IT201700103489A1 - Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico - Google Patents

Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico

Info

Publication number
IT201700103489A1
IT201700103489A1 IT102017000103489A IT201700103489A IT201700103489A1 IT 201700103489 A1 IT201700103489 A1 IT 201700103489A1 IT 102017000103489 A IT102017000103489 A IT 102017000103489A IT 201700103489 A IT201700103489 A IT 201700103489A IT 201700103489 A1 IT201700103489 A1 IT 201700103489A1
Authority
IT
Italy
Prior art keywords
acoustic transducer
filtering membrane
manufacture
electronic system
thin
Prior art date
Application number
IT102017000103489A
Other languages
English (en)
Inventor
Matteo Perletti
Federico Vercesi
Silvia Adorno
Giorgio Allegato
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102017000103489A priority Critical patent/IT201700103489A1/it
Priority to US16/128,288 priority patent/US10555091B2/en
Priority to CN201811076753.5A priority patent/CN109511066B/zh
Priority to CN201821508057.2U priority patent/CN208836409U/zh
Priority to EP18194622.9A priority patent/EP3457709B1/en
Publication of IT201700103489A1 publication Critical patent/IT201700103489A1/it
Priority to US16/693,003 priority patent/US11317219B2/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0029—Protection against environmental influences not provided for in groups B81B7/0012 - B81B7/0025
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00309—Processes for packaging MEMS devices suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00626—Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/08—Mouthpieces; Microphones; Attachments therefor
    • H04R1/083—Special constructions of mouthpieces
    • H04R1/086—Protective screens, e.g. all weather or wind screens
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/28—Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
    • H04R1/2807—Enclosures comprising vibrating or resonating arrangements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/01—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
    • B81B2207/012—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being separate parts in the same package
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0198—Manufacture or treatment of microstructural devices or systems in or on a substrate for making a masking layer
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Geometry (AREA)
  • Computer Hardware Design (AREA)
  • Otolaryngology (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Pressure Sensors (AREA)
IT102017000103489A 2017-09-15 2017-09-15 Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico IT201700103489A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT102017000103489A IT201700103489A1 (it) 2017-09-15 2017-09-15 Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico
US16/128,288 US10555091B2 (en) 2017-09-15 2018-09-11 Method for manufacturing a thin filtering membrane and an acoustic transducer device including the filtering membrane
CN201811076753.5A CN109511066B (zh) 2017-09-15 2018-09-14 用于制造薄过滤膜的方法以及包括过滤膜的声学换能器装置
CN201821508057.2U CN208836409U (zh) 2017-09-15 2018-09-14 声学换能器装置和电子系统
EP18194622.9A EP3457709B1 (en) 2017-09-15 2018-09-14 Method for manufacturing a thin filtering membrane, acoustic transducer device including the filtering membrane, method for assembling the acoustic transducer device, and electronic system
US16/693,003 US11317219B2 (en) 2017-09-15 2019-11-22 Method for manufacturing a thin filtering membrane and an acoustic transducer device including the filtering membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000103489A IT201700103489A1 (it) 2017-09-15 2017-09-15 Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico

Publications (1)

Publication Number Publication Date
IT201700103489A1 true IT201700103489A1 (it) 2019-03-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000103489A IT201700103489A1 (it) 2017-09-15 2017-09-15 Metodo di fabbricazione di una membrana filtrante sottile, dispositivo trasduttore acustico includente la membrana filtrante, metodo di assemblaggio del dispositivo trasduttore acustico e sistema elettronico

Country Status (4)

