DE69206770D1 - Dreiachsiger Beschleunigungsmesser - Google Patents

Dreiachsiger Beschleunigungsmesser

Info

Publication number
DE69206770D1
DE69206770D1 DE69206770T DE69206770T DE69206770D1 DE 69206770 D1 DE69206770 D1 DE 69206770D1 DE 69206770 T DE69206770 T DE 69206770T DE 69206770 T DE69206770 T DE 69206770T DE 69206770 D1 DE69206770 D1 DE 69206770D1
Authority
DE
Germany
Prior art keywords
triaxial accelerometer
triaxial
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69206770T
Other languages
English (en)
Other versions
DE69206770T2 (de
Inventor
Ljubisa Ristic
Michael F Calaway
Ronald J Gutteridge
William C Dunn
Wu Koucheng
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of DE69206770D1 publication Critical patent/DE69206770D1/de
Publication of DE69206770T2 publication Critical patent/DE69206770T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
DE69206770T 1991-12-19 1992-09-28 Dreiachsiger Beschleunigungsmesser Expired - Fee Related DE69206770T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US81006391A 1991-12-19 1991-12-19

Publications (2)

Publication Number Publication Date
DE69206770D1 true DE69206770D1 (de) 1996-01-25
DE69206770T2 DE69206770T2 (de) 1996-07-11

Family

ID=25202899

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69206770T Expired - Fee Related DE69206770T2 (de) 1991-12-19 1992-09-28 Dreiachsiger Beschleunigungsmesser

Country Status (4)

Country Link
US (1) US5487305A (de)
EP (1) EP0547742B1 (de)
JP (1) JP3327595B2 (de)
DE (1) DE69206770T2 (de)

Families Citing this family (121)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5665915A (en) * 1992-03-25 1997-09-09 Fuji Electric Co., Ltd. Semiconductor capacitive acceleration sensor
JP3156453B2 (ja) * 1993-07-28 2001-04-16 富士電機株式会社 半導体容量形加速度センサ
US5461916A (en) 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
US5824901A (en) * 1993-08-09 1998-10-20 Leica Geosystems Ag Capacitive sensor for measuring accelerations and inclinations
DE4326666C1 (de) * 1993-08-09 1995-02-23 Wild Heerbrugg Ag Kapazitiver Sensor
US5777226A (en) * 1994-03-28 1998-07-07 I/O Sensors, Inc. Sensor structure with L-shaped spring legs
JP3305516B2 (ja) * 1994-10-31 2002-07-22 株式会社東海理化電機製作所 静電容量式加速度センサ及びその製造方法
KR100398292B1 (ko) * 1994-11-23 2004-07-27 코닌클리케 필립스 일렉트로닉스 엔.브이. 고정전극과가동성전극을갖는마이크로컴포넌트를구비한반도체장치
DE19547642A1 (de) * 1994-12-20 1996-06-27 Zexel Corp Beschleunigungssensor und Verfahren zu dessen Herstellung
JP3433401B2 (ja) * 1995-05-18 2003-08-04 アイシン精機株式会社 静電容量型加速度センサ
US5583291A (en) * 1995-07-31 1996-12-10 Motorola, Inc. Micromechanical anchor structure
US5806365A (en) * 1996-04-30 1998-09-15 Motorola, Inc. Acceleration sensing device on a support substrate and method of operation
JPH09318649A (ja) * 1996-05-30 1997-12-12 Texas Instr Japan Ltd 複合センサ
US5978972A (en) * 1996-06-14 1999-11-09 Johns Hopkins University Helmet system including at least three accelerometers and mass memory and method for recording in real-time orthogonal acceleration data of a head
DE19637265A1 (de) * 1996-09-13 1998-03-26 Bosch Gmbh Robert Sensor zur kapazitiven Aufnahme einer Beschleunigung
US6065742A (en) * 1996-09-13 2000-05-23 Lord Corporation Multi-directional tuned vibration absorber
SE9700205D0 (sv) * 1997-01-24 1997-01-24 Peter Lindberg Integrated microfluidic element
US6041655A (en) * 1997-04-22 2000-03-28 Alliedsignal, Inc. Active cover accelerometer
US6199430B1 (en) 1997-06-17 2001-03-13 Denso Corporation Acceleration sensor with ring-shaped movable electrode
US6223598B1 (en) 1997-06-18 2001-05-01 Analog Devices, Inc. Suspension arrangement for semiconductor accelerometer
US5939633A (en) * 1997-06-18 1999-08-17 Analog Devices, Inc. Apparatus and method for multi-axis capacitive sensing
US6082737A (en) * 1997-08-20 2000-07-04 John Crane Inc. Rotary shaft monitoring seal system
JP4178192B2 (ja) * 1998-04-22 2008-11-12 ミツミ電機株式会社 物理量検出センサ
US6128954A (en) * 1998-12-18 2000-10-10 Delco Electronics Corporation Spring for a resonance ring of an angular rate sensor
US6122963A (en) * 1999-01-22 2000-09-26 Motorola, Inc. Electronic component for measuring acceleration
JP4238437B2 (ja) 1999-01-25 2009-03-18 株式会社デンソー 半導体力学量センサとその製造方法
DE19920066B4 (de) * 1999-05-03 2007-03-01 Robert Bosch Gmbh Sensor aus einem mehrschichtigen Substrat mit einem aus einer Halbleiterschicht herausstrukturierten Federelement
JP3525862B2 (ja) * 2000-05-22 2004-05-10 トヨタ自動車株式会社 センサ素子及びセンサ装置
FR2810976B1 (fr) * 2000-06-29 2003-08-29 Planhead Silmag P H S Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant
US6536280B1 (en) * 2000-09-12 2003-03-25 Ic Mechanics, Inc. Thin film MEMS sensors employing electrical sensing and force feedback
US7526389B2 (en) * 2000-10-11 2009-04-28 Riddell, Inc. Power management of a system for measuring the acceleration of a body part
US10952671B2 (en) 2000-10-11 2021-03-23 Riddell, Inc. System for monitoring a physiological parameter of players engaged in a sporting activity
US6826509B2 (en) 2000-10-11 2004-11-30 Riddell, Inc. System and method for measuring the linear and rotational acceleration of a body part
US8797165B2 (en) 2000-10-11 2014-08-05 Riddell, Inc. System for monitoring a physiological parameter of players engaged in a sporting activity
JP2002131331A (ja) * 2000-10-24 2002-05-09 Denso Corp 半導体力学量センサ
US6701788B2 (en) * 2001-07-31 2004-03-09 Kelsey-Hayes Company Multiple output inertial sensing device
JP2003166999A (ja) * 2001-12-03 2003-06-13 Denso Corp 半導体力学量センサ
US6718826B2 (en) * 2002-02-28 2004-04-13 Delphi Technologies, Inc. Balanced angular accelerometer
US6996051B2 (en) * 2002-04-29 2006-02-07 Hewlett-Packard Development Company, L.P. Data storage module suspension system having primary and secondary flexures
ATE352041T1 (de) * 2002-07-19 2007-02-15 Analog Devices Inc Verringerung des offsets eines beschleunigungsaufnehmers
TW574128B (en) * 2002-11-29 2004-02-01 Lightuning Tech Inc Thermal bubble type micro-machined inertial sensor
JP4156946B2 (ja) * 2003-02-26 2008-09-24 三菱電機株式会社 加速度センサ
US6845670B1 (en) * 2003-07-08 2005-01-25 Freescale Semiconductor, Inc. Single proof mass, 3 axis MEMS transducer
JP2005249446A (ja) * 2004-03-02 2005-09-15 Matsushita Electric Ind Co Ltd 振動型圧電加速度センサ
TWI255341B (en) 2004-06-10 2006-05-21 Chung Shan Inst Of Science Miniature accelerator
EP1779121A1 (de) 2004-08-17 2007-05-02 Analog Devices, Inc. Mehrfachachsenbeschleunigungssensor
US8789896B2 (en) 2004-10-08 2014-07-29 Cequent Electrical Products Brake control unit
US8746812B2 (en) 2004-10-08 2014-06-10 Marcia Albright Brake control unit
FR2876795B1 (fr) * 2004-10-19 2006-12-29 Univ Reims Champagne Ardenne Dispositif de detection de defauts des machines tournantes
US7228739B2 (en) * 2004-11-23 2007-06-12 The Boeing Company Precision flexure plate
JP4754817B2 (ja) * 2004-12-20 2011-08-24 Ｏｋｉセミコンダクタ株式会社 半導体加速度センサ
CN101137996A (zh) 2005-01-07 2008-03-05 格斯图尔泰克股份有限公司 基于光流的倾斜传感器
WO2006074411A2 (en) 2005-01-07 2006-07-13 Riddell, Inc. System and method for evaluating and providing treatment to sports participants
US20060207327A1 (en) * 2005-03-16 2006-09-21 Zarabadi Seyed R Linear accelerometer
EP1886509B1 (de) 2005-05-17 2017-01-18 Qualcomm Incorporated Orientierungsempfindliche signalausgabe
US7337671B2 (en) 2005-06-03 2008-03-04 Georgia Tech Research Corp. Capacitive microaccelerometers and fabrication methods
US7738975B2 (en) * 2005-10-04 2010-06-15 Fisher-Rosemount Systems, Inc. Analytical server integrated in a process control network
US7258011B2 (en) * 2005-11-21 2007-08-21 Invensense Inc. Multiple axis accelerometer
JP4949673B2 (ja) * 2005-12-01 2012-06-13 ラピスセミコンダクタ株式会社 半導体加速度センサおよびその製造方法
US7578189B1 (en) * 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
US7757555B2 (en) * 2006-08-30 2010-07-20 Robert Bosch Gmbh Tri-axis accelerometer having a single proof mass and fully differential output signals
US7487661B2 (en) * 2006-10-11 2009-02-10 Freescale Semiconductor, Inc. Sensor having free fall self-test capability and method therefor
DE102006048381A1 (de) * 2006-10-12 2008-04-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensor zur Erfassung von Beschleunigungen
GB2456937B (en) * 2006-10-24 2011-07-13 Bradley Fixtures Corp Capacitive sensing for washroom fixture
DE102007057044B4 (de) * 2007-09-10 2021-08-05 Continental Teves Ag & Co. Ohg Mikromechanische Feder
JP2009098007A (ja) * 2007-10-17 2009-05-07 Denso Corp 物理量センサ
JP2009192379A (ja) * 2008-02-14 2009-08-27 Seiko Instruments Inc 加速度センサ及び加速度センサの製造方法
US8468887B2 (en) * 2008-04-14 2013-06-25 Freescale Semiconductor, Inc. Resonant accelerometer with low sensitivity to package stress
PT2127964T (pt) 2008-05-27 2017-02-21 Viasat Spa Dispositivo instalável a bordo de um veículo para pedido de socorro e envio automático de informações sobre a posição geográfica do veículo
US8096182B2 (en) * 2008-05-29 2012-01-17 Freescale Semiconductor, Inc. Capacitive sensor with stress relief that compensates for package stress
WO2010016094A1 (ja) * 2008-08-06 2010-02-11 パイオニア株式会社 静電容量検出型センサ
TWI374268B (en) * 2008-09-05 2012-10-11 Ind Tech Res Inst Multi-axis capacitive accelerometer
US8205498B2 (en) * 2008-11-18 2012-06-26 Industrial Technology Research Institute Multi-axis capacitive accelerometer
DE102009002702B4 (de) 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
JP2011022018A (ja) * 2009-07-16 2011-02-03 Mitsubishi Electric Corp 静電容量型加速度センサー
US8739626B2 (en) * 2009-08-04 2014-06-03 Fairchild Semiconductor Corporation Micromachined inertial sensor devices
WO2011073935A2 (en) * 2009-12-16 2011-06-23 Y-Sensors Ltd. Tethered, levitated-mass accelerometer
CN102101635B (zh) * 2009-12-17 2013-06-05 原相科技股份有限公司 适用于微机电传感器的质量体与使用该质量体的三轴微机电传感器
TWI429912B (zh) * 2010-08-17 2014-03-11 Pixart Imaging Inc 具有增強結構強度之微機電系統加速度計
DE112011103124T5 (de) 2010-09-18 2013-12-19 Fairchild Semiconductor Corporation Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
EP2616389B1 (de) * 2010-09-18 2017-04-05 Fairchild Semiconductor Corporation Mehrchip-mems-verpackung
US9278846B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
US9856132B2 (en) 2010-09-18 2018-01-02 Fairchild Semiconductor Corporation Sealed packaging for microelectromechanical systems
US8813564B2 (en) 2010-09-18 2014-08-26 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope with central suspension and gimbal structure
EP2616772B1 (de) * 2010-09-18 2016-06-22 Fairchild Semiconductor Corporation Mikroverarbeitetes monolithisches 3-achsen-gyroskop mit einzelantrieb
