Sensors | Self-testable micro-accelerometer |
US5115291A (en) * | 1989-07-27 | 1992-05-19 | Honeywell Inc. | Electrostatic silicon accelerometer |
JP2560140B2 (ja) * | 1990-08-03 | 1996-12-04 | 日産自動車株式会社 | 半導体装置 |
US5314572A (en) * | 1990-08-17 | 1994-05-24 | Analog Devices, Inc. | Method for fabricating microstructures |
EP0543901B1 (de) * | 1990-08-17 | 1995-10-04 | Analog Devices, Inc. | Monolithischer beschleunigungsmesser |
US5620931A (en) * | 1990-08-17 | 1997-04-15 | Analog Devices, Inc. | Methods for fabricating monolithic device containing circuitry and suspended microstructure |
US5417111A (en) * | 1990-08-17 | 1995-05-23 | Analog Devices, Inc. | Monolithic chip containing integrated circuitry and suspended microstructure |
US5326726A (en) * | 1990-08-17 | 1994-07-05 | Analog Devices, Inc. | Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure |
US5168756A (en) * | 1991-02-08 | 1992-12-08 | Sundstrand Corporation | Dithering coriolis rate and acceleration sensor utilizing a permanent magnet |
US5241861A (en) * | 1991-02-08 | 1993-09-07 | Sundstrand Corporation | Micromachined rate and acceleration sensor |
US5331853A (en) * | 1991-02-08 | 1994-07-26 | Alliedsignal Inc. | Micromachined rate and acceleration sensor |
US6295870B1 (en) | 1991-02-08 | 2001-10-02 | Alliedsignal Inc. | Triaxial angular rate and acceleration sensor |
US5243278A (en) * | 1991-02-08 | 1993-09-07 | Sundstrand Corporation | Differential angular velocity sensor that is sensitive in only one degree of freedom |
US5396797A (en) * | 1991-02-08 | 1995-03-14 | Alliedsignal Inc. | Triaxial angular rate and acceleration sensor |
JP2773495B2 (ja) * | 1991-11-18 | 1998-07-09 | 株式会社日立製作所 | 三次元加速度センサ |
EP0556487B1 (de) * | 1992-02-11 | 1995-09-06 | FOKKER SPACE & SYSTEMS B.V. | Zusammenbau von Beschleunigungsmessaufnehmern zur Verwendung in einem Messystem für dreidimensionale Bewegungen eines festen Körpers |
US5280524A (en) * | 1992-05-11 | 1994-01-18 | Jabra Corporation | Bone conductive ear microphone and method |
DE4229558C2 (de) * | 1992-09-04 | 1995-10-19 | Tzn Forschung & Entwicklung | Beschleunigungsaufnehmer |
SE500615C2 (sv) * | 1992-12-03 | 1994-07-25 | Gert Andersson | Anordning för mätning av kraftkomponenter, förfarande för framställning av dylik samt användning därav. |
US5381231A (en) * | 1993-01-07 | 1995-01-10 | Ameron Technologies, Inc. | One-piece silicon substrate having fiber optic stops and a reflective surface thereon and methods of manufacturing same |
US5456109A (en) * | 1993-03-29 | 1995-10-10 | Delco Electronics Corporation | Thick film rotational accelerometer having two structurally integrated linear acceleration sensors |
US5383473A (en) * | 1993-05-10 | 1995-01-24 | Pacesetter, Inc. | Rate-responsive implantable stimulation device having a miniature hybrid-mountable accelerometer-based sensor and method of fabrication |
US5425750A (en) * | 1993-07-14 | 1995-06-20 | Pacesetter, Inc. | Accelerometer-based multi-axis physical activity sensor for a rate-responsive pacemaker and method of fabrication |
JP3269274B2 (ja) * | 1994-03-15 | 2002-03-25 | 株式会社デンソー | 加速度センサ |
US5962788A (en) * | 1994-08-18 | 1999-10-05 | Btg International Limited | Transducer |
GB9416683D0 (en) * | 1994-08-18 | 1994-10-19 | British Tech Group | Accelerometer |
SE9500729L (sv) * | 1995-02-27 | 1996-08-28 | Gert Andersson | Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan |
EP0762128B1 (de) * | 1995-09-04 | 2000-05-17 | Murata Manufacturing Co., Ltd. | Beschleunigungsdetektionsvorrichtung |
WO1997010513A1 (fr) * | 1995-09-14 | 1997-03-20 | Sergei Feodosievich Konovalov | Accelerometre a trois composants |
DE19649715C2 (de) * | 1996-11-30 | 2001-07-12 | Telefunken Microelectron | Anordnung zur Messung von Beschleunigungen |
US5831164A (en) * | 1997-01-21 | 1998-11-03 | Conrad Technologies, Inc. | Linear and rotational accelerometer |
US5905201A (en) * | 1997-10-28 | 1999-05-18 | Alliedsignal Inc. | Micromachined rate and acceleration sensor and method |
