FR2810976B1 - Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant - Google Patents

Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant

Info

Publication number
FR2810976B1
FR2810976B1 FR0008420A FR0008420A FR2810976B1 FR 2810976 B1 FR2810976 B1 FR 2810976B1 FR 0008420 A FR0008420 A FR 0008420A FR 0008420 A FR0008420 A FR 0008420A FR 2810976 B1 FR2810976 B1 FR 2810976B1
Authority
FR
France
Prior art keywords
component
micro
sensor
electronic
actuator incorporating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0008420A
Other languages
English (en)
Other versions
FR2810976A1 (fr
Inventor
Francois Valentin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Planhead Silmag PHS
Original Assignee
Planhead Silmag PHS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Planhead Silmag PHS filed Critical Planhead Silmag PHS
Priority to FR0008420A priority Critical patent/FR2810976B1/fr
Priority to JP2002505744A priority patent/JP2004502146A/ja
Priority to AU2001270703A priority patent/AU2001270703A1/en
Priority to US10/311,981 priority patent/US20030164042A1/en
Priority to PCT/FR2001/002075 priority patent/WO2002001706A1/fr
Priority to EP01949575A priority patent/EP1295384A1/fr
Publication of FR2810976A1 publication Critical patent/FR2810976A1/fr
Application granted granted Critical
Publication of FR2810976B1 publication Critical patent/FR2810976B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
FR0008420A 2000-06-29 2000-06-29 Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant Expired - Fee Related FR2810976B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0008420A FR2810976B1 (fr) 2000-06-29 2000-06-29 Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant
JP2002505744A JP2004502146A (ja) 2000-06-29 2001-06-28 電子超小型部品ならびに該電子超小型部品を内蔵したセンサ及びアクチュエータ
AU2001270703A AU2001270703A1 (en) 2000-06-29 2001-06-28 Electronic microcomponent, sensor and actuator incorporating same
US10/311,981 US20030164042A1 (en) 2000-06-29 2001-06-28 Electronic microcomponent, sensor and actuator incorporating same
PCT/FR2001/002075 WO2002001706A1 (fr) 2000-06-29 2001-06-28 Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant
EP01949575A EP1295384A1 (fr) 2000-06-29 2001-06-28 Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0008420A FR2810976B1 (fr) 2000-06-29 2000-06-29 Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant

Publications (2)

Publication Number Publication Date
FR2810976A1 FR2810976A1 (fr) 2002-01-04
FR2810976B1 true FR2810976B1 (fr) 2003-08-29

Family

ID=8851884

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0008420A Expired - Fee Related FR2810976B1 (fr) 2000-06-29 2000-06-29 Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant

Country Status (6)

Country Link
US (1) US20030164042A1 (fr)
EP (1) EP1295384A1 (fr)
JP (1) JP2004502146A (fr)
AU (1) AU2001270703A1 (fr)
FR (1) FR2810976B1 (fr)
WO (1) WO2002001706A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7168680B2 (en) * 2004-07-22 2007-01-30 Harris Corporation Embedded control valve using electroactive material
US7258010B2 (en) * 2005-03-09 2007-08-21 Honeywell International Inc. MEMS device with thinned comb fingers
US7690254B2 (en) * 2007-07-26 2010-04-06 Honeywell International Inc. Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
DE102008043836A1 (de) * 2008-11-19 2010-05-20 Robert Bosch Gmbh Verfahren zum Betreiben eines elektrostatischen Antriebs und elektrostatische Antriebe
US20120146452A1 (en) * 2010-12-10 2012-06-14 Miradia, Inc. Microelectromechanical system device and semi-manufacture and manufacturing method thereof
ITTO20131014A1 (it) * 2013-12-12 2015-06-13 St Microelectronics Int Nv Struttura oscillante attuata elettrostaticamente con controllo della fase di inizio oscillazione, e relativi metodo di fabbricazione e metodo di pilotaggio
GB2579057A (en) * 2018-11-16 2020-06-10 Atlantic Inertial Systems Ltd Accelerometer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69206770T2 (de) * 1991-12-19 1996-07-11 Motorola Inc Dreiachsiger Beschleunigungsmesser
DE4419844B4 (de) * 1994-06-07 2009-11-19 Robert Bosch Gmbh Beschleunigungssensor
GB9416683D0 (en) * 1994-08-18 1994-10-19 British Tech Group Accelerometer
DE4432837B4 (de) * 1994-09-15 2004-05-13 Robert Bosch Gmbh Beschleunigungssensor und Meßverfahren
DE4439238A1 (de) * 1994-11-03 1996-05-09 Telefunken Microelectron Kapazitiver Beschleunigungssensor
DE19537814B4 (de) * 1995-10-11 2009-11-19 Robert Bosch Gmbh Sensor und Verfahren zur Herstellung eines Sensors
JP2000206142A (ja) * 1998-11-13 2000-07-28 Denso Corp 半導体力学量センサおよびその製造方法
JP2002131331A (ja) * 2000-10-24 2002-05-09 Denso Corp 半導体力学量センサ

Also Published As

Publication number Publication date
FR2810976A1 (fr) 2002-01-04
US20030164042A1 (en) 2003-09-04
JP2004502146A (ja) 2004-01-22
EP1295384A1 (fr) 2003-03-26
AU2001270703A1 (en) 2002-01-08
WO2002001706A1 (fr) 2002-01-03

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20070228