KR101332701B1 (ko) 2010-09-20 2013-11-25 페어차일드 세미컨덕터 코포레이션 기준 커패시터를 포함하는 미소 전자기계 압력 센서
KR101311966B1 (ko) 2010-09-20 2013-10-14 페어차일드 세미컨덕터 코포레이션 감소된 션트 커패시턴스를 갖는 관통 실리콘 비아
CN102583217B (zh) * 2011-01-12 2015-01-28 原相科技股份有限公司 微机电系统元件及用于其中的防止变形结构及其制作方法
JP5427199B2 (ja) 2011-03-17 2014-02-26 日立オートモティブシステムズ株式会社 半導体物理量検出センサ
US9140637B2 (en) 2011-03-31 2015-09-22 Mihaly Kis, JR. Method and apparatus for simulating head impacts for helmet testing
MX352036B (es) 2011-09-01 2017-11-07 Riddell Sistemas y métodos para monitorear un parámetro fisiológico de personas que están realizando una actividad física.
EP2607849A1 (de) 2011-12-22 2013-06-26 Tronics Microsystems S.A. Mehrachsiger mikroelektronischer Trägheitssensor
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
WO2013116522A1 (en) * 2012-02-01 2013-08-08 Cenk Acar Mems multi-axis gyroscope z-axis electrode structure
US8754694B2 (en) 2012-04-03 2014-06-17 Fairchild Semiconductor Corporation Accurate ninety-degree phase shifter
US8742964B2 (en) 2012-04-04 2014-06-03 Fairchild Semiconductor Corporation Noise reduction method with chopping for a merged MEMS accelerometer sensor
US9027403B2 (en) 2012-04-04 2015-05-12 Analog Devices, Inc. Wide G range accelerometer
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
EP2647955B8 (de) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS-Vorrichtung mit Quadraturphasenverschiebungsauslöschung
EP2647952B1 (de) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Automatische Verstärkungsregelungsschleife einer MEMS-Vorrichtung für mechanischen Amplitudenantrieb
KR102058489B1 (ko) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 멤스 장치 프론트 엔드 전하 증폭기
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
KR101999745B1 (ko) 2012-04-12 2019-10-01 페어차일드 세미컨덕터 코포레이션 미세 전자 기계 시스템 구동기
US9857254B2 (en) * 2012-05-18 2018-01-02 Atesteo Gmbh Torque-measuring device or jig
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
JP5799929B2 (ja) 2012-10-02 2015-10-28 株式会社村田製作所 加速度センサ
US20150260752A1 (en) * 2012-10-12 2015-09-17 Panasonic Corporation Acceleration sensor
US9316666B2 (en) 2012-11-27 2016-04-19 Murata Manufacturing Co., Ltd. Acceleration sensor having a capacitor array located in the center of an inertial mass
US9207254B2 (en) * 2013-02-19 2015-12-08 Maxim Integrated Products, Inc. Accelerometer with low sensitivity to thermo-mechanical stress
CN104714050B (zh) * 2015-03-07 2017-12-29 南京中诺斯特传感器科技有限公司 一种三轴电容式mems加速度传感器及制备方法
DE102015211387A1 (de) * 2015-06-19 2016-12-22 Robert Bosch Gmbh Drei-achsiger Drehbeschleunigungssensor
US10184951B2 (en) 2016-02-10 2019-01-22 Globalfoundries Singapore Pte. Ltd. Three-axis monolithic MEMS accelerometers and methods for fabricating same
JP2017187447A (ja) * 2016-04-08 2017-10-12 アルプス電気株式会社 センサ装置
AU2017326530A1 (en) 2016-09-16 2019-05-02 Horizon Global Americas Inc. Driver and diagnostic system for a brake controller
US10363910B2 (en) 2016-12-07 2019-07-30 Horizon Global Americas Inc. Automated gain and boost for a brake controller
US10697994B2 (en) 2017-02-22 2020-06-30 Semiconductor Components Industries, Llc Accelerometer techniques to compensate package stress
CN107015287B (zh) * 2017-03-09 2018-12-11 中国科学院电工研究所 一种重力梯度测量装置及测量方法
US10712360B2 (en) 2017-09-27 2020-07-14 Azoteq (Pty) Ltd Differential charge transfer based accelerometer
JP7003076B2 (ja) * 2019-03-08 2022-01-20 株式会社東芝 センサ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4342227A (en) * 1980-12-24 1982-08-03 International Business Machines Corporation Planar semiconductor three direction acceleration detecting device and method of fabrication
US4430895A (en) * 1982-02-02 1984-02-14 Rockwell International Corporation Piezoresistive accelerometer
FR2580389B2 (fr) * 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique
GB8728442D0 (en) * 1987-12-04 1988-01-13 Russell M K Triaxial accelerometers
US5092174A (en) * 1989-10-19 1992-03-03 Texas Instruments Incorporated Capacitance accelerometer
US5249465A (en) * 1990-12-11 1993-10-05 Motorola, Inc. Accelerometer utilizing an annular mass

Also Published As

Publication number Publication date
DE69206770T2 (de) 1996-07-11
JP3327595B2 (ja) 2002-09-24
JPH05249138A (ja) 1993-09-28
EP0547742A1 (de) 1993-06-23
EP0547742B1 (de) 1995-12-13
US5487305A (en) 1996-01-30

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Owner name: FREESCALE SEMICONDUCTOR, INC. (N.D.GES.D. STAATES

8339 Ceased/non-payment of the annual fee