DE69930652D1 - Monolithischer miniatur-beschleunigungssensor - Google Patents

Monolithischer miniatur-beschleunigungssensor

Info

Publication number
DE69930652D1
DE69930652D1 DE69930652T DE69930652T DE69930652D1 DE 69930652 D1 DE69930652 D1 DE 69930652D1 DE 69930652 T DE69930652 T DE 69930652T DE 69930652 T DE69930652 T DE 69930652T DE 69930652 D1 DE69930652 D1 DE 69930652D1
Authority
DE
Germany
Prior art keywords
acceleration sensor
miniature acceleration
monolithic miniature
monolithic
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69930652T
Other languages
English (en)
Other versions
DE69930652T2 (de
Inventor
Denis Janiaud
Traon Olivier Le
Serge Muller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Publication of DE69930652D1 publication Critical patent/DE69930652D1/de
Application granted granted Critical
Publication of DE69930652T2 publication Critical patent/DE69930652T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Micromachines (AREA)
DE69930652T 1998-10-20 1999-10-13 Monolithischer miniatur-beschleunigungssensor Expired - Lifetime DE69930652T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9813108 1998-10-20
FR9813108A FR2784752B1 (fr) 1998-10-20 1998-10-20 Accelerometre miniature monolithique
PCT/FR1999/002489 WO2000023808A1 (fr) 1998-10-20 1999-10-13 Accelerometre miniature monolithique

Publications (2)

Publication Number Publication Date
DE69930652D1 true DE69930652D1 (de) 2006-05-18
DE69930652T2 DE69930652T2 (de) 2006-12-28

Family

ID=9531751

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69930652T Expired - Lifetime DE69930652T2 (de) 1998-10-20 1999-10-13 Monolithischer miniatur-beschleunigungssensor

Country Status (6)

Country Link
US (1) US6386035B2 (de)
EP (1) EP1123511B1 (de)
AU (1) AU753754B2 (de)
DE (1) DE69930652T2 (de)
FR (1) FR2784752B1 (de)
WO (1) WO2000023808A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1292228B1 (de) * 2000-06-23 2005-08-24 Vibrotron AS Mechano-elektrischer zweiwegwandler
FR2832804B1 (fr) * 2001-11-23 2004-01-30 Sagem Procede de mesure accelerometrique, compensee thermiquement, avec au moins un dispositif a deux resonateurs vibrants
FR2887990B1 (fr) * 2005-07-04 2007-09-07 Sagem Defense Securite Capteur inertiel a courant perturbateur reduit par reduction de la largeur et de l'ecartement des pistes dans les zones critiques
FR2898884B1 (fr) * 2006-03-27 2008-05-02 Commissariat Energie Atomique Micro-capteur inertiel resonant a epaisseur variable realise en technologies de surface
FR2906038B1 (fr) 2006-09-19 2008-11-28 Commissariat Energie Atomique Accelerometre a poutre resonante avec bras de levier articule en rotation
US8584524B2 (en) * 2008-10-21 2013-11-19 ISC8 Inc. Nano-resonator inertial sensor assembly
IT1395419B1 (it) * 2009-09-07 2012-09-14 Milano Politecnico Accelerometro risonante mems con migliorate caretteristiche elettriche
JP5085679B2 (ja) * 2010-03-15 2012-11-28 日本電波工業株式会社 圧電振動片および圧電デバイス
IT1405796B1 (it) 2010-11-26 2014-01-24 St Microelectronics Srl Struttura di accelerometro biassiale risonante di tipo microelettromeccanico
KR101531093B1 (ko) * 2013-07-31 2015-06-23 삼성전기주식회사 가속도 센서 및 각속도 센서
CN103760381A (zh) * 2014-01-24 2014-04-30 东南大学 一种一体式的石英振梁加速度计
US20180209791A1 (en) * 2015-07-07 2018-07-26 Agency For Science, Technology And Research Motion measurement devices and methods for measuring motion
CN111046578B (zh) * 2019-12-24 2023-07-14 北京航天控制仪器研究所 一种石英振梁加速度计建立输出模型的方法
CN111650400B (zh) * 2020-06-03 2021-05-14 西安交通大学 一种小型化侧面贴装差动型集成式谐振加速度计

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526247A (en) * 1983-01-18 1985-07-02 Ohaus Scale Corporation Weighing scale transducer
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US4945765A (en) * 1988-08-31 1990-08-07 Kearfott Guidance & Navigation Corp. Silicon micromachined accelerometer
US5005413A (en) * 1989-02-27 1991-04-09 Sundstrand Data Control, Inc. Accelerometer with coplanar push-pull force transducers
FR2685964B1 (fr) 1992-01-06 1996-06-07 Onera (Off Nat Aerospatiale) Capteur accelerometrique miniature a lames vibrant en flexion.
US5313023A (en) * 1992-04-03 1994-05-17 Weigh-Tronix, Inc. Load cell
US5456110A (en) * 1993-11-12 1995-10-10 Alliedsignal Inc. Dual pendulum vibrating beam accelerometer
US5962786A (en) * 1995-09-26 1999-10-05 Onera (Office National D'eudes Et De Recheres Aerospatiales) Monolithic accelerometric transducer

Also Published As

Publication number Publication date
EP1123511A1 (de) 2001-08-16
AU6097099A (en) 2000-05-08
FR2784752B1 (fr) 2000-11-17
FR2784752A1 (fr) 2000-04-21
EP1123511B1 (de) 2006-03-29
US20010015102A1 (en) 2001-08-23
US6386035B2 (en) 2002-05-14
AU753754B2 (en) 2002-10-31
WO2000023808A1 (fr) 2000-04-27
DE69930652T2 (de) 2006-12-28

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: ONERA (OFFICE NATIONAL D'ETUDES ET DE RECHERCHES A

8364 No opposition during term of opposition
R082 Change of representative

Ref document number: 1123511

Country of ref document: EP

Representative=s name: JOCHEN MUELLER, 55411 BINGEN, DE