DE10064170C2 (de) * | 2000-12-22 | 2002-11-07 | Stn Atlas Elektronik Gmbh | Vorrichtung zur Messung von beschleunigung und/oder Winkelgeschwindigkeit |
US6495398B1 (en) * | 2001-01-05 | 2002-12-17 | Clarisay, Incorporated | Wafer-scale package for surface acoustic wave circuit and method of manufacturing the same |
US6507097B1 (en) | 2001-11-29 | 2003-01-14 | Clarisay, Inc. | Hermetic package for pyroelectric-sensitive electronic device and method of manufacturing the same |
US6621379B1 (en) | 2001-11-29 | 2003-09-16 | Clarisay, Incorporated | Hermetic package for surface acoustic wave device and method of manufacturing the same |
US6649446B1 (en) | 2001-11-29 | 2003-11-18 | Clarisay, Inc. | Hermetic package for multiple contact-sensitive electronic devices and methods of manufacturing thereof |
US6639150B1 (en) | 2002-04-23 | 2003-10-28 | Clarisay, Inc. | Hermetic package for surface acoustic wave device having exposed device substrate contacts and method of manufacturing the same |
DE10225714A1 (de) * | 2002-06-11 | 2004-01-08 | Eads Deutschland Gmbh | Mehrachsiger monolithischer Beschleunigungssensor |
US6829937B2 (en) * | 2002-06-17 | 2004-12-14 | Vti Holding Oy | Monolithic silicon acceleration sensor |
FI119159B (fi) * | 2003-02-11 | 2008-08-15 | Vti Technologies Oy | Kapasitiivinen kiihtyvyysanturirakenne |
EP1711836A1 (de) * | 2004-01-07 | 2006-10-18 | Northrop Grumman Corporation | Zur messung von beschleunigung entlang dreier achsen verwendbare coplanare prüfmassen |
SE528404C2 (sv) * | 2004-10-20 | 2006-11-07 | Imego Ab | Sensorarrangemang |
CN100462723C (zh) * | 2005-10-12 | 2009-02-18 | 西安中星测控有限公司 | 微机械式三轴角速率传感器 |
US7380454B2 (en) * | 2005-12-20 | 2008-06-03 | Honeywell International Inc. | Load beam for surface acoustic wave accelerometer |
FR2919392A1 (fr) * | 2007-07-27 | 2009-01-30 | Thales Sa | Accelerometre d'unite de mesure inertielle a cout reduit et securite amelioree. |
KR101454122B1 (ko) * | 2013-07-31 | 2014-10-22 | 삼성전기주식회사 | 센서용 검출모듈 및 이를 구비하는 각속도 센서 |
US10067154B2 (en) * | 2015-07-24 | 2018-09-04 | Honeywell International Inc. | Accelerometer with inductive pick-off |
CN107092038B (zh) * | 2017-06-19 | 2019-02-01 | 华中科技大学 | 一种mems重力仪 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2273259A1 (en) * | 1974-05-28 | 1975-12-26 | Schlumberger Compteurs | Force or pressure measurement device - has parameter responsive surface wave emitter and frequency variation sensor |
US4342227A (en) * | 1980-12-24 | 1982-08-03 | International Business Machines Corporation | Planar semiconductor three direction acceleration detecting device and method of fabrication |
FR2580389B2 (fr) * | 1985-04-16 | 1989-03-03 | Sfena | Accelerometre micro-usine a rappel electrostatique |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
JPS62118260A (ja) * | 1985-11-19 | 1987-05-29 | Fujitsu Ltd | 加速度センサ |
US4736629A (en) * | 1985-12-20 | 1988-04-12 | Silicon Designs, Inc. | Micro-miniature accelerometer |
US4803883A (en) * | 1987-11-09 | 1989-02-14 | Rockwell International Corporation | Accelerometer |
US4809552A (en) * | 1987-11-23 | 1989-03-07 | Allied-Signal, Inc. | Multidirectional force-sensing transducer |
-
1987
- 1987-07-29 GB GB878718004A patent/GB8718004D0/en active Pending
-
1988
- 1988-07-21 US US07/222,138 patent/US4920801A/en not_active Expired - Fee Related
- 1988-07-27 EP EP88306894A patent/EP0301816B1/de not_active Expired - Lifetime
- 1988-07-27 GB GB8817866A patent/GB2207758B/en not_active Expired - Lifetime
- 1988-07-27 DE DE8888306894T patent/DE3867748D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2207758A (en) | 1989-02-08 |
EP0301816A3 (en) | 1990-01-17 |
GB2207758B (en) | 1991-01-23 |
GB8817866D0 (en) | 1988-09-01 |
GB8718004D0 (en) | 1987-12-16 |
EP0301816B1 (de) | 1992-01-15 |
EP0301816A2 (de) | 1989-02-01 |
US4920801A (en) | 1990-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |