DE69806477T2 - Mikrotechnologischer strömungs-optischer gassensor - Google Patents

Mikrotechnologischer strömungs-optischer gassensor

Info

Publication number
DE69806477T2
DE69806477T2 DE69806477T DE69806477T DE69806477T2 DE 69806477 T2 DE69806477 T2 DE 69806477T2 DE 69806477 T DE69806477 T DE 69806477T DE 69806477 T DE69806477 T DE 69806477T DE 69806477 T2 DE69806477 T2 DE 69806477T2
Authority
DE
Germany
Prior art keywords
microtechnological
flow
gas sensor
optical gas
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69806477T
Other languages
English (en)
Other versions
DE69806477D1 (de
Inventor
Bonne Ulrich
E Cole
E Higashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE69806477D1 publication Critical patent/DE69806477D1/de
Application granted granted Critical
Publication of DE69806477T2 publication Critical patent/DE69806477T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/37—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N2021/0346—Capillary cells; Microcells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
DE69806477T 1997-04-30 1998-04-29 Mikrotechnologischer strömungs-optischer gassensor Expired - Lifetime DE69806477T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/841,748 US5869749A (en) 1997-04-30 1997-04-30 Micromachined integrated opto-flow gas/liquid sensor
PCT/US1998/008741 WO1998049540A1 (en) 1997-04-30 1998-04-29 Micromachined opto-flow gas sensor

Publications (2)

Publication Number Publication Date
DE69806477D1 DE69806477D1 (de) 2002-08-14
DE69806477T2 true DE69806477T2 (de) 2003-02-20

Family

ID=25285606

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69806477T Expired - Lifetime DE69806477T2 (de) 1997-04-30 1998-04-29 Mikrotechnologischer strömungs-optischer gassensor

Country Status (6)

Country Link
US (2) US5869749A (de)
EP (1) EP0979401B1 (de)
JP (1) JP4183285B2 (de)
CA (1) CA2283563C (de)
DE (1) DE69806477T2 (de)
WO (1) WO1998049540A1 (de)

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US8226576B2 (en) * 2004-02-25 2012-07-24 Becton, Dickinson And Company Safety blood collection holder
DE102004032176A1 (de) * 2004-07-02 2006-01-26 Robert Bosch Gmbh Beschichteter mikromechanischer Strahler
US7502109B2 (en) * 2005-05-17 2009-03-10 Honeywell International Inc. Optical micro-spectrometer
EP1945561B1 (de) * 2005-10-14 2018-10-24 STMicroelectronics Srl Substratscheibenmontage für ein integriertes bauelement, herstellungsverfahren dafür und verwandtes integriertes bauelement
US7549206B2 (en) * 2007-08-13 2009-06-23 Honeywell International Inc. Shell flow sensor
US7508567B1 (en) * 2008-01-08 2009-03-24 Hewlett-Packard Development Company, L.P. Metal etalon with enhancing stack
DE102008047658B3 (de) * 2008-09-12 2010-01-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gassensor und Verwendung eines Gassensors
US8124953B2 (en) * 2009-03-12 2012-02-28 Infineon Technologies Ag Sensor device having a porous structure element
DE102009029002B3 (de) 2009-08-28 2011-01-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photoakustischer Sensor sowie Verfahren zu seiner Herstellung und Verwendung
FR2951545B1 (fr) * 2009-10-21 2014-01-03 Commissariat Energie Atomique Detecteur de gaz photoacoustique
US9267924B2 (en) * 2010-04-15 2016-02-23 Qcm Lab Aktiebolag Method for detecting gas and a gas detector therefor
US8695402B2 (en) * 2010-06-03 2014-04-15 Honeywell International Inc. Integrated IR source and acoustic detector for photoacoustic gas sensor
EP2469275B1 (de) 2010-12-24 2015-12-23 Honeywell Romania S.R.L. Cantilever-Kohlendioxidsensor
FR2974413B1 (fr) * 2011-04-21 2014-06-13 Commissariat Energie Atomique Detecteur de gaz photoacoustique a cellule de helmholtz
US9664500B2 (en) 2012-03-08 2017-05-30 Cornell University Tunable optofluidic apparatus, method, and applications
US8848191B2 (en) 2012-03-14 2014-09-30 Honeywell International Inc. Photoacoustic sensor with mirror
DE102012008102B3 (de) * 2012-04-25 2013-08-01 Testo Ag Messvorrichtung und Messverfahren
TWM444585U (zh) * 2012-06-04 2013-01-01 Az Instr Corp 氣體濃度檢測計
TWI512930B (zh) * 2012-09-25 2015-12-11 Xintex Inc 晶片封裝體及其形成方法
US9513261B2 (en) * 2013-10-14 2016-12-06 Infineon Technologies Ag Photoacoustic gas sensor device and a method for analyzing gas
DE102014200583B3 (de) * 2014-01-15 2015-05-13 Robert Bosch Gmbh Verfahren zum herstellen eines integrierten mikromechanischen fluidsensor-bauteils, integriertes mikromechanisches fluidsensor-bauteil und verfahren zum detektieren eines fluids mittels eines integrierten mikromechanischen fluidsensor-bauteils
WO2016141155A1 (en) 2015-03-05 2016-09-09 Honeywell International Inc. Use of selected glass types and glass thicknesses in the optical path to remove cross sensitivity to water absorption peaks
DE202015002315U1 (de) * 2015-03-27 2015-05-06 Infineon Technologies Ag Gassensor
JP6548480B2 (ja) * 2015-06-29 2019-07-24 日本光電工業株式会社 ガスセンサキット、及びガス測定システム
US20180299369A1 (en) 2015-09-10 2018-10-18 Honeywell International Inc. Gas detector with normalized response and improved sensitivity
EP3359933A1 (de) 2015-10-09 2018-08-15 Honeywell International Inc. Detektor für elektromagnetische strahlung mit einer planaren golay-zelle
DE102016103646B4 (de) * 2016-01-22 2023-03-02 Infineon Technologies Ag Integriertes photoakustisches gassensormodul
DE102016122479B4 (de) 2016-11-22 2020-10-22 Infineon Technologies Ag Infrarotemitteranordnung und Verfahren zum Herstellen einer Infrarotemitteranordnung
IT201700103489A1 (it) 2017-09-15 2019-03-15 St Microelectronics Srl Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico
US11187655B2 (en) 2018-05-16 2021-11-30 Sensera, Inc. Compact gas sensors

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Also Published As

Publication number Publication date
DE69806477D1 (de) 2002-08-14
WO1998049540A1 (en) 1998-11-05
EP0979401B1 (de) 2002-07-10
CA2283563A1 (en) 1998-11-05
JP2001522463A (ja) 2001-11-13
CA2283563C (en) 2008-07-15
US5869749A (en) 1999-02-09
EP0979401A1 (de) 2000-02-16
JP4183285B2 (ja) 2008-11-19
US5886249A (en) 1999-03-23

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Legal Events

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