Country Link
US (2) US10555091B2 (it)
EP (1) EP3457709B1 (it)
CN (2) CN109511066B (it)
IT (1) IT201700103489A1 (it)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020210134A1 (en) * 2019-04-10 2020-10-15 Knowles Electronics, Llc Non-planar ingress protection element for a sensor device
DE102019111799A1 (de) * 2019-05-07 2020-11-12 RF360 Europe GmbH Verfahren zur Herstellung eines elektroakustischen Resonators und elektroakustischer Resonator
US11245975B2 (en) * 2019-05-30 2022-02-08 Bose Corporation Techniques for wind noise reduction
US11352252B2 (en) 2019-06-21 2022-06-07 Amkor Technology Singapore Holding Pte. Ltd. Semiconductor device and method of manufacturing semiconductor device
CN111031460B (zh) * 2019-12-27 2024-06-25 歌尔微电子有限公司 一种mems芯片、制备方法及包括其的mems麦克风
US12167190B2 (en) * 2020-01-07 2024-12-10 Cochlear Limited Acoustic port cover
EP3851848A1 (en) * 2020-01-20 2021-07-21 Infineon Technologies AG Micromechanical device with perforated membrane
CN218679383U (zh) * 2020-06-30 2023-03-21 瑞声声学科技(深圳)有限公司 振动传感器
US12172887B2 (en) * 2020-07-12 2024-12-24 xMEMS Labs, Inc. Sound producing package structure including sound producing membranes actuated toward cavity center
CN215187378U (zh) * 2021-04-28 2021-12-14 瑞声声学科技(深圳)有限公司 振动传感器
CN215187377U (zh) * 2021-04-28 2021-12-14 瑞声声学科技(深圳)有限公司 振动传感器
US11882394B2 (en) 2022-02-11 2024-01-23 Apple Inc. Vented liquid-resistant microphone assembly
US11902727B2 (en) * 2022-02-11 2024-02-13 Apple Inc. Inductive acoustic filters for acoustic devices
DE102023209592A1 (de) 2023-09-29 2025-04-03 Robert Bosch Gesellschaft mit beschränkter Haftung Herstellungsverfahren für ein mikromechanisches Sensorbauelement und entsprechendes mikromechanisches Sensorbauelement

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2252077A1 (en) * 2009-05-11 2010-11-17 STMicroelectronics Srl Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof
US20120237073A1 (en) * 2011-03-18 2012-09-20 Analog Devices, Inc. Packages and methods for packaging mems microphone devices
EP2536168A2 (en) * 2011-06-15 2012-12-19 Robert Bosch Gmbh Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
US20160345084A1 (en) * 2015-05-20 2016-11-24 Infineon Technologies Ag Micro-electro-mechanical system devices

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5937716Y2 (ja) 1979-01-31 1984-10-19 日産自動車株式会社 半導体差圧センサ
US4533795A (en) 1983-07-07 1985-08-06 American Telephone And Telegraph Integrated electroacoustic transducer
US5467252A (en) 1993-10-18 1995-11-14 Motorola, Inc. Method for plating using nested plating buses and semiconductor device having the same
JPH07225240A (ja) 1994-02-14 1995-08-22 Omron Corp 半導体加速度センサ及び半導体加速度センサ装置並びに半導体圧力センサ及び半導体圧力センサ装置
US5591679A (en) 1995-04-12 1997-01-07 Sensonor A/S Sealed cavity arrangement method
JPH09304211A (ja) 1996-05-15 1997-11-28 Omron Corp 静電容量型圧力センサのパッケージング構造およびパッケージング方法
US5889872A (en) 1996-07-02 1999-03-30 Motorola, Inc. Capacitive microphone and method therefor
US5869749A (en) 1997-04-30 1999-02-09 Honeywell Inc. Micromachined integrated opto-flow gas/liquid sensor
JP3702612B2 (ja) 1997-10-07 2005-10-05 株式会社デンソー 半導体装置の製造方法
US6088463A (en) 1998-10-30 2000-07-11 Microtronic A/S Solid state silicon-based condenser microphone
JP2000357937A (ja) 1999-06-17 2000-12-26 Murata Mfg Co Ltd 弾性表面波装置
US6522762B1 (en) 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
US6732588B1 (en) 1999-09-07 2004-05-11 Sonionmems A/S Pressure transducer
US6541832B2 (en) 2000-01-31 2003-04-01 Texas Instruments Incorporated Plastic package for micromechanical devices
US20020119807A1 (en) 2001-02-23 2002-08-29 Hsi-Che Lee Mobile phone with electronic voice date book
CN1179203C (zh) 2001-08-24 2004-12-08 中国科学院电子学研究所 全SiNx微结构谐振梁压力传感器
CN1156680C (zh) 2001-08-24 2004-07-07 中国科学院电子学研究所 以SiNx为梁的微结构谐振梁压力传感器制造方法
WO2003054927A2 (en) 2001-11-07 2003-07-03 The Board Of Trustees Of The University Of Arkansas Structure and process for packaging rf mems and other devices
JP2003163998A (ja) 2001-11-27 2003-06-06 Seiko Epson Corp コンデンサマイクロホンの製造方法、コンデンサマイクロホンおよび電子機器
CN1210563C (zh) 2002-03-14 2005-07-13 财团法人工业技术研究院 三氧化钨前驱物制成的硫化氢气体传感器
JP3947443B2 (ja) 2002-08-30 2007-07-18 Ｔｄｋ株式会社 電子デバイス用基板および電子デバイス
US6781231B2 (en) 2002-09-10 2004-08-24 Knowles Electronics Llc Microelectromechanical system package with environmental and interference shield
GB0302271D0 (en) 2003-01-31 2003-03-05 Melexis Nv Integrated pressure and acceleration measurement device and a method of manufacture thereof
CN1245559C (zh) 2003-04-09 2006-03-15 王民寿 快速沉井的井架结构装置及其成井施工方法
US7303645B2 (en) 2003-10-24 2007-12-04 Miradia Inc. Method and system for hermetically sealing packages for optics
CN1244807C (zh) 2003-11-12 2006-03-08 王文襄 一种微型动态压阻压力传感器及其制造方法
JP2005180930A (ja) 2003-12-16 2005-07-07 Ricoh Co Ltd 半導体センサ装置及びその製造方法
EP1577656B1 (en) 2004-03-19 2010-06-09 STMicroelectronics Srl Method for manufacturing a semiconductor pressure sensor
EP1684079A1 (en) 2005-01-25 2006-07-26 STMicroelectronics S.r.l. Piezoresistive accelerometer with mass on membrane, and manufacturing process
US20070040231A1 (en) 2005-08-16 2007-02-22 Harney Kieran P Partially etched leadframe packages having different top and bottom topologies
JP5174673B2 (ja) 2005-10-14 2013-04-03 エスティーマイクロエレクトロニクス エス．アール．エル． 基板レベル・アセンブリを具えた電子装置及びその製造処理方法
US7436054B2 (en) 2006-03-03 2008-10-14 Silicon Matrix, Pte. Ltd. MEMS microphone with a stacked PCB package and method of producing the same
EP2005789B1 (en) 2006-03-30 2010-06-16 Sonion MEMS A/S Single die mems acoustic transducer and manufacturing method
US7763488B2 (en) 2006-06-05 2010-07-27 Akustica, Inc. Method of fabricating MEMS device
TWI348872B (en) 2007-10-17 2011-09-11 Ind Tech Res Inst Electro-acoustic sensing device
US20100164083A1 (en) 2008-12-29 2010-07-01 Numonyx B.V. Protective thin film coating in chip packaging
US8421168B2 (en) 2009-11-17 2013-04-16 Fairchild Semiconductor Corporation Microelectromechanical systems microphone packaging systems
US10589987B2 (en) * 2013-11-06 2020-03-17 Infineon Technologies Ag System and method for a MEMS transducer
US9769554B2 (en) * 2015-03-05 2017-09-19 Stmicroelectronics (Malta) Ltd Semiconductor integrated device for acoustic applications with contamination protection element, and manufacturing method thereof
CN205179362U (zh) * 2015-12-08 2016-04-20 歌尔声学股份有限公司 单指向mems麦克风
CN206472304U (zh) * 2016-11-30 2017-09-05 歌尔科技有限公司 一种麦克风线路板以及mems麦克风
US10167188B2 (en) * 2017-01-30 2019-01-01 Apple Inc. Integrated particle filter for MEMS device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2252077A1 (en) * 2009-05-11 2010-11-17 STMicroelectronics Srl Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof
US20120237073A1 (en) * 2011-03-18 2012-09-20 Analog Devices, Inc. Packages and methods for packaging mems microphone devices
EP2536168A2 (en) * 2011-06-15 2012-12-19 Robert Bosch Gmbh Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
US20160345084A1 (en) * 2015-05-20 2016-11-24 Infineon Technologies Ag Micro-electro-mechanical system devices

Also Published As

Publication number Publication date
CN109511066A (zh) 2019-03-22
EP3457709A1 (en) 2019-03-20
US11317219B2 (en) 2022-04-26
US20200092659A1 (en) 2020-03-19
CN109511066B (zh) 2021-11-05
US10555091B2 (en) 2020-02-04
EP3457709B1 (en) 2021-10-27
CN208836409U (zh) 2019-05-07
US20190090067A1 (en) 2019-03-21

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